[labnetwork] Electron Beam Deposition Materials Question

[julia.aebersold at louisville.edu]

Hello folks.  I have a client that wishes to deposit two materials in our electron beam deposition tool.  Our tool is specifically used for typical metal depositions and my concern is chamber contamination, system contamination and cleanup.

The materials the client wishes to deposit are:

AlQ3 - (Tris-(8-hydroxyquinoline)aluminum (organic)
LiF - Lithium Fluoride (inorganic)

Also, please let me know your thoughts in general about the deposition of organic materials in your tools.

Cheers!

Julia Aebersold, Ph.D.
Cleanroom Manager
Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/

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