From hathaway at cns.fas.harvard.edu Tue Sep 2 09:28:12 2014 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Tue, 2 Sep 2014 09:28:12 -0400 Subject: [labnetwork] looking for FTIR measurment service In-Reply-To: References: Message-ID: <5405C5EC.8070307@cns.fas.harvard.edu> Hi Ben, I'm pretty sure we can take care of that for you. Give me a call (617-259-0859), and we can talk. Mac Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA02138 617-495-9012 On 8/29/2014 1:02 PM, Ben Zhang wrote: > > Hi > > I am an engineer at MTPV, we are looking for service providers to do > FTIR spectrum analysis test. It is highly appreciated if someone could > suggest a service provider around Boston(MA). > > Thanks > > Ben Zhang > > Engineer > > MTPV Power Corporation > > 200 Boston Ave, suite 1550 > > Medford, MA 02155 > > Direct Line: 781-874-9596 ext:404 > > Fax:781-874-9597 > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From evgenia.moiseeva at louisville.edu Wed Sep 3 15:57:30 2014 From: evgenia.moiseeva at louisville.edu (evgenia.moiseeva at louisville.edu) Date: Wed, 3 Sep 2014 19:57:30 +0000 Subject: [labnetwork] Silicon wafer recycling Message-ID: Dear Colleagues, Could you recommend any companies for silicon wafer recycling and precious metal reclaim. Sincerely, Evgeniya Moiseeva, Ph.D. Process Engineer, MNTC Cleanroom University of Louisville Work: (502) 852-0613 Mobile: (502) 592-4801 Email: evgenia.moiseeva at louisville.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From len.olona at ou.edu Mon Sep 8 13:58:04 2014 From: len.olona at ou.edu (Olona, Leonard E.) Date: Mon, 8 Sep 2014 17:58:04 +0000 Subject: [labnetwork] Litho Spinner Message-ID: All, We are looking for a new research sized litho resist spinner. 3" sized substrates max. Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated. Thank you, -Len Leonard E. Olona Lab Manager, RIL Advanced Radar Research Center 3190 Monitor Ave Norman, OK 73019 Office: (405) 325-4374 Cell: (405) 630-9068 -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.rooks at yale.edu Mon Sep 8 15:45:34 2014 From: michael.rooks at yale.edu (Michael Rooks) Date: Mon, 08 Sep 2014 15:45:34 -0400 Subject: [labnetwork] Litho Spinner In-Reply-To: References: Message-ID: <540E075E.1030202@yale.edu> I'm very happy with our Laurell spinners. The small one cost $4100 a few years ago. I like them a lot more than the Headway spinners. --------------------- Michael Rooks Yale Institute for Nanoscience & Quantum Engineering nano.yale.edu On 09/08/2014 01:58 PM, Olona, Leonard E. wrote: > All, > > We are looking for a new research sized litho resist spinner. 3" > sized substrates max. > > Headway Research offers a nice spinner for around $8K. Any suggestions > would be greatly appreciated. > > Thank you, > -Len > > *Leonard E. Olona* > /Lab Manager/, RIL > Advanced Radar Research Center > 3190 Monitor Ave > Norman, OK 73019 > Office: (405) 325-4374 > Cell: (405) 630-9068 > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From bordonaro at cnf.cornell.edu Mon Sep 8 15:50:42 2014 From: bordonaro at cnf.cornell.edu (Garry J. Bordonaro) Date: Mon, 8 Sep 2014 15:50:42 -0400 Subject: [labnetwork] Litho Spinner In-Reply-To: References: Message-ID: <026601cfcb9e$2c4cdda0$84e698e0$@cnf.cornell.edu> If your user requirements are not too demanding, try Laurell: http://www.laurell.com/ Garry J. Bordonaro Microlithographic Engineer Cornell NanoScale Facility 250 Duffield Hall Cornell University Ithaca, NY 14853-2700 (607) 254-4936 bordonaro at cnf.cornell.edu http://www.cnf.cornell.edu/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E. Sent: Monday, September 08, 2014 1:58 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Litho Spinner All, We are looking for a new research sized litho resist spinner. 3" sized substrates max. Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated. Thank you, -Len Leonard E. Olona Lab Manager, RIL Advanced Radar Research Center 3190 Monitor Ave Norman, OK 73019 Office: (405) 325-4374 Cell: (405) 630-9068 -------------- next part -------------- An HTML attachment was scrubbed... URL: From neil.peters at sjsu.edu Mon Sep 8 16:18:24 2014 From: neil.peters at sjsu.edu (Neil Peters) Date: Mon, 8 Sep 2014 13:18:24 -0700 Subject: [labnetwork] Litho Spinner In-Reply-To: References: Message-ID: Laurell makes great small footprint table top spinners. They can be found on auctions or ebay. Often for less than $5K Best Regards Neil On Mon, Sep 8, 2014 at 10:58 AM, Olona, Leonard E. wrote: > All, > > We are looking for a new research sized litho resist spinner. 3" sized > substrates max. > > Headway Research offers a nice spinner for around $8K. Any suggestions > would be greatly appreciated. > > Thank you, > -Len > > *Leonard E. Olona* > *Lab Manager*, RIL > Advanced Radar Research Center > 3190 Monitor Ave > Norman, OK 73019 > Office: (405) 325-4374 > Cell: (405) 630-9068 > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Mon Sep 8 16:54:49 2014 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Mon, 8 Sep 2014 20:54:49 +0000 Subject: [labnetwork] Litho Spinner In-Reply-To: References: Message-ID: Headway units have been around for ages and are quite good. They offer easy RPM calibration and adjustable ramp up time. The way to preserve them is to add an additional separator/filter on the vacuum line to keep resist out of the solenoid and instruct your users to NEVER use a chuck that's larger than the sample since the chuck vacuum will suck in whatever your coating with. Good luck. Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E. Sent: Monday, September 08, 2014 1:58 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Litho Spinner All, We are looking for a new research sized litho resist spinner. 3" sized substrates max. Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated. Thank you, -Len Leonard E. Olona Lab Manager, RIL Advanced Radar Research Center 3190 Monitor Ave Norman, OK 73019 Office: (405) 325-4374 Cell: (405) 630-9068 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rsavage at calpoly.edu Mon Sep 8 19:54:53 2014 From: rsavage at calpoly.edu (Richard N. Savage) Date: Mon, 8 Sep 2014 16:54:53 -0700 (PDT) Subject: [labnetwork] Litho Spinner In-Reply-To: References: Message-ID: <1761355185.4413389.1410220493227.JavaMail.zimbra@calpoly.edu> Laurell and Brewer are other options....Rich Richard N. Savage, Ph.D. Director Graduate Education Professor & Chair Biomedical Engineering Cal Poly State University Bldg 116-212 1 Grand Avenue San Luis Obispo, CA 93407 805-756-6519 rsavage at calpoly.edu ----- Original Message ----- From: "Leonard E. Olona" To: labnetwork at mtl.mit.edu Sent: Monday, September 8, 2014 10:58:04 AM Subject: [labnetwork] Litho Spinner All, We are looking for a new research sized litho resist spinner. 3" sized substrates max. Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated. Thank you, -Len Leonard E. Olona Lab Manager , RIL Advanced Radar Research Center 3190 Monitor Ave Norman, OK 73019 Office: (405) 325-4374 Cell: (405) 630-9068 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From kevin.walsh at louisville.edu Mon Sep 8 19:56:00 2014 From: kevin.walsh at louisville.edu (kevin.walsh at louisville.edu) Date: Mon, 8 Sep 2014 23:56:00 +0000 Subject: [labnetwork] openings for "micro/nano"faculty Message-ID: <0D1ABD6DF2541B42A05BD6E6D36954110128B9914C@EXMBX03.ad.louisville.edu> We anticipate several faculty openings for both assistant and senior candidates involved in device micro/nanotechnology in a variety of departments and disciplines who can leverage our university's recent investment in its $30M multi-user micro/nano cleanroom facility. Our AGI-designed 10,000 sq ft core facility houses a wide variety of processing and characteristic tools appropriate for microelectronics, power semiconductors, MEMS, bioMEMS, biomimetics, microfluidics, optics and energy, to name a few areas of research. Department appointments (Eng, physics, chemistry, biology, medicine) would be consistent with the candidate's background and teaching interests. If you are interested or know of someone, please have them email their CV to me and I will keep them informed of the opportunities here at UofL. http://louisville.edu/micronano Thanks, Kevin Walsh Dr. Kevin M. Walsh Ky nanoNET Director Samuel T. Fife Professor of Electrical and Computer Engineering Founding Director of the UofL Micro/Nanotechnology Center 2210 South Brook St Shumaker Research Building, Room 234 Louisville, KY 40292 Office # (502) 852-0826 Fax # (502) 852-8128 http://kynanonet.org/ [Description: Capture for email signature] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 14485 bytes Desc: image001.jpg URL: From len.olona at ou.edu Mon Sep 8 20:06:55 2014 From: len.olona at ou.edu (Olona, Leonard E.) Date: Tue, 9 Sep 2014 00:06:55 +0000 Subject: [labnetwork] Litho Spinner In-Reply-To: <1761355185.4413389.1410220493227.JavaMail.zimbra@calpoly.edu> References: , <1761355185.4413389.1410220493227.JavaMail.zimbra@calpoly.edu> Message-ID: Rick and all my compadres, Thank you all very much for the informative and unbiased advice regarding litho spinners. I have some price quotes already in the queue and should be placing an order very soon! On a side note... I have accepted a new position at the University of Oklahoma Radar Innovation Laboratory as the Facility Manager. I will also continue my role as the University Cleanroom Manager and will continue my participation in our awesome network! Cheers! Len > On Sep 8, 2014, at 6:54 PM, "Richard N. Savage" wrote: > > Laurell and Brewer are other options....Rich > > Richard N. Savage, Ph.D. > Director Graduate Education > Professor & Chair Biomedical Engineering > Cal Poly State University > Bldg 116-212 > 1 Grand Avenue > San Luis Obispo, CA 93407 > 805-756-6519 > rsavage at calpoly.edu > > ----- Original Message ----- > From: "Leonard E. Olona" > To: labnetwork at mtl.mit.edu > Sent: Monday, September 8, 2014 10:58:04 AM > Subject: [labnetwork] Litho Spinner > > All, > > We are looking for a new research sized litho resist spinner. 3" sized substrates max. > > Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated. > > Thank you, > -Len > > Leonard E. Olona > Lab Manager , RIL > Advanced Radar Research Center > 3190 Monitor Ave > Norman, OK 73019 > Office: (405) 325-4374 > Cell: (405) 630-9068 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From lej at danchip.dtu.dk Tue Sep 9 02:35:32 2014 From: lej at danchip.dtu.dk (Leif Johansen) Date: Tue, 9 Sep 2014 06:35:32 +0000 Subject: [labnetwork] Litho Spinner In-Reply-To: References: Message-ID: <879AEF5002D70747B136D02BC86A9C982F1230@ait-pex02mbx05.win.dtu.dk> Hello Leonard, At DTU Danchip we have both Laurell and S?ss LabSpin6 table top spinners. People tend to prefer the LabSpin6, which is very simple but well designed and quite easy to use. Changing of spinner bowls and chucks is straightforward. Best regards, Leif From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E. Sent: 8. september 2014 19:58 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Litho Spinner All, We are looking for a new research sized litho resist spinner. 3" sized substrates max. Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated. Thank you, -Len Leonard E. Olona Lab Manager, RIL Advanced Radar Research Center 3190 Monitor Ave Norman, OK 73019 Office: (405) 325-4374 Cell: (405) 630-9068 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Tue Sep 9 06:12:04 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Tue, 09 Sep 2014 10:12:04 +0000 Subject: [labnetwork] Litho Spinner In-Reply-To: References: Message-ID: For the money the Headway spinners are the best in my opinion. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E. Sent: Monday, September 08, 2014 1:58 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Litho Spinner All, We are looking for a new research sized litho resist spinner. 3" sized substrates max. Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated. Thank you, -Len Leonard E. Olona Lab Manager, RIL Advanced Radar Research Center 3190 Monitor Ave Norman, OK 73019 Office: (405) 325-4374 Cell: (405) 630-9068 -------------- next part -------------- An HTML attachment was scrubbed... URL: From khbeis at uw.edu Tue Sep 9 08:53:39 2014 From: khbeis at uw.edu (Michael Khbeis) Date: Tue, 9 Sep 2014 05:53:39 -0700 Subject: [labnetwork] Litho Spinner In-Reply-To: References: , <1761355185.4413389.1410220493227.JavaMail.zimbra@calpoly.edu> Message-ID: Len, Ever expanding resume... hope all is well. The Headway's are a bit more pricey, but their D-style chuck mounts are very convenient. Laurell's are a good product. Recently, we bought some tabletop SCS spinners, and all I can say is "eh". It uses the Headway chuck design (interchangable) but they aren't the greatest units - acrylic lids that start to crack and they have a really finicky lid interlock and lid port that induces spin non-uniformity. I do have some Suss LabSpin 8 units that are very nice, but were also 2x in price plus the electropolished hotplates. I bought them with syringe dispense and EBR - both of which my folks don't use because of process instability with the dispensers. Best, Dr. Michael Khbeis Associate Director, Washington Nanofabrication Facility (WNF) National Nanotechnology Infrastructure Network (NNIN) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (F) 206.221.1681 (C) 443.254.5192 khbeis at uw.edu www.wnf.washington.edu/ On Sep 8, 2014, at 5:06 PM, Olona, Leonard E. wrote: > Rick and all my compadres, > > Thank you all very much for the informative and unbiased advice regarding litho spinners. > > I have some price quotes already in the queue and should be placing an order very soon! > > On a side note... I have accepted a new position at the University of Oklahoma Radar Innovation Laboratory as the Facility Manager. I will also continue my role as the University Cleanroom Manager and will continue my participation in our awesome network! > > Cheers! > > Len > > > > > > > > >> On Sep 8, 2014, at 6:54 PM, "Richard N. Savage" wrote: >> >> Laurell and Brewer are other options....Rich >> >> Richard N. Savage, Ph.D. >> Director Graduate Education >> Professor & Chair Biomedical Engineering >> Cal Poly State University >> Bldg 116-212 >> 1 Grand Avenue >> San Luis Obispo, CA 93407 >> 805-756-6519 >> rsavage at calpoly.edu >> >> ----- Original Message ----- >> From: "Leonard E. Olona" >> To: labnetwork at mtl.mit.edu >> Sent: Monday, September 8, 2014 10:58:04 AM >> Subject: [labnetwork] Litho Spinner >> >> All, >> >> We are looking for a new research sized litho resist spinner. 3" sized substrates max. >> >> Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated. >> >> Thank you, >> -Len >> >> Leonard E. Olona >> Lab Manager , RIL >> Advanced Radar Research Center >> 3190 Monitor Ave >> Norman, OK 73019 >> Office: (405) 325-4374 >> Cell: (405) 630-9068 >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From Vincent.Luciani at nist.gov Tue Sep 9 08:55:14 2014 From: Vincent.Luciani at nist.gov (Luciani, Vincent) Date: Tue, 9 Sep 2014 12:55:14 +0000 Subject: [labnetwork] Litho Spinner In-Reply-To: References: Message-ID: <249ec619ea1e485d913c0e1d7ceff58d@DM2PR09MB0303.namprd09.prod.outlook.com> One more for your survey. We have a couple researchers who are very happy with these http://www.smartcoater.com/. I am not very familiar with them myself, perhaps a new player on the market. Definitely for the low volume lab. The reason they are popular here is that they are less than $3k which means we can buy on a credit card without the whole gov acquisition process. Congratulations on your new position. Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E. Sent: Monday, September 08, 2014 1:58 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Litho Spinner All, We are looking for a new research sized litho resist spinner. 3" sized substrates max. Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated. Thank you, -Len Leonard E. Olona Lab Manager, RIL Advanced Radar Research Center 3190 Monitor Ave Norman, OK 73019 Office: (405) 325-4374 Cell: (405) 630-9068 -------------- next part -------------- An HTML attachment was scrubbed... URL: From peter.modh at chalmers.se Tue Sep 9 08:56:31 2014 From: peter.modh at chalmers.se (Peter Modh) Date: Tue, 9 Sep 2014 12:56:31 +0000 Subject: [labnetwork] CTI cryo pump service Message-ID: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> Hi labnetwork, We are looking for recommendations of where to service/repair CTI cryo pumps. Our local serviceman in Sweden has discontinued this service and we have not been fully satisfied with the price and delivery time at the alternative service points in Europe, which we have used lately. Therefore, we would like to ship our CTI cryo pumps directly to USA or Canada for service/repair. Thanks in advance, Peter Modh ----------------------------------------------------------------------------- Peter Modh Ph.D., Head of Nanofabrication Laboratory Department of Microtechnology and Nanoscience - MC2 Chalmers University of Technology SE-412 96 G?teborg, Sweden Phone: +46-(0)31-772 16 05 Fax: +46-(0)31-772 83 90 E-mail: peter.modh at chalmers.se From dzapotok at ccs.nrl.navy.mil Tue Sep 9 09:44:41 2014 From: dzapotok at ccs.nrl.navy.mil (David Zapotok) Date: Tue, 9 Sep 2014 09:44:41 -0400 Subject: [labnetwork] Institute for Nanoscience Job Opening Message-ID: <057201cfcc34$34e0b0e0$9ea212a0$@ccs.nrl.navy.mil> Facilities Assistant: Institute for Nanoscience Naval Research Laboratory in Washington, DC The Naval Research Laboratory's Institute for Nanoscience is looking to hire a full-time staff member to support the nanoscience research laboratory. The laboratory consists of a 5000 sq. ft., class 100 cleanroom and 12 environmentally controlled "quiet" labs. The cleanroom facility is operated as a user facility where NRL scientists perform their own lithographic processing. The new employee will be responsible for providing processing advice to NRL scientists as well as assisting in the installation and maintenance of the cleanroom equipment and other laboratory facilities. The successful applicant will have cleanroom experience, a desire to learn a diverse set of technical skills and the ability to interface with a large community of NRL scientists. The salary for the position will depend on the experience and educational level of the applicant. While the goal is to hire a full-time employee, paid student interns that convert to full-time after graduation will also be considered. This positon requires a clearance and therefore only individuals eligible to obtain a clearance may be considered. If you are interested in this position, please email a cover letter and CV to eric.snow at nrl.navy.mil . NRL is an equal employment opportunity employer. David Zapotok U.S. Naval Research Laboratory Institute for Nanoscience Facilities Manager 4555 Overlook Ave S.W. Washington DC 20375 202.404.4960 - Office 202.596.4235 - Cell 202.767.7201 - Fax -------------- next part -------------- An HTML attachment was scrubbed... URL: From lej at danchip.dtu.dk Tue Sep 9 10:20:05 2014 From: lej at danchip.dtu.dk (Leif Johansen) Date: Tue, 9 Sep 2014 14:20:05 +0000 Subject: [labnetwork] Experiences with tram close to cleanroom facility? Message-ID: <879AEF5002D70747B136D02BC86A9C982F144B@ait-pex02mbx05.win.dtu.dk> Dear all network members, The City of Copenhagen is currently in the process of scheduling the construction of an electrically driven tram which may run approximately 80 feet (ca. 25 meters) past our cleanroom facility. There will even be a stop right outside on the road next to us - i.e. many accelerations and decelerations which will emit rather large magnetic fields. Naturally, we are slightly concerned about maintaining operations - especially of our e-beam writer and SEM equipment. Are any of the lab members facing similar challenges and, if so, how do you tackle them? Is noise cancellation a viable option with large transient magnetic fields? Best regards, Leif Leif S. Johansen Head of Operations DTU Danchip Technical University of Denmark [http://www.dtu.dk/images/DTU_email_logo_01.gif] Danchip ?rsteds Plads, Byg. 347 2800 Lyngby Direct +45 45255713 Mobile +45 25348992 lesjo at danchip.dtu.dk www.danchip.dtu.dk/ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.gif Type: image/gif Size: 1055 bytes Desc: image001.gif URL: From hwooden at iest.org Tue Sep 9 12:17:59 2014 From: hwooden at iest.org (Heather Wooden) Date: Tue, 9 Sep 2014 11:17:59 -0500 Subject: [labnetwork] Abstracts Needed for Operations and Management of Cleanrooms and Labs Topics Message-ID: IEST is looking for professionals to present topics related to Operations and Management of Cleanrooms and Labs at ESTECH 2015, the 61st Annual Technical Meeting and Exposition of IEST. The conference will take place April 27-30, 2015 at the Doubletree Boston North Shore in Danvers, Massachusetts. Details on abstract and presenter guidelines can be found online at http://www.iest.org/Meetings/ESTECH/Call-for-Presentations. All abstracts can be submitted via e-mail to Jennifer Sklena at jsklena at iest.org. Heather Wooden IEST Meetings and Education Manager Phone: 847-981-0100 E-mail: hwooden at iest.org IEST - Membership Is a Best Practice - www.iest.org From michael.call at maine.edu Tue Sep 9 12:22:09 2014 From: michael.call at maine.edu (Michael Call) Date: Tue, 9 Sep 2014 12:22:09 -0400 Subject: [labnetwork] CTI cryo pump service In-Reply-To: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> References: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> Message-ID: We have had good luck with Oxford Scientific, formerly Austin Scientific in Austin, Texas. http://www.oxford-instruments.com/businesses/industrial-products/austin On Tue, Sep 9, 2014 at 8:56 AM, Peter Modh wrote: > Hi labnetwork, > > We are looking for recommendations of where to service/repair CTI cryo > pumps. Our local serviceman in Sweden has discontinued this service and we > have not been fully satisfied with the price and delivery time at the > alternative service points in Europe, which we have used lately. Therefore, > we would like to ship our CTI cryo pumps directly to USA or Canada for > service/repair. > > Thanks in advance, > > Peter Modh > > > > ----------------------------------------------------------------------------- > Peter Modh > Ph.D., Head of Nanofabrication Laboratory > Department of Microtechnology and Nanoscience - MC2 > Chalmers University of Technology > SE-412 96 G?teborg, Sweden > Phone: +46-(0)31-772 16 05 > Fax: +46-(0)31-772 83 90 > E-mail: peter.modh at chalmers.se > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Mike Call Research Engineer UMaine LASST 207-581-3382 -------------- next part -------------- An HTML attachment was scrubbed... URL: From elliscd at auburn.edu Tue Sep 9 12:24:43 2014 From: elliscd at auburn.edu (Charles Ellis) Date: Tue, 9 Sep 2014 16:24:43 +0000 Subject: [labnetwork] CTI cryo pump service In-Reply-To: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> References: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> Message-ID: <86124AF7-1BF5-4133-84D0-EF24760B145C@auburn.edu> We have had really good service from Vacnet.inc in Albuquerque,NM. Each time they have rebuilt a CTI Cryopump it has lasted at least 5 years and the service is quick and very reasonable. Charles Ellis Director, Microlab Auburn University > On Sep 9, 2014, at 10:12 AM, "Peter Modh" wrote: > > Hi labnetwork, > > We are looking for recommendations of where to service/repair CTI cryo pumps. Our local serviceman in Sweden has discontinued this service and we have not been fully satisfied with the price and delivery time at the alternative service points in Europe, which we have used lately. Therefore, we would like to ship our CTI cryo pumps directly to USA or Canada for service/repair. > > Thanks in advance, > > Peter Modh > > > ----------------------------------------------------------------------------- > Peter Modh > Ph.D., Head of Nanofabrication Laboratory > Department of Microtechnology and Nanoscience - MC2 > Chalmers University of Technology > SE-412 96 G?teborg, Sweden > Phone: +46-(0)31-772 16 05 > Fax: +46-(0)31-772 83 90 > E-mail: peter.modh at chalmers.se > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From tbritton at criticalsystemsinc.com Tue Sep 9 12:30:05 2014 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Tue, 9 Sep 2014 16:30:05 +0000 Subject: [labnetwork] CTI cryo pump service In-Reply-To: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> References: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2E011C3880@P3PWEX2MB006.ex2.secureserver.net> Hello