[labnetwork] Fwd: Ytterbium sputtering in ATC 2200

[Kamal Yadav]

Dear All,

Awaiting help on ytterbium query below. The data got jumbled so attaching a
pic.

Thanks,
Kamal.
 On Nov 2, 2014 10:27 PM, "Kamal Yadav" <kamal.yadav at gmail.com> wrote:

> Dear All,
>
> Could anybody answer this query about Ytterbium sputtering at AJA model
> ATC 2200.
>
> Thanks,
> Kamal.
>
> >
> > Do you have any experience sputtering Ytterbium?
> >
> > Since the material is highly electropositive, it requires high
> > vac for sputtering in metallic form.
> >
> > So I am assuming it will oxidize quickly to form an
> > oxide and the oxide stability is the real question.
> >
> > Do you think Yb sputtering could cause any issues with the
> > vacuum levels of the system? Or are there any contamination
> > concerns?
> >
> > I am planning to use the system for high temperature deposition (800
> degC)
> > but using dedicated chucks. The Yb contaminated chuck will
> > not be used for high temperature.
> >
> > Below are some melting and boiling point comparisons
> > with various oxides. Is this assessment reasonable?
> >
> > Thanks!
> >
> > Udayan
> >
> > Material
> >
> > Boiling point (°F)
> >
> > Melting point (°F)
> >
> > Boiling point (°C)
> >
> > Melting point (°C)
> >
> > Yb2O3
> >
> > 7358
> >
> > 4271
> >
> > 3256
> >
> > 1884
> >
> > TiO2
> >
> > 5,382
> >
> > 3349
> >
> > 2378
> >
> > 1474
> >
> > HfO2
> >
> > 9752
> >
> > 4996
> >
> > 4320
> >
> > 2206
> >
> > Al2O3
> >
> > 5391
> >
> > 3762
> >
> > 2382
> >
> > 1658
> >
> > ZnO
> >
> > 4280
> >
> > 3587
> >
> > 1888
> >
> > 1580
> >
> >
> >
> >
> > --
> > Associate Professor
> > Dept of Electrical Engineering, Indian Institute of Technology Bombay
> > +91-22-25767698 (o) +91-9920977698 (m)
> > http://www.ee.iitb.ac.in/wiki/faculty/udayan
> >
> >
> >
> > --
> > Associate Professor
> > Dept of Electrical Engineering, Indian Institute of Technology Bombay
> > +91-22-25767698 (o) +91-9920977698 (m)
> > http://www.ee.iitb.ac.in/wiki/faculty/udayan
> >
> >
> >
> > --
> > Associate Professor
> > Dept of Electrical Engineering, Indian Institute of Technology Bombay
> > +91-22-25767698 (o) +91-9920977698 (m)
> > http://www.ee.iitb.ac.in/wiki/faculty/udayan
>
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