[labnetwork] Query regarding quartz tube cleaning station

[Weaver, John R]

Yes, we have a custom-designed tube cleaning station. It is located in the chase behind the furnaces, so it is very convenient to move the tubes to the furnaces. We are currently under construction, but when complete we expect the area to perform slightly worse than Class 100. The furnace bay itself operates at Class 1 (ISO 3).

This is a recent change - in fact, we are currently in transition. We had a separate Class 100 cleanroom area where the tube-cleaning station was located, but we have turned that into active laboratory space. We transported the tubes from that location through the main cleanroom aisle on a polypropylene card designed for that purpose.

John


John R. Weaver
Facility Manager
Birck Nanotechnology Center
1205 West State Street
West Lafayette IN 47907
(765) 494-5494
jrweaver at purdue.edu
nano.purdue.edu



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of vanaparthy at ee.iitb.ac.in
Sent: Monday, March 10, 2014 6:55 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Query regarding quartz tube cleaning station

Hello,

We are planning to install a new quartz tube cleaning station / bench for Furnace tubes in our lab at IIT Bombay. Do you have such tube cleaning station at your facility. If yes or if you could let us know following:

Quartz tube cleaning requires HF & HNO3.

1. Does such tube cleaning require a clean room? or is semi-clean area is also OK?

2.Is the Quartz tube cleaning station kept in the same room / area where furnaces are there.

3.If furnaces are in different area, how do you transport quartz tubes from Quartz tube cleaning station to furnace area.

The following are the process tubes at present in IITB:

A. Dry oxidation
B. Pyrogenic Oxidation
C. Nitride deposition
D. Poly Deposition (doped & undoped),
E. Solid source diffusion furnaces


--
Thanks & Regards,
V.RAJENDRA PRASAD
  Lab Manager,
  CEN,IITBNF, Electrical Engg Dept, Annexe,
  IIT Bombay, Mumbai, Powai- 400076
  Tel No.+91 9930621667




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