Peter, I've had a lot of success with Kaye Kolb at ADVACO. See the attached flyer. You can reach Kaye at: Kaye G. Kolb, Jr. President Advanced Vacuum Company, Inc. (ADVACO) 1215 Business Parkway North Westminster, MD 21157 Ph: 410-876-8200 ext. 212 Fax: 866-402-3427 Mobile: 443-744-0005 kaye at advaco.com; www.advaco.com Enjoy the day! Thank you! Tom Britton Director of Sales Critical Systems, Inc. Direct: 208-890-1417 Office: 877-572-5515 www.CriticalSystemsInc.com [logo for email signature png] -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Peter Modh Sent: Tuesday, September 09, 2014 6:57 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] CTI cryo pump service Hi labnetwork, We are looking for recommendations of where to service/repair CTI cryo pumps. Our local serviceman in Sweden has discontinued this service and we have not been fully satisfied with the price and delivery time at the alternative service points in Europe, which we have used lately. Therefore, we would like to ship our CTI cryo pumps directly to USA or Canada for service/repair. Thanks in advance, Peter Modh ----------------------------------------------------------------------------- Peter Modh Ph.D., Head of Nanofabrication Laboratory Department of Microtechnology and Nanoscience - MC2 Chalmers University of Technology SE-412 96 G?teborg, Sweden Phone: +46-(0)31-772 16 05 Fax: +46-(0)31-772 83 90 E-mail: peter.modh at chalmers.se _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9501 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: CTI Cryo Flier.pdf Type: application/pdf Size: 124304 bytes Desc: CTI Cryo Flier.pdf URL: From rmorrison at draper.com Tue Sep 9 14:21:03 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Tue, 09 Sep 2014 18:21:03 +0000 Subject: [labnetwork] CTI cryo pump service In-Reply-To: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> References: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> Message-ID: Hi Peter, Here at Draper we use Oxford Instruments and sometime CTI. They have an advanced exchange program, where they ship you a unit that works and you return your non functional unit back. Here is a contact for Oxford Instruments. Donna Dent Customer Service Representative Oxford Instruments Austin, Inc 1340 Airport Commerce Dr Bldg 1 Ste 175 Austin TX 78741 Tel: +1 800 611 8871 ext 122 Direct: +1 512 590 7622 Fax: +1 512 443 6665 Main: +1 512 441 6893 Email: donna.dent at oxinst.com www.oxford-instruments.com/austin Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Peter Modh Sent: Tuesday, September 09, 2014 8:57 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] CTI cryo pump service Hi labnetwork, We are looking for recommendations of where to service/repair CTI cryo pumps. Our local serviceman in Sweden has discontinued this service and we have not been fully satisfied with the price and delivery time at the alternative service points in Europe, which we have used lately. Therefore, we would like to ship our CTI cryo pumps directly to USA or Canada for service/repair. Thanks in advance, Peter Modh ----------------------------------------------------------------------------- Peter Modh Ph.D., Head of Nanofabrication Laboratory Department of Microtechnology and Nanoscience - MC2 Chalmers University of Technology SE-412 96 G?teborg, Sweden Phone: +46-(0)31-772 16 05 Fax: +46-(0)31-772 83 90 E-mail: peter.modh at chalmers.se _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From rmorrison at draper.com Tue Sep 9 14:58:15 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Tue, 09 Sep 2014 18:58:15 +0000 Subject: [labnetwork] Experiences with tram close to cleanroom facility? In-Reply-To: <879AEF5002D70747B136D02BC86A9C982F144B@ait-pex02mbx05.win.dtu.dk> References: <879AEF5002D70747B136D02BC86A9C982F144B@ait-pex02mbx05.win.dtu.dk> Message-ID: Hi Leif, When we built our facility in 2012 we had vibration measurements and magnetic field measurements taken in the areas where the Stepper, SEM and AFM were to be located. These were 24 hour surveys. We have a subway line located 1 block from our facility and a freight train line 50 feet from the building. Both surveys showed when the subway was active, there was magnetic interference and significant vibration. However, we were located on the 3rd floor so that attenuated the magnetic field enough and the vibration was below the specification of the tool manufacturer. There are companies that sell electrical/magnetic shield systems we use the following company for those solutions: Ets-lingren www.ets-lindgren.com they make an excellent system. If you need a good float table this company makes a unit that has active feedback control for vibration damping: RDM INDUSTRIAL PRODUCTS, INC. 1652 Watson Court Milpitas, CA 95035-6822 Ph: (408) 945-8400 Fax: (408) 945-8433 Website: www.rdm-ind.com Regards Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leif Johansen Sent: Tuesday, September 09, 2014 10:20 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Experiences with tram close to cleanroom facility? Dear all network members, The City of Copenhagen is currently in the process of scheduling the construction of an electrically driven tram which may run approximately 80 feet (ca. 25 meters) past our cleanroom facility. There will even be a stop right outside on the road next to us - i.e. many accelerations and decelerations which will emit rather large magnetic fields. Naturally, we are slightly concerned about maintaining operations - especially of our e-beam writer and SEM equipment. Are any of the lab members facing similar challenges and, if so, how do you tackle them? Is noise cancellation a viable option with large transient magnetic fields? Best regards, Leif Leif S. Johansen Head of Operations DTU Danchip Technical University of Denmark [http://www.dtu.dk/images/DTU_email_logo_01.gif] Danchip ?rsteds Plads, Byg. 347 2800 Lyngby Direct +45 45255713 Mobile +45 25348992 lesjo at danchip.dtu.dk www.danchip.dtu.dk/ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.gif Type: image/gif Size: 1055 bytes Desc: image001.gif URL: From kamal.yadav at gmail.com Tue Sep 9 15:09:04 2014 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Wed, 10 Sep 2014 00:39:04 +0530 Subject: [labnetwork] CTI cryo pump service In-Reply-To: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> References: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> Message-ID: APP systems, Singapore. We recently got 3 repaired and feel satisfied. Kamal Yadav IITBNF, Mumbai, India. On Sep 9, 2014 9:31 PM, "Peter Modh" wrote: > Hi labnetwork, > > We are looking for recommendations of where to service/repair CTI cryo > pumps. Our local serviceman in Sweden has discontinued this service and we > have not been fully satisfied with the price and delivery time at the > alternative service points in Europe, which we have used lately. Therefore, > we would like to ship our CTI cryo pumps directly to USA or Canada for > service/repair. > > Thanks in advance, > > Peter Modh > > > > ----------------------------------------------------------------------------- > Peter Modh > Ph.D., Head of Nanofabrication Laboratory > Department of Microtechnology and Nanoscience - MC2 > Chalmers University of Technology > SE-412 96 G?teborg, Sweden > Phone: +46-(0)31-772 16 05 > Fax: +46-(0)31-772 83 90 > E-mail: peter.modh at chalmers.se > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Tue Sep 9 15:11:43 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Tue, 09 Sep 2014 19:11:43 +0000 Subject: [labnetwork] equipment question Message-ID: Hi everyone, We are purchasing a plating bench with robot automation, linear in nature with up down motion for agitation. One vendor is going to use Rexroth, Bosch Group robot unit. Do any of you have any experience with this company or can you recommend a robot for a plating bench. Thanks Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Tue Sep 9 16:41:49 2014 From: codreanu at udel.edu (Iulian Codreanu) Date: Tue, 09 Sep 2014 16:41:49 -0400 Subject: [labnetwork] Experiences with tram close to cleanroom facility? In-Reply-To: References: <879AEF5002D70747B136D02BC86A9C982F144B@ait-pex02mbx05.win.dtu.dk> Message-ID: <540F660D.1090803@udel.edu> Other EMI cancellation system vendors: -Stefan Mayer Instruments -Spicer Consulting Other vibration cancellation system vendors: http://www.techmfg.com/products/floorplatforms/quietisland.htm iulian Codreanu, Ph.D. Director of Operations, UD NanoFab University of Delaware Office: 163 ISE Lab Mail to: 250N ISE Lab Ship to: 165 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 On 9/9/2014 2:58 PM, Morrison, Richard H., Jr. wrote: > > Hi Leif, > > When we built our facility in 2012 we had vibration measurements and > magnetic field measurements taken in the areas where the Stepper, SEM > and AFM were to be located. These were 24 hour surveys. We have a > subway line located 1 block from our facility and a freight train line > 50 feet from the building. Both surveys showed when the subway was > active, there was magnetic interference and significant vibration. > However, we were located on the 3^rd floor so that attenuated the > magnetic field enough and the vibration was below the specification of > the tool manufacturer. > > There are companies that sell electrical/magnetic shield systems we > use the following company for those solutions: > > Ets-lingren www.ets-lindgren.com they > make an excellent system. > > If you need a good float table this company makes a unit that has > active feedback control for vibration damping: > > *RDM INDUSTRIAL PRODUCTS, INC.* > > 1652 Watson Court > > Milpitas, CA 95035-6822 > > Ph: (408) 945-8400 Fax: (408) 945-8433 > > Website: www.rdm-ind.com > > Regards > > Rick > > Draper Laboratory > > Principal Member of the Technical Staff > > Group Leader Microfabrication Operations > > 555 Technology Square > > Cambridge Ma, 02139-3563 > > www.draper.com > > rmorrison at draper.com > > W 617-258-3420 > > C 508-930-3461 > > *From:*labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Leif Johansen > *Sent:* Tuesday, September 09, 2014 10:20 AM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Experiences with tram close to cleanroom facility? > > Dear all network members, > > The City of Copenhagen is currently in the process of scheduling the > construction of an electrically driven tram which may run > approximately 80 feet (ca. 25 meters) past our cleanroom facility. > There will even be a stop right outside on the road next to us -- i.e. > many accelerations and decelerations which will emit rather large > magnetic fields. > > Naturally, we are slightly concerned about maintaining operations -- > especially of our e-beam writer and SEM equipment. Are any of the lab > members facing similar challenges and, if so, how do you tackle them? > Is noise cancellation a viable option with large transient magnetic > fields? > > Best regards, > > Leif > > *Leif S. Johansen * > > Head of Operations > > DTU Danchip > > *Technical University of Denmark* > > > > http://www.dtu.dk/images/DTU_email_logo_01.gif > > Danchip > > ?rsteds Plads, Byg. 347 > > 2800 Lyngby > > Direct +45 45255713 > > Mobile +45 25348992 > > lesjo at danchip.dtu.dk > > www.danchip.dtu.dk/ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 1055 bytes Desc: not available URL: From peter.modh at chalmers.se Wed Sep 10 02:26:07 2014 From: peter.modh at chalmers.se (Peter Modh) Date: Wed, 10 Sep 2014 06:26:07 +0000 Subject: [labnetwork] CTI cryo pump service In-Reply-To: References: <5687FFF6-7DBC-4F3C-B569-9B05FC1044D7@chalmers.se> Message-ID: <5A339812-E553-42D2-AC2E-6003D9BEC045@chalmers.se> Hi all, Thank you very much for your rapid response and all recommendations. best regards, Peter On 9 sep 2014, at 21:09, Kamal Yadav wrote: > > On Sep 9, 2014 9:31 PM, "Peter Modh" wrote: > Hi labnetwork, > > We are looking for recommendations of where to service/repair CTI cryo pumps. Our local serviceman in Sweden has discontinued this service and we have not been fully satisfied with the price and delivery time at the alternative service points in Europe, which we have used lately. Therefore, we would like to ship our CTI cryo pumps directly to USA or Canada for service/repair. > > Thanks in advance, > > Peter Modh > > > ----------------------------------------------------------------------------- > Peter Modh > Ph.D., Head of Nanofabrication Laboratory > Department of Microtechnology and Nanoscience - MC2 > Chalmers University of Technology > SE-412 96 G?teborg, Sweden > Phone: +46-(0)31-772 16 05 > Fax: +46-(0)31-772 83 90 > E-mail: peter.modh at chalmers.se > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork ----------------------------------------------------------------------------- Peter Modh Ph.D., Head of Nanofabrication Laboratory Department of Microtechnology and Nanoscience - MC2 Chalmers University of Technology SE-412 96 G?teborg, Sweden Phone: +46-(0)31-772 16 05 Fax: +46-(0)31-772 83 90 E-mail: peter.modh at chalmers.se From info at fabsurplus.com Wed Sep 10 04:37:16 2014 From: info at fabsurplus.com (Stephen Howe) Date: Wed, 10 Sep 2014 10:37:16 +0200 Subject: [labnetwork] Experiences with tram close to cleanroom facility? In-Reply-To: <540F660D.1090803@udel.edu> References: <879AEF5002D70747B136D02BC86A9C982F144B@ait-pex02mbx05.win.dtu.dk> <540F660D.1090803@udel.edu> Message-ID: <1410338236.4261.26.camel@stephen-Q500A> Dear Sirs, I recall that , when I worked for VG Analytical, I helped install a mass spectrometer in the LAND institute in Berlin, very close to the S-Bahn. The assessment was made that , as magnetic field decreased as 1/r3, then the trains would not have an adverse effect. However, what the gurus forgot is, apparently, the trains going past make an inductance loop. The field from that decreases as 1/r. Hence, we had to fix the problem using a search coil to cancel the extra magnetic field error. Once the search coil system was added, the instrument did not have problems any more related to the stray field from the trains. Yours sincerely, Stephen Howe Company Owner SDI Fabsurplus Group +1 830 388 1071 (Mobile) +39 335 710 7756 (Italy Mobile) Skype: Stephencshowe email: info at fabsurplus.com WWW.FABSURPLUS.COM Japan-Italy-Ireland-USA Facebook: www.facebook.com/fabsurplus Twitter: http://twitter.com/fabsurplus Google+: https://plus.google.com/+Fabsurplus Japan-Italy-Ireland-USA Featured Sales Items:- *********************** 440 Fab tools for sale from Nishiwaki Japan.Still Operational until August. http://www.fabsurplus.com/sdi_catalog/salesItemList.do?listTypeId=3 Applied Materials Mirra 3400 CMP system standalone:- http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=76435 KLA-Tencor 6420 Surfscan for sale, still installed and operational:- http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=76690 Agilent 4071A Parametric tester for Sale:- http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=76798 Accretech UF 200 prober for sale:- http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=76775 On Tue, 2014-09-09 at 16:41 -0400, Iulian Codreanu wrote: > Other EMI cancellation system vendors: > -Stefan Mayer Instruments > -Spicer Consulting > > Other vibration cancellation system vendors: > http://www.techmfg.com/products/floorplatforms/quietisland.htm > iulian Codreanu, Ph.D. > Director of Operations, UD NanoFab > University of Delaware > Office: 163 ISE Lab > Mail to: 250N ISE Lab > Ship to: 165 ISE Lab > 221 Academy Street > Newark, DE 19716 > 302-831-2784 > On 9/9/2014 2:58 PM, Morrison, Richard H., Jr. wrote: > > > Hi Leif, > > > > > > > > When we built our facility in 2012 we had vibration measurements and > > magnetic field measurements taken in the areas where the Stepper, > > SEM and AFM were to be located. These were 24 hour surveys. We have > > a subway line located 1 block from our facility and a freight train > > line 50 feet from the building. Both surveys showed when the subway > > was active, there was magnetic interference and significant > > vibration. However, we were located on the 3rd floor so that > > attenuated the magnetic field enough and the vibration was below the > > specification of the tool manufacturer. > > > > > > > > There are companies that sell electrical/magnetic shield systems we > > use the following company for those solutions: > > > > Ets-lingren www.ets-lindgren.com they make an excellent > > system. > > > > > > > > If you need a good float table this company makes a unit that has > > active feedback control for vibration damping: > > > > RDM INDUSTRIAL PRODUCTS, INC. > > > > 1652 Watson Court > > > > Milpitas, CA 95035-6822 > > > > Ph: (408) 945-8400 Fax: (408) 945-8433 > > > > Website: www.rdm-ind.com > > > > > > > > Regards > > > > Rick > > > > > > > > > > > > Draper Laboratory > > > > Principal Member of the Technical Staff > > > > Group Leader Microfabrication Operations > > > > 555 Technology Square > > > > Cambridge Ma, 02139-3563 > > > > > > > > www.draper.com > > > > rmorrison at draper.com > > > > W 617-258-3420 > > > > C 508-930-3461 > > > > > > > > > > > > > > > > > > > > From: labnetwork-bounces at mtl.mit.edu > > [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leif Johansen > > Sent: Tuesday, September 09, 2014 10:20 AM > > To: labnetwork at mtl.mit.edu > > Subject: [labnetwork] Experiences with tram close to cleanroom > > facility? > > > > > > > > > > Dear all network members, > > > > > > > > The City of Copenhagen is currently in the process of scheduling the > > construction of an electrically driven tram which may run > > approximately 80 feet (ca. 25 meters) past our cleanroom facility. > > There will even be a stop right outside on the road next to us ? > > i.e. many accelerations and decelerations which will emit rather > > large magnetic fields. > > > > > > > > Naturally, we are slightly concerned about maintaining operations ? > > especially of our e-beam writer and SEM equipment. Are any of the > > lab members facing similar challenges and, if so, how do you tackle > > them? Is noise cancellation a viable option with large transient > > magnetic fields? > > > > > > > > Best regards, > > > > > > > > Leif > > > > > > > > Leif S. Johansen > > > > > > Head of Operations > > > > > > DTU Danchip > > > > > > > > > > > > Technical University of Denmark > > > > > > http://www.dtu.dk/images/DTU_email_logo_01.gif > > > > > > Danchip > > > > > > ?rsteds Plads, Byg. 347 > > > > > > 2800 Lyngby > > > > > > Direct +45 45255713 > > > > Mobile +45 25348992 > > > > > > lesjo at danchip.dtu.dk > > > > > > www.danchip.dtu.dk/ > > > > > > > > > > > > > > > > > > > > > > _______________________________________________ > > labnetwork mailing list > > labnetwork at mtl.mit.edu > > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From mheiden at engr.ucr.edu Wed Sep 10 11:15:13 2014 From: mheiden at engr.ucr.edu (Mark Heiden) Date: Wed, 10 Sep 2014 15:15:13 +0000 Subject: [labnetwork] Hyphenated Systems Confocal Microscope Repair Message-ID: <9116e9edd7744a5dbda23534caa44f9c@mailbox.engr.local> Is there anyone out there that has a contact to someone that can work on a Hyphenated Systems Confocal microscope system? We have one based on a Nikon L150 scope but the confocal feature has stopped working and we have no documentation.. Thanks in advance, Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 -------------- next part -------------- An HTML attachment was scrubbed... URL: From bcord at umn.edu Wed Sep 10 10:50:24 2014 From: bcord at umn.edu (bryan cord) Date: Wed, 10 Sep 2014 09:50:24 -0500 Subject: [labnetwork] Experiences with tram close to cleanroom facility? In-Reply-To: <879AEF5002D70747B136D02BC86A9C982F144B@ait-pex02mbx05.win.dtu.dk> References: <879AEF5002D70747B136D02BC86A9C982F144B@ait-pex02mbx05.win.dtu.dk> Message-ID: <54106530.2010602@umn.edu> Hi Leif, Our new clean room at U of Minnesota sits a few hundred feet from the city's light rail (also an electric surface train). We see almost no measurable noise from the trains on our SEM or e-beam litho units, but if it becomes an issue for you the Lindgren active cancellation system Richard suggested was an easy retrofit to our lab, so you could always add it later if you're getting noise. We installed one for an unrelated issue (noise from the building elevator) and it works perfectly and requires basically no maintenance. Cheers, -bryan On 9/9/2014 9:20 AM, Leif Johansen wrote: > > Dear all network members, > > The City of Copenhagen is currently in the process of scheduling the > construction of an electrically driven tram which may run > approximately 80 feet (ca. 25 meters) past our cleanroom facility. > There will even be a stop right outside on the road next to us -- i.e. > many accelerations and decelerations which will emit rather large > magnetic fields. > > Naturally, we are slightly concerned about maintaining operations -- > especially of our e-beam writer and SEM equipment. Are any of the lab > members facing similar challenges and, if so, how do you tackle them? > Is noise cancellation a viable option with large transient magnetic > fields? > > Best regards, > > Leif > > *Leif S. Johansen *** > > Head of Operations > > DTU Danchip > > *Technical University of Denmark*** > > > > http://www.dtu.dk/images/DTU_email_logo_01.gif > > Danchip > > ?rsteds Plads, Byg. 347 > > 2800 Lyngby > > Direct +45 45255713 > > Mobile +45 25348992 > > lesjo at danchip.dtu.dk > > www.danchip.dtu.dk/ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Bryan Cord Minnesota Nano Center (MNC) University of Minnesota 115 Union St SE, Rm 153 Minneapolis, MN 55455 612.626.3287 (work) 857.891.6820 (cell) bcord at umn.edu http://wiki.umn.edu/EBPG -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 1055 bytes Desc: not available URL: From cibuzar at umn.edu Wed Sep 10 14:47:42 2014 From: cibuzar at umn.edu (Gregory Cibuzar) Date: Wed, 10 Sep 2014 13:47:42 -0500 Subject: [labnetwork] Hyphenated Systems Confocal Microscope Repair In-Reply-To: <9116e9edd7744a5dbda23534caa44f9c@mailbox.engr.local> References: <9116e9edd7744a5dbda23534caa44f9c@mailbox.engr.local> Message-ID: Mark, We have one of those tools as well. I think Bruker bought them out a few years ago. They might have some parts. You can try contacting them: John Ryan, Brian Henry, and Tina 800-366-9956 profilersupport at bruker-nano.com Regards, Greg Greg Cibuzar Manager, Minnesota Nano Center www.mnc.umn.edu University of Minnesota 612-625-8079 On Wed, Sep 10, 2014 at 10:15 AM, Mark Heiden wrote: > Is there anyone out there that has a contact to someone that can work on > a Hyphenated Systems Confocal microscope system? We have one based on a > Nikon L150 scope but the confocal feature has stopped working and we have > no documentation.. > > > > Thanks in advance, > > > > > > Mark Heiden > > NanoFab Cleanroom Manager > > Center for Nanoscale Science and Engineering > > University of California, Riverside > > 951-827-2551 > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From john.nibarger at nist.gov Fri Sep 12 15:25:18 2014 From: john.nibarger at nist.gov (Nibarger, John) Date: Fri, 12 Sep 2014 19:25:18 +0000 Subject: [labnetwork] Fabrication positions at NIST Boulder Message-ID: Colleagues, We have positions available at NIST, Boulder to develop and fabricate superconducting devices for a variety of applications. If you know any strong candidates, please send this advertisement to them. The job posting is at this address and is also attached. Please contact myself and Hannes Hubmayr (johannes.hubmayr at nist.gov, 303-497-6164) if you are interested. Additional opportunities are expected in the future. Cheers, John John P. Nibarger, Ph.D. Manager, Boulder Micro-Fabrication Facility National Institute of Standards and Technology 325 Broadway, MS 817.03 Boulder, CO 80305 303-497-4575 (phone) 303-497-3042 (fax) john.nibarger at nist.gov -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Wed Sep 17 08:54:41 2014 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas) Date: Wed, 17 Sep 2014 12:54:41 +0000 Subject: [labnetwork] best tables for uPG101 Message-ID: Colleagues, We're installing a HEIDELBERG INSTRUMENTS ?PG 101. Any recommendation on table choices, i.e. Vibration isolation versus static? What have people used? Best Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax [cid:image003.png at 01CFD255.048609A0] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 57996 bytes Desc: image003.png URL: From ocola at anl.gov Thu Sep 18 11:15:45 2014 From: ocola at anl.gov (ocola) Date: Thu, 18 Sep 2014 10:15:45 -0500 Subject: [labnetwork] electricla code ... Message-ID: <541AF721.9090502@anl.gov> Dear All, I am in need of relatively urgent help. We need to know what electrical code is used in your cleanrooms for connecting tools. We have a situation here where the electrical engineer insists that following NEPA code he must consider the tools as "appliances" and that the disconnect boxes must be inside the bay next to the tool. (The boxes with pull down levers). I have never seen this in any cleanroom I have visited. I believe they are all in the chase. Can you please ask your electrical engineers and find out ? Thank you Leo -- Leonidas E Ocola, PhD Center for Nanoscale Materials Argonne National Laboratory 9700 South Cass Avenue Bldg 440, Rm A129 Email: ocola at anl.gov Phone: 630-252-6613 Fax : 630-252-5739 From kamal.yadav at gmail.com Thu Sep 18 14:12:13 2014 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Thu, 18 Sep 2014 23:42:13 +0530 Subject: [labnetwork] Cleaning of SS chambers with Acetic Acid Message-ID: Dear All, Recently our gold metal target got completely consumed during the run in the sputter and the metal underneath, which is copper, got sputtered instead. It may have happened few times, as target is fixed and hard to reach usually for a look before sputtering. This made the entire chamber looks black, and dirty. I believe copper oxide coating must be there. After this the metal resistivities are coming in ohm-cm, as we believe some redeposition may be happening. I want to clean the chamber using diluted acetic acid [4% only] which removes copper oxides. Any other recommendation to clean SS chambers and hope this may be ok?. Or any other suggestion to the observation. Thanks a lot! -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: +91-7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From ocola at anl.gov Thu Sep 18 14:31:22 2014 From: ocola at anl.gov (ocola) Date: Thu, 18 Sep 2014 13:31:22 -0500 Subject: [labnetwork] electricla code ... In-Reply-To: <541AF721.9090502@anl.gov> References: <541AF721.9090502@anl.gov> Message-ID: <541B24FA.9020202@anl.gov> Dear All, I appreciate your wonderful feedback response time and content ! The picture has gotten clearer. As long as we follow lock out / tag out protocol we can have the lever boxes in the chase or any place outside of visual control of the tool. Thank you for your time. Leo On 9/18/2014 10:15 AM, ocola wrote: > Dear All, > > I am in need of relatively urgent help. > > We need to know what electrical code is used > in your cleanrooms for connecting tools. > > We have a situation here where the electrical > engineer insists that following NEPA code he > must consider the tools as "appliances" and > that the disconnect boxes must be inside the > bay next to the tool. > (The boxes with pull down levers). > > I have never seen this in any cleanroom I have visited. > I believe they are all in the chase. > > Can you please ask your electrical engineers and > find out ? > > Thank you > > Leo > > > > -- Leonidas E Ocola, PhD Center for Nanoscale Materials Argonne National Laboratory 9700 South Cass Avenue Bldg 440, Rm A129 Email: ocola at anl.gov Phone: 630-252-6613 Fax : 630-252-5739 From spaolini at cns.fas.harvard.edu Thu Sep 18 15:55:31 2014 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Thu, 18 Sep 2014 19:55:31 +0000 Subject: [labnetwork] Cleaning of SS chambers with Acetic Acid In-Reply-To: References: Message-ID: Kamal, My concern is of the black material. Copper oxide is usually greenish and I don?t think it would form if you were not doing reactive sputtering with O2. Sputtering targets, particularly gold ones, are bonded to the copper with indium which is grey-black. Indium is used for its low temperature melting point and high thermal conductivity. I would send a sample of the material (on a wipe) for analysis before planning a cleaning strategy. Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav Sent: Thursday, September 18, 2014 2:12 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cleaning of SS chambers with Acetic Acid Dear All, Recently our gold metal target got completely consumed during the run in the sputter and the metal underneath, which is copper, got sputtered instead. It may have happened few times, as target is fixed and hard to reach usually for a look before sputtering. This made the entire chamber looks black, and dirty. I believe copper oxide coating must be there. After this the metal resistivities are coming in ohm-cm, as we believe some redeposition may be happening. I want to clean the chamber using diluted acetic acid [4% only] which removes copper oxides. Any other recommendation to clean SS chambers and hope this may be ok?. Or any other suggestion to the observation. Thanks a lot! -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: +91-7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From nfshuyun at ust.hk Thu Sep 18 22:21:47 2014 From: nfshuyun at ust.hk (nfshuyun) Date: Fri, 19 Sep 2014 10:21:47 +0800 Subject: [labnetwork] Cleanliness level in clean room Message-ID: <022901cfd3b0$76ad7de0$640879a0$@ust.hk> Dear All, Sorry to bother you. I come from NFF in the Hong Kong University of Science and Technology. It is nice to join in this group. I have some questions about the material contamination in clean room. We have most of the research projects from department of ECE, ME, Physics, Chemical, such as, CMOS, TFT, Solar cell, SOI MEMS, LED and HENMT, micro-fluid, and so on. Right now the cleanliness level is basically defined based on the materials. Highest level, Clean: Si, SiO2, Nitride, amorphous silicon, polycrystalline silicon, Second, Semi-clean: Al, Ni, Ti, Mo, ITO Lowest level: Non-standard: others (IGZO, GaN, GaAs, Al2O3, Cu, TiW, Au, Ag, Hf, Pt and so on) What kind of cleanliness levels are you using? And how to define the contamination of these materials? Is it possible to promote GaN-based process to semi-clean? Thank you very much for your advise. Have a good day! Best, Shuyun Zhao Scientific officer Nanoelectronics Fabrication Facility The Hong Kong University of Science & Technology Clear Water Bay, Kowloon, Hong Kong Tel: (852) 2358 7212/7896 Fax: (852) 2358 1372 Email: nfshuyun at ust.hk -------------- next part -------------- An HTML attachment was scrubbed... URL: From kamal.yadav at gmail.com Mon Sep 22 02:22:59 2014 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Mon, 22 Sep 2014 11:52:59 +0530 Subject: [labnetwork] Shared Chiller [for equipment cooling] Issues Message-ID: Dear All, We are facing chiller [for cooling water for equipment] issues, most likely flow issues, probably due to using same chiller for multiple equipment. Though chiller total cooling capacity is able to provide flow/pressure but in an shared equipment scenario, could there be issues. Suddenly some equipment, in use, trips, because of low flow of cooling water probably. Did anybody faced these issues, are we diagnosing it correctly? Thanks a lot. -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: 7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From dev.c0debabe at gmail.com Mon Sep 22 08:11:14 2014 From: dev.c0debabe at gmail.com (=?UTF-8?B?U3RlZmFuIFNjaMO2bmxlaXRuZXI=?=) Date: Mon, 22 Sep 2014 14:11:14 +0200 Subject: [labnetwork] Looking for Used Sputter Coater Message-ID: <542011E2.5080807@gmail.com> Hello, for our small lab we are looking for a used sputter coater to coat SEM samples (Au, Pt or similar). In particular, we would like to coat older decapsulated IC (integrated circuits) models to get better results with voltage contrast imaging. Since we're on a very low budget, I was wondering if anyone on this list has an old sputter coater that is no longer in used and could be sold to us. Necessary repairs would be no problem as long as we can still get spare parts. Thank you, Stefan From myoung6 at nd.edu Mon Sep 22 08:58:09 2014 From: myoung6 at nd.edu (Mike Young) Date: Mon, 22 Sep 2014 08:58:09 -0400 Subject: [labnetwork] Shared Chiller [for equipment cooling] Issues In-Reply-To: References: Message-ID: <125ACBFF-56FD-48A2-B371-FC78765CC5FA@nd.edu> Kamal, we use flow limiters ("circuit setters" in the US) in the *return* line of each shared instrument, when they are installed in parallel on one cooling loop. Each flow limiter set to the maximum flow required by the single tool ahead of it. That way, as other tools intermittently increase their coolant flow, they are not able to "starve" other equipment, by virtue of the flow limiter. In order for this scheme to work, the chiller has to be able to supply the total of the maximum flow required of all its commected tools, *at the differential pressure required by the the tool with the highest required differential*. If you chiller can't meet this requirement, you need a larger chiller. Good luck! --Mike On Sep 22, 2014, at 2:22 AM, Kamal Yadav wrote: > Dear All, > > We are facing chiller [for cooling water for equipment] issues, most likely flow issues, probably due to using same chiller for multiple equipment. Though chiller total cooling capacity is able to provide flow/pressure but in an shared equipment scenario, could there be issues. Suddenly some equipment, in use, trips, because of low flow of cooling water probably. > > Did anybody faced these issues, are we diagnosing it correctly? > > Thanks a lot. > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 412-6728 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Mon Sep 22 11:01:42 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Mon, 22 Sep 2014 15:01:42 +0000 Subject: [labnetwork] Shared Chiller [for equipment cooling] Issues In-Reply-To: References: Message-ID: Hi, We do the same thing here, 1 chiller runs 3 process tools. We have manifolds at each tool that set the flow and pressure going to each tool. You have to make sure that your system is balanced, in other words you need valves at each manifold to throttle the water flow so that each tool receives only the water it requires. Hope this helps. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav Sent: Monday, September 22, 2014 2:23 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Shared Chiller [for equipment cooling] Issues Dear All, We are facing chiller [for cooling water for equipment] issues, most likely flow issues, probably due to using same chiller for multiple equipment. Though chiller total cooling capacity is able to provide flow/pressure but in an shared equipment scenario, could there be issues. Suddenly some equipment, in use, trips, because of low flow of cooling water probably. Did anybody faced these issues, are we diagnosing it correctly? Thanks a lot. -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: 7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From roberthamilton at berkeley.edu Mon Sep 22 11:07:49 2014 From: roberthamilton at berkeley.edu (Bob Hamilton) Date: Mon, 22 Sep 2014 08:07:49 -0700 Subject: [labnetwork] Shared Chiller [for equipment cooling] Issues In-Reply-To: References: Message-ID: <54203B45.7070009@berkeley.edu> Kamal Yadav, It is difficult to diagnose your issue given the information in your e-mail. It is possible a single tool is using more water than it needs and therefore reducing the available volume to tools with higher impedance cooling circuits. You may also have a blocked cooling channel in a tool(s). Consider running water through them, backwards and into an open drain or bucket to back-flush them. A question; what purpose does this chiller serve? Does it supply deionized for rf cooling circuits where the resistivity of the water is important or does it simply provide equipment cooling? Is it a heat exchanger (HX) or is it Freon-based centrifigal chiller? Do you have a rotameter in the cooling loop? Assuming the conductance of various tools allows most of the process cooling water to flow through those tools with lowest impedance consider adding "flow-setters" to your tools or just to the tool using too much water. There are dynamic version of flow-setters that adjust flow to a specific volume of liters-per-minute and maintain this constant flow over a range of pressure. At the Marvell NanoLab we've used flow-setters made of brass, PVC and stainless depending on the application. If you choose PVC versions, I'd pick male pipe thread (mpt) over female pipe thread (fpt). We try and avoid threading metal mpt fittings into plastic fpt fittings because the plastic fitting may crack at some part of its service life causing flooding. Appended are a few US links that provide an example of the device I am referring to. I've also seen them on EBAY. http://www.deanbennett.com/dole-flow-control-valves.htm http://www.haysfluidcontrols.ca/hays_automatic_flow_controls_2305.htm http://www.merrillmfg.com/product/08-WellPoints/Merrill-Valves/features.php http://www.plastomatic.com/fc.html http://www.swtwater.com/catalog/1318_flow_controls.htm Regards from the MNL, Bob Hamilton -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu e-mail preferred My personal mobile: 510-325-7557 On 9/21/2014 11:22 PM, Kamal Yadav wrote: > Dear All, > > We are facing chiller [for cooling water for equipment] issues, most > likely flow issues, probably due to using same chiller for multiple > equipment. Though chiller total cooling capacity is able to provide > flow/pressure but in an shared equipment scenario, could there be > issues. Suddenly some equipment, in use, trips, because of low flow of > cooling water probably. > > Did anybody faced these issues, are we diagnosing it correctly? > > Thanks a lot. > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com , > kamalyadav at ee.iitb.ac.in > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Mon Sep 22 13:39:01 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Mon, 22 Sep 2014 17:39:01 +0000 Subject: [labnetwork] Temperature Measurement Question Message-ID: Hi Everyone, We currently use Sense-array wafers from KLA/Tencor to monitor hot plates and ovens. I have found 2 big draw backs with this; #1 the T/C pop off and #2 the wafers break. Does anybody have a better solution of hot plate and oven mapping? Thanks in advance for your help. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mark.walters at duke.edu Mon Sep 22 21:22:20 2014 From: mark.walters at duke.edu (Mark Walters, Ph.D.) Date: Tue, 23 Sep 2014 01:22:20 +0000 Subject: [labnetwork] MgF2 deposition considerations Message-ID: <317f756f6954454786fe2ddf418a40ad@CO1PR05MB348.namprd05.prod.outlook.com> We have several people here who would like for our facility to offer a MgF2 deposition process (either evaporation or sputtering or both). While MgF2 seems to be a fairly common optical coating material, I'm having difficulty finding information about potential health and cross-contamination issues with this material in deposition systems. I've heard everything from it's a very stable material and you don't need to worry about it, to you should wear Hazmat gear anytime you change out the sources. I'm hoping that there are people in this community that have experience with running MgF2 deposition processes in their facilities. If so, could you share any precautions or special procedures you implement to avoid or limit possible health concerns from fluoride exposure and cross-contamination with other materials and processes run in the same systems? Thanks, Mark D. Walters, Ph.D. Director, Shared Materials Instrumentation Facility (SMIF) Duke University Box 90271 Durham, NC 27708-0271 http://smif.lab.duke.edu Phone: (919) 660-5486 Fax: (919) 660-5491 -------------- next part -------------- An HTML attachment was scrubbed... URL: From kamal.yadav at gmail.com Tue Sep 23 01:32:14 2014 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Tue, 23 Sep 2014 11:02:14 +0530 Subject: [labnetwork] Shared Chiller [for equipment cooling] Issues In-Reply-To: <54203B45.7070009@berkeley.edu> References: <54203B45.7070009@berkeley.edu> Message-ID: Dear All, Thank you very much for sharing your experiences. There is a design where one puts an expansion tank on the return line for these shared chiller, probably to avoid ripples, flow shocks, that one gets when another tool is being switched ON or OFF. I found a document which is attached which talks about designing such cooling water circuits. This water is only for process equipment cooling, and not facilities equipment cooling. If anybody has worked without these expansion tanks, and if using flow settlers is enough that would be great to know, we may need to modify our circuits little bit, if needed. Thanks, Kamal. On Mon, Sep 22, 2014 at 8:37 PM, Bob Hamilton wrote: > Kamal Yadav, > > It is difficult to diagnose your issue given the information in your > e-mail. It is possible a single tool is using more water than it needs and > therefore reducing the available volume to tools with higher impedance > cooling circuits. You may also have a blocked cooling channel in a tool(s). > Consider running water through them, backwards and into an open drain or > bucket to back-flush them. > > A question; what purpose does this chiller serve? Does it supply deionized > for rf cooling circuits where the resistivity of the water is important or > does it simply provide equipment cooling? Is it a heat exchanger (HX) or is > it Freon-based centrifigal chiller? Do you have a rotameter in the cooling > loop? > > Assuming the conductance of various tools allows most of the process > cooling water to flow through those tools with lowest impedance consider > adding "flow-setters" to your tools or just to the tool using too much > water. There are dynamic version of flow-setters that adjust flow to a > specific volume of liters-per-minute and maintain this constant flow over a > range of pressure. > > At the Marvell NanoLab we've used flow-setters made of brass, PVC and > stainless depending on the application. If you choose PVC versions, I'd > pick male pipe thread (mpt) over female pipe thread (fpt). We try and avoid > threading metal mpt fittings into plastic fpt fittings because the plastic > fitting may crack at some part of its service life causing flooding. > > Appended are a few US links that provide an example of the device I am > referring to. I've also seen them on EBAY. > http://www.deanbennett.com/dole-flow-control-valves.htm > http://www.haysfluidcontrols.ca/hays_automatic_flow_controls_2305.htm > http://www.merrillmfg.com/product/08-WellPoints/Merrill-Valves/features.php > http://www.plastomatic.com/fc.html > http://www.swtwater.com/catalog/1318_flow_controls.htm > > Regards from the MNL, > Bob Hamilton > > -- > Robert Hamilton > University of California at Berkeley > Marvell NanoLab > Equipment Eng. Mgr. > Room 520 Sutardja Dai Hall > Berkeley, CA 94720-1754bob at eecs.berkeley.edu > e-mail preferred > My personal mobile: 510-325-7557 > > > On 9/21/2014 11:22 PM, Kamal Yadav wrote: > > Dear All, > > We are facing chiller [for cooling water for equipment] issues, most > likely flow issues, probably due to using same chiller for multiple > equipment. Though chiller total cooling capacity is able to provide > flow/pressure but in an shared equipment scenario, could there be issues. > Suddenly some equipment, in use, trips, because of low flow of cooling > water probably. > > Did anybody faced these issues, are we diagnosing it correctly? > > Thanks a lot. > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in > > > _______________________________________________ > labnetwork mailing listlabnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > -- > Robert Hamilton > University of California at Berkeley > Marvell NanoLab > Equipment Eng. Mgr. > Room 520 Sutardja Dai Hall > Berkeley, CA 94720-1754bob at eecs.berkeley.edu > Phone: 510-809-8600 > Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: 7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: PCW_Circuit_York_piping0001.pdf Type: application/pdf Size: 3676045 bytes Desc: not available URL: From rmorrison at draper.com Tue Sep 23 08:17:07 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Tue, 23 Sep 2014 12:17:07 +0000 Subject: [labnetwork] MgF2 deposition considerations In-Reply-To: <317f756f6954454786fe2ddf418a40ad@CO1PR05MB348.namprd05.prod.outlook.com> References: <317f756f6954454786fe2ddf418a40ad@CO1PR05MB348.namprd05.prod.outlook.com> Message-ID: HI, WE have what is called a "dirty" evaporator for MgF, In, Sn materials like that. We just lined the inside of the chamber with foil and after completion we carefully removed the foil and sent it to waste. Safety wanted us to wear proper PPE and we had no issue. We stored the material in a dry box in a sealed container. Hope this helps. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Walters, Ph.D. Sent: Monday, September 22, 2014 9:22 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] MgF2 deposition considerations We have several people here who would like for our facility to offer a MgF2 deposition process (either evaporation or sputtering or both). While MgF2 seems to be a fairly common optical coating material, I'm having difficulty finding information about potential health and cross-contamination issues with this material in deposition systems. I've heard everything from it's a very stable material and you don't need to worry about it, to you should wear Hazmat gear anytime you change out the sources. I'm hoping that there are people in this community that have experience with running MgF2 deposition processes in their facilities. If so, could you share any precautions or special procedures you implement to avoid or limit possible health concerns from fluoride exposure and cross-contamination with other materials and processes run in the same systems? Thanks, Mark D. Walters, Ph.D. Director, Shared Materials Instrumentation Facility (SMIF) Duke University Box 90271 Durham, NC 27708-0271 http://smif.lab.duke.edu Phone: (919) 660-5486 Fax: (919) 660-5491 -------------- next part -------------- An HTML attachment was scrubbed... URL: From roberthamilton at berkeley.edu Tue Sep 23 10:33:56 2014 From: roberthamilton at berkeley.edu (Bob Hamilton) Date: Tue, 23 Sep 2014 07:33:56 -0700 Subject: [labnetwork] Shared Chiller [for equipment cooling] Issues In-Reply-To: References: <54203B45.7070009@berkeley.edu> Message-ID: <542184D4.2050204@berkeley.edu> Kamal, The Microlab, which preceded the Marvell NanoLab, had issues with big dips in city water pressure when classes let out. Our building was also a teaching building and on the hour, when classes ended and restrooms were heavily used, we'd see large dips in pressure that resulted in our reverse osmosis water system shutting down from low pressure. We also had a problem with inertia. On start-up, the RO pump dipped the inlet pressure because of the inertia of the water column. We solved the problem by tee'ing in a 100 gallon expansion tank (sometimes called a draw-down tank). This required adding a check valve to prevent the tank from back-feeding the building. This tank was equipped with an air bladder pressurized to 80 psi which was the motive force to keep water under pressure. It worked flawlessly. These tanks are often used in association with well pumps so pumps do not end up close-cycling. A switch with a dead band of ~ 20-30 psi is then used to cycle the pump. Having shared this, it does not seem applicable to your chiller issue. There are devices with smaller volumes called pulsation dampers which mitigate the high frequency pulses from gear pumps. Perhaps that is what someone has recommended? Bob On 9/22/2014 10:32 PM, Kamal Yadav wrote: > Dear All, > > Thank you very much for sharing your experiences. > > There is a design where one puts an expansion tank on the return line > for these shared chiller, probably to avoid ripples, flow shocks, that > one gets when another tool is being switched ON or OFF. I found a > document which is attached which talks about designing such cooling > water circuits. This water is only for process equipment cooling, and > not facilities equipment cooling. > > If anybody has worked without these expansion tanks, and if using flow > settlers is enough that would be great to know, we may need to modify > our circuits little bit, if needed. > > Thanks, > Kamal. > > > > > On Mon, Sep 22, 2014 at 8:37 PM, Bob Hamilton > > wrote: > > Kamal Yadav, > > It is difficult to diagnose your issue given the information in > your e-mail. It is possible a single tool is using more water than > it needs and therefore reducing the available volume to tools with > higher impedance cooling circuits. You may also have a blocked > cooling channel in a tool(s). Consider running water through them, > backwards and into an open drain or bucket to back-flush them. > > A question; what purpose does this chiller serve? Does it supply > deionized for rf cooling circuits where the resistivity of the > water is important or does it simply provide equipment cooling? Is > it a heat exchanger (HX) or is it Freon-based centrifigal chiller? > Do you have a rotameter in the cooling loop? > > Assuming the conductance of various tools allows most of the > process cooling water to flow through those tools with lowest > impedance consider adding "flow-setters" to your tools or just to > the tool using too much water. There are dynamic version of > flow-setters that adjust flow to a specific volume of > liters-per-minute and maintain this constant flow over a range of > pressure. > > At the Marvell NanoLab we've used flow-setters made of brass, PVC > and stainless depending on the application. If you choose PVC > versions, I'd pick male pipe thread (mpt) over female pipe thread > (fpt). We try and avoid threading metal mpt fittings into plastic > fpt fittings because the plastic fitting may crack at some part of > its service life causing flooding. > > Appended are a few US links that provide an example of the device > I am referring to. I've also seen them on EBAY. > http://www.deanbennett.com/dole-flow-control-valves.htm > http://www.haysfluidcontrols.ca/hays_automatic_flow_controls_2305.htm > http://www.merrillmfg.com/product/08-WellPoints/Merrill-Valves/features.php > http://www.plastomatic.com/fc.html > http://www.swtwater.com/catalog/1318_flow_controls.htm > > Regards from the MNL, > Bob Hamilton > > -- > Robert Hamilton > University of California at Berkeley > Marvell NanoLab > Equipment Eng. Mgr. > Room 520 Sutardja Dai Hall > Berkeley, CA 94720-1754 > bob at eecs.berkeley.edu > e-mail preferred > My personal mobile:510-325-7557 > > > On 9/21/2014 11:22 PM, Kamal Yadav wrote: >> Dear All, >> >> We are facing chiller [for cooling water for equipment] issues, >> most likely flow issues, probably due to using same chiller for >> multiple equipment. Though chiller total cooling capacity is able >> to provide flow/pressure but in an shared equipment scenario, >> could there be issues. Suddenly some equipment, in use, trips, >> because of low flow of cooling water probably. >> >> Did anybody faced these issues, are we diagnosing it correctly? >> >> Thanks a lot. >> >> -- >> Thanks, >> Kamal Yadav >> Sr. Process Technologist >> IITBNF, EE Department, Annexe, >> IIT Bombay, Powai >> Mumbai 400076 >> Internal: 4435 >> Cell: 7506144798 >> Email: kamal.yadav at gmail.com , >> kamalyadav at ee.iitb.ac.in >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- > Robert Hamilton > University of California at Berkeley > Marvell NanoLab > Equipment Eng. Mgr. > Room 520 Sutardja Dai Hall > Berkeley, CA 94720-1754 > bob at eecs.berkeley.edu > Phone:510-809-8600 > Mobile:510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com , > kamalyadav at ee.iitb.ac.in -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred -------------- next part -------------- An HTML attachment was scrubbed... URL: From kamal.yadav at gmail.com Tue Sep 23 11:02:20 2014 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Tue, 23 Sep 2014 20:32:20 +0530 Subject: [labnetwork] Shared Chiller [for equipment cooling] Issues In-Reply-To: <542184D4.2050204@berkeley.edu> References: <54203B45.7070009@berkeley.edu> <542184D4.2050204@berkeley.edu> Message-ID: Dear Bob, Thank you for your reply. The pulsation dampers is for ripples in the circuit? or something else. My query is when we open or close any of these process equipment cooling water valves, does this generate a ripple which may cause the flow sensor in other tools to get activated. Please see a document attached in which a plate heat exchanger with cooling water has a expansion tank in it. Do we need this tank or is there any other way to tackle the issue. I am in Process, but from last few months these chiller issues causing tripping of equipment has increased, so wanted to know about such cooling water circuits where chillers are shared. Thanks, Kamal. On Tue, Sep 23, 2014 at 8:03 PM, Bob Hamilton wrote: > Kamal, > > The Microlab, which preceded the Marvell NanoLab, had issues with big dips > in city water pressure when classes let out. Our building was also a > teaching building and on the hour, when classes ended and restrooms were > heavily used, we'd see large dips in pressure that resulted in our reverse > osmosis water system shutting down from low pressure. We also had a problem > with inertia. On start-up, the RO pump dipped the inlet pressure because of > the inertia of the water column. > > We solved the problem by tee'ing in a 100 gallon expansion tank (sometimes > called a draw-down tank). This required adding a check valve to prevent the > tank from back-feeding the building. This tank was equipped with an air > bladder pressurized to 80 psi which was the motive force to keep water > under pressure. It worked flawlessly. These tanks are often used in > association with well pumps so pumps do not end up close-cycling. A switch > with a dead band of ~ 20-30 psi is then used to cycle the pump. > > Having shared this, it does not seem applicable to your chiller issue. > There are devices with smaller volumes called pulsation dampers which > mitigate the high frequency pulses from gear pumps. Perhaps that is what > someone has recommended? > > Bob > > On 9/22/2014 10:32 PM, Kamal Yadav wrote: > > Dear All, > > Thank you very much for sharing your experiences. > > There is a design where one puts an expansion tank on the return line > for these shared chiller, probably to avoid ripples, flow shocks, that one > gets when another tool is being switched ON or OFF. I found a document > which is attached which talks about designing such cooling water circuits. > This water is only for process equipment cooling, and not facilities > equipment cooling. > > If anybody has worked without these expansion tanks, and if using flow > settlers is enough that would be great to know, we may need to modify our > circuits little bit, if needed. > > Thanks, > Kamal. > > > > > On Mon, Sep 22, 2014 at 8:37 PM, Bob Hamilton > wrote: > >> Kamal Yadav, >> >> It is difficult to diagnose your issue given the information in your >> e-mail. It is possible a single tool is using more water than it needs and >> therefore reducing the available volume to tools with higher impedance >> cooling circuits. You may also have a blocked cooling channel in a tool(s). >> Consider running water through them, backwards and into an open drain or >> bucket to back-flush them. >> >> A question; what purpose does this chiller serve? Does it supply >> deionized for rf cooling circuits where the resistivity of the water is >> important or does it simply provide equipment cooling? Is it a heat >> exchanger (HX) or is it Freon-based centrifigal chiller? Do you have a >> rotameter in the cooling loop? >> >> Assuming the conductance of various tools allows most of the process >> cooling water to flow through those tools with lowest impedance consider >> adding "flow-setters" to your tools or just to the tool using too much >> water. There are dynamic version of flow-setters that adjust flow to a >> specific volume of liters-per-minute and maintain this constant flow over a >> range of pressure. >> >> At the Marvell NanoLab we've used flow-setters made of brass, PVC and >> stainless depending on the application. If you choose PVC versions, I'd >> pick male pipe thread (mpt) over female pipe thread (fpt). We try and avoid >> threading metal mpt fittings into plastic fpt fittings because the plastic >> fitting may crack at some part of its service life causing flooding. >> >> Appended are a few US links that provide an example of the device I am >> referring to. I've also seen them on EBAY. >> http://www.deanbennett.com/dole-flow-control-valves.htm >> http://www.haysfluidcontrols.ca/hays_automatic_flow_controls_2305.htm >> >> http://www.merrillmfg.com/product/08-WellPoints/Merrill-Valves/features.php >> http://www.plastomatic.com/fc.html >> http://www.swtwater.com/catalog/1318_flow_controls.htm >> >> Regards from the MNL, >> Bob Hamilton >> >> -- >> Robert Hamilton >> University of California at Berkeley >> Marvell NanoLab >> Equipment Eng. Mgr. >> Room 520 Sutardja Dai Hall >> Berkeley, CA 94720-1754bob at eecs.berkeley.edu >> e-mail preferred >> My personal mobile: 510-325-7557 >> >> >> On 9/21/2014 11:22 PM, Kamal Yadav wrote: >> >> Dear All, >> >> We are facing chiller [for cooling water for equipment] issues, most >> likely flow issues, probably due to using same chiller for multiple >> equipment. Though chiller total cooling capacity is able to provide >> flow/pressure but in an shared equipment scenario, could there be issues. >> Suddenly some equipment, in use, trips, because of low flow of cooling >> water probably. >> >> Did anybody faced these issues, are we diagnosing it correctly? >> >> Thanks a lot. >> >> -- >> Thanks, >> Kamal Yadav >> Sr. Process Technologist >> IITBNF, EE Department, Annexe, >> IIT Bombay, Powai >> Mumbai 400076 >> Internal: 4435 >> Cell: 7506144798 >> Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in >> >> >> _______________________________________________ >> labnetwork mailing listlabnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> >> -- >> Robert Hamilton >> University of California at Berkeley >> Marvell NanoLab >> Equipment Eng. Mgr. >> Room 520 Sutardja Dai Hall >> Berkeley, CA 94720-1754bob at eecs.berkeley.edu >> Phone: 510-809-8600 >> Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred >> >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> > > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in > > > -- > Robert Hamilton > University of California at Berkeley > Marvell NanoLab > Equipment Eng. Mgr. > Room 520 Sutardja Dai Hall > Berkeley, CA 94720-1754bob at eecs.berkeley.edu > Phone: 510-809-8600 > Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred > > > -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: 7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: PCW_Circuit_York_piping0001.pdf Type: application/pdf Size: 3676045 bytes Desc: not available URL: From diadiuk at mit.edu Mon Sep 29 12:30:02 2014 From: diadiuk at mit.edu (Vicky Diadiuk) Date: Mon, 29 Sep 2014 12:30:02 -0400 Subject: [labnetwork] STS Multiplex ICP-MESC DRIE system for sale Message-ID: <47D26A8F-0E3D-4182-945D-6190C5BF8BE5@mit.edu> HI, We arre selling an STS Multiplex ICP-MESC DRIE system, bought new in 2003. The tool is set up for 6" wafers, has a two wafer load chamber, a balanced coil, onboard gas box, weighted clamp and comes with the platen chiller. It was in our fab, maintained by STS, the entire time until Apr 2014 when we decommissioned because we bought a Pegasus & no longer had a need for it. It would benefit from the Trinity software upgrade from SPTS (they no longer support the installed software). We think it's worth ~$100k, but we need the space urgently, so pls make an offer - it's highly negotiable :) Thx, Vicky From codreanu at udel.edu Mon Sep 29 17:32:28 2014 From: codreanu at udel.edu (Iulian Codreanu) Date: Mon, 29 Sep 2014 17:32:28 -0400 Subject: [labnetwork] burn box location Message-ID: <5429CFEC.4020508@udel.edu> Dear Colleagues, I am looking at the possibility of using a burn box (using natural gas for fuel) to abate the exhaust from some CVD tools. I would have to locate it in the chase area. It appears that a burn box is not that clean; I can imagine "soot" spreading throughout the cleanroom during maintenance. Does anyone have burn boxes in the chase area? How do you keep the soot contained? Thank you very much. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD NanoFab University of Delaware Office: 163 ISE Lab Mail to: 250N ISE Lab Ship to: 165 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 From shott at stanford.edu Mon Sep 29 22:48:52 2014 From: shott at stanford.edu (John Shott) Date: Mon, 29 Sep 2014 19:48:52 -0700 Subject: [labnetwork] burn box location In-Reply-To: <5429CFEC.4020508@udel.edu> References: <5429CFEC.4020508@udel.edu> Message-ID: <542A1A14.3090205@stanford.edu> Iulian: Let me get the ball rolling on this topic. We do have a multi-tool abatement for some of our LPCVD tubes in the chase area. While it is not a gas-fired unit, we have had both an electrically heated CDI/Delatech unit in that location as well as a PureAire unit. Our H2-fueled Guardian GS-4 units that deal with epi reactors have been in the sub-fab, not because of great concerns about particles, but because that's where the pumps for the tool was. Note: as a disclaimer, while our clean room is rated at and performs at Class 100 conditions, I don't lose much sleep worrying about that and am a big believer in the "self cleaning" nature of clean rooms: a bit of time and a lot of air changes per hour resolves a number of issues. That said, yes, cleaning the scrubber/burn box, and piping leading to it and from it can be a bit messy ... as is changing pump oil and any number of other things that happen in clean rooms and service chases. Moreover, pulling tubes and/or cantilevers for cleaning and/or replacement, that will likely happen in a critical area of your clean room, can be a rather disruptive, particle-generating process as well. Of course, the same can be said for maintenance and/or cleaning of may processes that deposit films. My first concern is safety: some of the parts that you are hoping to clean can contain unreacted silane, DCS, hydrogen, and other nasties. While it is more likely to happen with "back end" parts from a hydrogen-fueled process like epitaxy, some of these post-pump parts are known to burst into flame when you take them apart. If that happens, you've got a more serious particle problem ... not to mention the challenge of dealing with a flaming chunk of tubing. So, I believe in wearing proper PPE and doing everything possible to cap sections as quickly as possible to get them out of the area for most of the actual cleaning. In fact, because of incorporation of pump oil and other things, the deposits in the tubing leading to the burn box and even beyond it seem to stick reasonably well to the walls if you are careful not to do too much beating on them. I've always been surprised that the deposits aren't more light and flaky. In short, I think that if you are prepared with appropriate numbers and sizes of KF flanges and other needed blank-off ports, you can quickly take apart a system and end up with a collection of capped segments without having caused great harm to your clean room or service chase. Then, you can take those to an area where they can be fully cleaned without any compromise to your clean room or service chases. I expect that the good folks from Critical Systems will weigh in on this issue and I look forward to their comments and to those of some of our other colleagues, but my experience as an end user of various exhaust treatment systems is that they have to be handled carefully and that you need to anticipate potential problems, but I don't consider particle generation in the chase area as a make or break situation. Good luck, John On 9/29/2014 2:32 PM, Iulian Codreanu wrote: > Dear Colleagues, > > I am looking at the possibility of using a burn box (using natural gas > for fuel) to abate the exhaust from some CVD tools. I would have to > locate it in the chase area. It appears that a burn box is not that > clean; I can imagine "soot" spreading throughout the cleanroom during > maintenance. Does anyone have burn boxes in the chase area? How do > you keep the soot contained? > > Thank you very much. > > Iulian > From jrweaver at purdue.edu Tue Sep 30 08:24:11 2014 From: jrweaver at purdue.edu (Weaver, John R) Date: Tue, 30 Sep 2014 12:24:11 +0000 Subject: [labnetwork] burn box location In-Reply-To: <5429CFEC.4020508@udel.edu> References: <5429CFEC.4020508@udel.edu> Message-ID: <6A848421F695C54A9210C1A873C96AC225043B26@WPVEXCMBX04.purdue.lcl> Iulian - I am concerned about two things. First, are your pumps in the chase? If so, and if you are using any carbon-based oils (not dry pumps and not Fomblin), you are most likely putting paraffins into your airstream. These will pass right through a HEPA or ULPA filter and condense on cold surfaces like silicon wafers. If the pump issue is not a problem, the "soot" problem is of concern. It can have multiple effects, depending on the range of particle sizes. First, there are surface particles. When a person is cleaning the burn box are they wearing a cleanroom garment that will be worn elsewhere in the cleanroom, even just to enter and exit that chase? Also, cleanroom laundries are not geared to remove large percentages of contaminants, only small quantities. Garments that come in heavily soiled will not be as clean as other cleanroom garments after processing. Second, there is the issue of aerosol particles. Any size particles can deposit on chase walls and be a constant source of particles. People going into the chase and touching the wall with their cleanroom garment can spread it around the cleanroom. Aerosol soot can plug your prefilters and also plug your HEPA filters if the particle size allows a significant quantity through the prefilter. In general, I would be very concerned with that approach. If there is any way you can locate the burn boxes outside of your cleanroom airstream you are far better off. John -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Monday, September 29, 2014 5:32 PM To: Fab Network Subject: [labnetwork] burn box location Dear Colleagues, I am looking at the possibility of using a burn box (using natural gas for fuel) to abate the exhaust from some CVD tools. I would have to locate it in the chase area. It appears that a burn box is not that clean; I can imagine "soot" spreading throughout the cleanroom during maintenance. Does anyone have burn boxes in the chase area? How do you keep the soot contained? Thank you very much. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD NanoFab University of Delaware Office: 163 ISE Lab Mail to: 250N ISE Lab Ship to: 165 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From tbritton at criticalsystemsinc.com Tue Sep 30 11:41:38 2014 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Tue, 30 Sep 2014 15:41:38 +0000 Subject: [labnetwork] burn box location In-Reply-To: <5429CFEC.4020508@udel.edu> References: <5429CFEC.4020508@udel.edu> Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2E011E7760@P3PWEX2MB006.ex2.secureserver.net> Hello Iulian, John Shott was spot on with his assessment. Proper procedures keep both particles out of the cleanroom and your technicians safe. I sent this email to Todd Erickson, who is the product manager of our Gas Abatement Products division. I think you met him at the UGIM conference this past June. He responded as follows: "Most of the applications we see for the Guardian type burn boxes are installed in the chase or sub-fab area of the cleanroom. While the burn box is running there is no particle adders to the cleanroom because the tool is exhausted and the particles are enclosed in the burn box with some drag-out into the duct work. Cleaning the system while doing the PM is another situation that can be handled by proper procedures. Capping any parts immediately after removal helps immensely but also using a vacuum with a HEPA filter would be beneficial. Iulian, as with any process, it is imperative that the application be specified and matched with a certain type and size of POU scrubber. If a burn box is specified it must see only flammable gases like CO, H2, SiH4 and Hydrogencarbons." CSI supplies and services several different types of burn boxes, so we are well versed in how to effectively run and maintain these. If you have any questions, we have our Abatement Division sales manager (Gene Ungvarsky, formerly with CS Clean) in Boston that I can put you in touch with, or you can post them here and we'll answer them accordingly. Thank you! Tom Tom Britton Director of Sales Critical Systems, Inc. Direct: 208-890-1417 Office: 877-572-5515 www.CriticalSystemsInc.com [logo for email signature png] -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Monday, September 29, 2014 3:32 PM To: Fab Network Subject: [labnetwork] burn box location Dear Colleagues, I am looking at the possibility of using a burn box (using natural gas for fuel) to abate the exhaust from some CVD tools. I would have to locate it in the chase area. It appears that a burn box is not that clean; I can imagine "soot" spreading throughout the cleanroom during maintenance. Does anyone have burn boxes in the chase area? How do you keep the soot contained? Thank you very much. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD NanoFab University of Delaware Office: 163 ISE Lab Mail to: 250N ISE Lab Ship to: 165 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9501 bytes Desc: image001.png URL: From tbritton at criticalsystemsinc.com Tue Sep 30 13:36:27 2014 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Tue, 30 Sep 2014 17:36:27 +0000 Subject: [labnetwork] burn box location In-Reply-To: <6A848421F695C54A9210C1A873C96AC225043B26@WPVEXCMBX04.purdue.lcl> References: <5429CFEC.4020508@udel.edu> <6A848421F695C54A9210C1A873C96AC225043B26@WPVEXCMBX04.purdue.lcl> Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2E011E79A7@P3PWEX2MB006.ex2.secureserver.net> Hello gentlemen, John, excellent comments. Iulian, If your pumps are located in the chase and you are exhausting the pumps then you should not need to worry about them contaminating your cleanroom. The carbon-based oils in a wet pump can and would add to the possibility of build-up in the exhaust ductwork and present a fire hazard if left for many years. As far as the gowning, we had different sets for the maintenance technicians, blue, and the process people wore white. We of course had these tested in my many years as a fab manager and even after crawling around under a subfloor the blue gowns passed inspection. The technician gowns, were rejected only for tears and stains which happened quite often. Thanks, Todd Erickson Critical Systems, Inc. Director of Operations MN 612-328-2312 www.CriticalSystemsInc.com -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Weaver, John R Sent: Tuesday, September 30, 2014 6:24 AM To: 'Iulian Codreanu'; Fab Network Subject: Re: [labnetwork] burn box location Iulian - I am concerned about two things. First, are your pumps in the chase? If so, and if you are using any carbon-based oils (not dry pumps and not Fomblin), you are most likely putting paraffins into your airstream. These will pass right through a HEPA or ULPA filter and condense on cold surfaces like silicon wafers. If the pump issue is not a problem, the "soot" problem is of concern. It can have multiple effects, depending on the range of particle sizes. First, there are surface particles. When a person is cleaning the burn box are they wearing a cleanroom garment that will be worn elsewhere in the cleanroom, even just to enter and exit that chase? Also, cleanroom laundries are not geared to remove large percentages of contaminants, only small quantities. Garments that come in heavily soiled will not be as clean as other cleanroom garments after processing. Second, there is the issue of aerosol particles. Any size particles can deposit on chase walls and be a constant source of particles. People going into the chase and touching the wall with their cleanroom garment can spread it around the cleanroom. Aerosol soot can plug your prefilters and also plug your HEPA filters if the particle size allows a significant quantity through the prefilter. In general, I would be very concerned with that approach. If there is any way you can locate the burn boxes outside of your cleanroom airstream you are far better off. John -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Monday, September 29, 2014 5:32 PM To: Fab Network Subject: [labnetwork] burn box location Dear Colleagues, I am looking at the possibility of using a burn box (using natural gas for fuel) to abate the exhaust from some CVD tools. I would have to locate it in the chase area. It appears that a burn box is not that clean; I can imagine "soot" spreading throughout the cleanroom during maintenance. Does anyone have burn boxes in the chase area? How do you keep the soot contained? Thank you very much. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD NanoFab University of Delaware Office: 163 ISE Lab Mail to: 250N ISE Lab Ship to: 165 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork