[labnetwork] Fwd: Ytterbium sputtering in ATC 2200

[Kamal Yadav]

Dear All,

Could anybody answer this query about Ytterbium sputtering at AJA model ATC
2200.

Thanks,
Kamal.

>
> Do you have any experience sputtering Ytterbium?
>
> Since the material is highly electropositive, it requires high
> vac for sputtering in metallic form.
>
> So I am assuming it will oxidize quickly to form an
> oxide and the oxide stability is the real question.
>
> Do you think Yb sputtering could cause any issues with the
> vacuum levels of the system? Or are there any contamination
> concerns?
>
> I am planning to use the system for high temperature deposition (800
degC)
> but using dedicated chucks. The Yb contaminated chuck will
> not be used for high temperature.
>
> Below are some melting and boiling point comparisons
> with various oxides. Is this assessment reasonable?
>
> Thanks!
>
> Udayan
>
> Material
>
> Boiling point (°F)
>
> Melting point (°F)
>
> Boiling point (°C)
>
> Melting point (°C)
>
> Yb2O3
>
> 7358
>
> 4271
>
> 3256
>
> 1884
>
> TiO2
>
> 5,382
>
> 3349
>
> 2378
>
> 1474
>
> HfO2
>
> 9752
>
> 4996
>
> 4320
>
> 2206
>
> Al2O3
>
> 5391
>
> 3762
>
> 2382
>
> 1658
>
> ZnO
>
> 4280
>
> 3587
>
> 1888
>
> 1580
>
>
>
>
> --
> Associate Professor
> Dept of Electrical Engineering, Indian Institute of Technology Bombay
> +91-22-25767698 (o) +91-9920977698 (m)
> http://www.ee.iitb.ac.in/wiki/faculty/udayan
>
>
>
> --
> Associate Professor
> Dept of Electrical Engineering, Indian Institute of Technology Bombay
> +91-22-25767698 (o) +91-9920977698 (m)
> http://www.ee.iitb.ac.in/wiki/faculty/udayan
>
>
>
> --
> Associate Professor
> Dept of Electrical Engineering, Indian Institute of Technology Bombay
> +91-22-25767698 (o) +91-9920977698 (m)
> http://www.ee.iitb.ac.in/wiki/faculty/udayan
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