From merport at gmail.com  Wed Oct  1 12:36:04 2014
From: merport at gmail.com (Todd Merport)
Date: Wed, 1 Oct 2014 09:36:04 -0700
Subject: [labnetwork] Fwd:  Interlock Boxes
In-Reply-To: <CA+NiZd3UdNvpk1NwD4eDHDwan6Yen_G2N90aW+EuBD8L9MZPwQ@mail.gmail.com>
References: <48483fa9f0674813ac26ad09718b7b16@BN1PR03MB169.namprd03.prod.outlook.com>
 <53BEE199.509@stanford.edu>
 <4AA894F792D3D64085E82E89F3604131677F5442@REXMD.intranet.epfl.ch>
 <53BFF089.2050207@yale.edu>
 <A71ECB2B7F230841A953EFA3D299504A286A5A9A@xm-mbx-08-prod.ad.uchicago.edu>
 <CA+NiZd3UdNvpk1NwD4eDHDwan6Yen_G2N90aW+EuBD8L9MZPwQ@mail.gmail.com>
Message-ID: <CA+NiZd2OHyTwk=nWm2pHn4VQVt_AmFPwJooew5hXNUiH5wDrqw@mail.gmail.com>

I hope this is useful.


---------- Forwarded message ----------
From: Todd Merport <merport at gmail.com>
Date: Tue, Sep 30, 2014 at 5:00 PM
Subject: Re: [labnetwork] Interlock Boxes
To: Shivakumar Bhaskaran <sbhas at uchicago.edu>


Here are some user account issues that we had in the Berkeley Microlab
( I'm not sure if they are still relevant to the Marvel Nanolab in
2014).

The Marvell Nanolab maintains it's own user database for the following
reasons:  Note, the Nanolab network is administered by the EECS
department.

a) The EECS departmental database does not allow account creation of
users from other departments without a monthly fee (so members would
be billed for two departments in that case).

b) The EECS department doesn't want non paying customers using their network.

c) The campus database does not allow outside industry members to
acquire an account without legalese that industry members find
unacceptable.

d) Guest users require limited access to layout conversion software (
for mask making) or view only privileges of equipment maintenance,
process monitoring, and other database tables. So paying a network
access fee is out of the question.

Todd Merport
(formerly of the Microlab/Nanolab)

P.S. A web based interlock system used in some rooms by the Microlab
was from WebRelay
http://www.controlbyweb.com/webrelay/

On Fri, Jul 11, 2014 at 12:09 PM, Shivakumar Bhaskaran
<sbhas at uchicago.edu> wrote:
> Hello All,
>
>
>
> I am trying to set a interlock system for our cleanroom. In the process I
> was able to get the phpscheduler up running. Before I design or buy the
> interlock I need your inputs regarding how to set up.
>
>
>
> Do the user log in to computer that is attached to the unit and validate the
> credentials and then use the equipment. Inorder to do that user data should
> be validated by the scheduler system, in that case does user have separate
> id created or it will be same associated with the campus ID.
>
>
>
> Do the user use separate swipe card in the interlock to access the system.
>
>
>
> Apart from the user access, currently the users access the cleanroom with
> swipe in card and when they leave they swipe out. But not all the users
> swipe in or swipe out. Our door system is designed in such a way that it
> will be opened for atleast for 10-20sec , but with this there is possibility
> of other users following the previous user without swiping the card. Does
> any one have system that detect the user based on proximity that
> automatically gets the user information based on RF ID card without swipe
> in.
>
>
>
> --Thanks
>
> --Shiva
>
>
>
>
>
> Shivakumar Bhaskaran, Ph.D.
>
> Searle CleanRoom Manager
>
> Uinversity of Chicago
>
> 5735 S.Ellis, Room 032
>
> Chicago-60637
>
> Ph:773-795-2297
>
>
>
>
>
>
>
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
> On Behalf Of Michael Rooks
> Sent: Friday, July 11, 2014 9:11 AM
> To: labnetwork at mtl.mit.edu
> Subject: Re: [labnetwork] Interlock Boxes
>
>
>
> We use ethernet relay boards from National Control Devices, controlled by
> Badger (the new version of Coral). NCD also makes wifi connected relays.
> Having two relays on a board makes it easy to keep isolated grounds
> isolated. Each board requires its own static IPv4 address. The boards can be
> easily mounted in a 6"x6" electrical box, or in the custom-fitted plastic
> case from Badgerlms. I suggest you keep these boards behind a firewall,
> since they run a tiny operating system and web page, but with only minimal
> security.
>
>
> ---------------------
>
> Michael Rooks
>
> Yale Institute for Nanoscience & Quantum Engineering
>
> nano.yale.edu
>
>
>
>
>
> On 07/11/2014 06:14 AM, Fl?ckiger Philippe wrote:
>
> Hi All,
>
>
>
> EPFL is using Ether IO24 R from http://www.elexol.com/IO_Modules/
>
>
>
> Our software is homemade but we have a call for tenders running in order to
> ?couple our homemade software? with a commercial package.
>
>
>
> We will keep you posted on this important move on which we are investing a
> lot of effort.
>
>
>
> With my very best regards,
>
> Philippe
>
>
>
> Dr Philippe Fl?ckiger
>
> Director of Operations
>
> http://cmi.epfl.ch/
>
> Phone +41 21 693 6695
>
>
>
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
> On Behalf Of John Shott
> Sent: jeudi 10 juillet 2014 20:55
> To: Kolin Brown; labnetwork at mtl.mit.edu
> Subject: Re: [labnetwork] Interlock Boxes
>
>
>
> Kolin:
>
> I believe that most folks are using the Advantech ADAM-6060 or ADAM-6066
> 6-channel IP-addressable relay modules for interlocking.  Others use modules
> that come from National Control Devices that have 1-, 2-, 4-, and 8-relay
> devices with current ratings from 5 to 30 amps.  Most folks are currently
> using hard-wired ethernet connections, but some wireless options are also
> available.
>
> I believe that most of these IP-addressable relays are functionally
> equivalent but would certainly have minor differences in the default port
> that is used and the exact command sent to turn on, turn off, or check the
> status of a given relay channel.
>
> I don't have experience with either Cores or iLab software to know what, if
> any, interlocking hardware has been interfaced with their systems.
>
> Good luck,
>
> John
>
> On 7/10/2014 6:08 AM, Kolin Brown wrote:
>
> Hi!  Here at WVU, we are going to interlock our tools to our reservation
> software.  Everyone at the UGIM was talking about the ?blue boxes? from
> Advantech.  Can anyone provide me with a model number?  Also, has anyone
> interfaced these boxes with Cores or iLabs software?
>
>
>
> Kolin Brown
>
>
>
>
>
> _______________________________________________
>
> labnetwork mailing list
>
> labnetwork at mtl.mit.edu
>
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
>
>
>
>
> _______________________________________________
>
> labnetwork mailing list
>
> labnetwork at mtl.mit.edu
>
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>



From sbhas at uchicago.edu  Wed Oct  1 14:06:36 2014
From: sbhas at uchicago.edu (Shivakumar Bhaskaran)
Date: Wed, 1 Oct 2014 18:06:36 +0000
Subject: [labnetwork] Fwd:  Interlock Boxes
In-Reply-To: <CA+NiZd2OHyTwk=nWm2pHn4VQVt_AmFPwJooew5hXNUiH5wDrqw@mail.gmail.com>
References: <48483fa9f0674813ac26ad09718b7b16@BN1PR03MB169.namprd03.prod.outlook.com>
 <53BEE199.509@stanford.edu>
 <4AA894F792D3D64085E82E89F3604131677F5442@REXMD.intranet.epfl.ch>
 <53BFF089.2050207@yale.edu>
 <A71ECB2B7F230841A953EFA3D299504A286A5A9A@xm-mbx-08-prod.ad.uchicago.edu>
 <CA+NiZd3UdNvpk1NwD4eDHDwan6Yen_G2N90aW+EuBD8L9MZPwQ@mail.gmail.com>
 <CA+NiZd2OHyTwk=nWm2pHn4VQVt_AmFPwJooew5hXNUiH5wDrqw@mail.gmail.com>
Message-ID: <A71ECB2B7F230841A953EFA3D299504A286BFDA8@xm-mbx-08-prod.ad.uchicago.edu>

Todd,

Thanks for the interlock system, It was really helpful. I guess each equipment in the cleanroom is equipped with interlock, so you run network cable to unit, Do you ever thought of using the wireless router to do this. Will the Wireless router signal might interfere your sensitive equipment.
Is there any specific network cable you use or regular CAT5 / CAT6 cable is sufficient. Our cleanroom is built without any network port, if I want to do this I have to physically run cable on the ceiling in the chase and drop it next to the equipment. 

--Thanks
--Shiva


Shivakumar Bhaskaran
Searle CleanRoom Manager
University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Todd Merport
Sent: Wednesday, October 01, 2014 11:36 AM
To: Fab Network
Subject: [labnetwork] Fwd: Interlock Boxes

I hope this is useful.


---------- Forwarded message ----------
From: Todd Merport <merport at gmail.com>
Date: Tue, Sep 30, 2014 at 5:00 PM
Subject: Re: [labnetwork] Interlock Boxes
To: Shivakumar Bhaskaran <sbhas at uchicago.edu>


Here are some user account issues that we had in the Berkeley Microlab ( I'm not sure if they are still relevant to the Marvel Nanolab in 2014).

The Marvell Nanolab maintains it's own user database for the following
reasons:  Note, the Nanolab network is administered by the EECS department.

a) The EECS departmental database does not allow account creation of users from other departments without a monthly fee (so members would be billed for two departments in that case).

b) The EECS department doesn't want non paying customers using their network.

c) The campus database does not allow outside industry members to acquire an account without legalese that industry members find unacceptable.

d) Guest users require limited access to layout conversion software ( for mask making) or view only privileges of equipment maintenance, process monitoring, and other database tables. So paying a network access fee is out of the question.

Todd Merport
(formerly of the Microlab/Nanolab)

P.S. A web based interlock system used in some rooms by the Microlab was from WebRelay http://www.controlbyweb.com/webrelay/

On Fri, Jul 11, 2014 at 12:09 PM, Shivakumar Bhaskaran <sbhas at uchicago.edu> wrote:
> Hello All,
>
>
>
> I am trying to set a interlock system for our cleanroom. In the 
> process I was able to get the phpscheduler up running. Before I design 
> or buy the interlock I need your inputs regarding how to set up.
>
>
>
> Do the user log in to computer that is attached to the unit and 
> validate the credentials and then use the equipment. Inorder to do 
> that user data should be validated by the scheduler system, in that 
> case does user have separate id created or it will be same associated with the campus ID.
>
>
>
> Do the user use separate swipe card in the interlock to access the system.
>
>
>
> Apart from the user access, currently the users access the cleanroom 
> with swipe in card and when they leave they swipe out. But not all the 
> users swipe in or swipe out. Our door system is designed in such a way 
> that it will be opened for atleast for 10-20sec , but with this there 
> is possibility of other users following the previous user without 
> swiping the card. Does any one have system that detect the user based 
> on proximity that automatically gets the user information based on RF 
> ID card without swipe in.
>
>
>
> --Thanks
>
> --Shiva
>
>
>
>
>
> Shivakumar Bhaskaran, Ph.D.
>
> Searle CleanRoom Manager
>
> Uinversity of Chicago
>
> 5735 S.Ellis, Room 032
>
> Chicago-60637
>
> Ph:773-795-2297
>
>
>
>
>
>
>
> From: labnetwork-bounces at mtl.mit.edu 
> [mailto:labnetwork-bounces at mtl.mit.edu]
> On Behalf Of Michael Rooks
> Sent: Friday, July 11, 2014 9:11 AM
> To: labnetwork at mtl.mit.edu
> Subject: Re: [labnetwork] Interlock Boxes
>
>
>
> We use ethernet relay boards from National Control Devices, controlled 
> by Badger (the new version of Coral). NCD also makes wifi connected relays.
> Having two relays on a board makes it easy to keep isolated grounds 
> isolated. Each board requires its own static IPv4 address. The boards 
> can be easily mounted in a 6"x6" electrical box, or in the 
> custom-fitted plastic case from Badgerlms. I suggest you keep these 
> boards behind a firewall, since they run a tiny operating system and 
> web page, but with only minimal security.
>
>
> ---------------------
>
> Michael Rooks
>
> Yale Institute for Nanoscience & Quantum Engineering
>
> nano.yale.edu
>
>
>
>
>
> On 07/11/2014 06:14 AM, Fl?ckiger Philippe wrote:
>
> Hi All,
>
>
>
> EPFL is using Ether IO24 R from http://www.elexol.com/IO_Modules/
>
>
>
> Our software is homemade but we have a call for tenders running in 
> order to ?couple our homemade software? with a commercial package.
>
>
>
> We will keep you posted on this important move on which we are 
> investing a lot of effort.
>
>
>
> With my very best regards,
>
> Philippe
>
>
>
> Dr Philippe Fl?ckiger
>
> Director of Operations
>
> http://cmi.epfl.ch/
>
> Phone +41 21 693 6695
>
>
>
> From: labnetwork-bounces at mtl.mit.edu 
> [mailto:labnetwork-bounces at mtl.mit.edu]
> On Behalf Of John Shott
> Sent: jeudi 10 juillet 2014 20:55
> To: Kolin Brown; labnetwork at mtl.mit.edu
> Subject: Re: [labnetwork] Interlock Boxes
>
>
>
> Kolin:
>
> I believe that most folks are using the Advantech ADAM-6060 or 
> ADAM-6066 6-channel IP-addressable relay modules for interlocking.  
> Others use modules that come from National Control Devices that have 
> 1-, 2-, 4-, and 8-relay devices with current ratings from 5 to 30 
> amps.  Most folks are currently using hard-wired ethernet connections, 
> but some wireless options are also available.
>
> I believe that most of these IP-addressable relays are functionally 
> equivalent but would certainly have minor differences in the default 
> port that is used and the exact command sent to turn on, turn off, or 
> check the status of a given relay channel.
>
> I don't have experience with either Cores or iLab software to know 
> what, if any, interlocking hardware has been interfaced with their systems.
>
> Good luck,
>
> John
>
> On 7/10/2014 6:08 AM, Kolin Brown wrote:
>
> Hi!  Here at WVU, we are going to interlock our tools to our 
> reservation software.  Everyone at the UGIM was talking about the 
> ?blue boxes? from Advantech.  Can anyone provide me with a model 
> number?  Also, has anyone interfaced these boxes with Cores or iLabs software?
>
>
>
> Kolin Brown
>
>
>
>
>
> _______________________________________________
>
> labnetwork mailing list
>
> labnetwork at mtl.mit.edu
>
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
>
>
>
>
> _______________________________________________
>
> labnetwork mailing list
>
> labnetwork at mtl.mit.edu
>
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

From merport at gmail.com  Wed Oct  1 20:25:34 2014
From: merport at gmail.com (Todd Merport)
Date: Wed, 1 Oct 2014 17:25:34 -0700
Subject: [labnetwork] Fwd: Interlock Boxes
In-Reply-To: <A71ECB2B7F230841A953EFA3D299504A286BFDA8@xm-mbx-08-prod.ad.uchicago.edu>
References: <48483fa9f0674813ac26ad09718b7b16@BN1PR03MB169.namprd03.prod.outlook.com>
 <53BEE199.509@stanford.edu>
 <4AA894F792D3D64085E82E89F3604131677F5442@REXMD.intranet.epfl.ch>
 <53BFF089.2050207@yale.edu>
 <A71ECB2B7F230841A953EFA3D299504A286A5A9A@xm-mbx-08-prod.ad.uchicago.edu>
 <CA+NiZd3UdNvpk1NwD4eDHDwan6Yen_G2N90aW+EuBD8L9MZPwQ@mail.gmail.com>
 <CA+NiZd2OHyTwk=nWm2pHn4VQVt_AmFPwJooew5hXNUiH5wDrqw@mail.gmail.com>
 <A71ECB2B7F230841A953EFA3D299504A286BFDA8@xm-mbx-08-prod.ad.uchicago.edu>
Message-ID: <CA+NiZd0g_oXWbPdWd9a5cv30USefLqr5LjP-B1OVu_q3Tz6Usw@mail.gmail.com>

The Berkeley Marvell Nanolab has multiple Cat5e drops in each service
chase for network connections. Also the lab was wired with a 25  pair
cable to each chase. The twisted pairs are used for sensors and a
centralized relay control system, an Agilent 34980A, for the entire
lab that activate magnetic latching relays in Walker Interlock Boxes
for each piece of equipment.  There should be a diagram of the system
in the Mercury report that Katalin recently sent to the list.

