[labnetwork] Litho Spinner
Luciani, Vincent
Vincent.Luciani at nist.gov
Tue Sep 9 08:55:14 EDT 2014
One more for your survey.
We have a couple researchers who are very happy with these http://www.smartcoater.com/. I am not very familiar with them myself, perhaps a new player on the market. Definitely for the low volume lab. The reason they are popular here is that they are less than $3k which means we can buy on a credit card without the whole gov acquisition process.
Congratulations on your new position.
Vince
Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E.
Sent: Monday, September 08, 2014 1:58 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Litho Spinner
All,
We are looking for a new research sized litho resist spinner. 3" sized substrates max.
Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated.
Thank you,
-Len
Leonard E. Olona
Lab Manager, RIL<http://arrc.ou.edu/ril.html>
Advanced Radar Research Center <http://arrc.ou.edu/>
3190 Monitor Ave
Norman, OK 73019
Office: (405) 325-4374
Cell: (405) 630-9068
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