[labnetwork] Zn ion implantation

[nfshuyun]

Dear Colleagues,

 

Does anyone has experiences on Zn ion implantation? What kind of source is
needed? Is there any gas sources for Zn ions?Or has to be solid source for
Zn? Can it be implanted using normal Varian CF-3000 implanter?

 

Thank you very much for any advice!

 

Have a good day!

 

Shuyun Zhao

Scientific officer

Nanoelectronics Fabrication Facility

The Hong Kong University of Science & Technology

Clear Water Bay, Kowloon, Hong Kong

Tel:  (852) 2358 7212/7896

Fax: (852) 2358 1372

Email:  <mailto:nfshuyun at ust.hk> nfshuyun at ust.hk

 

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