The centralized system, called Hydra, based on the 34980A reduced the
per equipment interlock cost because the individual interlock boxes
were brought over from the Berkeley Microlab when the equipment moved.
The 34980A is not only able to turn on the interlock boxes but also
read the relay coil resistance. That allows the connection to be
tested when a piece of equipment is enabled. The 34980A also allows
full manual control of all the interlock boxes (an override). The
loopback  wiring check was also a feature of the Walker Interlock
Controller system we used in the Microlab.

Some of the Nanolab's equipment is in the building next door, Cory
Hall. To interlock these systems, we use the ControlbyWeb 4 channel
WebRelays and the Walker Interlock System. The Mercury software knows
which system to contact for each piece of equipment.

The other tricky problem is making sure all of the interlocks are
synchronized to the state of the Mercury database. I've attached a
diagram the explains the procedure that the Nanolab uses.

I think setting up your facility with Cat5e/6 would be preferable to
only wireless routers, but I don't have any experience with going
wireless for equipment control. I know the Microlab had wireless
access points that apparently didn't cause any problems with the
equipment.

Another thing to consider is network security and administration. The
Nanolab has network connections that are connected to the department
public network and private network connections for cameras and stuff
that cannot be exposed to the outside world. We also use a plug
computer, sheevaPlug (http://en.wikipedia.org/wiki/SheevaPlug) to
isolate the Hydra system from the public network.

Agilent (previously HP) is now Keysight Technologies.
http://www.keysight.com/en/pc-1000003024%3Aepsg%3Apgr/34980a-multifunction-switch-measure-mainframe-and-modules?nid=-33260.0.00&cc=US&lc=eng

I had worked for HP/Agilent writing software for manufacturing network
analyzers. I have a feeling that is why I was comfortable using the
34980A as an interlock system for the Nanolab.

Todd
(formally of the Marvell Nanolab).
Oh, I should mention that my daughter is a doctoral candidate in
English at the University of Chicago.

On Wed, Oct 1, 2014 at 11:06 AM, Shivakumar Bhaskaran
<sbhas at uchicago.edu> wrote:
> Todd,
>
> Thanks for the interlock system, It was really helpful. I guess each equipment in the cleanroom is equipped with interlock, so you run network cable to unit, Do you ever thought of using the wireless router to do this. Will the Wireless router signal might interfere your sensitive equipment.
> Is there any specific network cable you use or regular CAT5 / CAT6 cable is sufficient. Our cleanroom is built without any network port, if I want to do this I have to physically run cable on the ceiling in the chase and drop it next to the equipment.
>
> --Thanks
> --Shiva
>
>
> Shivakumar Bhaskaran
> Searle CleanRoom Manager
> University of Chicago
> 5735 S.Ellis, Room 032
> Chicago-60637
> Ph:773-795-2297
>
>
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Todd Merport
> Sent: Wednesday, October 01, 2014 11:36 AM
> To: Fab Network
> Subject: [labnetwork] Fwd: Interlock Boxes
>
> I hope this is useful.
>
>
> ---------- Forwarded message ----------
> From: Todd Merport <merport at gmail.com>
> Date: Tue, Sep 30, 2014 at 5:00 PM
> Subject: Re: [labnetwork] Interlock Boxes
> To: Shivakumar Bhaskaran <sbhas at uchicago.edu>
>
>
> Here are some user account issues that we had in the Berkeley Microlab ( I'm not sure if they are still relevant to the Marvel Nanolab in 2014).
>
> The Marvell Nanolab maintains it's own user database for the following
> reasons:  Note, the Nanolab network is administered by the EECS department.
>
> a) The EECS departmental database does not allow account creation of users from other departments without a monthly fee (so members would be billed for two departments in that case).
>
> b) The EECS department doesn't want non paying customers using their network.
>
> c) The campus database does not allow outside industry members to acquire an account without legalese that industry members find unacceptable.
>
> d) Guest users require limited access to layout conversion software ( for mask making) or view only privileges of equipment maintenance, process monitoring, and other database tables. So paying a network access fee is out of the question.
>
> Todd Merport
> (formerly of the Microlab/Nanolab)
>
> P.S. A web based interlock system used in some rooms by the Microlab was from WebRelay http://www.controlbyweb.com/webrelay/
>
> On Fri, Jul 11, 2014 at 12:09 PM, Shivakumar Bhaskaran <sbhas at uchicago.edu> wrote:
>> Hello All,
>>
>>
>>
>> I am trying to set a interlock system for our cleanroom. In the
>> process I was able to get the phpscheduler up running. Before I design
>> or buy the interlock I need your inputs regarding how to set up.
>>
>>
>>
>> Do the user log in to computer that is attached to the unit and
>> validate the credentials and then use the equipment. Inorder to do
>> that user data should be validated by the scheduler system, in that
>> case does user have separate id created or it will be same associated with the campus ID.
>>
>>
>>
>> Do the user use separate swipe card in the interlock to access the system.
>>
>>
>>
>> Apart from the user access, currently the users access the cleanroom
>> with swipe in card and when they leave they swipe out. But not all the
>> users swipe in or swipe out. Our door system is designed in such a way
>> that it will be opened for atleast for 10-20sec , but with this there
>> is possibility of other users following the previous user without
>> swiping the card. Does any one have system that detect the user based
>> on proximity that automatically gets the user information based on RF
>> ID card without swipe in.
>>
>>
>>
>> --Thanks
>>
>> --Shiva
>>
>>
>>
>>
>>
>> Shivakumar Bhaskaran, Ph.D.
>>
>> Searle CleanRoom Manager
>>
>> Uinversity of Chicago
>>
>> 5735 S.Ellis, Room 032
>>
>> Chicago-60637
>>
>> Ph:773-795-2297
>>
>>
>>
>>
>>
>>
>>
>> From: labnetwork-bounces at mtl.mit.edu
>> [mailto:labnetwork-bounces at mtl.mit.edu]
>> On Behalf Of Michael Rooks
>> Sent: Friday, July 11, 2014 9:11 AM
>> To: labnetwork at mtl.mit.edu
>> Subject: Re: [labnetwork] Interlock Boxes
>>
>>
>>
>> We use ethernet relay boards from National Control Devices, controlled
>> by Badger (the new version of Coral). NCD also makes wifi connected relays.
>> Having two relays on a board makes it easy to keep isolated grounds
>> isolated. Each board requires its own static IPv4 address. The boards
>> can be easily mounted in a 6"x6" electrical box, or in the
>> custom-fitted plastic case from Badgerlms. I suggest you keep these
>> boards behind a firewall, since they run a tiny operating system and
>> web page, but with only minimal security.
>>
>>
>> ---------------------
>>
>> Michael Rooks
>>
>> Yale Institute for Nanoscience & Quantum Engineering
>>
>> nano.yale.edu
>>
>>
>>
>>
>>
>> On 07/11/2014 06:14 AM, Fl?ckiger Philippe wrote:
>>
>> Hi All,
>>
>>
>>
>> EPFL is using Ether IO24 R from http://www.elexol.com/IO_Modules/
>>
>>
>>
>> Our software is homemade but we have a call for tenders running in
>> order to ?couple our homemade software? with a commercial package.
>>
>>
>>
>> We will keep you posted on this important move on which we are
>> investing a lot of effort.
>>
>>
>>
>> With my very best regards,
>>
>> Philippe
>>
>>
>>
>> Dr Philippe Fl?ckiger
>>
>> Director of Operations
>>
>> http://cmi.epfl.ch/
>>
>> Phone +41 21 693 6695
>>
>>
>>
>> From: labnetwork-bounces at mtl.mit.edu
>> [mailto:labnetwork-bounces at mtl.mit.edu]
>> On Behalf Of John Shott
>> Sent: jeudi 10 juillet 2014 20:55
>> To: Kolin Brown; labnetwork at mtl.mit.edu
>> Subject: Re: [labnetwork] Interlock Boxes
>>
>>
>>
>> Kolin:
>>
>> I believe that most folks are using the Advantech ADAM-6060 or
>> ADAM-6066 6-channel IP-addressable relay modules for interlocking.
>> Others use modules that come from National Control Devices that have
>> 1-, 2-, 4-, and 8-relay devices with current ratings from 5 to 30
>> amps.  Most folks are currently using hard-wired ethernet connections,
>> but some wireless options are also available.
>>
>> I believe that most of these IP-addressable relays are functionally
>> equivalent but would certainly have minor differences in the default
>> port that is used and the exact command sent to turn on, turn off, or
>> check the status of a given relay channel.
>>
>> I don't have experience with either Cores or iLab software to know
>> what, if any, interlocking hardware has been interfaced with their systems.
>>
>> Good luck,
>>
>> John
>>
>> On 7/10/2014 6:08 AM, Kolin Brown wrote:
>>
>> Hi!  Here at WVU, we are going to interlock our tools to our
>> reservation software.  Everyone at the UGIM was talking about the
>> ?blue boxes? from Advantech.  Can anyone provide me with a model
>> number?  Also, has anyone interfaced these boxes with Cores or iLabs software?
>>
>>
>>
>> Kolin Brown
>>
>>
>>
>>
>>
>> _______________________________________________
>>
>> labnetwork mailing list
>>
>> labnetwork at mtl.mit.edu
>>
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>>
>>
>>
>>
>>
>>
>> _______________________________________________
>>
>> labnetwork mailing list
>>
>> labnetwork at mtl.mit.edu
>>
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>>
>>
>>
>>
>> _______________________________________________
>> labnetwork mailing list
>> labnetwork at mtl.mit.edu
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From sbhas at uchicago.edu  Wed Oct  1 22:09:43 2014
From: sbhas at uchicago.edu (Shivakumar Bhaskaran)
Date: Thu, 2 Oct 2014 02:09:43 +0000
Subject: [labnetwork] Fwd: Interlock Boxes
In-Reply-To: <CA+NiZd0g_oXWbPdWd9a5cv30USefLqr5LjP-B1OVu_q3Tz6Usw@mail.gmail.com>
References: <48483fa9f0674813ac26ad09718b7b16@BN1PR03MB169.namprd03.prod.outlook.com>
 <53BEE199.509@stanford.edu>
 <4AA894F792D3D64085E82E89F3604131677F5442@REXMD.intranet.epfl.ch>
 <53BFF089.2050207@yale.edu>
 <A71ECB2B7F230841A953EFA3D299504A286A5A9A@xm-mbx-08-prod.ad.uchicago.edu>
 <CA+NiZd3UdNvpk1NwD4eDHDwan6Yen_G2N90aW+EuBD8L9MZPwQ@mail.gmail.com>
 <CA+NiZd2OHyTwk=nWm2pHn4VQVt_AmFPwJooew5hXNUiH5wDrqw@mail.gmail.com>
 <A71ECB2B7F230841A953EFA3D299504A286BFDA8@xm-mbx-08-prod.ad.uchicago.edu>,
 <CA+NiZd0g_oXWbPdWd9a5cv30USefLqr5LjP-B1OVu_q3Tz6Usw@mail.gmail.com>
Message-ID: <A71ECB2B7F230841A953EFA3D299504A286BFEF5@xm-mbx-08-prod.ad.uchicago.edu>

Todd,

Thanks for your detailed description, I will be starting this project next month. Will keep you all updated how it went.

--Thanks
--Shiva

________________________________________
From: Todd Merport [merport at gmail.com]
Sent: Wednesday, October 01, 2014 7:25 PM
To: Shivakumar Bhaskaran
Cc: Fab Network
Subject: Re: [labnetwork] Fwd: Interlock Boxes

The Berkeley Marvell Nanolab has multiple Cat5e drops in each service
chase for network connections. Also the lab was wired with a 25  pair
cable to each chase. The twisted pairs are used for sensors and a
centralized relay control system, an Agilent 34980A, for the entire
lab that activate magnetic latching relays in Walker Interlock Boxes
for each piece of equipment.  There should be a diagram of the system
in the Mercury report that Katalin recently sent to the list.

The centralized system, called Hydra, based on the 34980A reduced the
per equipment interlock cost because the individual interlock boxes
were brought over from the Berkeley Microlab when the equipment moved.
The 34980A is not only able to turn on the interlock boxes but also
read the relay coil resistance. That allows the connection to be
tested when a piece of equipment is enabled. The 34980A also allows
full manual control of all the interlock boxes (an override). The
loopback  wiring check was also a feature of the Walker Interlock
Controller system we used in the Microlab.

Some of the Nanolab's equipment is in the building next door, Cory
Hall. To interlock these systems, we use the ControlbyWeb 4 channel
WebRelays and the Walker Interlock System. The Mercury software knows
which system to contact for each piece of equipment.

The other tricky problem is making sure all of the interlocks are
synchronized to the state of the Mercury database. I've attached a
diagram the explains the procedure that the Nanolab uses.

I think setting up your facility with Cat5e/6 would be preferable to
only wireless routers, but I don't have any experience with going
wireless for equipment control. I know the Microlab had wireless
access points that apparently didn't cause any problems with the
equipment.

Another thing to consider is network security and administration. The
Nanolab has network connections that are connected to the department
public network and private network connections for cameras and stuff
that cannot be exposed to the outside world. We also use a plug
computer, sheevaPlug (http://en.wikipedia.org/wiki/SheevaPlug) to
isolate the Hydra system from the public network.

Agilent (previously HP) is now Keysight Technologies.
http://www.keysight.com/en/pc-1000003024%3Aepsg%3Apgr/34980a-multifunction-switch-measure-mainframe-and-modules?nid=-33260.0.00&cc=US&lc=eng

I had worked for HP/Agilent writing software for manufacturing network
analyzers. I have a feeling that is why I was comfortable using the
34980A as an interlock system for the Nanolab.

Todd
(formally of the Marvell Nanolab).
Oh, I should mention that my daughter is a doctoral candidate in
English at the University of Chicago.

