[labnetwork] burn box location

[Tom Britton]

Hello Iulian,



John Shott was spot on with his assessment. Proper procedures keep both particles out of the cleanroom and your technicians safe. I sent this email to Todd Erickson, who is the product manager of our Gas Abatement Products division. I think you met him at the UGIM conference this past June.



He responded as follows:


"Most of the applications we see for the Guardian type burn boxes are installed in the chase or sub-fab area of the cleanroom. While the burn box is running there is no particle adders to the cleanroom because the tool is exhausted and the particles are enclosed in the burn box with some drag-out into the duct work. Cleaning the system while doing the PM is another situation that can be handled by proper procedures. Capping any parts immediately after removal helps immensely but also using a vacuum with a HEPA filter would be beneficial. Iulian, as with any process, it is imperative that the application be specified and matched with a certain type and size of POU scrubber. If a burn box is specified it must see only flammable gases like CO, H2, SiH4 and  Hydrogencarbons."



CSI supplies and services several different types of burn boxes, so we are well versed in how to effectively run and maintain these. If you have any questions, we have our Abatement Division sales manager (Gene Ungvarsky, formerly with CS Clean) in Boston that I can put you in touch with, or you can post them here and we'll answer them accordingly.

Thank you!

Tom

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208-890-1417
Office: 877-572-5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

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-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu
Sent: Monday, September 29, 2014 3:32 PM
To: Fab Network
Subject: [labnetwork] burn box location



Dear Colleagues,



I am looking at the possibility of using a burn box (using natural gas for fuel) to abate the exhaust from some CVD tools.  I would have to locate it in the chase area.  It appears that a burn box is not that clean; I can imagine "soot" spreading throughout the cleanroom during maintenance.  Does anyone have burn boxes in the chase area?  How do you keep the soot contained?



Thank you very much.



Iulian



--

iulian Codreanu, Ph.D.

Director of Operations, UD NanoFab

University of Delaware

Office: 163 ISE Lab

Mail to: 250N ISE Lab

Ship to: 165 ISE Lab

221 Academy Street

Newark, DE 19716

302-831-2784





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