From agregg at abbiegregg.com Wed Apr 1 00:01:29 2015 From: agregg at abbiegregg.com (Abbie Gregg) Date: Wed, 1 Apr 2015 00:01:29 -0400 Subject: [labnetwork] Smoke detectors in the clean room In-Reply-To: References: , <43D7E05E-0266-439E-8A13-8F787DA34C20@nd.edu> Message-ID: <5863FB4055D90542A7A7DAE0CEF2ACB0544ED93F98@E2K7CCR1.netvigour.com> Cleanrooms are indeed notorious for too much dilution of smoke to detect it. That is why VESDA and similar systems need MULTIPLE points of detection that are in the air path. A model of air flow in the cleanroom would help to determine the best places to locate the very sensitive smoke detectors needed (eg, VESDA or similar). Probably in your case the air with the small amount of smoke did not pass close enough to the sensors, or they were not sensitive enough, or both. You likely would have needed quite a few more sensors to detect it, as well. We would have to know more about your air handlers and the exact room layout and where the fire was actually located that went un- detected. What caused someone to finally notice the fire or smoke? Abbie Gregg President Abbie Gregg, Inc. 1130 East University Drive, Suite 105 Tempe, Arizona 85281 Phone 480 446-8000 x 107 Cell 480-577-5083 FAX 480-446-8001 email agregg at abbiegregg.com website www.abbiegregg.com CONFIDENTIALITY NOTICE: All information contained in or attached to this email constitutes confidential information belonging to Abbie Gregg, Inc., its affiliates and subsidiaries and/or its clients. This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee(s) only. All other uses or disclosures are strictly prohibited. If the reader is not the intended recipient you are hereby notified that the perusal, copying or dissemination of this email is strictly prohibited. If you have received this communication in error, please notify the sender, and delete all copies of this message and its attachments immediately. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu Sent: Monday, March 30, 2015 5:15 PM To: Labnetwork Subject: Re: [labnetwork] Smoke detectors in the clean room I bet Abbie Gregg has a good response for the code standards here in the US. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ ________________________________ From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Mike Young [myoung6 at nd.edu] Sent: Monday, March 30, 2015 9:26 AM To: Labnetwork Subject: Re: [labnetwork] Smoke detectors in the clean room Unless I am missing something, in most jurisdictions, this is determined entirely by the applicable building and/or fire code(s). Cleanroom management generally have no say in the matter. --Mike On Mar 30, 2015, at 5:49 AM, savitha.p > wrote: Hi! We had a fire recently inside the cleanroom and our smoke detectors did not give any warning even though the fire was burning for ~5min before it was put out. We currently have smoke detectors, a VESDA system installed inside the room with 3 detectors, one at the plenum level, one in the room and one under the raised floor (room is square shaped with ~700 sq.ft area, Class 1000). We were wondering how the other fabs handle these kind of situations. What is the ideal distance between smoke detectors and how do you ensure that the smoke is driven over the detectors no matter what the location of the fire is. Please let us know your thoughts on this matter. Thanks and regards, Savitha ____________________________________________ Dr.Savitha P, Technology Manager National Nanofabrication Centre, Centre for Nanoscience and Engineering Indian Institute of Science Bangalore - 560012 India. Ph: +91 80 2293 3254 The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be www.cense.iisc.ernet.in _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 637-6302 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Wed Apr 1 10:21:58 2015 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas) Date: Wed, 1 Apr 2015 14:21:58 +0000 Subject: [labnetwork] new materials for our sputter tool Message-ID: Colleagues, I have a customer who wants to use YF3 (Yttrium Fluoride) , Y2O3 (Yttrium Oxide), ZnS (Zinc Sulfide) , in our Lesker Sputter tool. It's a new lab line load lock tool (DC, DC-Pulse and RF) Does anyone have a "Red Flags" for these materials? (I just don't have experience with these specifically) Thanks Tom Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax [cid:image001.png at 01D06C65.AFA7A280] -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: application/octet-stream Size: 57996 bytes Desc: not available URL: From rmorrison at draper.com Wed Apr 1 11:58:49 2015 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Wed, 01 Apr 2015 15:58:49 +0000 Subject: [labnetwork] DRIE Tool Message-ID: I would like to thank everyone who responded to my general inquiry on tool vendors for DRIE tool. After a very lengthily review of references and etch test we elected to purchase a Rapier tool from SPTS. If any of you wants to go into this deeper send me an email off the lab-net list and I can respond. Your candid responses to my question were very helpful. Again thanks for your help. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Wed Apr 1 12:06:47 2015 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Wed, 01 Apr 2015 16:06:47 +0000 Subject: [labnetwork] Convectron gauges In-Reply-To: References: Message-ID: We use a TC vacuum gage with a digital readout, we have not experienced the issue you talk about. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven Sent: Tuesday, March 31, 2015 4:26 PM To: Fab Network (labnetwork at mtl.mit.edu) Subject: [labnetwork] Convectron gauges Greeting fellow Nanofabbers, Has anyone experienced frequent failures of convectron style vacuum gauges in a Xenon Difluoride etcher? I chose to use this style because it is important for us to observe vacuum over a wide range for this process, but within 10 hours of running time, the readout displays "bad sensor" or the gauge will not read above 3 Torr. I have been using a major vacuum component supplier's version of a popular manufacturer's gauge and we have an isolation valve that closes during process. I suspect residual XeF2 is the culprit but I would like to hear from the community if there have been similar failures. Thanks! Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From myoung6 at nd.edu Wed Apr 1 12:28:55 2015 From: myoung6 at nd.edu (Mike Young) Date: Wed, 1 Apr 2015 12:28:55 -0400 Subject: [labnetwork] new materials for our sputter tool In-Reply-To: References: Message-ID: <587B8167-717D-448E-8B1F-2F860EB4427E@nd.edu> Hi Tom. I have done *evaporated* ZnS in a *non-loadlocked* eveporator. The evaporation worked, but a few months after that, the evaporator was found to be trash - apparently a significant amount of H2SO4 is formed by the interaction of moist lab air with freshly-deposited ZnS. This may or may not be an issue for a good loadlocked sputtering system. Better safe than sorry... --Mike > On Apr 1, 2015, at 10:21 AM, Ferraguto, Thomas wrote: > > Colleagues, > > I have a customer who wants to use YF3 (Yttrium Fluoride) , Y2O3 (Yttrium Oxide), ZnS (Zinc Sulfide) , in our Lesker Sputter tool. It's a new lab line load lock tool (DC, DC-Pulse and RF) > > Does anyone have a "Red Flags" for these materials? (I just don't have experience with these specifically) > > Thanks > Tom > > > Thomas S. Ferraguto > Saab ETIC Nanofabrication Laboratory Director > University of Massachusetts