On Wed, Oct 1, 2014 at 11:06 AM, Shivakumar Bhaskaran
<sbhas at uchicago.edu> wrote:
> Todd,
>
> Thanks for the interlock system, It was really helpful. I guess each equipment in the cleanroom is equipped with interlock, so you run network cable to unit, Do you ever thought of using the wireless router to do this. Will the Wireless router signal might interfere your sensitive equipment.
> Is there any specific network cable you use or regular CAT5 / CAT6 cable is sufficient. Our cleanroom is built without any network port, if I want to do this I have to physically run cable on the ceiling in the chase and drop it next to the equipment.
>
> --Thanks
> --Shiva
>
>
> Shivakumar Bhaskaran
> Searle CleanRoom Manager
> University of Chicago
> 5735 S.Ellis, Room 032
> Chicago-60637
> Ph:773-795-2297
>
>
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Todd Merport
> Sent: Wednesday, October 01, 2014 11:36 AM
> To: Fab Network
> Subject: [labnetwork] Fwd: Interlock Boxes
>
> I hope this is useful.
>
>
> ---------- Forwarded message ----------
> From: Todd Merport <merport at gmail.com>
> Date: Tue, Sep 30, 2014 at 5:00 PM
> Subject: Re: [labnetwork] Interlock Boxes
> To: Shivakumar Bhaskaran <sbhas at uchicago.edu>
>
>
> Here are some user account issues that we had in the Berkeley Microlab ( I'm not sure if they are still relevant to the Marvel Nanolab in 2014).
>
> The Marvell Nanolab maintains it's own user database for the following
> reasons:  Note, the Nanolab network is administered by the EECS department.
>
> a) The EECS departmental database does not allow account creation of users from other departments without a monthly fee (so members would be billed for two departments in that case).
>
> b) The EECS department doesn't want non paying customers using their network.
>
> c) The campus database does not allow outside industry members to acquire an account without legalese that industry members find unacceptable.
>
> d) Guest users require limited access to layout conversion software ( for mask making) or view only privileges of equipment maintenance, process monitoring, and other database tables. So paying a network access fee is out of the question.
>
> Todd Merport
> (formerly of the Microlab/Nanolab)
>
> P.S. A web based interlock system used in some rooms by the Microlab was from WebRelay http://www.controlbyweb.com/webrelay/
>
> On Fri, Jul 11, 2014 at 12:09 PM, Shivakumar Bhaskaran <sbhas at uchicago.edu> wrote:
>> Hello All,
>>
>>
>>
>> I am trying to set a interlock system for our cleanroom. In the
>> process I was able to get the phpscheduler up running. Before I design
>> or buy the interlock I need your inputs regarding how to set up.
>>
>>
>>
>> Do the user log in to computer that is attached to the unit and
>> validate the credentials and then use the equipment. Inorder to do
>> that user data should be validated by the scheduler system, in that
>> case does user have separate id created or it will be same associated with the campus ID.
>>
>>
>>
>> Do the user use separate swipe card in the interlock to access the system.
>>
>>
>>
>> Apart from the user access, currently the users access the cleanroom
>> with swipe in card and when they leave they swipe out. But not all the
>> users swipe in or swipe out. Our door system is designed in such a way
>> that it will be opened for atleast for 10-20sec , but with this there
>> is possibility of other users following the previous user without
>> swiping the card. Does any one have system that detect the user based
>> on proximity that automatically gets the user information based on RF
>> ID card without swipe in.
>>
>>
>>
>> --Thanks
>>
>> --Shiva
>>
>>
>>
>>
>>
>> Shivakumar Bhaskaran, Ph.D.
>>
>> Searle CleanRoom Manager
>>
>> Uinversity of Chicago
>>
>> 5735 S.Ellis, Room 032
>>
>> Chicago-60637
>>
>> Ph:773-795-2297
>>
>>
>>
>>
>>
>>
>>
>> From: labnetwork-bounces at mtl.mit.edu
>> [mailto:labnetwork-bounces at mtl.mit.edu]
>> On Behalf Of Michael Rooks
>> Sent: Friday, July 11, 2014 9:11 AM
>> To: labnetwork at mtl.mit.edu
>> Subject: Re: [labnetwork] Interlock Boxes
>>
>>
>>
>> We use ethernet relay boards from National Control Devices, controlled
>> by Badger (the new version of Coral). NCD also makes wifi connected relays.
>> Having two relays on a board makes it easy to keep isolated grounds
>> isolated. Each board requires its own static IPv4 address. The boards
>> can be easily mounted in a 6"x6" electrical box, or in the
>> custom-fitted plastic case from Badgerlms. I suggest you keep these
>> boards behind a firewall, since they run a tiny operating system and
>> web page, but with only minimal security.
>>
>>
>> ---------------------
>>
>> Michael Rooks
>>
>> Yale Institute for Nanoscience & Quantum Engineering
>>
>> nano.yale.edu
>>
>>
>>
>>
>>
>> On 07/11/2014 06:14 AM, Fl?ckiger Philippe wrote:
>>
>> Hi All,
>>
>>
>>
>> EPFL is using Ether IO24 R from http://www.elexol.com/IO_Modules/
>>
>>
>>
>> Our software is homemade but we have a call for tenders running in
>> order to ?couple our homemade software? with a commercial package.
>>
>>
>>
>> We will keep you posted on this important move on which we are
>> investing a lot of effort.
>>
>>
>>
>> With my very best regards,
>>
>> Philippe
>>
>>
>>
>> Dr Philippe Fl?ckiger
>>
>> Director of Operations
>>
>> http://cmi.epfl.ch/
>>
>> Phone +41 21 693 6695
>>
>>
>>
>> From: labnetwork-bounces at mtl.mit.edu
>> [mailto:labnetwork-bounces at mtl.mit.edu]
>> On Behalf Of John Shott
>> Sent: jeudi 10 juillet 2014 20:55
>> To: Kolin Brown; labnetwork at mtl.mit.edu
>> Subject: Re: [labnetwork] Interlock Boxes
>>
>>
>>
>> Kolin:
>>
>> I believe that most folks are using the Advantech ADAM-6060 or
>> ADAM-6066 6-channel IP-addressable relay modules for interlocking.
>> Others use modules that come from National Control Devices that have
>> 1-, 2-, 4-, and 8-relay devices with current ratings from 5 to 30
>> amps.  Most folks are currently using hard-wired ethernet connections,
>> but some wireless options are also available.
>>
>> I believe that most of these IP-addressable relays are functionally
>> equivalent but would certainly have minor differences in the default
>> port that is used and the exact command sent to turn on, turn off, or
>> check the status of a given relay channel.
>>
>> I don't have experience with either Cores or iLab software to know
>> what, if any, interlocking hardware has been interfaced with their systems.
>>
>> Good luck,
>>
>> John
>>
>> On 7/10/2014 6:08 AM, Kolin Brown wrote:
>>
>> Hi!  Here at WVU, we are going to interlock our tools to our
>> reservation software.  Everyone at the UGIM was talking about the
>> ?blue boxes? from Advantech.  Can anyone provide me with a model
>> number?  Also, has anyone interfaced these boxes with Cores or iLabs software?
>>
>>
>>
>> Kolin Brown
>>
>>
>>
>>
>>
>> _______________________________________________
>>
>> labnetwork mailing list
>>
>> labnetwork at mtl.mit.edu
>>
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>>
>>
>>
>>
>>
>>
>> _______________________________________________
>>
>> labnetwork mailing list
>>
>> labnetwork at mtl.mit.edu
>>
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>>
>>
>>
>>
>> _______________________________________________
>> labnetwork mailing list
>> labnetwork at mtl.mit.edu
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork



From nfshuyun at ust.hk  Fri Oct  3 04:06:27 2014
From: nfshuyun at ust.hk (nfshuyun)
Date: Fri, 3 Oct 2014 16:06:27 +0800
Subject: [labnetwork] Zn ion implantation
Message-ID: <060701cfdee0$eee6afd0$ccb40f70$@ust.hk>

Dear Colleagues,

 

Does anyone has experiences on Zn ion implantation? What kind of source is
needed? Is there any gas sources for Zn ions?Or has to be solid source for
Zn? Can it be implanted using normal Varian CF-3000 implanter?

 

Thank you very much for any advice!

 

Have a good day!

 

Shuyun Zhao

Scientific officer

Nanoelectronics Fabrication Facility

The Hong Kong University of Science & Technology

Clear Water Bay, Kowloon, Hong Kong

Tel:  (852) 2358 7212/7896

Fax: (852) 2358 1372

Email:  <mailto:nfshuyun at ust.hk> nfshuyun at ust.hk

 

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From olinx034 at umn.edu  Tue Oct  7 13:33:18 2014
From: olinx034 at umn.edu (Gary Olin)
Date: Tue, 7 Oct 2014 12:33:18 -0500
Subject: [labnetwork] Support for KLA Tencor P-16 and Flexus
Message-ID: <CAMR4DN_ZOj0pkdX1RkXpxC9Lg-gWvveMmv-rAZ4F65oY8rAe3w@mail.gmail.com>

Hi,

I am looking for support we need for our KLA Tencor P-16 profiler and
Flexus 2320i stress measurement tool.  We have issues at this time and
would like to find vendors that can move me along.
Thank You,

Gary Olin
Maintenance Supervisor
Minnesota Nano Center
University of Minnesota
olinx034 at umn.edu
(612) 625-9780
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From olinx034 at umn.edu  Thu Oct  9 11:48:45 2014
From: olinx034 at umn.edu (Gary Olin)
Date: Thu, 9 Oct 2014 10:48:45 -0500
Subject: [labnetwork] Thank You
Message-ID: <CAMR4DN_pizmYkE=Suo8X_AQc+sOo_MQN8do81P+U5SdPqPzR0w@mail.gmail.com>

Thank you to all who helped me with finding KLA Tencor tool support.   This
will help bail me out of a jam.
Regards,

Gary Olin
Maintenance Supervisor
Minnesota Nano Center
University of Minnesota
olinx034 at umn.edu
(612) 625-9780

On Tue, Oct 7, 2014 at 12:33 PM, Gary Olin <olinx034 at umn.edu> wrote:

> Hi,
>
> I am looking for support we need for our KLA Tencor P-16 profiler and
> Flexus 2320i stress measurement tool.  We have issues at this time and
> would like to find vendors that can move me along.
> Thank You,
>
> Gary Olin
> Maintenance Supervisor
> Minnesota Nano Center
> University of Minnesota
> olinx034 at umn.edu
> (612) 625-9780
>
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From shott at stanford.edu  Fri Oct 10 12:08:15 2014
From: shott at stanford.edu (John Shott)
Date: Fri, 10 Oct 2014 09:08:15 -0700
Subject: [labnetwork] Experience with cart-mounted RGA systems?
Message-ID: <5438046F.7030006@stanford.edu>

Hello Labnetwork Community:

We are exploring options for portable Residual Gas Analyzer (RGA) 
systems that are sufficiently flexible and portable to be used on a 
variety of process tools.  In particular, we would like to be able to 
use them on systems such as ALD, etch, and PECVD tools that are 
typically comparatively low-vacuum systems often  pumped with only a dry 
mechanical pump.  I trust that means that we need a system with it's own 
on-board turbo and an appropriate inlet manifold to provide sufficiently 
high vacuum for the RGA.

If you have experience with such a system, I'd appreciate learning more 
about whether your system is a useful diagnostic tool on a variety of 
systems, whether it is reasonably robust, easy to use, etc.  Also, most 
RGAs typically offer the ability to measure masses up to 100 AMU with 
often the option to measure up to 200 or 300 AMU.  For general vacuum 
"finger printing" is there added value in being able to measure higher 
than 100 AMU?  If you've tried this approach and found that it did not 
deliver the information that you hoped to learn, I'd be interested in 
that experience as well.  Are there other approaches to tracking the 
health of vacuum chambers that we should be investigating?

Thanks for your consideration,

John
Stanford Nanofabrication Facility






From gregg.cure at gmail.com  Mon Oct 13 13:46:38 2014
From: gregg.cure at gmail.com (Gregg Cure)
Date: Mon, 13 Oct 2014 10:46:38 -0700
Subject: [labnetwork] Span gauge replacements for gas cabinets
Message-ID: <CAB5QBGzOKUootoX4f1-EozZnnmbFsC3QPWZ9XZGZqyrSwG9ETA@mail.gmail.com>

Hello,
We have older (circa 1992) Air Products GasGuard GG450 single and dual
controller gas cabinets.
We are using them for SiH4, DCS, PH3 balance SiH4 for various LPCVD
processes.

The Span pressure gauges in the pigtails and VMBs are showing their age and
a few of them have failed, or are no longer able to be calibrated. These
gauge transducers are either in the own weldments connected to the lines or
connected to the lines via VCRs. One gauge is an analog visual unit on the
secondary side of the regulator with an integral transducer that sends a
signal to the controller.

It seems that Span is no longer a viable entity. Does anyone know of a 3rd
party company that sources replacements for these transducers?

Thanks,
Gregg Cure`

-- 
Gregg D. Cure`
The University of Arizona
Arizona Research Laboratories
Nano Fabrication and Processing Center
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987
Cell: 520.307.2760
Fax: 520.626.7877
Website: http://mfc.engr.arizona.edu
Website: http://www.arl.arizona.edu/
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From schweig at umich.edu  Tue Oct 14 05:54:57 2014
From: schweig at umich.edu (Dennis Schweiger)
Date: Tue, 14 Oct 2014 05:54:57 -0400
Subject: [labnetwork] Span gauge replacements for gas cabinets
Message-ID: <CAKzi2_MY-BTwQxN9yCt5oOUXcBbTJ0W2Kts-wPaMkv7Cw8gC4g@mail.gmail.com>

Gregg,

I'd talk to Tom Britton of Critical Systems.  He's on this site, and is a
regular contributor.  They have also refurbished "older" Air Products gas
cabinets for me.  I would expect them to have spares, or could at least
point you in the correct direction.  The "Span" name has been bought and
sold so many times, I'm not sure what banner they're being offered under
now.

I took a look at one of our gas cabinets, we're using a WIKA guage, similar
to this;

http://wika.us/PGT23_063UHP_en_us.WIKA

Take care,

DennisSchweiger
University of Michigan/LNF

734.647.2055 Ofc

On Mon, Oct 13, 2014 at 1:46 PM, Gregg Cure <gregg.cure at gmail.com> wrote:

> Hello,
> We have older (circa 1992) Air Products GasGuard GG450 single and dual
> controller gas cabinets.
> We are using them for SiH4, DCS, PH3 balance SiH4 for various LPCVD
> processes.
>
> The Span pressure gauges in the pigtails and VMBs are showing their age
> and a few of them have failed, or are no longer able to be calibrated.
> These gauge transducers are either in the own weldments connected to the
> lines or connected to the lines via VCRs. One gauge is an analog visual
> unit on the secondary side of the regulator with an integral transducer
> that sends a signal to the controller.
>
> It seems that Span is no longer a viable entity. Does anyone know of a 3rd
> party company that sources replacements for these transducers?
>
> Thanks,
> Gregg Cure`
>
> --
> Gregg D. Cure`
> The University of Arizona
> Arizona Research Laboratories
> Nano Fabrication and Processing Center
> 1230 E. Speedway Blvd.
> P.O. Box 210104
> Tucson, AZ 85721-0104
> Office: 520.626.1987
> Cell: 520.307.2760
> Fax: 520.626.7877
> Website: http://mfc.engr.arizona.edu
> Website: http://www.arl.arizona.edu/
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
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From shott at stanford.edu  Tue Oct 14 10:43:57 2014
From: shott at stanford.edu (John Shott)
Date: Tue, 14 Oct 2014 07:43:57 -0700
Subject: [labnetwork] Span gauge replacements for gas cabinets
In-Reply-To: <CAKzi2_MY-BTwQxN9yCt5oOUXcBbTJ0W2Kts-wPaMkv7Cw8gC4g@mail.gmail.com>
References: <CAKzi2_MY-BTwQxN9yCt5oOUXcBbTJ0W2Kts-wPaMkv7Cw8gC4g@mail.gmail.com>
Message-ID: <543D36AD.6000700@stanford.edu>

Gregg:

I agree with Dennis that Tom Britton of Critical Systems will be a 
valuable resource ... they know Air Products cabinets forwards and 
backwards.

We have a handful of older Air Products GS500 cabinets.  They are 
equipped with MKS pressure transducers.  I think that both Wika and MKS 
(and others, I'm sure) have been producing pressure transducers for uses 
like this for a long time.

Pending more detailed information from Tom Britton, there are a few 
things that you will need to try to match when looking for a replacement 
transducer ... and all pressure transducer manufactures including Wika, 
MKS, and others offer a dizzying array of part numbers and options.

The things that you will need to match include:

1. Power supply voltage.  Most commonly +24VDC.

2. Output signal: 4-20 mA is probably most common, but some systems use 
0-5VDC or even 0-10VDC.

3. Compound or "normal" gauge.  In other words, does the gauge go from 0 
PSIA or 0 PSIG to maximum pressure reading.  Many cabinets that have 
vacuum generators will use compound gauges to be able to measure down to 
0 PSIA (-14.73 PSIG) ... but your gauge has to put out what the 
controller is expecting.

4. Electrical connector or "flying leads" to match what is already in 
your cabinet.

5. Flow through or single-ended.

6. Weld joint or VCR.

7. Particularly for your silane cabinets, do you need gauges that are 
Class 1/Div 2 rated?  That is, they can't induce an explosion in the 
event of a leak.

Also, some manufacturers offer a built-in readout if you want to be able 
to see a pressure reading where you currently have an analog gauge.

If he doesn't chime in on his own, send me email and I'll give you Tom 
Britton's contact information: he will likely be able to short-circuit 
much of your search and provide you with lots of good, specific information.

