From nclay at seas.upenn.edu Sun Feb 1 09:13:04 2015 From: nclay at seas.upenn.edu (Noah Clay) Date: Sun, 01 Feb 2015 09:13:04 -0500 Subject: [labnetwork] Contamination control in PVD systems In-Reply-To: References: <90069614.15740707.1422726767061.JavaMail.zimbra@stanford.edu> <1302126497.15747884.1422727299551.JavaMail.zimbra@stanford.edu> Message-ID: Carsen, Here are a few guidelines that have worked over the years: 1. Don't mix metals, polymers and dielectrics in thermal and/or e-beam evaporators. Holding the line on this is tough, but I've always tried to minimize cross contamination. 2. Disallow materials containing: Zn, P and As. Weird PVD requests emerge all of the time and it's good to maintain an "anything goes" system, but stay away from the above. 3. Keep one e-beam system free of magnetic materials (even Ni). The condensed matter physicists will be happy. 4. Don't go cheap on sputtering system hardware. To the extent reasonable, keep separate gun hardware for each target or class of materials. 5. Bead blast shields, gun hardware, etc. routinely...as for the frequency, it should be based on use, not time, unless your use is very steady. 6. Remove and clean any e-beam hearths at least once each year. 7. Every now and then, I cave in on a user's request to evaporate a material that I'm uncomfortable with...we let them run and then change shielding immediately after they are done. Sometimes we reserve a system for them for 1 to 2 days, line the walls with UHV foil and do a full tear down when they're done. As a rule, we RGA fingerprint the system before and after and try to align this with routine maintenance. 8. Staff-maintained loadlocked systems are the best for contamination control. At 3am on Sunday morning, for all I know, someone is evaporating radioactive peanut butter. I hope this helps. Best, Nosh On January 31, 2015 6:48:10 PM EST, Fouad Karouta wrote: >Dear Carsen, > >Here at the Australian National University, Canberra, we do have an >open access e-beam evaporator reserved for metals and we started with: >Au, Pt, Ni, Ti, Ge, Al, Cr and later we added Pd, Mo, Hf and Nb. >So far we haven't heard from our users any negative feedback about >deterioration/contamination of contacts. >We do not allow oxides nor metals like Zn, Cu, Te, Sn etc. where we >believe these metals have a more serious contamination risk. In our >facility we do have a sputter system w/o materials restriction and it >is used for metals to oxides, nitrides offering more than 50 >materials/targets. We do know from users that some contamination is >found at level clearly below 1%. > >Hope this helps a bit and I am curious to learn from others their >experience. > >Cheers, >Fouad Karouta > >********************************* >Manager ANFF ACT Node >Australian National Fabrication Facility >Research School of Physics and Engineering >Australian National University >ACT 0200, Canberra, Australia >Tel: + 61 2 6125 7174 >Mob: + 61 451 046 412 >Email: fouad.karouta at anu.edu.au >http://anff-act.anu.edu.au/ > >-----Original Message----- >From: labnetwork-bounces at mtl.mit.edu >[mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Carsen Kline >Sent: Sunday, 1 February 2015 5:02 AM >To: labnetwork at mtl.mit.edu >Subject: [labnetwork] Contamination control in PVD systems > >Hello all, > >We're looking to expand our PVD capabilities and we're curious to know >how other labs control contamination as it relates to safety, process, >and equipment condition. Can anyone share your general philosophy or >policies on approaching contamination control in PVD systems? (For >example, categorizing systems based on allowed contaminants, or having >multiple levels of controlled access to specific tools, etc.) > >Thanks for your input, I'm looking forward to your responses. > >Carsen > > > > >Carsen Kline >Stanford Nanofabrication Facility >http://snf.stanford.edu >carsen at stanford.edu > > >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Sent from my Android phone with K-9 Mail. Please excuse my brevity. -------------- next part -------------- An HTML attachment was scrubbed... URL: From kamal.yadav at gmail.com Mon Feb 2 07:22:35 2015 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Mon, 2 Feb 2015 17:52:35 +0530 Subject: [labnetwork] Conductivity Standard Solution In-Reply-To: References: <54CBAD79.1000204@stanford.edu> Message-ID: Dear