Lowell > 1 University Avenue > Lowell MA 01854-5120 > 978-934-1809 land > 617-755-0910 mobile > 978-934-1014 fax > > -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 637-6302 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 -------------- next part -------------- An HTML attachment was scrubbed... URL: From prk1 at sfu.ca Wed Apr 1 12:32:14 2015 From: prk1 at sfu.ca (Philip Kubik) Date: Wed, 1 Apr 2015 09:32:14 -0700 Subject: [labnetwork] Convectron gauges In-Reply-To: References: Message-ID: <002301d06c99$699ac090$3cd041b0$@sfu.ca> Hello Steve, I had the same problem with a CF4 etcher. The gauge manufacturer told me that fluorine attacks the coating on the filament. Regards, Philip _________________________ Philip Kubik, Ph.D. Staff Scientist 4D Labs, Simon Fraser University 8888 University Dr. Burnaby, BC, Canada V5A 1S6 Office phone: 778-782-9818 Email: Kubik at 4DLabs.ca From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven Sent: March 31, 2015 13:26 To: Fab Network (labnetwork at mtl.mit.edu) Subject: [labnetwork] Convectron gauges Greeting fellow Nanofabbers, Has anyone experienced frequent failures of convectron style vacuum gauges in a Xenon Difluoride etcher? I chose to use this style because it is important for us to observe vacuum over a wide range for this process, but within 10 hours of running time, the readout displays "bad sensor" or the gauge will not read above 3 Torr. I have been using a major vacuum component supplier's version of a popular manufacturer's gauge and we have an isolation valve that closes during process. I suspect residual XeF2 is the culprit but I would like to hear from the community if there have been similar failures. Thanks! Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From mark.walters at duke.edu Wed Apr 1 13:40:54 2015 From: mark.walters at duke.edu (Mark Walters, Ph.D.) Date: Wed, 1 Apr 2015 17:40:54 +0000 Subject: [labnetwork] new materials for our sputter tool In-Reply-To: References: Message-ID: We once made the mistake of trying e-beam evaporating ZnS in our Lesker PVD75 system. We found that the sulfur totally contaminated the system and pumps. We had to totally clean out the chamber and rebuild the pumps. I've later learned that you pretty much need a dedicated system for sulfides with a pumping package that can handle those materials. Mark D. Walters, Ph.D. Director, Shared Materials Instrumentation Facility (SMIF) Duke University Box 90271 Durham, NC 27708-0271 http://smif.lab.duke.edu Phone: (919) 660-5486 Fax: (919) 660-5491 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ferraguto, Thomas Sent: Wednesday, April 01, 2015 10:22 AM To: 'labnetwork at mtl.mit.edu' Subject: [labnetwork] new materials for our sputter tool Colleagues, I have a customer who wants to use YF3 (Yttrium Fluoride) , Y2O3 (Yttrium Oxide), ZnS (Zinc Sulfide) , in our Lesker Sputter tool. It's a new lab line load lock tool (DC, DC-Pulse and RF) Does anyone have a "Red Flags" for these materials? (I just don't have experience with these specifically) Thanks Tom Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax [cid:image001.png at 01D06C65.AFA7A280] From jrg at lesker.com Wed Apr 1 14:10:06 2015 From: jrg at lesker.com (JR Gaines) Date: Wed, 1 Apr 2015 18:10:06 +0000 Subject: [labnetwork] Convectron gauges In-Reply-To: References: Message-ID: Hello Steve, One approach, when using corrosive gases, would be to use a gauge with a mechanical barrier between the environment to be sensed and the active component of the detector, like a capacitance manometer. J.R. JR Gaines | Technical Director | Tel: +1 (412) 896-8402 | Cell: +1 (614) 446-2202 | Fax: +1 (412) 872-5046 | Email: jrg at lesker.com | Skype ID: kjlc.jrg | [http://www.lesker.com/newweb/emailsignature/EmailSignature_KJLCLogoMission.png] [http://www.lesker.com/newweb/emailsignature/EmailSignature_Twitter.png] [http://www.lesker.com/newweb/emailsignature/EmailSignature_LinkedIn.png] If this email is transmitted to you in error, please notify me, and then delete this email and all copies. If this email is sent for legal or business purposes, (a) this email and its content or attachments may include confidential and/or proprietary information of Kurt J. Lesker Company, in which case all rights to that information are reserved by the Company, and (b) your right and authorization to retain, and use, this information is limited to the purpose(s) expressly stated in, or reasonably implied by, this email. Any questions should be directed to me. Thank you. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven Sent: Tuesday, March 31, 2015 4:26 PM To: Fab Network (labnetwork at mtl.mit.edu) Subject: [labnetwork] Convectron gauges Greeting fellow Nanofabbers, Has anyone experienced frequent failures of convectron style vacuum gauges in a Xenon Difluoride etcher? I chose to use this style because it is important for us to observe vacuum over a wide range for this process, but within 10 hours of running time, the readout displays ?bad sensor? or the gauge will not read above 3 Torr. I have been using a major vacuum component supplier?s version of a popular manufacturer?s gauge and we have an isolation valve that closes during process. I suspect residual XeF2 is the culprit but I would like to hear from the community if there have been similar failures. Thanks! Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrg at lesker.com Wed Apr 1 14:04:37 2015 From: jrg at lesker.com (JR Gaines) Date: Wed, 1 Apr 2015 18:04:37 +0000 Subject: [labnetwork] new materials for our sputter tool In-Reply-To: References: Message-ID: Hello Thomas, Our Rob Belan, who you will meet next week, provided the following comments: "Red flags galore. The most problematic is the ZnS - which will decompose during sputtering and will leave traces of sulfur throughout the system. Sulfur will contaminate most subsequent films as it only needs to get to about 80C before it vaporizes in sufficient quantities to contaminate films. Fine particulate can be generated from a ZnS deposition as well and that is very hard to completely remove from a vacuum system. ZnS and most sulfides should only be run in systems that are dedicated to such films. Fluorides in general are fairly stable - I have no direct experience with YF3. Yttrium Oxide should be OK and I have sputtered this material in the superconductor days." Looks like you have also received some warnings from others on the ZnS. See you next week. J.R. JR Gaines | Technical Director | Tel: +1 (412) 896-8402 | Cell: +1 (614) 446-2202 | Fax: +1 (412) 872-5046 | Email: jrg at lesker.com | http://www.lesker.com If this email is transmitted to you in error, please notify me, and then delete this email and all copies. If this email is sent for legal or business purposes, (a) this email and its content or attachments may include confidential and/or proprietary information of Kurt J. Lesker Company, in which case all rights to that information are reserved by the Company, and (b) your right and authorization to retain, and use, this information is limited to the purpose(s)expressly stated in, or reasonably implied by, this email. Any questions should be directed to me. Thank you. -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ferraguto, Thomas Sent: Wednesday, April 01, 2015 10:22 AM To: 'labnetwork at mtl.mit.edu' Subject: [labnetwork] new materials for our sputter tool Colleagues, I have a customer