Let me know if you have any further questions,

John

On 10/14/2014 2:54 AM, Dennis Schweiger wrote:
> Gregg,
>
> I'd talk to Tom Britton of Critical Systems.  He's on this site, and 
> is a regular contributor.  They have also refurbished "older" Air 
> Products gas cabinets for me.  I would expect them to have spares, or 
> could at least point you in the correct direction.  The "Span" name 
> has been bought and sold so many times, I'm not sure what banner 
> they're being offered under now.
>
> I took a look at one of our gas cabinets, we're using a WIKA guage, 
> similar to this;
>
> http://wika.us/PGT23_063UHP_en_us.WIKA
>
> Take care,
>
> DennisSchweiger
> University of Michigan/LNF
> 734.647.2055 Ofc
>
> On Mon, Oct 13, 2014 at 1:46 PM, Gregg Cure <gregg.cure at gmail.com 
> <mailto:gregg.cure at gmail.com>> wrote:
>
>     Hello,
>     We have older (circa 1992) Air Products GasGuard GG450 single and
>     dual controller gas cabinets.
>     We are using them for SiH4, DCS, PH3 balance SiH4 for various
>     LPCVD processes.
>
>     The Span pressure gauges in the pigtails and VMBs are showing
>     their age and a few of them have failed, or are no longer able to
>     be calibrated. These gauge transducers are either in the own
>     weldments connected to the lines or connected to the lines via
>     VCRs. One gauge is an analog visual unit on the secondary side of
>     the regulator with an integral transducer that sends a signal to
>     the controller.
>
>     It seems that Span is no longer a viable entity. Does anyone know
>     of a 3rd party company that sources replacements for these
>     transducers?
>
>     Thanks,
>     Gregg Cure`
>
>     -- 
>     Gregg D. Cure`
>     The University of Arizona
>     Arizona Research Laboratories
>     Nano Fabrication and Processing Center
>     1230 E. Speedway Blvd.
>     P.O. Box 210104
>     Tucson, AZ 85721-0104
>     Office: 520.626.1987 <tel:520.626.1987>
>     Cell: 520.307.2760 <tel:520.307.2760>
>     Fax: 520.626.7877 <tel:520.626.7877>
>     Website: http://mfc.engr.arizona.edu
>     Website: http://www.arl.arizona.edu/
>
>     _______________________________________________
>     labnetwork mailing list
>     labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
>     https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From tbritton at criticalsystemsinc.com  Tue Oct 14 12:22:40 2014
From: tbritton at criticalsystemsinc.com (Tom Britton)
Date: Tue, 14 Oct 2014 16:22:40 +0000
Subject: [labnetwork] Span gauge replacements for gas cabinets
In-Reply-To: <CAKzi2_MY-BTwQxN9yCt5oOUXcBbTJ0W2Kts-wPaMkv7Cw8gC4g@mail.gmail.com>
References: <CAKzi2_MY-BTwQxN9yCt5oOUXcBbTJ0W2Kts-wPaMkv7Cw8gC4g@mail.gmail.com>
Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2E011F2A9D@P3PWEX2MB006.ex2.secureserver.net>

Thank you Dennis!

Hi Greg. We can definitely help here. While we don't have any of the GG450 systems anymore, we do have every generation from that point forward, and over 500 gas cabinets and VMBs in stock. Because of this, I have all the parts you'll need to get back up for as little as possible. When you're ready for replacement cabinets, we have a cost model that many in our UGIM group have taken advantage of. As-new warrantees, on-site commissioning, training, ongoing support. It's a model that is designed to provide an excellent reconditioned gas cabinet that will serve all your needs at a price that won't destroy your budget.

This isn't a sales forum, so I'll leave it at that, but if you want to give me a call I'll get you the parts you need.

Thank you!

Tom

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208-890-1417
Office: 877-572-5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

[logo for email signature png]



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dennis Schweiger
Sent: Tuesday, October 14, 2014 3:55 AM
To: Gregg Cure
Cc: Fab Network
Subject: Re: [labnetwork] Span gauge replacements for gas cabinets

Gregg,

I'd talk to Tom Britton of Critical Systems.  He's on this site, and is a regular contributor.  They have also refurbished "older" Air Products gas cabinets for me.  I would expect them to have spares, or could at least point you in the correct direction.  The "Span" name has been bought and sold so many times, I'm not sure what banner they're being offered under now.

I took a look at one of our gas cabinets, we're using a WIKA guage, similar to this;
http://wika.us/PGT23_063UHP_en_us.WIKA

Take care,

DennisSchweiger
University of Michigan/LNF

734.647.2055 Ofc

On Mon, Oct 13, 2014 at 1:46 PM, Gregg Cure <gregg.cure at gmail.com<mailto:gregg.cure at gmail.com>> wrote:
Hello,
We have older (circa 1992) Air Products GasGuard GG450 single and dual controller gas cabinets.
We are using them for SiH4, DCS, PH3 balance SiH4 for various LPCVD processes.

The Span pressure gauges in the pigtails and VMBs are showing their age and a few of them have failed, or are no longer able to be calibrated. These gauge transducers are either in the own weldments connected to the lines or connected to the lines via VCRs. One gauge is an analog visual unit on the secondary side of the regulator with an integral transducer that sends a signal to the controller.

It seems that Span is no longer a viable entity. Does anyone know of a 3rd party company that sources replacements for these transducers?

Thanks,
Gregg Cure`

--
Gregg D. Cure`
The University of Arizona
Arizona Research Laboratories
Nano Fabrication and Processing Center
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987<tel:520.626.1987>
Cell: 520.307.2760<tel:520.307.2760>
Fax: 520.626.7877<tel:520.626.7877>
Website: http://mfc.engr.arizona.edu
Website: http://www.arl.arizona.edu/

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From michael.rooks at yale.edu  Tue Oct 14 12:29:10 2014
From: michael.rooks at yale.edu (Michael Rooks)
Date: Tue, 14 Oct 2014 12:29:10 -0400
Subject: [labnetwork] job opening: Yale west campus cleanroom
Message-ID: <543D4F56.5020002@yale.edu>

*Job Description:*

The Microfabrication Core of Yale University West Campus is seeking to 
hire an
experienced lead technician to oversee this new facility. The Specialist 
will have the
responsibility of operating instruments, training new operators, 
consulting with users on
experimental design and completion, interfacing with instrument 
manufacturers, and the
maintenance of instruments in the Core. The Specialist will be expected 
to contribute
heavily to the development and construction of the new state-of-art 
facility and manage
its operation moving forward. The Core will accommodate the research 
activities of
faculty from the West Campus Institutes: Nanobiology, Chemical Biology, 
Cancer
Biology, Energy Sciences, Systems Biology, and Microbial Diversity.

The Specialist is expected to assist faculty, staff, and students in 
conducting research.
S/he will also be required to assist in the development of research 
plans and participate in
preparing grant proposals.

*Resources in the Core will include:*

  * Facilities for soft lithography mold making and casting.
  * Wet process fume hoods: base, acid and solvent chemical processes
  * Photolithography: resist spinners, hot plates, EVG aligner
  * Dry Process: O2 Plasma, annealing
  * Metrology: Microscopes, profilometer, reflectometer
  * Safety equipment


*Essential Duties of the Position:*

With reporting responsibility to the West Campus Director of Research 
Operations and
Technology, direct activities of the facility in partnership with the 
existing cleanroom
facilities in the Yale School of Engineering and Applied Sciences, and 
with the existing
Analytical Services Group at West Campus.

Activities include organizing the space and the flow of work, ordering 
equipment and
supplies, advertising technologies available in the facility, scheduling 
work, establishing
priorities, developing short and long range programmatic goals to ensure 
the outstanding
quality of the services.

    1. Serve as a technical mentor for cleanroom users by developing and
    debugging
    cleanroom processes used in research. Benchmark essential cleanroom
    processes
    and performance.
    2. Conceive, design and modify microfluidic (and possibly semiconductor)
    processing equipment.
    3. Develop and implement research applications to fabricate
    microfluidic materials,
    devices and processing equipment.
    4. Assist in managing research groups for the efficient flow of
    research projects.
    5. Participate in defining the direction of research and equipment
    design.
    6. Develop and maintain a system for data and user management.
    7. Assist in managing research, research support design, and
    projects associated with
    the development of devices and materials and associated process and
    characterization equipment.
    8. Conceive and design equipment and facilities for material processing.
    9. Supervise contractors, researchers, graduate students, etc.
    10. Consult and advise on technical designs.
    11. Interact with internal contacts to discuss and consult on
    research projects.
    12. Design research processes, implement and project cost estimates.
    13. Interact with vendors, suppliers, manufacturing companies and
    other research
    institutions to develop and design specialized equipment and
    instruments.
    14. Exchange technical information. Stay abreast of new research
    technologies and
    developments.
    15. Develop and manage the budget of the facility in conjunction
    with West Campus
    Administration, determine pricing and ensure use of the facility to
    guarantee a
    steady revenue flow and cost recovery.

*Education and Training:*

B.S. Degree in Engineering and eight to ten years related work 
experience in a research
development facility, supervising and overseeing facilities operations; 
or the equivalent
combination of education and experience.
Experience and understanding of microfluidic and microelectronics processing
equipment.

Applicant should be familiar with all processes related to soft 
lithography used in the
fabrication of micro and nano- fluidic devices.

Background in photomask design using CAD programs such as Layout Editor 
is a plus.
Processes including positive and negative resists, silanization, casting 
materials (i.e.
PDMS) are used to create single and multi-level devices, applicant will 
be knowledgeable
of the basics in this area and be required to teach and train users in 
these processes.

Familiarity with alignment techniques at the micro and nano level is 
critical.
Maintaining process equipment and integrating process solutions is a major
responsibility.

Experience working in a multiuser environment.

*Skills and Abilities*

    1. Excellent interpersonal skills suited to a multiuser environment.
    2. Demonstrated ability to organize and support multiple projects
    for multiple users.
    3. Ability to function independently and utilize judgment, analysis
    and creativity in
    investigating problems while evaluating alternative solutions.
    4. Self-motivated
    5. Ability to work as a full collaborator with faculty, students,
    and research staff.
    6. Ability to train and instruct students and post-docs.
    7. Participate in acquiring funding.


*Application: *

For more information and immediate consideration, please apply online at
www.Yale.edu/jobs - the STARS req ID for this position is 27388BR. 
Please be sure to
reference this website when applying for this position.

We invite you to discover the excitement, diversity, rewards and 
excellence of a
career at Yale University. One of the country's great workplaces, Yale 
University
offers exciting opportunities for meaningful accomplishment and true 
growth. Our
benefits package is among the best anywhere, with a wide variety of 
insurance
choices, liberal paid time off, fantastic family and educational 
benefits, a variety of
retirement benefits, extensive recreational facilities, and much more.
Yale University is an affirmative action/equal opportunity employer. 
Yale values
diversity in its faculty, staff, and students and strongly encourages 
applications from
women and members of underrepresented minority groups.

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From cooper at exper-tech.com  Tue Oct 14 20:01:34 2014
From: cooper at exper-tech.com (Mark Cooper)
Date: Tue, 14 Oct 2014 17:01:34 -0700
Subject: [labnetwork] Span gauge replacements for gas cabinets
In-Reply-To: <9820889A26AAC34EBEB01D62DFCEEB2E011F2A9D@P3PWEX2MB006.ex2.secureserver.net>
References: <CAKzi2_MY-BTwQxN9yCt5oOUXcBbTJ0W2Kts-wPaMkv7Cw8gC4g@mail.gmail.com>
 <9820889A26AAC34EBEB01D62DFCEEB2E011F2A9D@P3PWEX2MB006.ex2.secureserver.net>
Message-ID: <DB973B9A4B661345B25968994D2E9ABD151A61@EXSERVER.expertech.local>

The Johnston Group LLC from Pleasanton Ca has over 180 of the Air
Products GG450 cabinets and over 100 VMBs instock, and can help with
hard to find parts, including complete cabinets. Expertech and The
Johnston Group are alliance partners, and I would be glad to forward the
list of their material to anyone who would like. As Tom said, since this
is not a sales forum, I am glad to take this offline. 

 

 

 

Mark Cooper

Vice President General Manager

Main: 831-439-9300  ext. 422 
Fax: 831-439-8139 
Mobile: 831-332-9396
cooper at exper-tech.com

This email message is for the sole use of the addressee(s) and may
contain Expertech confidential and legally privileged information.
Access, review, use, disclosure or distribution of this email by anyone
other than the intended addressee is unauthorized and prohibited.  If
you are not the intended recipient, please notify the sender immediately
and destroy all paper and electronic copies of the original message and
any attachments. 

 

________________________________

From: labnetwork-bounces at mtl.mit.edu
[mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Tom Britton
Sent: Tuesday, October 14, 2014 9:23 AM
To: Dennis Schweiger; Gregg Cure
Cc: Fab Network
Subject: Re: [labnetwork] Span gauge replacements for gas cabinets

 

Thank you Dennis!

 

Hi Greg. We can definitely help here. While we don't have any of the
GG450 systems anymore, we do have every generation from that point
forward, and over 500 gas cabinets and VMBs in stock. Because of this, I
have all the parts you'll need to get back up for as little as possible.
When you're ready for replacement cabinets, we have a cost model that
many in our UGIM group have taken advantage of. As-new warrantees,
on-site commissioning, training, ongoing support. It's a model that is
designed to provide an excellent reconditioned gas cabinet that will
serve all your needs at a price that won't destroy your budget.

 

This isn't a sales forum, so I'll leave it at that, but if you want to
give me a call I'll get you the parts you need.

 

Thank you!

 

Tom

 

Tom Britton

Director of Sales

Critical Systems, Inc.

Direct: 208-890-1417

Office: 877-572-5515

www.CriticalSystemsInc.com <http://www.criticalsystemsinc.com/> 

 

 

 

 

 

From: labnetwork-bounces at mtl.mit.edu
[mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dennis Schweiger
Sent: Tuesday, October 14, 2014 3:55 AM
To: Gregg Cure
Cc: Fab Network
Subject: Re: [labnetwork] Span gauge replacements for gas cabinets

 

Gregg,

 

I'd talk to Tom Britton of Critical Systems.  He's on this site, and is
a regular contributor.  They have also refurbished "older" Air Products
gas cabinets for me.  I would expect them to have spares, or could at
least point you in the correct direction.  The "Span" name has been
bought and sold so many times, I'm not sure what banner they're being
offered under now.

 

I took a look at one of our gas cabinets, we're using a WIKA guage,
similar to this;

http://wika.us/PGT23_063UHP_en_us.WIKA

 

Take care,




DennisSchweiger

University of Michigan/LNF

 

734.647.2055 Ofc

 

On Mon, Oct 13, 2014 at 1:46 PM, Gregg Cure <gregg.cure at gmail.com>
wrote:

Hello,

We have older (circa 1992) Air Products GasGuard GG450 single and dual
controller gas cabinets. 

We are using them for SiH4, DCS, PH3 balance SiH4 for various LPCVD
processes.

 

The Span pressure gauges in the pigtails and VMBs are showing their age
and a few of them have failed, or are no longer able to be calibrated.
These gauge transducers are either in the own weldments connected to the
lines or connected to the lines via VCRs. One gauge is an analog visual
unit on the secondary side of the regulator with an integral transducer
that sends a signal to the controller.

 

It seems that Span is no longer a viable entity. Does anyone know of a
3rd party company that sources replacements for these transducers?

 

Thanks,

Gregg Cure`

 

-- 
Gregg D. Cure`
The University of Arizona
Arizona Research Laboratories
Nano Fabrication and Processing Center
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987
Cell: 520.307.2760
Fax: 520.626.7877
Website: http://mfc.engr.arizona.edu
Website: http://www.arl.arizona.edu/ 


_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

 

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From tbritton at criticalsystemsinc.com  Wed Oct 15 11:40:39 2014
From: tbritton at criticalsystemsinc.com (Tom Britton)
Date: Wed, 15 Oct 2014 15:40:39 +0000
Subject: [labnetwork] Span gauge replacements for gas cabinets
In-Reply-To: <543D36AD.6000700@stanford.edu>
References: <CAKzi2_MY-BTwQxN9yCt5oOUXcBbTJ0W2Kts-wPaMkv7Cw8gC4g@mail.gmail.com>
 <543D36AD.6000700@stanford.edu>
Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2E011F3472@P3PWEX2MB006.ex2.secureserver.net>

Just to follow up on the discussion points that John made.

Air Products previously used Span's Indicating Pressure Switches and Transmitters with their GG450 and GG250 gas cabinets, rack units and VMBs. The measurement units were all in PSIG and for the transmitters, their output was 4-20mA. Excitation voltage was 11.5+ to 28 VDC. I don't remember any connection from Span other than Lower Mount and Center Back VCR or NPT. All of the pressure measurement devices used by Air Products from the GG450 to the latest AP10 and AP11 systems, all use the AMP style connector, which plugs into their AMP box. We add these connectors with all the electrical devices we put into their systems.

