[labnetwork] Understanding Phosphorus Contamination

[Kamal Yadav]

Dear All,

While we all allow PH3 gas for implantation, there has been known concern
that Phosphorus in different other forms causes contamination in MOS
devices. Recently we have refused black phosphorus material in ALD
anticipating contamination issues.

If anybody has dealt with this situation, we would like to take help of
their leanings vis-a-vis, what forms are potentially should not be allowed
in what chambers/processes.

Thanks a lot!

-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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