who wants to use YF3 (Yttrium Fluoride) , Y2O3 (Yttrium Oxide), ZnS (Zinc Sulfide) , in our Lesker Sputter tool. It's a new lab line load lock tool (DC, DC-Pulse and RF) Does anyone have a "Red Flags" for these materials? (I just don't have experience with these specifically) Thanks Tom Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax [cid:image001.png at 01D06C65.AFA7A280] From sbhas at uchicago.edu Thu Apr 9 11:34:15 2015 From: sbhas at uchicago.edu (Shivakumar Bhaskaran) Date: Thu, 9 Apr 2015 15:34:15 +0000 Subject: [labnetwork] Filter type for the FCU Message-ID: My building Facility Engineer was trying to change the filters in the FCU. He found that the FCU was installed with MERV8 type filter. I looked into the specs and it mentioned its used in commercial building. For cleanroom the filter type is MERV20. Before we change , I want to consult with you guys on what type of filters do you use in your FCU. Our FCU is located in the Chase area of the Cleanroom ceiling. The filter that was installed were Pre-pleat 40 LPD. The filter frame is cardboard, I am worried that this cardboard framed filter shouldn't be used in the FCU instead it should be metal frame or plastic. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Thu Apr 9 13:02:29 2015 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Thu, 09 Apr 2015 17:02:29 +0000 Subject: [labnetwork] Filter type for the FCU In-Reply-To: References: Message-ID: Here is a good cross-reference guide. We have MERV-8 as pre-filters in our makeup air unit they have plastic frames they are 2" thick. The final filter in the MAU is 4" thick Merv-15 Precision Cell ll 95% filters, again plastic frame. This air is then feed to the chases and passed into Fan Filter HEPA ceiling units. Hope this helps I am not familiar with a FCU, what does that stand for. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 11:34 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Filter type for the FCU My building Facility Engineer was trying to change the filters in the FCU. He found that the FCU was installed with MERV8 type filter. I looked into the specs and it mentioned its used in commercial building. For cleanroom the filter type is MERV20. Before we change , I want to consult with you guys on what type of filters do you use in your FCU. Our FCU is located in the Chase area of the Cleanroom ceiling. The filter that was installed were Pre-pleat 40 LPD. The filter frame is cardboard, I am worried that this cardboard framed filter shouldn't be used in the FCU instead it should be metal frame or plastic. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: ASHRAE+MERV+CROSS+REFERENCE.PDF Type: application/pdf Size: 140427 bytes Desc: ASHRAE+MERV+CROSS+REFERENCE.PDF URL: From sbhas at uchicago.edu Thu Apr 9 13:39:15 2015 From: sbhas at uchicago.edu (Shivakumar Bhaskaran) Date: Thu, 9 Apr 2015 17:39:15 +0000 Subject: [labnetwork] Filter type for the FCU In-Reply-To: References: Message-ID: FCU- Fan Coil Unit. We have opening on each side (right/left wall) of the cleanroom were the cleanroom air is pushed out of the cleanroom and comes to the chase and then go to the FCU and then goes to the HEPA filter (we are recirculating the cleanroom air). Even though the chase area is not maintained at class 100/ 1000, we want to make sure we install the correct filter type to maintain the air quality of the cleanroom, so that we don't make the HEPA filters work hard with less quality air coming from the Chase air. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ From: Morrison, Richard H., Jr. [mailto:rmorrison at draper.com] Sent: Thursday, April 09, 2015 12:02 PM To: Shivakumar Bhaskaran; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Here is a good cross-reference guide. We have MERV-8 as pre-filters in our makeup air unit they have plastic frames they are 2" thick. The final filter in the MAU is 4" thick Merv-15 Precision Cell ll 95% filters, again plastic frame. This air is then feed to the chases and passed into Fan Filter HEPA ceiling units. Hope this helps I am not familiar with a FCU, what does that stand for. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 11:34 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Filter type for the FCU My building Facility Engineer was trying to change the filters in the FCU. He found that the FCU was installed with MERV8 type filter. I looked into the specs and it mentioned its used in commercial building. For cleanroom the filter type is MERV20. Before we change , I want to consult with you guys on what type of filters do you use in your FCU. Our FCU is located in the Chase area of the Cleanroom ceiling. The filter that was installed were Pre-pleat 40 LPD. The filter frame is cardboard, I am worried that this cardboard framed filter shouldn't be used in the FCU instead it should be metal frame or plastic. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From tribble at fas.harvard.edu Thu Apr 9 16:59:31 2015 From: tribble at fas.harvard.edu (Tribble, Thomas) Date: Thu, 9 Apr 2015 20:59:31 +0000 Subject: [labnetwork] Filter type for the FCU In-Reply-To: References: Message-ID: <2FA135939A3C9644A89D6AF332BE5FD6018D7CADDC@harvandmbx05.fasmail.priv> FCU = Fan Coil Unit. It would be used to temper air, someplace before your cleanroom filters. An FCU is not the appropriate equipment to supply air to a cleanroom as it typically would not have enough fan power to push are through an appropriate filter. You may be able to upgrade the FCU filters to a MERV 13 [and I would] because any load you take off your HEPA final filters will save you money] but they cannot BE your final filter. An FCU would be used to address a identified heat load as an example. - TAT From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr. Sent: Thursday, April 09, 2015 1:02 PM To: Shivakumar Bhaskaran; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Filter type for the FCU Here is a good cross-reference guide. We have MERV-8 as pre-filters in our makeup air unit they have plastic frames they are 2" thick. The final filter in the MAU is 4" thick Merv-15 Precision Cell ll 95% filters, again plastic frame. This air is then feed to the chases and passed into Fan Filter HEPA ceiling units. Hope this helps I am not familiar with a FCU, what does that stand for. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 11:34 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Filter type for the FCU My building Facility Engineer was trying to change the filters in the FCU. He found that the FCU was installed with MERV8 type filter. I looked into the specs and it mentioned its used in commercial building. For cleanroom the filter type is MERV20. Before we change , I want to consult with you guys on what type of filters do you use in your FCU. Our FCU is located in the Chase area of the Cleanroom ceiling. The filter that was installed were Pre-pleat 40 LPD. The filter frame is cardboard, I am worried that this cardboard framed filter shouldn't be used in the FCU instead it should be metal frame or plastic. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From Jack.Paul at hdrinc.com Thu Apr 9 17:11:38 2015 From: Jack.Paul at hdrinc.com (Paul, Jack) Date: Thu, 9 Apr 2015 21:11:38 +0000 Subject: [labnetwork] Filter type for the FCU In-Reply-To: References: Message-ID: Hi Shiva, A couple of comments if I may. Fan Coil Units are notoriously low power fans, so most of the time they are not equipped with a filter at all. The fans cannot typically handle the pressure drop required to draw air through the filter. I doubt that the FCU's installed in your cleanroom will be capable of handling a MERV 20 filter, and the fan will overheat. I may have misunderstood your air management scheme, but I believe the FCU is effectively only drawing air from the cleanroom chase and then pushing it back into a plenum above the cleanroom ceiling, correct? Any air it draws out of the chase has come from the clean side, and that same air it pushes back into the plenum above the cleanroom ceiling will be filtered by the HEPA's in the Fan/Filter Units. It should not need much filtration on it, if any. In a common cleanroom design approach, a recirculating air handler (a beefed up much larger version of your Fan Coil Unit) will not have a filter on the inlet side. Occasionally, it might include a light duty filter (such as MERV 8) or as we sometimes call it "a wiper catcher". [If I've misunderstood and you are not using Fan/Filter Units in the ceiling of the cleanroom, but instead have a pressurized plenum, then the FCU is providing the pressure to push the air through the HEPA filters? In any case, the air will be filtered at the ceiling before entering the cleanroom so a filter on the FCU should not be necessary] If you do keep a filter on the FCU, you should definitely install filters with plastic or metal frames. No cardboard. In this case, I would even suggest you are better off without the existing filter at all. (and the fan in the FCU will operate more efficiently as well). Hope this helps, and hasn't created confusion. Regards, Jack Paul Jack Paul, RA, LEED AP BD+C Laboratory Planner/Programmer Vice President HDR 3200 E Camelback Rd, Suite 250 Phoenix, Arizona 85018 D 602.474.3940 M 602.369.2086 jack.paul at hdrinc.com hdrinc.com/follow-us From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 10:39 AM To: Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Filter type for the FCU FCU- Fan Coil Unit. We have opening on each side (right/left wall) of the cleanroom were the cleanroom air is pushed out of the cleanroom and comes to the chase and then go to the FCU and then goes to the HEPA filter (we are recirculating the cleanroom air). Even though the chase area is not maintained at class 100/ 1000, we want to make sure we install the correct filter type to maintain the air quality of the cleanroom, so that we don't make the HEPA filters work hard with less quality air coming from the Chase air. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ From: Morrison, Richard H., Jr. [mailto:rmorrison at draper.com] Sent: Thursday, April 09, 2015 12:02 PM To: Shivakumar Bhaskaran; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Here is a good cross-reference guide. We have MERV-8 as pre-filters in our makeup air unit they have plastic frames they are 2" thick. The final filter in the MAU is 4" thick Merv-15 Precision Cell ll 95% filters, again plastic frame. This air is then feed to the chases and passed into Fan Filter HEPA ceiling units. Hope this helps I am not familiar with a FCU, what does that stand for. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 11:34 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Filter type for the FCU My building Facility Engineer was trying to change the filters in the FCU. He found that the FCU was installed with MERV8 type filter. I looked into the specs and it mentioned its used in commercial building. For cleanroom the filter type is MERV20. Before we change , I want to consult with you guys on what type of filters do you use in your FCU. Our FCU is located in the Chase area of the Cleanroom ceiling. The filter that was installed were Pre-pleat 40 LPD. The filter frame is cardboard, I am worried that this cardboard framed filter shouldn't be used in the FCU instead it should be metal frame or plastic. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From sbhas at uchicago.edu Thu Apr 9 19:21:07 2015 From: sbhas at uchicago.edu (Shivakumar Bhaskaran) Date: Thu, 9 Apr 2015 23:21:07 +0000 Subject: [labnetwork] Filter type for the FCU In-Reply-To: References: Message-ID: Hello Jack, What you saying is correct. The cleanroom was installed before I joined here and I am trying to figure out how this works. Correct me I am wrong. As its been more than two year since it was installed I am trying to add the pieces based on inputs from different people and trying to correlate with my contractors and facility personnel. The supply from the Air Handler unit and FCU supply are going to the HEPA filters. The return opening with the filters on the FCU are exposed to the chase area. Attaching the pdf of our systems. Based on the interaction with other Cleanroom Managers I see that you guys are having prefilters on top of the HEPA filters, is it recommended?, I was looking into the spec of the model of the unit I have and datasheet showing prefilters on the HEPA filters. Based on my arrangement if I have prefilter installed will there be going to be effect on the air balance/pressure on the cleanroom. Thanks for all your inputs. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ From: Paul, Jack [mailto:Jack.Paul at hdrinc.com] Sent: Thursday, April 09, 2015 4:12 PM To: Shivakumar Bhaskaran; Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Hi Shiva, A couple of comments if I may. Fan Coil Units are notoriously low power fans, so most of the time they are not equipped with a filter at all. The fans cannot typically handle the pressure drop required to draw air through the filter. I doubt that the FCU's installed in your cleanroom will be capable of handling a MERV 20 filter, and the fan will overheat. I may have misunderstood your air management scheme, but I believe the FCU is effectively only drawing air from the cleanroom chase and then pushing it back into a plenum above the cleanroom ceiling, correct? Any air it draws out of the chase has come from the clean side, and that same air it pushes back into the plenum above the cleanroom ceiling will be filtered by the HEPA's in the Fan/Filter Units. It should not need much filtration on it, if any. In a common cleanroom design approach, a recirculating air handler (a beefed up much larger version of your Fan Coil Unit) will not have a filter on the inlet side. Occasionally, it might include a light duty filter (such as MERV 8) or as we sometimes call it "a wiper catcher". [If I've misunderstood and you are not using Fan/Filter Units in the ceiling of the cleanroom, but instead have a pressurized plenum, then the FCU is providing the pressure to push the air through the HEPA filters? In any case, the air will be filtered at the ceiling before entering the cleanroom so a filter on the FCU should not be necessary] If you do keep a filter on the FCU, you should definitely install filters with plastic or metal frames. No cardboard. In this case, I would even suggest you are better off without the existing filter at all. (and the fan in the FCU will operate more efficiently as well). Hope this helps, and hasn't created confusion. Regards, Jack Paul Jack Paul, RA, LEED AP BD+C Laboratory Planner/Programmer Vice President HDR 3200 E Camelback Rd, Suite 250 Phoenix, Arizona 85018 D 602.474.3940 M 602.369.2086 jack.paul at hdrinc.com hdrinc.com/follow-us From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 10:39 AM To: Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Filter type for the FCU FCU- Fan Coil Unit. We have opening on each side (right/left wall) of the cleanroom were the cleanroom air is pushed out of the cleanroom and comes to the chase and then go to the FCU and then goes to the HEPA filter (we are recirculating the cleanroom air). Even though the chase area is not maintained at class 100/ 1000, we want to make sure we install the correct filter type to maintain the air quality of the cleanroom, so that we don't make the HEPA filters work hard with less quality air coming from the Chase air. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ From: Morrison, Richard H., Jr. [mailto:rmorrison at draper.com] Sent: Thursday, April 09, 2015 12:02 PM To: Shivakumar Bhaskaran; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Here is a good cross-reference guide. We have MERV-8 as pre-filters in our makeup air unit they have plastic frames they are 2" thick. The final filter in the MAU is 4" thick Merv-15 Precision Cell ll 95% filters, again plastic frame. This air is then feed to the chases and passed into Fan Filter HEPA ceiling units. Hope this helps I am not familiar with a FCU, what does that stand for. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 11:34 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Filter type for the FCU My building Facility Engineer was trying to change the filters in the FCU. He found that the FCU was installed with MERV8 type filter. I looked into the specs and it mentioned its used in commercial building. For cleanroom the filter type is MERV20. Before we change , I want to consult with you guys on what type of filters do you use in your FCU. Our FCU is located in the Chase area of the Cleanroom ceiling. The filter that was installed were Pre-pleat 40 LPD. The filter frame is cardboard, I am worried that this cardboard framed filter shouldn't be used in the FCU instead it should be metal frame or plastic. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: FCU_HEPA_AHU.pdf Type: application/pdf Size: 124451 bytes Desc: FCU_HEPA_AHU.pdf URL: From Jack.Paul at hdrinc.com Thu Apr 9 19:56:11 2015 From: Jack.Paul at hdrinc.com (Paul, Jack) Date: Thu, 9 Apr 2015 23:56:11 +0000 Subject: [labnetwork] Filter type for the FCU In-Reply-To: References: Message-ID: Hi Shiva, Thanks for the photos. Very helpful. It looks like you have your make-up air dumping into the ceiling space, where it mixes with the air coming from the Fan Coil Unit. That's good as it will give you the best consistency of temperature and humidity across the cleanroom. The Fan Filter Units (FFU's) are doing all the "work" of recirculating the air and the Fan Coil Unit (FCU) is only doing enough work to pull air out of the chase, across the sensible cooling coil, and into the ceiling space. To answer your question regarding pre-filters on the FFU's, most new FFU's are available with the option to install a pre-filter, but it is not required. The purpose of the pre-filter in that location is mostly to protect the fan motor from any "big stuff" like cleanroom wipers or pieces of paper that get entrained in the air stream, and particle build-up on the motor itself. They are typically fiberglass in an aluminum (or other metal) frame. There is a slight reduction in airflow through the FFU when you add the pre-filter, but it can be accommodated by speeding up the FFU motor if you have variable speed motors. If you have 2 speed or 3 speed motors, you might be limited, but overall it should not upset your air balance too much. You would see the difference in the face velocity of the HEPA on the FFU, so if you are happy with the current face velocity (which also equates to volume change or air change rate) then you could speed up the motors to until you achieved the same face velocity. The main purpose of the pre-filter on the FCU is to protect the cooling coils in the FCU from dust build-up. It doesn't really do much fine particulate filtering since that job is done by the HEPA's. But the air going in should be pretty clean since it just came through the cleanroom. I do understand the concern with loading the HEPA's, but if your cleanroom users have good protocol, it is typical for your HEPA's to last 10 years. If you do decide to replace the current cardboard framed filters, we would suggest a MERV 7 or 8 fiberglass media filter in an aluminum or plastic frame (HDPE for example), sized to fit the FCU of course. A MERV 17 or 18 (i.e. HEPA) or a MERV 20 (i.e. ULPA) filter will reduce the air flow through the FCU substantially due to the very high pressure drop across the filter. Let me know if I can help further. Jack Jack Paul, RA, LEED AP BD+C Laboratory Planner/Programmer Vice President HDR 3200 E Camelback Rd, Suite 250 Phoenix, Arizona 85018 D 602.474.3940 M 602.369.2086 jack.paul at hdrinc.com hdrinc.com/follow-us From: Shivakumar Bhaskaran [mailto:sbhas at uchicago.edu] Sent: Thursday, April 09, 2015 4:21 PM To: Paul, Jack; Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Hello Jack, What you saying is correct. The cleanroom was installed before I joined here and I am trying to figure out how this works. Correct me I am wrong. As its been more than two year since it was installed I am trying to add the pieces based on inputs from different people and trying to correlate with my contractors and facility personnel. The supply from the Air Handler unit and FCU supply are going to the HEPA filters. The return opening with the filters on the FCU are exposed to the chase area. Attaching the pdf of our systems. Based on the interaction with other Cleanroom Managers I see that you guys are having prefilters on top of the HEPA filters, is it recommended?, I was looking into the spec of the model of the unit I have and datasheet showing prefilters on the HEPA filters. Based on my arrangement if I have prefilter installed will there be going to be effect on the air balance/pressure on the cleanroom. Thanks for all your inputs. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ From: Paul, Jack [mailto:Jack.Paul at hdrinc.com] Sent: Thursday, April 09, 2015 4:12 PM To: Shivakumar Bhaskaran; Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Hi Shiva, A couple of comments if I may. Fan Coil Units are notoriously low power fans, so most of the time they are not equipped with a filter at all. The fans cannot typically handle the pressure drop required to draw air through the filter. I doubt that the FCU's installed in your cleanroom will be capable of handling a MERV 20 filter, and the fan will overheat. I may have misunderstood your air management scheme, but I believe the FCU is effectively only drawing air from the cleanroom chase and then pushing it back into a plenum above the cleanroom ceiling, correct? Any air it draws out of the chase has come from the clean side, and that same air it pushes back into the plenum above the cleanroom ceiling will be filtered by the HEPA's in the Fan/Filter Units. It should not need much filtration on it, if any. In a common cleanroom design approach, a recirculating air handler (a beefed up much larger version of your Fan Coil Unit) will not have a filter on the inlet side. Occasionally, it might include a light duty filter (such as MERV 8) or as we sometimes call it "a wiper catcher". [If I've misunderstood and you are not using Fan/Filter Units in the ceiling of the cleanroom, but instead have a pressurized plenum, then the FCU is providing the pressure to push the air through the HEPA filters? In any case, the air will be filtered at the ceiling before entering the cleanroom so a filter on the FCU should not be necessary] If you do keep a filter on the FCU, you should definitely install filters with plastic or metal frames. No cardboard. In this case, I would even suggest you are better off without the existing filter at all. (and the fan in the FCU will operate more efficiently as well). Hope this helps, and hasn't created confusion. Regards, Jack Paul Jack Paul, RA, LEED AP BD+C Laboratory Planner/Programmer Vice President HDR 3200 E Camelback Rd, Suite 250 Phoenix, Arizona 85018 D 602.474.3940 M 602.369.2086 jack.paul at hdrinc.com hdrinc.com/follow-us From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 10:39 AM To: Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Filter type for the FCU FCU- Fan Coil Unit. We have opening on each side (right/left wall) of the cleanroom were the cleanroom air is pushed out of the cleanroom and comes to the chase and then go to the FCU and then goes to the HEPA filter (we are recirculating the cleanroom air). Even though the chase area is not maintained at class 100/ 1000, we want to make sure we install the correct filter type to maintain the air quality of the cleanroom, so that we don't make the HEPA filters work hard with less quality air coming from the Chase air. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ From: Morrison, Richard H., Jr. [mailto:rmorrison at draper.com] Sent: Thursday, April 09, 2015 12:02 PM To: Shivakumar Bhaskaran; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Here is a good cross-reference guide. We have MERV-8 as pre-filters in our makeup air unit they have plastic frames they are 2" thick. The final filter in the MAU is 4" thick Merv-15 Precision Cell ll 95% filters, again plastic frame. This air is then feed to the chases and passed into Fan Filter HEPA ceiling units. Hope this helps I am not familiar with a FCU, what does that stand for. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 11:34 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Filter type for the FCU My building Facility Engineer was trying to change the filters in the FCU. He found that the FCU was installed with MERV8 type filter. I looked into the specs and it mentioned its used in commercial building. For cleanroom the filter type is MERV20. Before we change , I want to consult with you guys on what type of filters do you use in your FCU. Our FCU is located in the Chase area of the Cleanroom ceiling. The filter that was installed were Pre-pleat 40 LPD. The filter frame is cardboard, I am worried that this cardboard framed filter shouldn't be used in the FCU instead it should be metal frame or plastic. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From sbhas at uchicago.edu Fri Apr 10 10:45:43 2015 From: sbhas at uchicago.edu (Shivakumar Bhaskaran) Date: Fri, 10 Apr 2015 14:45:43 +0000 Subject: [labnetwork] Filter type for the FCU In-Reply-To: References: , Message-ID: Jack, Now I am getting the clear picture of the how air system works. I will convey your suggestion and feedback to my facility engineers and Will discuss about this with my installation contractors so that we will all agree upon what is best. Once again thanks for your valuable feedback. -Shiva ________________________________ From: Paul, Jack [Jack.Paul at hdrinc.com] Sent: Thursday, April 09, 2015 6:56 PM To: Shivakumar Bhaskaran; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Hi Shiva, Thanks for the photos. Very helpful. It looks like you have your make-up air dumping into the ceiling space, where it mixes with the air coming from the Fan Coil Unit. That?s good as it will give you the best consistency of temperature and humidity across the cleanroom. The Fan Filter Units (FFU?s) are doing all the ?work? of recirculating the air and the Fan Coil Unit (FCU) is only doing enough work to pull air out of the chase, across the sensible cooling coil, and into the ceiling space. To answer your question regarding pre-filters on the FFU?s, most new FFU?s are available with the option to install a pre-filter, but it is not required. The purpose of the pre-filter in that location is mostly to protect the fan motor from any ?big stuff? like cleanroom wipers or pieces of paper that get entrained in the air stream, and particle build-up on the motor itself. They are typically fiberglass in an aluminum (or other metal) frame. There is a slight reduction in airflow through the FFU when you add the pre-filter, but it can be accommodated by speeding up the FFU motor if you have variable speed motors. If you have 2 speed or 3 speed motors, you might be limited, but overall it should not upset your air balance too much. You would see the difference in the face velocity of the HEPA on the FFU, so if you are happy with the current face velocity (which also equates to volume change or air change rate) then you could speed up the motors to until you achieved the same face velocity. The main purpose of the pre-filter on the FCU is to protect the cooling coils in the FCU from dust build-up. It doesn?t really do much fine particulate filtering since that job is done by the HEPA?s. But the air going in should be pretty clean since it just came through the cleanroom. I do understand the concern with loading the HEPA?s, but if your cleanroom users have good protocol, it is typical for your HEPA?s to last 10 years. If you do decide to replace the current cardboard framed filters, we would suggest a MERV 7 or 8 fiberglass media filter in an aluminum or plastic frame (HDPE for example), sized to fit the FCU of course. A MERV 17 or 18 (i.e. HEPA) or a MERV 20 (i.e. ULPA) filter will reduce the air flow through the FCU substantially due to the very high pressure drop across the filter. Let me know if I can help further. Jack Jack Paul, RA, LEED AP BD+C Laboratory Planner/Programmer Vice President HDR 3200 E Camelback Rd, Suite 250 Phoenix, Arizona 85018 D 602.474.3940 M 602.369.2086 jack.paul at hdrinc.com hdrinc.com/follow-us From: Shivakumar Bhaskaran [mailto:sbhas at uchicago.edu] Sent: Thursday, April 09, 2015 4:21 PM To: Paul, Jack; Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Hello Jack, What you saying is correct. The cleanroom was installed before I joined here and I am trying to figure out how this works. Correct me I am wrong. As its been more than two year since it was installed I am trying to add the pieces based on inputs from different people and trying to correlate with my contractors and facility personnel. The supply from the Air Handler unit and FCU supply are going to the HEPA filters. The return opening with the filters on the FCU are exposed to the chase area. Attaching the pdf of our systems. Based on the interaction with other Cleanroom Managers I see that you guys are having prefilters on top of the HEPA filters, is it recommended?, I was looking into the spec of the model of the unit I have and datasheet showing prefilters on the HEPA filters. Based on my arrangement if I have prefilter installed will there be going to be effect on the air balance/pressure on the cleanroom. Thanks for all your inputs. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ From: Paul, Jack [mailto:Jack.Paul at hdrinc.com] Sent: Thursday, April 09, 2015 4:12 PM To: Shivakumar Bhaskaran; Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Hi Shiva, A couple of comments if I may. Fan Coil Units are notoriously low power fans, so most of the time they are not equipped with a filter at all. The fans cannot typically handle the pressure drop required to draw air through the filter. I doubt that the FCU?s installed in your cleanroom will be capable of handling a MERV 20 filter, and the fan will overheat. I may have misunderstood your air management scheme, but I believe the FCU is effectively only drawing air from the cleanroom chase and then pushing it back into a plenum above the cleanroom ceiling, correct? Any air it draws out of the chase has come from the clean side, and that same air it pushes back into the plenum above the cleanroom ceiling will be filtered by the HEPA?s in the Fan/Filter Units. It should not need much filtration on it, if any. In a common cleanroom design approach, a recirculating air handler (a beefed up much larger version of your Fan Coil Unit) will not have a filter on the inlet side. Occasionally, it might include a light duty filter (such as MERV 8) or as we sometimes call it ?a wiper catcher?. [If I?ve misunderstood and you are not using Fan/Filter Units in the ceiling of the cleanroom, but instead have a pressurized plenum, then the FCU is providing the pressure to push the air through the HEPA filters? In any case, the air will be filtered at the ceiling before entering the cleanroom so a filter on the FCU should not be necessary] If you do keep a filter on the FCU, you should definitely install filters with plastic or metal frames. No cardboard. In this case, I would even suggest you are better off without the existing filter at all. (and the fan in the FCU will operate more efficiently as well). Hope this helps, and hasn?t created confusion. Regards, Jack Paul Jack Paul, RA, LEED AP BD+C Laboratory Planner/Programmer Vice President HDR 3200 E Camelback Rd, Suite 250 Phoenix, Arizona 85018 D 602.474.3940 M 602.369.2086 jack.paul at hdrinc.com hdrinc.com/follow-us From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 10:39 AM To: Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Filter type for the FCU FCU- Fan Coil Unit. We have opening on each side (right/left wall) of the cleanroom were the cleanroom air is pushed out of the cleanroom and comes to the chase and then go to the FCU and then goes to the HEPA filter (we are recirculating the cleanroom air). Even though the chase area is not maintained at class 100/ 1000, we want to make sure we install the correct filter type to maintain the air quality of the cleanroom, so that we don?t make the HEPA filters work hard with less quality air coming from the Chase air. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ From: Morrison, Richard H., Jr. [mailto:rmorrison at draper.com] Sent: Thursday, April 09, 2015 12:02 PM To: Shivakumar Bhaskaran; labnetwork at mtl.mit.edu Subject: RE: Filter type for the FCU Here is a good cross-reference guide. We have MERV-8 as pre-filters in our makeup air unit they have plastic frames they are 2? thick. The final filter in the MAU is 4? thick Merv-15 Precision Cell ll 95% filters, again plastic frame. This air is then feed to the chases and passed into Fan Filter HEPA ceiling units. Hope this helps I am not familiar with a FCU, what does that stand for. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Thursday, April 09, 2015 11:34 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Filter type for the FCU My building Facility Engineer was trying to change the filters in the FCU. He found that the FCU was installed with MERV8 type filter. I looked into the specs and it mentioned its used in commercial building. For cleanroom the filter type is MERV20. Before we change , I want to consult with you guys on what type of filters do you use in your FCU. Our FCU is located in the Chase area of the Cleanroom ceiling. The filter that was installed were Pre-pleat 40 LPD. The filter frame is cardboard, I am worried that this cardboard framed filter shouldn?t be used in the FCU instead it should be metal frame or plastic. -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Mon Apr 20 18:46:50 2015 From: mmoneck at andrew.cmu.edu (Matt Moneck) Date: Mon, 20 Apr 2015 18:46:50 -0400 Subject: [labnetwork] Employment Opportunity - Equipment Manager - Carnegie Mellon University Nanofabrication Facility Message-ID: <553581DA.3070203@andrew.cmu.edu> Hello All, The Carnegie Mellon Nanofabrication Facility is currently looking for a Cleanroom Equipment Manager on the Pittsburgh, PA campus. Interested individuals are encouraged to apply at https://cmu.taleo.net/careersection/2/jobdetail.ftl?job=2000804 Please feel free to pass this message along to interested colleagues. Thank you for your time. Best Regards, Matt Moneck -- *Matthew T. Moneck* Executive Manager, Carnegie Mellon Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.5430 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From Jean.Lapointe at nrc-cnrc.gc.ca Thu Apr 23 09:56:36 2015 From: Jean.Lapointe at nrc-cnrc.gc.ca (Lapointe, Jean) Date: Thu, 23 Apr 2015 09:56:36 -0400 Subject: [labnetwork] LED lighting in cleanrooms/ litho Message-ID: Hello, We are considering replacing our fluorescent lighting in the cleanrooms by LEDs. Does anyone have information about LEDs that would be best suited for this purpose? Are LEDs being used in new fabs? The litho room is one major concern. We currently use yellow fluorescents or regular fluorescents with yellow filters. Have some commercial LEDs been tested for use in litho rooms with i-line resists (centered around 365 nm but some have some sensitivity up to 460nm)? Thanks, Jean Jean Lapointe Team lead, Fab2 eng. Information and Communications Technologies, National Research Council, Canada -------------- next part -------------- An HTML attachment was scrubbed... URL: From cibuzar at umn.edu Thu Apr 23 12:23:42 2015 From: cibuzar at umn.edu (Gregory Cibuzar) Date: Thu, 23 Apr 2015 11:23:42 -0500 Subject: [labnetwork] LED lighting in cleanrooms/ litho In-Reply-To: References: Message-ID: A few years ago we replaced 630 40 watt T12 florescent lamps in our cleanroom with 20 watt T8 LED lamps from Phillips. The T12 lamps had to go since they were being phased out of production. We looked at moving to T8 fluorescents, but that would have required considerable rewiring to replace all the remote ballasts that worked with the T12 lamps but would not work with the T8 lamps. Our local energy company had a rebate program for LED lighting, and that combined with the energy savings convinced our energy management department to fund the replacement. The LED lamps did not require a ballast, only some minor rewiring to route line voltage to the fixtures. It took a few electricians 3-4 days to do the work, but in the end it worked out pretty well. After 3 years we have not lost a lamp. The energy management team told me together with the occupancy sensors that were also added we were saving around $13K/yr in energy costs. Here is a link to the LED lamps we used: http://www.lighting.philips.com/pwc_li/us_en/connect/tools_literature/downloads/p-6206.pdf Before we agreed to this change, we investigated the resist exposure issue. Our T12 lamps had the yellow sleeves, but we did not want to go with these sleeves on the LED T8 lamps due to concerns that the lamp temp would rise too high and reduce the