Span had an interesting run. For all who care, they actually spun off their liquid filled division to the Thuemling Group who provides gauges for most of the fire trucks made. The UHP division was private labeled by the tubing manufacturer Cardinal UHP back in the late 90s, and then sold to Mykrolis years ago. Mykrolis sold to Celerity, who continued with the MFCs, but pretty much ignored the pressure measurement side. Celerity sold to Brooks, who has taken an interest in the line and now somewhat produce it for sale. Kind of sad since Span was the premier brand back in the late 80's through mid-90's.

For switches today, we use the Wika 230-15 series as they are kind of the sole survivor in this market. http://wika.us/230_15w_851_3_en_us.WIKA  The indicating transmitter is the one that Dennis refers to. Ametek previously made the IPS and IPT indicating switches and gauges, but they ran into issues with the sensor and told me a little over a year ago that this wasn't high on their priority list anymore.

For transducers, we use the MKS 870 that John referred to, the Setra 225G or the Wika WUC-10. These are all PSIA for the readout and 4-20 mA. Excitation voltage is still the 11.5+ to 28 VDC.

Air Products originally went with all flow-through transducers with the thought that they could minimize surface area and eliminate a connection by staying away from the dead leg style transducers, but that produced an issue with maintainability if the transducer went bad. They also has problems with the strain gauges due to how the manufacturer had to build the body. Delamination and torque problems plagued Span and other manufacturers back in the 90's. Today Air Products, and CSI, go with dead leg style transducers, as they are easy to service and extremely reliable.

I hope this was on interest and helped.

Best to all,

Tom

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208-890-1417
Office: 877-572-5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

[logo for email signature png]



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of John Shott
Sent: Tuesday, October 14, 2014 8:44 AM
To: Dennis Schweiger; Gregg Cure
Cc: Fab Network
Subject: Re: [labnetwork] Span gauge replacements for gas cabinets

Gregg:

I agree with Dennis that Tom Britton of Critical Systems will be a valuable resource ... they know Air Products cabinets forwards and backwards.

We have a handful of older Air Products GS500 cabinets.  They are equipped with MKS pressure transducers.  I think that both Wika and MKS (and others, I'm sure) have been producing pressure transducers for uses like this for a long time.

Pending more detailed information from Tom Britton, there are a few things that you will need to try to match when looking for a replacement transducer ... and all pressure transducer manufactures including Wika, MKS, and others offer a dizzying array of part numbers and options.

The things that you will need to match include:

1. Power supply voltage.  Most commonly +24VDC.

2. Output signal: 4-20 mA is probably most common, but some systems use 0-5VDC or even 0-10VDC.

3. Compound or "normal" gauge.  In other words, does the gauge go from 0 PSIA or 0 PSIG to maximum pressure reading.  Many cabinets that have vacuum generators will use compound gauges to be able to measure down to 0 PSIA (-14.73 PSIG) ... but your gauge has to put out what the controller is expecting.

4. Electrical connector or "flying leads" to match what is already in your cabinet.

5. Flow through or single-ended.

6. Weld joint or VCR.

7. Particularly for your silane cabinets, do you need gauges that are Class 1/Div 2 rated?  That is, they can't induce an explosion in the event of a leak.

Also, some manufacturers offer a built-in readout if you want to be able to see a pressure reading where you currently have an analog gauge.

If he doesn't chime in on his own, send me email and I'll give you Tom Britton's contact information: he will likely be able to short-circuit much of your search and provide you with lots of good, specific information.

Let me know if you have any further questions,

John
On 10/14/2014 2:54 AM, Dennis Schweiger wrote:
Gregg,

I'd talk to Tom Britton of Critical Systems.  He's on this site, and is a regular contributor.  They have also refurbished "older" Air Products gas cabinets for me.  I would expect them to have spares, or could at least point you in the correct direction.  The "Span" name has been bought and sold so many times, I'm not sure what banner they're being offered under now.

I took a look at one of our gas cabinets, we're using a WIKA guage, similar to this;
http://wika.us/PGT23_063UHP_en_us.WIKA

Take care,

DennisSchweiger
University of Michigan/LNF

734.647.2055 Ofc

On Mon, Oct 13, 2014 at 1:46 PM, Gregg Cure <gregg.cure at gmail.com<mailto:gregg.cure at gmail.com>> wrote:
Hello,
We have older (circa 1992) Air Products GasGuard GG450 single and dual controller gas cabinets.
We are using them for SiH4, DCS, PH3 balance SiH4 for various LPCVD processes.

The Span pressure gauges in the pigtails and VMBs are showing their age and a few of them have failed, or are no longer able to be calibrated. These gauge transducers are either in the own weldments connected to the lines or connected to the lines via VCRs. One gauge is an analog visual unit on the secondary side of the regulator with an integral transducer that sends a signal to the controller.

It seems that Span is no longer a viable entity. Does anyone know of a 3rd party company that sources replacements for these transducers?

Thanks,
Gregg Cure`

--
Gregg D. Cure`
The University of Arizona
Arizona Research Laboratories
Nano Fabrication and Processing Center
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987<tel:520.626.1987>
Cell: 520.307.2760<tel:520.307.2760>
Fax: 520.626.7877<tel:520.626.7877>
Website: http://mfc.engr.arizona.edu
Website: http://www.arl.arizona.edu/

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork





_______________________________________________

labnetwork mailing list

labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From kamal.yadav at gmail.com  Fri Oct 17 07:36:35 2014
From: kamal.yadav at gmail.com (Kamal Yadav)
Date: Fri, 17 Oct 2014 17:06:35 +0530
Subject: [labnetwork] Metal Targets Final thickness
Message-ID: <CAOfoCygJKXFtLwpXMmVMZRVZiHGmAqiaFfQJk_oybrxng1Dz3Q@mail.gmail.com>

Dear All,

Please let me know how do you know when you need to replace your metal
targets in a sputtering system. In a recent incident, we went little too
far may be and the back material [Cu] got sputtered and contaminated the
chamber. We have 4" and 2" round targets where a inner ring forms, which is
the thinnest.

If you follow any policy or methodology that would be great to know.

-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
IITBNF, EE Department, Annexe,
IIT Bombay, Powai
Mumbai 400076
Internal: 4435
Cell: 7506144798
Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in
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From codreanu at udel.edu  Fri Oct 17 11:21:50 2014
From: codreanu at udel.edu (Iulian Codreanu)
Date: Fri, 17 Oct 2014 11:21:50 -0400
Subject: [labnetwork] Process Engineer positions at Delaware
Message-ID: <5441340E.5010207@udel.edu>

Dear Lab Network,

UDNF has two process engineer openings; I am writing to kindly ask for 
your help in spreading the word.

UDNF is a new facility and will be outfitted with new process 
equipment.  The start date for the positions is February 2015.

The University of Delaware is an Equal Opportunity Employer which 
encourages applications from Minority Group Members, Women, Individuals 
with Disabilities and Veterans.

I attached a flyer for the positions; details are available on UD Jobs 
(Job ID: 102449):
http://www.udel.edu/udjobs/

Thank you very much for your help.

Iulian

-- 
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
Office: 163 ISE Lab
Mail to: 250N ISE Lab
Ship to: 165 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784

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From sgupta at eng.ua.edu  Fri Oct 17 12:24:21 2014
From: sgupta at eng.ua.edu (Gupta, Su)
Date: Fri, 17 Oct 2014 11:24:21 -0500
Subject: [labnetwork] Metal Targets Final thickness
In-Reply-To: <CAOfoCygJKXFtLwpXMmVMZRVZiHGmAqiaFfQJk_oybrxng1Dz3Q@mail.gmail.com>
References: <CAOfoCygJKXFtLwpXMmVMZRVZiHGmAqiaFfQJk_oybrxng1Dz3Q@mail.gmail.com>
Message-ID: <1B53C0DED5D00E40A81DF47DBF6A3DCB042BFC83B290@MAIL1.ua-net.ua.edu>

Dear Kamal:

You can measure the erosion groove with a depth gauge to see how close it is getting to punch-through. Otherwise you have to go by experience on the number of kilowatt-hours for a particular target and cathode type. When it is getting close to punch-through, you can observe the plasma, which will change to bright blue when you start sputtering copper. You should bond your tagets to a copper backing plate so that you avoid sputtering the target.

Best wishes,
Su Gupta

Dr. Subhadra Gupta
Director, UA Micro-Fabrication Facility
Professor, Metallurgical and Materials Engineering
Adjunct, Electrical and Computer Engineering
University of Alabama
Tuscaloosa, AL 35487
sgupta at eng.ua.edu<mailto:sgupta at eng.ua.edu>
(205) 348-4272

________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav [kamal.yadav at gmail.com]
Sent: Friday, October 17, 2014 6:36 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Metal Targets Final thickness

Dear All,

Please let me know how do you know when you need to replace your metal targets in a sputtering system. In a recent incident, we went little too far may be and the back material [Cu] got sputtered and contaminated the chamber. We have 4" and 2" round targets where a inner ring forms, which is the thinnest.

If you follow any policy or methodology that would be great to know.

--
Thanks,
Kamal Yadav
Sr. Process Technologist
IITBNF, EE Department, Annexe,
IIT Bombay, Powai
Mumbai 400076
Internal: 4435
Cell: 7506144798
Email: kamal.yadav at gmail.com<mailto:kamal.yadav at gmail.com>, kamalyadav at ee.iitb.ac.in<mailto:kamalyadav at ee.iitb.ac.in>



From rmorrison at draper.com  Fri Oct 17 12:24:18 2014
From: rmorrison at draper.com (Morrison, Richard H., Jr.)
Date: Fri, 17 Oct 2014 16:24:18 +0000
Subject: [labnetwork] Metal Targets Final thickness
In-Reply-To: <CAOfoCygJKXFtLwpXMmVMZRVZiHGmAqiaFfQJk_oybrxng1Dz3Q@mail.gmail.com>
References: <CAOfoCygJKXFtLwpXMmVMZRVZiHGmAqiaFfQJk_oybrxng1Dz3Q@mail.gmail.com>
Message-ID: <D3862732F46DEB4B93B4A7A80614D28868F730A1@mbx2.draper.com>

At Draper we do the following:

Take a surface profile of the target during installation, note target material thickness.
Keep a log of voltage and current for every run (DC Mag only)
As the target depth changes the voltage on the target compensates to keep the current set.
One per qtr we open the tool and do a surface profile and estimate the physical thickness left.
If you have been logging your deposition runs and thickness you can then estimate how many depositions you have left.

It is always best to pull the target early, because if you break through you sputter the bonding agent all over the chamber and your wafers and then you have a big mess to cleanup. Most bonding agents are indium based and that it tough to cleanup.

Hope this helps,

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav
Sent: Friday, October 17, 2014 7:37 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Metal Targets Final thickness

Dear All,

Please let me know how do you know when you need to replace your metal targets in a sputtering system. In a recent incident, we went little too far may be and the back material [Cu] got sputtered and contaminated the chamber. We have 4" and 2" round targets where a inner ring forms, which is the thinnest.

If you follow any policy or methodology that would be great to know.

--
Thanks,
Kamal Yadav
Sr. Process Technologist
IITBNF, EE Department, Annexe,
IIT Bombay, Powai
Mumbai 400076
Internal: 4435
Cell: 7506144798
Email: kamal.yadav at gmail.com<mailto:kamal.yadav at gmail.com>, kamalyadav at ee.iitb.ac.in<mailto:kamalyadav at ee.iitb.ac.in>
________________________________
Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
________________________________
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From mtang at stanford.edu  Fri Oct 17 21:02:08 2014
From: mtang at stanford.edu (Mary Tang)
Date: Fri, 17 Oct 2014 18:02:08 -0700
Subject: [labnetwork] New positions at the Stanford Nanofabrication Facility
Message-ID: <5441BC10.7000602@stanford.edu>

Dear Labnetwork --

I'm following Iulian's lead in asking for your help in getting the word 
out about new positions we have just opened at SNF.  We would like to 
hire a Maintenance/Lab Facilities Manager and two Senior Engineers.  
These new staff members will not only be responsible for existing 
cleanroom operations, but also will help to define shared experimental 
research infrastructure needs at Stanford for the future.  I've attached 
the job descriptions here.  Please feel free to distribute.  And if 
anyone has any questions about these positions, they can contact me.

Many thanks for your attention!

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Bldg 141, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu

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From xiaojin.wang at louisville.edu  Sat Oct 18 11:26:44 2014
From: xiaojin.wang at louisville.edu (xiaojin.wang at louisville.edu)
Date: Sat, 18 Oct 2014 15:26:44 +0000
Subject: [labnetwork] vacuum sensor
Message-ID: <CF113F25F8FC0042A04B3BFE8AA6260261C6594C@EXMBX10.ad.louisville.edu>

Dear all,

 

We have a PBR 260 compact full range BA gauge from pfeiffer installed on Kurt lesker e-beam system. The hot cathode filament burnt out so it can not measure the vacuum lower than 10^-2 torr. I want to repair it. Can you suggest a third party company that can provide this service? Thank you.

 

Best wishes

Xiaojin Wang

Senior MNTC process engineer
Micro/nano technology center
University of Louisville
________________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Mary Tang [mtang at stanford.edu]
Sent: Friday, October 17, 2014 9:02 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] New positions at the Stanford Nanofabrication Facility

Dear Labnetwork --

I'm following Iulian's lead in asking for your help in getting the word
out about new positions we have just opened at SNF.  We would like to
hire a Maintenance/Lab Facilities Manager and two Senior Engineers.
These new staff members will not only be responsible for existing
cleanroom operations, but also will help to define shared experimental
research infrastructure needs at Stanford for the future.  I've attached
the job descriptions here.  Please feel free to distribute.  And if
anyone has any questions about these positions, they can contact me.

Many thanks for your attention!

Mary

--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Bldg 141, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From khbeis at uw.edu  Tue Oct 21 10:43:47 2014
From: khbeis at uw.edu (Michael Khbeis)
Date: Tue, 21 Oct 2014 07:43:47 -0700
Subject: [labnetwork] Recruiting - On-site Field Service Engineer
Message-ID: <CA0FADC3-DC96-4236-A58B-A0FF4F05ACD3@uw.edu>

Dear Lab Network Colleagues, 

We have an immediate opening for a full-time on-site FSE. Prefer experience on vacuum systems and electronics troubleshooting. Gas piping and chemical safety experience is also desired. If you know of anyone looking to relocate to beautiful Seattle, please forward them my contact info. 

Most gratefully, 

Dr. Michael Khbeis
Associate Director, Washington Nanofabrication Facility (WNF) 
National Nanotechnology Infrastructure Network (NNIN)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
www.wnf.washington.edu/






From schweig at umich.edu  Wed Oct 22 10:57:04 2014
From: schweig at umich.edu (Dennis Schweiger)
Date: Wed, 22 Oct 2014 10:57:04 -0400
Subject: [labnetwork] Knife edge flange pressure application
Message-ID: <CAKzi2_MPbqb1VeE-URwM_asNe+aAq=k3p1tBQuKAjCeyfwRTCQ@mail.gmail.com>

Good morning all,

Is anyone out there using a standard vacuum style knife-edge flange
(Conflat), in a pressure delivery application?  If so, I'd be interested to
hear your application, as well as any information you might have in regard
to certifying the usage for system integrity.

Many years ago, I designed some vacuum chambers that had to have a 150PSI
pressure rating as a process safety, and we used knife-edge flanges on the
chamber.  The knife-edge flanges were then certified as part of the
pressure vessel rating on the entire vacuum chamber.  The application I
have now is strictly flange related, they're not part of a larger system.

Thanks,

DennisSchweiger
University of Michigan/LNF

734.647.2055 Ofc
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From jdeng at cns.fas.harvard.edu  Wed Oct 22 16:24:04 2014
From: jdeng at cns.fas.harvard.edu (Deng, Jiangdong)
Date: Wed, 22 Oct 2014 20:24:04 +0000
Subject: [labnetwork] New position of pricipal RIE process engineer in CNS
	-Harvard
Message-ID: <03BE224832F7D64A86F3D080E282DDD7ACC5A97C@HARVANDMBX06.fasmail.priv>

Hi, Dear Labnetwork --

CNS at Harvard has an opening available now for a principal scientist/engineer position, mainly on dry etching and nanofabrication process development. Yes, we are looking for somebody who has intensive experience on the dry etching process.  Please find more detailed job descriptions in the attachment. It would be highly appreciated if you can distribute it around and give us some recommendation! 

