[labnetwork] e-beam deposition of cobalt

[Jay Vincent]

You need to be very careful how quickly you let cobalt warm up and cool
down in the machine, otherwise it has a tendency to fracture and spit
pieces into the machine and other pockets with other materials loaded.

Regards,

Jay DeLombard
Nanotech West OSSIP
The Ohio State University




On Thu, Oct 23, 2014 at 11:07 AM, xiaojin.wang at louisville.edu <
xiaojin.wang at louisville.edu> wrote:

>  Dear colleagues:
>
>
>
> One user requests a cobalt deposition in e-beam. Have any of you done this
> before in your lab? Does it have any negative effect on the system? Thank
> you.
>
>
>
> Best wishes
>
> Xiaojin Wang
>
> Senior process engineer
>
> Micro/nano technology center
>
> University of Louisville
>
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