[labnetwork] Litho Spinner

Garry J. Bordonaro bordonaro at cnf.cornell.edu
Mon Sep 8 15:50:42 EDT 2014


If your user requirements are not too demanding, try Laurell:
http://www.laurell.com/

 

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

Cornell University

Ithaca, NY  14853-2700

(607) 254-4936

 <mailto:bordonaro at cnf.cornell.edu> bordonaro at cnf.cornell.edu

 <http://www.cnf.cornell.edu/> http://www.cnf.cornell.edu/

 

 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Olona, Leonard E.
Sent: Monday, September 08, 2014 1:58 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Litho Spinner

 

All,

 

We are looking for a new research sized litho resist spinner.   3" sized
substrates max.   

 

Headway Research offers a nice spinner for around $8K.   Any suggestions
would be greatly appreciated.

 

Thank you,

-Len

 

Leonard E. Olona

Lab Manager, RIL <http://arrc.ou.edu/ril.html> 
Advanced Radar Research Center <http://arrc.ou.edu/>  
3190 Monitor Ave
Norman, OK 73019
Office: (405) 325-4374
Cell: (405) 630-9068

 

 

 

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