 Please feel free to contact me if anyone has any question about this position.

Best regards!

-JD

Jiangdong (JD) Deng, Ph. D
Senior Principal Scientist, 
Manager for Nanofabrication Facility 
Center for Nanoscale Systems 
Harvard University
Tel: 617-495-3396 (office)
Web: www.cns.fas.harvard.edu
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From matthieu.nannini at mcgill.ca  Wed Oct 22 17:39:30 2014
From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.)
Date: Wed, 22 Oct 2014 21:39:30 +0000
Subject: [labnetwork] monitoring gas cylinder weights
Message-ID: <DA245897-DC92-4EBF-8C2C-E0542B977918@mcgill.ca>

Colleagues:

Would anyone be able to recommend an easy-to-deploy solution to monitor weights of liquified gas cylinder and send the data on a server for email notification or equivalent ?

Thanks

Matthieu


-----------------------------------
Matthieu Nannini
McGill Nanotools Microfab
Manager
t: 514 398 3310
c: 514 758 3311
f: 514 398 8434
http://mnm.physics.mcgill.ca/
------------------------------------

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From tbritton at criticalsystemsinc.com  Wed Oct 22 18:14:26 2014
From: tbritton at criticalsystemsinc.com (Tom Britton)
Date: Wed, 22 Oct 2014 22:14:26 +0000
Subject: [labnetwork] monitoring gas cylinder weights
In-Reply-To: <DA245897-DC92-4EBF-8C2C-E0542B977918@mcgill.ca>
References: <DA245897-DC92-4EBF-8C2C-E0542B977918@mcgill.ca>
Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2E011F8AAD@P3PWEX2MB006.ex2.secureserver.net>

Hello Matthieu,

Aside from a gas cabinet which has these features, a cheap and easy solution is offered by Arlyn Scales. See this link: http://www.arlynscales.com/Cylinder-Scales-for-Cylinders-Pails-and-Tanks-p/cylinder-scale.htm They offer a scale with a digital readout with options for Ethernet communications.

Any question, let me know.

Best to you sir,

Tom

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208-890-1417
Office: 877-572-5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

[logo for email signature png]



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr.
Sent: Wednesday, October 22, 2014 3:40 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] monitoring gas cylinder weights

Colleagues:

Would anyone be able to recommend an easy-to-deploy solution to monitor weights of liquified gas cylinder and send the data on a server for email notification or equivalent ?

Thanks

Matthieu

-----------------------------------
Matthieu Nannini
McGill Nanotools Microfab
Manager
t: 514 398 3310
c: 514 758 3311
f: 514 398 8434
http://mnm.physics.mcgill.ca/
------------------------------------

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From spaolini at cns.fas.harvard.edu  Thu Oct 23 10:14:27 2014
From: spaolini at cns.fas.harvard.edu (Paolini, Steven)
Date: Thu, 23 Oct 2014 14:14:27 +0000
Subject: [labnetwork] Knife edge flange pressure application
In-Reply-To: <CAKzi2_MPbqb1VeE-URwM_asNe+aAq=k3p1tBQuKAjCeyfwRTCQ@mail.gmail.com>
References: <CAKzi2_MPbqb1VeE-URwM_asNe+aAq=k3p1tBQuKAjCeyfwRTCQ@mail.gmail.com>
Message-ID: <A806238C0992094FBF9298E5D90F5489B02134E5@HARVANDMBX01.fasmail.priv>

Dennis,
In my humble opinion, I would refer to ASME for any pressure related component use, they are quite particular in their specifying of vessels and components.

Steve Paolini
Equipment dood
Harvard University Center for Nanoscale Systems.

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dennis Schweiger
Sent: Wednesday, October 22, 2014 10:57 AM
To: Fab Network
Subject: [labnetwork] Knife edge flange pressure application

Good morning all,

Is anyone out there using a standard vacuum style knife-edge flange (Conflat), in a pressure delivery application?  If so, I'd be interested to hear your application, as well as any information you might have in regard to certifying the usage for system integrity.

Many years ago, I designed some vacuum chambers that had to have a 150PSI pressure rating as a process safety, and we used knife-edge flanges on the chamber.  The knife-edge flanges were then certified as part of the pressure vessel rating on the entire vacuum chamber.  The application I have now is strictly flange related, they're not part of a larger system.

Thanks,

DennisSchweiger
University of Michigan/LNF

734.647.2055 Ofc
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From xiaojin.wang at louisville.edu  Thu Oct 23 11:07:34 2014
From: xiaojin.wang at louisville.edu (xiaojin.wang at louisville.edu)
Date: Thu, 23 Oct 2014 15:07:34 +0000
Subject: [labnetwork] e-beam deposition of cobalt
Message-ID: <CF113F25F8FC0042A04B3BFE8AA6260261C69BDF@EXMBX10.ad.louisville.edu>

Dear colleagues:

One user requests a cobalt deposition in e-beam. Have any of you done this before in your lab? Does it have any negative effect on the system? Thank you.

Best wishes
Xiaojin Wang
Senior process engineer
Micro/nano technology center
University of Louisville
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From integralfrom0to1 at gmail.com  Thu Oct 23 13:05:03 2014
From: integralfrom0to1 at gmail.com (Jay Vincent)
Date: Thu, 23 Oct 2014 13:05:03 -0400
Subject: [labnetwork] e-beam deposition of cobalt
In-Reply-To: <52314be17d614f4aa26909edab2576b3@CIO-TNC-HT05.osuad.osu.edu>
References: <52314be17d614f4aa26909edab2576b3@CIO-TNC-HT05.osuad.osu.edu>
Message-ID: <CAEhRgktqQq0cxChTagZhBpE++Lzz+=m5V4fmKKdF+-v+f0184A@mail.gmail.com>

You need to be very careful how quickly you let cobalt warm up and cool
down in the machine, otherwise it has a tendency to fracture and spit
pieces into the machine and other pockets with other materials loaded.

Regards,

Jay DeLombard
Nanotech West OSSIP
The Ohio State University




On Thu, Oct 23, 2014 at 11:07 AM, xiaojin.wang at louisville.edu <
xiaojin.wang at louisville.edu> wrote:

>  Dear colleagues:
>
>
>
> One user requests a cobalt deposition in e-beam. Have any of you done this
> before in your lab? Does it have any negative effect on the system? Thank
> you.
>
>
>
> Best wishes
>
> Xiaojin Wang
>
> Senior process engineer
>
> Micro/nano technology center
>
> University of Louisville
>
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From lubelski at purdue.edu  Thu Oct 23 19:54:47 2014
From: lubelski at purdue.edu (Lubelski, David A)
Date: Thu, 23 Oct 2014 23:54:47 +0000
Subject: [labnetwork] e-beam deposition of cobalt
In-Reply-To: <CF113F25F8FC0042A04B3BFE8AA6260261C69BDF@EXMBX10.ad.louisville.edu>
References: <CF113F25F8FC0042A04B3BFE8AA6260261C69BDF@EXMBX10.ad.louisville.edu>
Message-ID: <8FB0F707-80F1-4094-9877-A7A4A44BF262@purdue.edu>

Xiaojin,
We have been using Cobalt in an e-beam for about 5 years. When first heating, we do it in manual mode to slowly heat the material. After the first heating, use two rise/soak cycles and it works very well. We do use it in a system predominately used for magnetic materials, so we have no problems. If you would like our recipe, email me and I'll send it your way.
Dave Lubelski
Research Engineer
Birck Nanotechnology Center
Purdue University

Sent from my iPad

On Oct 23, 2014, at 11:56 AM, "xiaojin.wang at louisville.edu<mailto:xiaojin.wang at louisville.edu>" <xiaojin.wang at louisville.edu<mailto:xiaojin.wang at louisville.edu>> wrote:

Dear colleagues:

One user requests a cobalt deposition in e-beam. Have any of you done this before in your lab? Does it have any negative effect on the system? Thank you.

Best wishes
Xiaojin Wang
Senior process engineer
Micro/nano technology center
University of Louisville
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From codreanu at udel.edu  Fri Oct 24 13:41:08 2014
From: codreanu at udel.edu (Iulian Codreanu)
Date: Fri, 24 Oct 2014 13:41:08 -0400
Subject: [labnetwork] Paging system
Message-ID: <544A8F34.6030807@udel.edu>

Dear Colleagues,

I would like to not allow cell phone use in the Delaware cleanroom; I 
recall a long thread on this forum with various opinions on this topic.  
Since I would very much like for my customers to be in touch with the 
outside world while in the cleanroom, I have been trying to develop a 
paging system that would work with the VOIP phone system.

The many pieces of the puzzle are coming together but I am struggling 
answering a basic question posed by the "speaker guy": how noisy will 
your cleanroom be?  That's a tough one because I will not know for a 
number of years until the cleanroom is filled with equipment.

I would like to get an idea of how noisy fully operational cleanrooms 
are (both the bay and chase areas).  Would you please share your knowledge?

Thank you very much!

Iulian

-- 
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
Office: 163 ISE Lab
Mail to: 250N ISE Lab
Ship to: 165 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784




From hathaway at cns.fas.harvard.edu  Sat Oct 25 10:43:13 2014
From: hathaway at cns.fas.harvard.edu (Hathaway, Malcolm)
Date: Sat, 25 Oct 2014 14:43:13 +0000
Subject: [labnetwork] Paging system
In-Reply-To: <544A8F34.6030807@udel.edu>
References: <544A8F34.6030807@udel.edu>
Message-ID: <A1DD3F105DE57E4CBD0ECD582DF03E990118AD4B39@HARVANDMBX01.fasmail.priv>

Hi Iulian,

At Harvard CNS we have a PA system, which includes a small signal amp.  It is quite audible in all the bays (one speaker per bay).  We tried out "talk back" speakers, which allow you to converse with cleanroom occupants.  However, since these are not full-duplex (i.e. you can't both be talking at the same time) and they are voice/sound activated at the cleanroom-end, we had the problem of ambient cleanroom noise triggering the "talk back" end during incoming speech, breaking up the incoming speech and making it pretty much un-listenable.  So we opted for one-way speakers, and use the bay phones for two-way communication.  The problem was worst in the plasma equipment bay, with all the various pumps running, as one might expect.  In the quieter bays (metrology, etc) the talk-back units worked okay.

I don't have dB numbers.

We have not noticed a problem with cell-phone usage in our cleanroom, either electromagnetically or particle-wise.  Potential problems may be limited by the fact that only Verizon cellphones will work down there (we have a Verizon repeater on that level.)


Mac
Harvard CNS

________________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Iulian Codreanu [codreanu at udel.edu]
Sent: Friday, October 24, 2014 1:41 PM
To: Fab Network
Subject: [labnetwork] Paging system

Dear Colleagues,

I would like to not allow cell phone use in the Delaware cleanroom; I
recall a long thread on this forum with various opinions on this topic.
Since I would very much like for my customers to be in touch with the
outside world while in the cleanroom, I have been trying to develop a
paging system that would work with the VOIP phone system.

The many pieces of the puzzle are coming together but I am struggling
answering a basic question posed by the "speaker guy": how noisy will
your cleanroom be?  That's a tough one because I will not know for a
number of years until the cleanroom is filled with equipment.

I would like to get an idea of how noisy fully operational cleanrooms
are (both the bay and chase areas).  Would you please share your knowledge?

Thank you very much!

Iulian

--
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
Office: 163 ISE Lab
Mail to: 250N ISE Lab
Ship to: 165 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784


_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork



From jnicholson at research.umass.edu  Mon Oct 27 13:56:35 2014
From: jnicholson at research.umass.edu (John Nicholson)
Date: Mon, 27 Oct 2014 13:56:35 -0400
Subject: [labnetwork] Paging system
In-Reply-To: <A1DD3F105DE57E4CBD0ECD582DF03E990118AD4B39@HARVANDMBX01.fasmail.priv>
References: <544A8F34.6030807@udel.edu>
 <A1DD3F105DE57E4CBD0ECD582DF03E990118AD4B39@HARVANDMBX01.fasmail.priv>
Message-ID: <1414432595.27764.85.camel@nanobox>

Iulian,

	We have a "ring down" phone installed by the clean room entry that
rings a phone in the relatively quiet interior access corridor as soon
it's picked up. Anyone can use the interior phone to make local calls
(i.e. my office) or LD calls if they have an access code and the
interior phone can also be called from any other phone. The facility is
small enough (~1500 SF) so that the phone can be heard from any of the
user bays despite the pump and HVAC sound level. The only drawback to
this arrangement is that our number is one digit off from the campus
Financial Aid office and I get too many wrong number calls from parents
who should be wearing their reading glasses.
	The initial plan was to use the AXIS networked cameras in the clean
room bays as an intercom with video via my office computer. However when
I asked for equipment recommendations from the campus police (they were
the only ones with video monitoring on campus at that time), I was told
to contact the campus legal office before implementing any audio/video
monitoring. After six months or so I finally got the legal opinion that
having the ability to control an audio feed without the lab users
knowledge from my office violated Massachusetts privacy laws (even if
lab users signed a consent form). Cameras were installed without
intercom ability. A video intercom may not have this restriction in your
location (and it may no longer be an issue in Massachusetts).
	In one of our chase areas, any intercom without some kind of noise
cancellation would be difficult due to pump noise.


Regards,

-- 
John Nicholson
Nanofabrication Laboratories Manager
MassNanoTech Nanofabrication Facility
Conte Center for Polymer Research, Rm. B111
University of Massachusetts/Amherst
120 Governor's Drive
Amherst, MA 01003-9305
Phone: 413-545-2772
Fax: 413-577-0165
http://nano.pse.umass.edu/
http://chm.pse.umass.edu/



P.S. My initial post - I've been following the list postings with great
interest for a while so I thought I'd make an attempt to contribute.




> ________________________________________
> From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Iulian Codreanu [codreanu at udel.edu]
> Sent: Friday, October 24, 2014 1:41 PM
> To: Fab Network
> Subject: [labnetwork] Paging system
> 
> Dear Colleagues,
> 
> I would like to not allow cell phone use in the Delaware cleanroom; I
> recall a long thread on this forum with various opinions on this topic.
> Since I would very much like for my customers to be in touch with the
> outside world while in the cleanroom, I have been trying to develop a
> paging system that would work with the VOIP phone system.
> 
> The many pieces of the puzzle are coming together but I am struggling
> answering a basic question posed by the "speaker guy": how noisy will
> your cleanroom be?  That's a tough one because I will not know for a
> number of years until the cleanroom is filled with equipment.
> 
> I would like to get an idea of how noisy fully operational cleanrooms
> are (both the bay and chase areas).  Would you please share your knowledge?
> 
> Thank you very much!
> 
> Iulian
> 
> --
> iulian Codreanu, Ph.D.
> Director of Operations, UD NanoFab
> University of Delaware
> Office: 163 ISE Lab
> Mail to: 250N ISE Lab
> Ship to: 165 ISE Lab
> 221 Academy Street
> Newark, DE 19716
> 302-831-2784
> 
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork






From shott at stanford.edu  Tue Oct 28 10:47:40 2014
From: shott at stanford.edu (John Shott)
Date: Tue, 28 Oct 2014 07:47:40 -0700
Subject: [labnetwork] Paging system
In-Reply-To: <544A8F34.6030807@udel.edu>
References: <544A8F34.6030807@udel.edu>
Message-ID: <544FAC8C.70801@stanford.edu>

Iulian:

I've dug up our Sound Level Meter (the best that Radio Shack has to 
offer ...) and have made a few measurements to provide you with some 
example numbers.  Note: my measurements were made using the dB(C) 
frequency compensation ... although I will give you a couple of 
references using dB(A) frequency compensation.

In general, clean rooms are pretty noisy.  Just the noise of the air 
handling equipment can be significant.  In fact, about 3 years ago we 
dropped our mean vertical air velocity from about 90 to about 70 feet 
per minute.  At the time, everyone commented on the fact that it was 
quieter in the clean room.  That said, even with lower air velocities, I 
could only find one area of our lab that had a reading of less that 60 
dB(C).  That was the room in which our Raith 150 ebeam tool is located 
and it registered 53-55 db(C).
The next two quietest rooms were an in-process measurement room (AFM and 
friends) coming in at about 60 db(C) and our gowning room at 61-62 db(C) 
and there is essentially no noisy equipment in either of those rooms.

Most areas of the lab with "real" process equipment in them registered 
in the range of 69-72 dB(C).  Note: most, but not all, of our pumps 
actually live in the sub-fab.  However, there are enough in-tool and 
near-tool pumps, fans, and other noise generators to increase sound 
levels significantly.

The two loudest areas of our lab are near a bank of LPCVD tubes that 
have their pumps in the cabinet, rather than in the sub-fab.  There we 
measured sound levels of 79-80 db(C).  Even though the pumps for our 
AMAT Centura epi reactor are in the sub-fab, sound level readings near 
that tool are about 74-76 dB(C).

Note:  our sub-fab is quite noisy with peak readings of about 86 dB(C) 
near the big scrubbers with average readings down there of about 82-83 
dB(C).

In areas dominated by equipment noise (which is most places in the clean 
room) and certainly in the sub-fab, I found that dB(A) readings were 
only about 2 dB lower than db(C) readings due to the fact, I suspect, 
that the noise of pumps and motors is dominated by higher-frequency 
components.  In an area with less equipment noise, however, I found that 
dB(A) readings were about 5 dB lower that the dB(C) reading at that 
location.

While I expect that there is significant variation from lab to lab in 
these numbers with, I suspect, newer labs being somewhat quieter, I 
think that it is reasonable to design for an average background sound 
level of about 70  dB(C) with some areas closer to equipment probably 
reaching as high as 80 dB(C).

As a bit of corroborating evidence, I believe that the folks who had 
tried to do various forms of video training and collaboration have found 
that using headphones and a microphone produce more understandable 
communication than relying on "field microphones".

Finally, we clearly did not spend much on our "sound level 
instrumentation package" ... in fact, while I haven't compared 
performance, I think that there are a collection of free apps for smart 
phones that are probably just as suitable for spot checks.

Let me know if you have any further questions,

John

On 10/24/2014 10:41 AM, Iulian Codreanu wrote:
> Dear Colleagues,
>
> I would like to not allow cell phone use in the Delaware cleanroom; I 
> recall a long thread on this forum with various opinions on this 
> topic.  Since I would very much like for my customers to be in touch 
> with the outside world while in the cleanroom, I have been trying to 
> develop a paging system that would work with the VOIP phone system.
>
> The many pieces of the puzzle are coming together but I am struggling 
> answering a basic question posed by the "speaker guy": how noisy will 
> your cleanroom be?  That's a tough one because I will not know for a 
> number of years until the cleanroom is filled with equipment.
>
> I would like to get an idea of how noisy fully operational cleanrooms 
> are (both the bay and chase areas).  Would you please share your 
> knowledge?
>
> Thank you very much!
>
> Iulian
>





From shott at stanford.edu  Tue Oct 28 11:34:29 2014
From: shott at stanford.edu (John Shott)
Date: Tue, 28 Oct 2014 08:34:29 -0700
Subject: [labnetwork] Knife edge flange pressure application
In-Reply-To: <A806238C0992094FBF9298E5D90F5489B02134E5@HARVANDMBX01.fasmail.priv>
References: <CAKzi2_MPbqb1VeE-URwM_asNe+aAq=k3p1tBQuKAjCeyfwRTCQ@mail.gmail.com>
 <A806238C0992094FBF9298E5D90F5489B02134E5@HARVANDMBX01.fasmail.priv>
Message-ID: <544FB785.8010709@stanford.edu>

Steve:

Thanks for your contributions to this list ... you are one of the 
regular posters here from whom I always learn something useful.

I think that your referral to ASME is exactly on target.  In fact, I 
found the following link that describes some of the issues and 
challenges associated with trying to use Conflat flanges in 
pressure-rated vessels:

http://mtm-inc.com/reduce_project_risk/asme_commercial_vacuum_flanges/

Dennis, it sounds as if Meyer Tool & Mfg might be a good source of 
information if you are looking at exploring this issue further.

Good luck,

John

On 10/23/2014 7:14 AM, Paolini, Steven wrote:
>
> Dennis,
>
> In my humble opinion, I would refer to ASME for any pressure related 
> component use, they are quite particular in their specifying of 
> vessels and components.
>
> Steve Paolini
>
> Equipment dood
>
> Harvard University Center for Nanoscale Systems.
>
> *From:*labnetwork-bounces at mtl.mit.edu 
> [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Dennis Schweiger
> *Sent:* Wednesday, October 22, 2014 10:57 AM
> *To:* Fab Network
> *Subject:* [labnetwork] Knife edge flange pressure application
>
> Good morning all,
>
> Is anyone out there using a standard vacuum style knife-edge flange 
> (Conflat), in a pressure delivery application?  If so, I'd be 
> interested to hear your application, as well as any information you 
> might have in regard to certifying the usage for system integrity.
>
> Many years ago, I designed some vacuum chambers that had to have a 
> 150PSI pressure rating as a process safety, and we used knife-edge 
> flanges on the chamber.  The knife-edge flanges were then certified as 
> part of the pressure vessel rating on the entire vacuum chamber.  The 
> application I have now is strictly flange related, they're not part of 
> a larger system.
>
> Thanks,
>
>
> DennisSchweiger
>
> University of Michigan/LNF
>
> 734.647.2055 Ofc
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From codreanu at udel.edu  Tue Oct 28 16:30:00 2014
From: codreanu at udel.edu (Iulian Codreanu)
Date: Tue, 28 Oct 2014 16:30:00 -0400
Subject: [labnetwork] Paging system
In-Reply-To: <544FAC8C.70801@stanford.edu>
References: <544A8F34.6030807@udel.edu> <544FAC8C.70801@stanford.edu>
Message-ID: <544FFCC8.8040300@udel.edu>

Thank you very much John!  As usual, very useful information coming from 
you!

iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
Office: 163 ISE Lab
Mail to: 250N ISE Lab
Ship to: 165 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784

On 10/28/2014 10:47 AM, John Shott wrote:
> Iulian:
>
> I've dug up our Sound Level Meter (the best that Radio Shack has to 
> offer ...) and have made a few measurements to provide you with some 
> example numbers.  Note: my measurements were made using the dB(C) 
> frequency compensation ... although I will give you a couple of 
> references using dB(A) frequency compensation.
>
> In general, clean rooms are pretty noisy.  Just the noise of the air 
> handling equipment can be significant.  In fact, about 3 years ago we 
> dropped our mean vertical air velocity from about 90 to about 70 feet 
> per minute.  At the time, everyone commented on the fact that it was 
> quieter in the clean room.  That said, even with lower air velocities, 
> I could only find one area of our lab that had a reading of less that 
> 60 dB(C).  That was the room in which our Raith 150 ebeam tool is 
> located and it registered 53-55 db(C).
> The next two quietest rooms were an in-process measurement room (AFM 
> and friends) coming in at about 60 db(C) and our gowning room at 61-62 
> db(C) and there is essentially no noisy equipment in either of those 
> rooms.
>
> Most areas of the lab with "real" process equipment in them registered 
> in the range of 69-72 dB(C).  Note: most, but not all, of our pumps 
> actually live in the sub-fab.  However, there are enough in-tool and 
> near-tool pumps, fans, and other noise generators to increase sound 
> levels significantly.
>
> The two loudest areas of our lab are near a bank of LPCVD tubes that 
> have their pumps in the cabinet, rather than in the sub-fab. There we 
> measured sound levels of 79-80 db(C).  Even though the pumps for our 
> AMAT Centura epi reactor are in the sub-fab, sound level readings near 
> that tool are about 74-76 dB(C).
>
> Note:  our sub-fab is quite noisy with peak readings of about 86 dB(C) 
> near the big scrubbers with average readings down there of about 82-83 
> dB(C).
>
> In areas dominated by equipment noise (which is most places in the 
> clean room) and certainly in the sub-fab, I found that dB(A) readings 
> were only about 2 dB lower than db(C) readings due to the fact, I 
> suspect, that the noise of pumps and motors is dominated by 
> higher-frequency components.  In an area with less equipment noise, 
> however, I found that dB(A) readings were about 5 dB lower that the 
> dB(C) reading at that location.
>
> While I expect that there is significant variation from lab to lab in 
> these numbers with, I suspect, newer labs being somewhat quieter, I 
> think that it is reasonable to design for an average background sound 
> level of about 70  dB(C) with some areas closer to equipment probably 
> reaching as high as 80 dB(C).
>
> As a bit of corroborating evidence, I believe that the folks who had 
> tried to do various forms of video training and collaboration have 
> found that using headphones and a microphone produce more 
> understandable communication than relying on "field microphones".
>
> Finally, we clearly did not spend much on our "sound level 
> instrumentation package" ... in fact, while I haven't compared 
> performance, I think that there are a collection of free apps for 
> smart phones that are probably just as suitable for spot checks.
>
> Let me know if you have any further questions,
>
> John
>
> On 10/24/2014 10:41 AM, Iulian Codreanu wrote:
>> Dear Colleagues,
>>
>> I would like to not allow cell phone use in the Delaware cleanroom; I 
>> recall a long thread on this forum with various opinions on this 
>> topic.  Since I would very much like for my customers to be in touch 
>> with the outside world while in the cleanroom, I have been trying to 
>> develop a paging system that would work with the VOIP phone system.
>>
>> The many pieces of the puzzle are coming together but I am struggling 
>> answering a basic question posed by the "speaker guy": how noisy will 
>> your cleanroom be?  That's a tough one because I will not know for a 
>> number of years until the cleanroom is filled with equipment.
>>
>> I would like to get an idea of how noisy fully operational cleanrooms 
>> are (both the bay and chase areas).  Would you please share your 
>> knowledge?
>>
>> Thank you very much!
>>
>> Iulian
>>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork




From schweig at umich.edu  Wed Oct 29 06:52:37 2014
From: schweig at umich.edu (Dennis Schweiger)
Date: Wed, 29 Oct 2014 06:52:37 -0400
Subject: [labnetwork] Paging system
Message-ID: <CAKzi2_PWJ3g-6CcnkchqfOjqxRSLSPo-FXBZYU=B7wAP-OcA5Q@mail.gmail.com>

Iulian,

years ago, here at UofM, we had a paging system.  It was OK at best.  When
we did the renovation/expansion back in 2006-2008, we took the head end out
as part of the construction (it was in the demolished room) project.  We
just figured we'd find a better technology to use.  We've looked at VOIP
systems, in fact we were hell bent to install one, and had the ITCOM guys
on board as well, until we talked to our Public Safety department.  They
wanted all phones on campus to be 911 compatible, meaning that each handset
had to have a distinct location to support 911.  A VOIP system at the time
couldn't provide that.  Flash forward to 2014, and we're still talking
about a paging system, but it doesn't have the same attraction it once
did.  We do allow cell phone use in the the fab, in fact we went as far as
installing a BDA for a specific carrier to make sure we get good coverage
throughout the fab, and service aisles.

As for the video camera systems, we ran into the same issues mentioned.
Video is OK as long as you post that you're monitoring, and you keep it to
what can be construed as public areas (not a gender specific room).
Video/voice is not acceptable as surveillance.  It's too intrusive,
violates privacy concerns, no matter what paperwork is signed off.

I've often joked, that I'd like to build one more fab in my career, to
"fix" all of the things that we didn't know, didn't understand, at the time
we built this one.

If you want to discuss video monitoring systems, give me a shout. We're
just wrapping up the install of a new one here that will provide for about
90-95% coverage of the entire fab area.  There are some nooks and crannies,
like between tools, that may still be "dark" spaces.  We will pick these up
when we add cameras at each of the head cases on the wet benches.

Dennis Schweiger
University of Michigan/LNF

734.647.2055 Ofc

On Fri, Oct 24, 2014 at 1:41 PM, Iulian Codreanu <codreanu at udel.edu> wrote:

> Dear Colleagues,
>
> I would like to not allow cell phone use in the Delaware cleanroom; I
> recall a long thread on this forum with various opinions on this topic.
> Since I would very much like for my customers to be in touch with the
> outside world while in the cleanroom, I have been trying to develop a
> paging system that would work with the VOIP phone system.
>
> The many pieces of the puzzle are coming together but I am struggling
> answering a basic question posed by the "speaker guy": how noisy will your
> cleanroom be?  That's a tough one because I will not know for a number of
> years until the cleanroom is filled with equipment.
>
> I would like to get an idea of how noisy fully operational cleanrooms are
> (both the bay and chase areas).  Would you please share your knowledge?
>
> Thank you very much!
>
> Iulian
>
> --
> iulian Codreanu, Ph.D.
> Director of Operations, UD NanoFab
> University of Delaware
> Office: 163 ISE Lab
> Mail to: 250N ISE Lab
> Ship to: 165 ISE Lab
> 221 Academy Street
> Newark, DE 19716
> 302-831-2784
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From schweig at umich.edu  Wed Oct 29 06:54:37 2014
From: schweig at umich.edu (Dennis Schweiger)
Date: Wed, 29 Oct 2014 06:54:37 -0400
Subject: [labnetwork] Knife edge flange pressure application
In-Reply-To: <544FB785.8010709@stanford.edu>
References: <CAKzi2_MPbqb1VeE-URwM_asNe+aAq=k3p1tBQuKAjCeyfwRTCQ@mail.gmail.com>
 <A806238C0992094FBF9298E5D90F5489B02134E5@HARVANDMBX01.fasmail.priv>
 <544FB785.8010709@stanford.edu>
Message-ID: <CAKzi2_MTdLVCBfryWUQ2q+W+LAS3dD5wXdEBk-GJn+AkZtbKeA@mail.gmail.com>

Thanks all for your input.

The Meyer Tool is a good lead. I'll give them a call. The pressure vessel
company I had used earlier has gone out of business.

Dennis

734.647.2055 Ofc

"People can be divided into 3 groups - those that make things happen, those
that watch things happen, and those that wonder what happened."  Within
which group do you belong?

On Tue, Oct 28, 2014 at 11:34 AM, John Shott <shott at stanford.edu> wrote:

>  Steve:
>
> Thanks for your contributions to this list ... you are one of the regular
> posters here from whom I always learn something useful.
>
> I think that your referral to ASME is exactly on target.  In fact, I found
> the following link that describes some of the issues and challenges
> associated with trying to use Conflat flanges in pressure-rated vessels:
>
> http://mtm-inc.com/reduce_project_risk/asme_commercial_vacuum_flanges/
>
> Dennis, it sounds as if Meyer Tool & Mfg might be a good source of
> information if you are looking at exploring this issue further.
>
> Good luck,
>
> John
>
> On 10/23/2014 7:14 AM, Paolini, Steven wrote:
>
>  Dennis,
>
> In my humble opinion, I would refer to ASME for any pressure related
> component use, they are quite particular in their specifying of vessels and
> components.
>
>
>
> Steve Paolini
>
> Equipment dood
>
> Harvard University Center for Nanoscale Systems.
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [
> mailto:labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu>] *On
> Behalf Of *Dennis Schweiger
> *Sent:* Wednesday, October 22, 2014 10:57 AM
> *To:* Fab Network
> *Subject:* [labnetwork] Knife edge flange pressure application
>
>
>
> Good morning all,
>
>
>
> Is anyone out there using a standard vacuum style knife-edge flange
> (Conflat), in a pressure delivery application?  If so, I'd be interested to
> hear your application, as well as any information you might have in regard
> to certifying the usage for system integrity.
>
>
>
> Many years ago, I designed some vacuum chambers that had to have a 150PSI
> pressure rating as a process safety, and we used knife-edge flanges on the
> chamber.  The knife-edge flanges were then certified as part of the
> pressure vessel rating on the entire vacuum chamber.  The application I
> have now is strictly flange related, they're not part of a larger system.
>
>
>
> Thanks,
>
>
>   DennisSchweiger
>
> University of Michigan/LNF
>
>
>
> 734.647.2055 Ofc
>
>
> _______________________________________________
> labnetwork mailing listlabnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
>
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From roberthamilton at berkeley.edu  Wed Oct 29 10:39:08 2014
From: roberthamilton at berkeley.edu (Bob Hamilton)
Date: Wed, 29 Oct 2014 07:39:08 -0700
Subject: [labnetwork] Paging system
In-Reply-To: <544FFCC8.8040300@udel.edu>
References: <544A8F34.6030807@udel.edu> <544FAC8C.70801@stanford.edu>
 <544FFCC8.8040300@udel.edu>
Message-ID: <5450FC0C.8030108@berkeley.edu>

A consideration for paging systems in a noisy environment with vaulted, 
cavernous space is the use of sound reinforcement rather than 
loudspeakers. A loudspeaker is typically a horn capable of high sound 
pressures. This results in echo and feedback in paging systems. Around 
the late 1960's Rudy Bozak came up with vertical arrays of speakers 
placed at close intervals to reinforce sound in concert halls. Each 
sound source was run at low power and covered a limited area. This 
reduced echos and feedback and gave better coverage. Similar solutions 
are now used for auditoriums, i.e. many individual speakers, placed at 
relatively close intervals and run at low volumes. We had good  results 
with this approach in adding paging to the UC Berkeley Microlab.

Bob Hamilton

-- 
Robert Hamilton
University of California at Berkeley
Marvell NanoLab
Equipment Eng. Mgr.
Room 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
bob at eecs.berkeley.edu
Phone: 510-809-8600
Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred



On 10/28/2014 1:30 PM, Iulian Codreanu wrote:
> Thank you very much John!  As usual, very useful information coming 
> from you!
>
> iulian Codreanu, Ph.D.
> Director of Operations, UD NanoFab
> University of Delaware
> Office: 163 ISE Lab
> Mail to: 250N ISE Lab
> Ship to: 165 ISE Lab
> 221 Academy Street
> Newark, DE 19716
> 302-831-2784
>
> On 10/28/2014 10:47 AM, John Shott wrote:
>> Iulian:
>>
>> I've dug up our Sound Level Meter (the best that Radio Shack has to 
>> offer ...) and have made a few measurements to provide you with some 
>> example numbers.  Note: my measurements were made using the dB(C) 
>> frequency compensation ... although I will give you a couple of 
>> references using dB(A) frequency compensation.
>>
>> In general, clean rooms are pretty noisy.  Just the noise of the air 
>> handling equipment can be significant.  In fact, about 3 years ago we 
>> dropped our mean vertical air velocity from about 90 to about 70 feet 
>> per minute.  At the time, everyone commented on the fact that it was 
>> quieter in the clean room.  That said, even with lower air 
>> velocities, I could only find one area of our lab that had a reading 
>> of less that 60 dB(C).  That was the room in which our Raith 150 
>> ebeam tool is located and it registered 53-55 db(C).
>> The next two quietest rooms were an in-process measurement room (AFM 
>> and friends) coming in at about 60 db(C) and our gowning room at 
>> 61-62 db(C) and there is essentially no noisy equipment in either of 
>> those rooms.
>>
>> Most areas of the lab with "real" process equipment in them 
>> registered in the range of 69-72 dB(C).  Note: most, but not all, of 
>> our pumps actually live in the sub-fab.  However, there are enough 
>> in-tool and near-tool pumps, fans, and other noise generators to 
>> increase sound levels significantly.
>>
>> The two loudest areas of our lab are near a bank of LPCVD tubes that 
>> have their pumps in the cabinet, rather than in the sub-fab. There we 
>> measured sound levels of 79-80 db(C).  Even though the pumps for our 
>> AMAT Centura epi reactor are in the sub-fab, sound level readings 
>> near that tool are about 74-76 dB(C).
>>
>> Note:  our sub-fab is quite noisy with peak readings of about 86 
>> dB(C) near the big scrubbers with average readings down there of 
>> about 82-83 dB(C).
>>
>> In areas dominated by equipment noise (which is most places in the 
>> clean room) and certainly in the sub-fab, I found that dB(A) readings 
>> were only about 2 dB lower than db(C) readings due to the fact, I 
>> suspect, that the noise of pumps and motors is dominated by 
>> higher-frequency components.  In an area with less equipment noise, 
>> however, I found that dB(A) readings were about 5 dB lower that the 
>> dB(C) reading at that location.
>>
>> While I expect that there is significant variation from lab to lab in 
>> these numbers with, I suspect, newer labs being somewhat quieter, I 
>> think that it is reasonable to design for an average background sound 
>> level of about 70  dB(C) with some areas closer to equipment probably 
>> reaching as high as 80 dB(C).
>>
>> As a bit of corroborating evidence, I believe that the folks who had 
>> tried to do various forms of video training and collaboration have 
>> found that using headphones and a microphone produce more 
>> understandable communication than relying on "field microphones".
>>
>> Finally, we clearly did not spend much on our "sound level 
>> instrumentation package" ... in fact, while I haven't compared 
>> performance, I think that there are a collection of free apps for 
>> smart phones that are probably just as suitable for spot checks.
>>
>> Let me know if you have any further questions,
>>
>> John
>>
>> On 10/24/2014 10:41 AM, Iulian Codreanu wrote:
>>> Dear Colleagues,
>>>
>>> I would like to not allow cell phone use in the Delaware cleanroom; 
>>> I recall a long thread on this forum with various opinions on this 
>>> topic.  Since I would very much like for my customers to be in touch 
>>> with the outside world while in the cleanroom, I have been trying to 
>>> develop a paging system that would work with the VOIP phone system.
>>>
>>> The many pieces of the puzzle are coming together but I am 
>>> struggling answering a basic question posed by the "speaker guy": 
>>> how noisy will your cleanroom be?  That's a tough one because I will 
>>> not know for a number of years until the cleanroom is filled with 
>>> equipment.
>>>
>>> I would like to get an idea of how noisy fully operational 
>>> cleanrooms are (both the bay and chase areas).  Would you please 
>>> share your knowledge?
>>>
>>> Thank you very much!
>>>
>>> Iulian
>>>
>>
>>
>>
>> _______________________________________________
>> labnetwork mailing list
>> labnetwork at mtl.mit.edu
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork




From Milan.Begliarbekov at asrc.cuny.edu  Fri Oct 31 12:15:05 2014
From: Milan.Begliarbekov at asrc.cuny.edu (Milan Begliarbekov)
Date: Fri, 31 Oct 2014 16:15:05 +0000
Subject: [labnetwork] Venting Tools with Building Nitrogen
Message-ID: <7EB621C923665D458D0ED5D9E722D7210C3C6070@EXPM5704.enterpriseapps.cuny.adlan>

Hi All,

At the moment we're trying to decide the purity / source of the nitrogen we will use to vent our tools. The building has a bulk nitrogen system that is plumbed to the clean room in copper pipes. Our clean room contractor believes that that nitrogen might be too dirty to use as a vent gas and recommends ultra pure nitrogen. I am wondering if anyone has thoughts on this matter. I believe that it is possible to get 99.998 % N2 out of copper pipes. Is that the case? If not are there purifiers / dryers that are commonly used? This is only a vent gas and not a process gas.

Any wisdom in this matter will be highly appreciated.

Best,

milan
Technical Cleanroom Manager
CUNY Advanced Science Research Center
Milan.Begliarbekov at asrc.cuny.edu
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From yglian at illinois.edu  Fri Oct 31 16:47:25 2014
From: yglian at illinois.edu (Lian, Yaguang)
Date: Fri, 31 Oct 2014 20:47:25 +0000
Subject: [labnetwork] Venting Tools with Building Nitrogen
In-Reply-To: <7EB621C923665D458D0ED5D9E722D7210C3C6070@EXPM5704.enterpriseapps.cuny.adlan>
References: <7EB621C923665D458D0ED5D9E722D7210C3C6070@EXPM5704.enterpriseapps.cuny.adlan>
Message-ID: <851B39526FEED74691E4131301DE17E51809C957@CITESMBX1.ad.uillinois.edu>

Milan,

I think 99.998% N2 is good enough to vent the tools. After a tool (mostly chamber) is vented by N2, we usually open it. And the tool (chamber) will be exposed to ambient air.  So the purity of N2 is not a big deal.

Regards,

Yaguang Lian

Research Engineer
2306 Micro and Nanotechnology Laboratory
University of Illinois at Urbana-Champaign
208 N. Wright St.
Urbana, IL 61801
Phone: 217-333-8051
Email: yglian at illinois.edu


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Milan Begliarbekov
Sent: 2014?10?31? 11:15
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Venting Tools with Building Nitrogen

Hi All,

At the moment we're trying to decide the purity / source of the nitrogen we will use to vent our tools. The building has a bulk nitrogen system that is plumbed to the clean room in copper pipes. Our clean room contractor believes that that nitrogen might be too dirty to use as a vent gas and recommends ultra pure nitrogen. I am wondering if anyone has thoughts on this matter. I believe that it is possible to get 99.998 % N2 out of copper pipes. Is that the case? If not are there purifiers / dryers that are commonly used? This is only a vent gas and not a process gas.

Any wisdom in this matter will be highly appreciated.

Best,

milan
Technical Cleanroom Manager
CUNY Advanced Science Research Center
Milan.Begliarbekov at asrc.cuny.edu<mailto:Milan.Begliarbekov at asrc.cuny.edu>
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From fouad.karouta at anu.edu.au  Fri Oct 31 18:10:34 2014
From: fouad.karouta at anu.edu.au (Fouad Karouta)
Date: Fri, 31 Oct 2014 22:10:34 +0000
Subject: [labnetwork] Venting Tools with Building Nitrogen
In-Reply-To: <7EB621C923665D458D0ED5D9E722D7210C3C6070@EXPM5704.enterpriseapps.cuny.adlan>
References: <7EB621C923665D458D0ED5D9E722D7210C3C6070@EXPM5704.enterpriseapps.cuny.adlan>
Message-ID: <890e2ef2b2024e019c76bfcb3deaf834@SIXPR06MB0447.apcprd06.prod.outlook.com>

Hi Milan,

Back in my Eindhoven's experience we had SS lines bringing bulk N2 from a tank on ground floor up to a clean room in 8th floor. Tank fittings and piping was all SS. We controlled the N2 purity at 8th floor and it was below 1ppm.
I have no experience with copper lines and purity, but here at ANU, the bulk N2 piping is in copper and we use N2 from cylinders to vent high end equipment (like ICP-RIE, PECVD, e-beam evaporator) while bulk N2 is used for venting low end equipment like a vacuum oven, a barrel etcher, etc.

Regards,
Fouad Karouta
ANFF ACT Node Manager
ANU, Australia

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Milan Begliarbekov
Sent: Saturday, 1 November 2014 3:15 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Venting Tools with Building Nitrogen

Hi All,

At the moment we're trying to decide the purity / source of the nitrogen we will use to vent our tools. The building has a bulk nitrogen system that is plumbed to the clean room in copper pipes. Our clean room contractor believes that that nitrogen might be too dirty to use as a vent gas and recommends ultra pure nitrogen. I am wondering if anyone has thoughts on this matter. I believe that it is possible to get 99.998 % N2 out of copper pipes. Is that the case? If not are there purifiers / dryers that are commonly used? This is only a vent gas and not a process gas.

Any wisdom in this matter will be highly appreciated.

Best,

milan
Technical Cleanroom Manager
CUNY Advanced Science Research Center
Milan.Begliarbekov at asrc.cuny.edu<mailto:Milan.Begliarbekov at asrc.cuny.edu>
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From shott at stanford.edu  Fri Oct 31 18:13:22 2014
From: shott at stanford.edu (John Shott)
Date: Fri, 31 Oct 2014 15:13:22 -0700
Subject: [labnetwork] Venting Tools with Building Nitrogen
In-Reply-To: <7EB621C923665D458D0ED5D9E722D7210C3C6070@EXPM5704.enterpriseapps.cuny.adlan>
References: <7EB621C923665D458D0ED5D9E722D7210C3C6070@EXPM5704.enterpriseapps.cuny.adlan>
Message-ID: <54540982.7000503@stanford.edu>

Milan:

You will likely get a wide range of opinions on this issue. However, a 
lot will depend on the quality of the gas that is coming out of your 
system.  Telling you what I have may be irrelevant if your gas is either 
much better or much worse than what we have.

We (the Stanford Nanofabrication Facility) have a single, stainless 
steel 9000 gallon LN2 tank that supplies both our copper-piped house 
nitrogen system and our stainless-routed UHP nitrogen system.  Aside 
from the piping, the other thing that differentiates our UHP system from 
our house nitrogen system is a set of A/B switchable Entegris 10M 
purifiers and more particle filtration.

At the moment, we have no real-time monitoring of either system ... but 
we are just about to add real-time moisture monitoring to both our house 
nitrogen and UHP nitrogen in the form of Michell Pura OL hygrometers to 
be able to measure moisture content in real time on these systems.  
While there are clearly other possible impurities in your nitrogen, I 
believe that moisture is both the most problematic and the easiest to 
measure.

As far as spot check measurements, that last time that we had our house 
nitrogen, UHP nitrogen, and argon systems measured (and we measured each 
both close to the tank and in the clean room near the end of the 
distribution lines) we observed the readings that I've reproduced in the 
following table.  Note: our last spot check occurred nearly a year ago 
(11/19/2013). We measured 3 gas systems (house nitrogen, UHP nitrogen 
and argon both near the tank and in the clean room.  We measured oxygen, 
water vapor, total hydrocarbon, and particles per cubic feet (> 0.1 um).
Note: if this table gets trashed in email translation, I'll find a way 
to post it on line.

Our most recent measurements were:

Gas 	Location 	Oxygen (ppm) 	H2O (ppm) 	THC (ppm) 	Particles
House Nitrogen 	Tank 	0.58 	0.5 	< 0.01 	56
House Nitrogen	Clean room 	0.6 	0.55 	< 0.01 	80
UHP Nitrogen 	Post Purifier 	0.028 	0.09 	< 0.01 	0
UHP Nitrogen 	Clean room 	0.038 	0.098 	< 0.01 	10
Argon 	Tank 	0.026 	0.54 	< 0.01 	14
Argon 	Clean room 	0.068 	0.55 	< 0.01 	11



While our UHP nitrogen (which comes from the same tank as our house 
nitrogen but goes through purifiers) is better than our house nitrogen, 
our house nitrogen is pretty good as well:  less than 1 ppm oxygen and 
water vapor and a reasonable number of particles ... particularly if it 
is venting a particle-laden process like sputtering or ebeam 
evaporation.  Of course, people tend to be more cavalier about using 
"PolyFlo" tubing on a house nitrogen system which can be an additional 
source of moisture at least locally. Even if that is done, if it is 
downstream of a regulator, you probably won't significantly increase 
moisture levels in other parts of your distribution system.

As a side note, we run house nitrogen from copper lines to our SRDs 
(spin-rinse dryers) because of the high flow requirements ... that may 
well cause your clean room contractor a bit of an apoplectic fit.

Of course, you would likely want to at least spot check the quality of 
your house and UHP nitrogen to see if they are comparable to ours.

Finally, most things that get vented, get opened to atmosphere at some 
point.  Air at 20% oxygen content and 45% RH can undo your very careful 
UHP venting in a matter of milliseconds ...

Good luck,

John

On 10/31/2014 9:15 AM, Milan Begliarbekov wrote:
> Hi All,
>
> At the moment we're trying to decide the purity / source of the 
> nitrogen we will use to vent our tools. The building has a bulk 
> nitrogen system that is plumbed to the clean room in copper pipes. Our 
> clean room contractor believes that that nitrogen might be too dirty 
> to use as a vent gas and recommends ultra pure nitrogen. I am 
> wondering if anyone has thoughts on this matter. I believe that it is 
> possible to get 99.998 % N2 out of copper pipes. Is that the case? If 
> not are there purifiers / dryers that are commonly used? This is only 
> a vent gas and not a process gas.
>
> Any wisdom in this matter will be highly appreciated.
>
> Best,
>
> milan
> Technical Cleanroom Manager
> CUNY Advanced Science Research Center
> Milan.Begliarbekov at asrc.cuny.edu
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From bill at eecs.berkeley.edu  Fri Oct 31 20:36:09 2014
From: bill at eecs.berkeley.edu (Bill Flounders)
Date: Fri, 31 Oct 2014 17:36:09 -0700
Subject: [labnetwork] Venting Tools with Building Nitrogen
In-Reply-To: <7EB621C923665D458D0ED5D9E722D7210C3C6070@EXPM5704.enterpriseapps.cuny.adlan>
References: <7EB621C923665D458D0ED5D9E722D7210C3C6070@EXPM5704.enterpriseapps.cuny.adlan>
Message-ID: <54542AF9.7030700@eecs.berkeley.edu>

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