lifetime. Instead we ended up buying some UV filtering film (we tested several for resist exposure) and manually cutting pieces to snugly fit inside the plastic housing surrounding the lamp (we have the old "teardrop" style lights in that cleanroom). That was a pain to do, but in the end it worked pretty well. Contact me directly if you need more details. Regards, Greg Greg Cibuzar Manager, Minnesota Nano Center www.mnc.umn.edu University of Minnesota 612-625-8079 On Thu, Apr 23, 2015 at 8:56 AM, Lapointe, Jean < Jean.Lapointe at nrc-cnrc.gc.ca> wrote: > Hello, > > > > We are considering replacing our fluorescent lighting in the cleanrooms by > LEDs. > > Does anyone have information about LEDs that would be best suited for this > purpose? > > Are LEDs being used in new fabs? > > > > The litho room is one major concern. We currently use yellow fluorescents > or regular fluorescents with yellow filters. > > Have some commercial LEDs been tested for use in litho rooms with i-line > resists (centered around 365 nm but some have some sensitivity up to 460nm)? > > > > Thanks, > > Jean > > > > Jean Lapointe > > Team lead, Fab2 eng. > > Information and Communications Technologies, > > National Research Council, Canada > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at seas.upenn.edu Thu Apr 23 12:29:45 2015 From: nclay at seas.upenn.edu (Noah Clay) Date: Thu, 23 Apr 2015 12:29:45 -0400 Subject: [labnetwork] LED lighting in cleanrooms/ litho In-Reply-To: References: Message-ID: Jean, We have strip LEDs in our three litho spinner benches since last June. The phosphor emission is broadband and there are stock yellow filters over the strips. We have had no problems. Thanks, Noah > On Apr 23, 2015, at 9:56 AM, Lapointe, Jean wrote: > > Hello, > > We are considering replacing our fluorescent lighting in the cleanrooms by LEDs. > Does anyone have information about LEDs that would be best suited for this purpose? > Are LEDs being used in new fabs? > > The litho room is one major concern. We currently use yellow fluorescents or regular fluorescents with yellow filters. > Have some commercial LEDs been tested for use in litho rooms with i-line resists (centered around 365 nm but some have some sensitivity up to 460nm)? > > Thanks, > Jean > > Jean Lapointe > Team lead, Fab2 eng. > Information and Communications Technologies, > National Research Council, Canada > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Wed Apr 29 11:46:59 2015 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Wed, 29 Apr 2015 15:46:59 +0000 Subject: [labnetwork] Electron Beam Deposition Materials Question Message-ID: Hello folks. I have a client that wishes to deposit two materials in our electron beam deposition tool. Our tool is specifically used for typical metal depositions and my concern is chamber contamination, system contamination and cleanup. The materials the client wishes to deposit are: AlQ3 - (Tris-(8-hydroxyquinoline)aluminum (organic) LiF - Lithium Fluoride (inorganic) Also, please let me know your thoughts in general about the deposition of organic materials in your tools. Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From songbin at illinois.edu Wed Apr 29 12:40:58 2015 From: songbin at illinois.edu (Songbin Gong) Date: Wed, 29 Apr 2015 11:40:58 -0500 Subject: [labnetwork] Research Engineer position in the Micro and Nanotechnology Laboratory , at the University of Illinois at Urbana-Champaign Message-ID: <5541099A.3030006@illinois.edu> The Micro and Nanotechnology Laboratory at the University of Illinois at Urbana-Champaign seeks applicants for a Re-search Engineer to promote research related activities by managing equipment involving semiconductor device fabrication, processes, and some applications in nano-biotechnology. Specific duties and responsibilities include: ? Operate, maintain and repair deposition equipment for use in various research performed in the MNTL, which include: plasma enhanced chemical vapor deposition (PECVD) and low pressure chemical vapor deposition (LPCVD). ? Operate, maintain and repair plasma etching equipment for use in various research performed in the MNTL, which include: reactive ion etching (RIE), chemically assisted ion beam etching (CAIBE), and inductively coupled plasma reactive ion etching (ICPRIE). ? Operate, maintain and repair Optical lithography equipment for use in various research performed in the MNTL, which include: spinners, mask aligners, and flood exposure systems. ? Act as a resource person to provide knowledgeable guidance on the daily use of the above equipment. ? Train students in the use of the above equipment, including formulation and distribution of suitable written instruction sets, and preparation/delivery of oral presentations to small groups on the topic of process development, statistical process control, and safe laboratory practices. Minimum Qualifications: ? Bachelor?s degree in Engineering or a related field. ? 10 years experience working with semiconductor device fabrication and processes, including Industry experience in pilot manufacturing, manufacturing, and/or research & development environments. ? Comprehensive understanding of electrical and mechanical schematics and skilled at diagnosing and repairing electromechanical systems and instrumentation. ? Excellent verbal and written communication skills. Preferred Qualifications: ? Master?s degree in Engineering or a related field. ? Familiarity with and experience working in a cleanroom environment ? Ability to troubleshoot optical, mechanical, and electrical systems. ? Proficiency with computers and commonly used computer programs. The Research Engineer position is a full-time, benefits-eligible academic professional position appointed on a 12-month service basis. The expected start date is as soon as possible after the closing date. Applicants may be inter-viewed before the closing date; however, no hiring decision will be made until after that date. Salary is commensurate with experience and qualifications. To apply for this position, please create your candidate profile at http://jobs.illinois.edu and upload your cover letter, resume, and names/contact information for three references by May 29, 2015. Full consideration will be given to complete applications received by the closing date. For further information regarding application procedures, contact Leslie Lewin Reinhart, lewin at illinois.edu, 217-300-3872. Illinois is an equal opportunity employer and all qualified applicants will receive consideration for employment without regard to race, religion, color, national origin, sex, sexual orientation, gender identity, age, status as a protected veteran, or status as a qualified individual with a disability. Illinois welcomes individuals with diverse backgrounds, experiences, and ideas who embrace and value diversity and inclusivity. (www.inclusiveillinois.illinois.edu). -- ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Songbin Gong Ph.D Assistant Professor Department of Electrical and Computer Engineering University of Illinois at Urbana Champaign 2264 Micro and Nano Technology Laboratory 208 N. Wright Street Urbana, Illinois 61801 http://ilirm.ece.illinois.edu ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ -------------- next part -------------- A non-text attachment was scrubbed... Name: ECE Flyer_MNTL_Research_Engineer.pdf Type: application/pdf Size: 364101 bytes Desc: not available URL: