[labnetwork] Experiences with tram close to cleanroom facility?

[Iulian Codreanu]

Other EMI cancellation system vendors:
-Stefan Mayer Instruments
-Spicer Consulting

Other vibration cancellation system vendors:
http://www.techmfg.com/products/floorplatforms/quietisland.htm

iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
Office: 163 ISE Lab
Mail to: 250N ISE Lab
Ship to: 165 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784

On 9/9/2014 2:58 PM, Morrison, Richard H., Jr. wrote:
>
> Hi Leif,
>
> When we built our facility in 2012 we had vibration measurements and 
> magnetic field measurements taken in the areas where the Stepper, SEM 
> and AFM were to be located. These were 24 hour surveys. We have a 
> subway line located 1 block from our facility and a freight train line 
> 50 feet from the building.  Both surveys showed when the subway was 
> active, there was magnetic interference and significant vibration. 
>  However,  we were located on the 3^rd floor so that attenuated the 
> magnetic field enough and the vibration was below the specification of 
> the tool manufacturer.
>
> There are companies that sell electrical/magnetic shield systems we 
> use the following company for those solutions:
>
> Ets-lingren www.ets-lindgren.com <http://www.ets-lindgren.com>    they 
> make an excellent system.
>
> If you need a good float table this company makes a unit that has 
> active feedback control for vibration damping:
>
> *RDM INDUSTRIAL PRODUCTS, INC.*
>
> 1652 Watson Court
>
> Milpitas, CA 95035-6822
>
> Ph: (408) 945-8400 Fax: (408) 945-8433
>
> Website: www.rdm-ind.com
>
> Regards
>
> Rick
>
> Draper Laboratory
>
> Principal Member of the Technical Staff
>
> Group Leader Microfabrication Operations
>
> 555 Technology Square
>
> Cambridge Ma, 02139-3563
>
> www.draper.com
>
> rmorrison at draper.com
>
> W 617-258-3420
>
> C 508-930-3461
>
> *From:*labnetwork-bounces at mtl.mit.edu 
> [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Leif Johansen
> *Sent:* Tuesday, September 09, 2014 10:20 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] Experiences with tram close to cleanroom facility?
>
> Dear all network members,
>
> The City of Copenhagen is currently in the process of scheduling the 
> construction of an electrically driven tram which may run 
> approximately 80 feet (ca. 25 meters) past our cleanroom facility. 
> There will even be a stop right outside on the road next to us -- i.e. 
> many accelerations and decelerations which will emit rather large 
> magnetic fields.
>
> Naturally, we are slightly concerned about maintaining operations -- 
> especially of our e-beam writer and SEM equipment. Are any of the lab 
> members facing similar challenges and, if so, how do you tackle them? 
> Is noise cancellation a viable option with large transient magnetic 
> fields?
>
> Best regards,
>
> Leif
>
> *Leif S. Johansen *
>
> Head of Operations
>
> DTU Danchip
>
> *Technical University of Denmark*
>
> 	
>
> http://www.dtu.dk/images/DTU_email_logo_01.gif
>
> Danchip
>
> Ørsteds Plads, Byg. 347
>
> 2800 Lyngby
>
> Direct +45 45255713
>
> Mobile +45 25348992
>
> lesjo at danchip.dtu.dk <mailto:lesjo at danchip.dtu.dk>
>
> www.danchip.dtu.dk/ <http://www.danchip.dtu.dk/>
>
>
>
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