John, Noah, and Miller, Thank you for your response. I have gone through the attachment sent by John and Noah, which is identical and discusses about the topic in detail. I did not know this one is going to be difficult as well... We do not have a circulating DI water loop. We have a conductivity meter using which we try to periodically check the DI water resistivity in flowing condition in a beaker waiting for sufficient time. I was happy as it was showing 0.04 uS/cm :) as that would be around 25 Mohm-cm much more than 18.2 Mohm, until a faculty pointed out that it is theoretically impossible at that temperature and is evident from the attachments you sent. We have another resistivity meter in Solar Cell Center, that one is new and gives good reading something on which we can believe, so far. Calibrating that meter after sometime need to be identified as informed by the supplier [Merc Millipore]. They do not know as of now!! *Two Options I can see: [John, Noah, Miller, please comment].* 1. These days 1 uS/cm standard is also available at NIST. But still far from ~ 0.055. The attachment claims ASTM standard even at 100 uS/cm can be used to calibrate UPW range resistivity meter? I am little confused whether I can use the standard, and whether it will be stable with its conductivity. We are ok as long as it shows more than 16 or 17 MOhm,..but certainly not 25 :). The good meter from Solar cell lab shows around 15 Mohm-cm so we know it may be accurate. Since it is flowing DI water in a beaker it would be little far from 18.2 compare to John's 17.5, I suppose! 2. Send out the meter to an outside agency, will work if agency is in India, otherwise I need to see how much it cost, which may be equal to buy a new one. Thanks, Kamal. On Sat, Jan 31, 2015 at 12:03 AM, Noah Clay wrote: > Kamal, > > Personally, I would send out your meter(s) for calibration by an expert. > That said, here?s a reference from a company in the Boston area (google > search: "calibrate ultrapure water conductivity meter?) > > http://www.snowpure.com/docs/thornton-upw-resistivity-measurement.pdf > > Apparently, one can purchase standards from NIST for this (as stated in > the above link), but I?m not sure if they have a standard in your range. > > Here?s another link from the same search/query: > > > http://www.thermoscientific.com/content/dam/tfs/ATG/EPD/EPD%20Documents/Application%20&%20Technical%20Notes/Water%20Analysis%20Instruments%20and%20Supplies/Lab%20Electrodes%20and%20Sensors/Ion%20Selective%20Electrodes/AN-PUREWATER-E%20RevA-HIGHRES.pdf > > Best of luck, > Noah Clay > > *Director, Quattrone Nanofabrication Facility* > *School of Engineering & Applied Sciences* > *University of Pennsylvania* > *nano.upenn.edu * > > > On Jan 30, 2015, at 11:12 AM, John Shott wrote: > > Kamal: > > Let me start by saying that I've never actually tried to calibrate meters > of this type. Why? Because it is not easy. Here is a good reference > article from over 15 years ago that describes the process in great detail > including the fact that the standard conductivity solutions only go down to > about 5 uS/cm ... which isn't very close to the 0.06 uS/cm you are hoping > to measure. They also talk about separating the whole calibration process > into the steps of calibrating the meter itself (easy), the temperature > probe (reasonably easy), and the "cell constant" of the probe itself > (hard). A number of you will recognize that the author of this paper works > for a company that makes and sells resistivity probes and monitors. This > is not intended to be an endorsement of that, or any other, company ... > but, I think, indicates that detailed calibration of DI resistivity > monitoring systems is typically found primarily in the companies that make > and sell such instrumentation rather than by the folks that use such > instrumentation. > > Their solution for high-precision calibration was to measure UHP water > over a range of temperatures as a means of determining and/or calibrating > the cell constant. If you read this article, however, you will conclude > that this is not a procedure for the faint of heart. > > In recirculating DI systems, I believe that it is more common to have > continuous resistivity monitoring on both the supply side and return side > of the system. In our case, we typically see supply and return resistivity > readings about 17.7 MOhm-cm or higher ... but that rarely, if ever, read > the theoretically expected 18.2 MOhm-cm. In fact, it is not uncommon to > see a return resistivity that is slightly higher than the supply-side > resistivity ... which would seem unlikely. > > Then, on an occasional basis ... probably not as frequently as we should > ... we (well, a third-party analytical laboratory) collect samples and have > them measured for particle content, bacteria grown, total oxidizable > carbon, dissolved silica, and a 30-element mass-spec analysis for metal > levels in the ppt range that is commonly used for DI systems. In short, > there are lots of things that CAN be wrong with DI water that are not seen > by even an accurate resistivity measurement. In other words, as long as > our resistivity readings are on the order of 17.5 MOhm-cm or above on both > supply and return lines, I, for one, don't worry about the resistivity > aspects of our water. In fact, earlier this week, I was comparing these DI > analytical test results with another frequent contributor to this forum > from the Bay Area institution with the longest history as a university > laboratory in this field. > > Finally, when you say "periodic monitoring" do you mean that you have a > probe in a continuously recirculating loop and you want to look at the > resistivity of that periodically ... or that you occasionally collect a > sample of water and are trying to measure it's resistivity? If it is the > latter, that can be tricky: when exposed to air, DI water absorbs CO2 which > forms carbonic acid that can cause your resistivity numbers to degrade. > > My guess is some of the folks that run newer labs than ours will have more > details about the way that they monitor the DI water in these newer > operations. > > Let me know if you have any additional questions. > > John > > On 1/30/2015 2:01 AM, Kamal Yadav wrote: > > Dear All, > > What is the best way to calibrate conductivity meters for DI water > resistivity periodic monitoring. > > Standard known conductivity solutions are available but which one is > good and stable for this range of measurement. [18 MOhm-cm or ~ 0.06 uS/cm] > > Thanks a lot! > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in > > > _______________________________________________ > labnetwork mailing listlabnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: 7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From myoung6 at nd.edu Mon Feb 2 10:26:59 2015 From: myoung6 at nd.edu (Mike Young) Date: Mon, 2 Feb 2015 10:26:59 -0500 Subject: [labnetwork] Conductivity Standard Solution In-Reply-To: References: <54CBAD79.1000204@stanford.edu> Message-ID: <48608376-18DE-4D38-9252-9A6E355ADCF8@nd.edu> Two quick comments: (1) I was always taught that in order to have deionized water, you *must* have a continuously circulating loop. (2) Nothing in this business is ?not difficult? ! If you do find something to be ?not difficult?, then you have overlooked something. :-) Good luck! --Mike On Feb 2, 2015, at 7:22 AM, Kamal Yadav wrote: > > Dear John, Noah, and Miller, > > Thank you for your response. I have gone through the attachment sent by John and Noah, which is identical and discusses about the topic in detail. I did not know this one is going to be difficult as well... > > We do not have a circulating DI water loop. We have a conductivity meter using which we try to periodically check the DI water resistivity in flowing condition in a beaker waiting for sufficient time. I was happy as it was showing 0.04 uS/cm :) as that would be around 25 Mohm-cm much more than 18.2 Mohm, until a faculty pointed out that it is theoretically impossible at that temperature and is evident from the attachments you sent. > > We have another resistivity meter in Solar Cell Center, that one is new and gives good reading something on which we can believe, so far. Calibrating that meter after sometime need to be identified as informed by the supplier [Merc Millipore]. They do not know as of now!! > > Two Options I can see: [John, Noah, Miller, please comment]. > > 1. These days 1 uS/cm standard is also available at NIST. But still far from ~ 0.055. The attachment claims ASTM standard even at 100 uS/cm can be used to calibrate UPW range resistivity meter? I am little confused whether I can use the standard, and whether it will be stable with its conductivity. We are ok as long as it shows more than 16 or 17 MOhm,..but certainly not 25 :). The good meter from Solar cell lab shows around 15 Mohm-cm so we know it may be accurate. Since it is flowing DI water in a beaker it would be little far from 18.2 compare to John's 17.5, I suppose! > > 2. Send out the meter to an outside agency, will work if agency is in India, otherwise I need to see how much it cost, which may be equal to buy a new one. > > > Thanks, > Kamal. > > > > > > > > > > > > On Sat, Jan 31, 2015 at 12:03 AM, Noah Clay > wrote: > Kamal, > > Personally, I would send out your meter(s) for calibration by an expert. That said, here?s a reference from a company in the Boston area (google search: "calibrate ultrapure water conductivity meter?) > > http://www.snowpure.com/docs/thornton-upw-resistivity-measurement.pdf > > Apparently, one can purchase standards from NIST for this (as stated in the above link), but I?m not sure if they have a standard in your range. > > Here?s another link from the same search/query: > > http://www.thermoscientific.com/content/dam/tfs/ATG/EPD/EPD%20Documents/Application%20&%20Technical%20Notes/Water%20Analysis%20Instruments%20and%20Supplies/Lab%20Electrodes%20and%20Sensors/Ion%20Selective%20Electrodes/AN-PUREWATER-E%20RevA-HIGHRES.pdf > > Best of luck, > Noah Clay > > Director, Quattrone Nanofabrication Facility > School of Engineering & Applied Sciences > University of Pennsylvania > nano.upenn.edu > > >> On Jan 30, 2015, at 11:12 AM, John Shott > wrote: >> >> Kamal: >> >> Let me start by saying that I've never actually tried to calibrate meters of this type. Why? Because it is not easy. Here is a good reference article from over 15 years ago that describes the process in great detail including the fact that the standard conductivity solutions only go down to about 5 uS/cm ... which isn't very close to the 0.06 uS/cm you are hoping to measure. They also talk about separating the whole calibration process into the steps of calibrating the meter itself (easy), the temperature probe (reasonably easy), and the "cell constant" of the probe itself (hard). A number of you will recognize that the author of this paper works for a company that makes and sells resistivity probes and monitors. This is not intended to be an endorsement of that, or any other, company ... but, I think, indicates that detailed calibration of DI resistivity monitoring systems is typically found primarily in the companies that make and sell such instrumentation rather than by the folks that use such instrumentation. >> >> Their solution for high-precision calibration was to measure UHP water over a range of temperatures as a means of determining and/or calibrating the cell constant. If you read this article, however, you will conclude that this is not a procedure for the faint of heart. >> >> In recirculating DI systems, I believe that it is more common to have continuous resistivity monitoring on both the supply side and return side of the system. In our case, we typically see supply and return resistivity readings about 17.7 MOhm-cm or higher ... but that rarely, if ever, read the theoretically expected 18.2 MOhm-cm. In fact, it is not uncommon to see a return resistivity that is slightly higher than the supply-side resistivity ... which would seem unlikely. >> >> Then, on an occasional basis ... probably not as frequently as we should ... we (well, a third-party analytical laboratory) collect samples and have them measured for particle content, bacteria grown, total oxidizable carbon, dissolved silica, and a 30-element mass-spec analysis for metal levels in the ppt range that is commonly used for DI systems. In short, there are lots of things that CAN be wrong with DI water that are not seen by even an accurate resistivity measurement. In other words, as long as our resistivity readings are on the order of 17.5 MOhm-cm or above on both supply and return lines, I, for one, don't worry about the resistivity aspects of our water. In fact, earlier this week, I was comparing these DI analytical test results with another frequent contributor to this forum from the Bay Area institution with the longest history as a university laboratory in this field. >> >> Finally, when you say "periodic monitoring" do you mean that you have a probe in a continuously recirculating loop and you want to look at the resistivity of that periodically ... or that you occasionally collect a sample of water and are trying to measure it's resistivity? If it is the latter, that can be tricky: when exposed to air, DI water absorbs CO2 which forms carbonic acid that can cause your resistivity numbers to degrade. >> >> My guess is some of the folks that run newer labs than ours will have more details about the way that they monitor the DI water in these newer operations. >> >> Let me know if you have any additional questions. >> >> John >> >> On 1/30/2015 2:01 AM, Kamal Yadav wrote: >>> Dear All, >>> >>> What is the best way to calibrate conductivity meters for DI water resistivity periodic monitoring. >>> >>> Standard known conductivity solutions are available but which one is good and stable for this range of measurement. [18 MOhm-cm or ~ 0.06 uS/cm] >>> >>> Thanks a lot! >>> >>> -- >>> Thanks, >>> Kamal Yadav >>> Sr. Process Technologist >>> IITBNF, EE Department, Annexe, >>> IIT Bombay, Powai >>> Mumbai 400076 >>> Internal: 4435 >>> Cell: 7506144798 >>> Email: kamal.yadav at gmail.com , kamalyadav at ee.iitb.ac.in >>> >>> _______________________________________________ >>> labnetwork mailing list >>> labnetwork at mtl.mit.edu >>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com , kamalyadav at ee.iitb.ac.in _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 637-6302 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Mon Feb 2 12:59:50 2015 From: shott at stanford.edu (John Shott) Date: Mon, 02 Feb 2015 09:59:50 -0800 Subject: [labnetwork] Conductivity Standard Solution In-Reply-To: References: <54CBAD79.1000204@stanford.edu> Message-ID: <54CFBB16.5090601@stanford.edu> Kamal: OK, I understand that you do not have a circulating system. I suspect that this is a "once through" system where water goes through a certain number of polishing beds, UV, and final filters before heading directly to your DI taps. I've run systems of that type. I personally don't think that calibration of your resistivity monitors is the thing that you should worry about. Even if your conductivity measures 0.04 uS/cm ... which, yes, is technically impossible because at room temperature water can be no less than 0.055 uS/cm ... that is indicative of high-resistivity water. If the conductivity increased to 0.08 uS/cm, however, then you know that something has changed. I would suggest that you try to get the appropriate adapter in your supply line so that you can install a permanent mounting point for your resistivity monitor. In that way, you can look at your conductivity any time that you are flowing water. You can also answer the question in a once through system: how long after I begin flowing water, does the conductivity fall to the point that I am getting good resistivity water. Most importantly, if you normally see a conductivity of 0.04 uS/cm, and it increases to 0.08 uS/cm, for example, you know that something has changed. That might be indicative, for example, that it is time to change your resin beds. While absolute calibration is nice, with all due respect to my friends at NIST, not all instruments need to be fully calibrated to provide useful diagnostic information. I believe that this may be one of those cases where being able to detect a change in conductivity may be more important than the absolute accuracy of the conductivity measurement. Good luck, John On 2/2/2015 4:22 AM, Kamal Yadav wrote: > Dear John, Noah, and Miller, > > Thank you for your response. I have gone through the attachment sent > by John and Noah, which is identical and discusses about the topic in > detail. I did not know this one is going to be difficult as well... > > We do not have a circulating DI water loop. We have a conductivity > meter using which we try to periodically check the DI water > resistivity in flowing condition in a beaker waiting for sufficient > time. I was happy as it was showing 0.04 uS/cm :) as that would be > around 25 Mohm-cm much more than 18.2 Mohm, until a faculty pointed > out that it is theoretically impossible at that temperature and is > evident from the attachments you sent. > > We have another resistivity meter in Solar Cell Center, that one is > new and gives good reading something on which we can believe, so far. > Calibrating that meter after sometime need to be identified as > informed by the supplier [Merc Millipore]. They do not know as of now!! > > *Two Options I can see: [John, Noah, Miller, please comment].* > > 1. These days 1 uS/cm standard is also available at NIST. But still > far from ~ 0.055. The attachment claims ASTM standard even at 100 > uS/cm can be used to calibrate UPW range resistivity meter? I am > little confused whether I can use the standard, and whether it will be > stable with its conductivity. We are ok as long as it shows more than > 16 or 17 MOhm,..but certainly not 25 :). The good meter from Solar > cell lab shows around 15 Mohm-cm so we know it may be accurate. Since > it is flowing DI water in a beaker it would be little far from 18.2 > compare to John's 17.5, I suppose! > > 2. Send out the meter to an outside agency, will work if agency is in > India, otherwise I need to see how much it cost, which may be equal to > buy a new one. > > > Thanks, > Kamal. > > > > > > > > > > > > On Sat, Jan 31, 2015 at 12:03 AM, Noah Clay > wrote: > > Kamal, > > Personally, I would send out your meter(s) for calibration by an > expert. That said, here?s a reference from a company in the > Boston area (google search: "calibrate ultrapure water > conductivity meter?) > > http://www.snowpure.com/docs/thornton-upw-resistivity-measurement.pdf > > Apparently, one can purchase standards from NIST for this (as > stated in the above link), but I?m not sure if they have a > standard in your range. > > Here?s another link from the same search/query: > > http://www.thermoscientific.com/content/dam/tfs/ATG/EPD/EPD%20Documents/Application%20&%20Technical%20Notes/Water%20Analysis%20Instruments%20and%20Supplies/Lab%20Electrodes%20and%20Sensors/Ion%20Selective%20Electrodes/AN-PUREWATER-E%20RevA-HIGHRES.pdf > > Best of luck, > Noah Clay > > /Director, Quattrone Nanofabrication Facility/ > /School of Engineering & Applied Sciences/ > /University of Pennsylvania/ > /nano.upenn.edu / > / > / > >> On Jan 30, 2015, at 11:12 AM, John Shott > > wrote: >> >> Kamal: >> >> Let me start by saying that I've never actually tried to >> calibrate meters of this type. Why? Because it is not easy. >> Here is a good reference article from over 15 years ago that >> describes the process in great detail including the fact that the >> standard conductivity solutions only go down to about 5 uS/cm ... >> which isn't very close to the 0.06 uS/cm you are hoping to >> measure. They also talk about separating the whole calibration >> process into the steps of calibrating the meter itself (easy), >> the temperature probe (reasonably easy), and the "cell constant" >> of the probe itself (hard). A number of you will recognize that >> the author of this paper works for a company that makes and sells >> resistivity probes and monitors. This is not intended to be an >> endorsement of that, or any other, company ... but, I think, >> indicates that detailed calibration of DI resistivity monitoring >> systems is typically found primarily in the companies that make >> and sell such instrumentation rather than by the folks that use >> such instrumentation. >> >> Their solution for high-precision calibration was to measure UHP >> water over a range of temperatures as a means of determining >> and/or calibrating the cell constant. If you read this article, >> however, you will conclude that this is not a procedure for the >> faint of heart. >> >> In recirculating DI systems, I believe that it is more common to >> have continuous resistivity monitoring on both the supply side >> and return side of the system. In our case, we typically see >> supply and return resistivity readings about 17.7 MOhm-cm or >> higher ... but that rarely, if ever, read the theoretically >> expected 18.2 MOhm-cm. In fact, it is not uncommon to see a >> return resistivity that is slightly higher than the supply-side >> resistivity ... which would seem unlikely. >> >> Then, on an occasional basis ... probably not as frequently as we >> should ... we (well, a third-party analytical laboratory) collect >> samples and have them measured for particle content, bacteria >> grown, total oxidizable carbon, dissolved silica, and a >> 30-element mass-spec analysis for metal levels in the ppt range >> that is commonly used for DI systems. In short, there are lots >> of things that CAN be wrong with DI water that are not seen by >> even an accurate resistivity measurement. In other words, as >> long as our resistivity readings are on the order of 17.5 MOhm-cm >> or above on both supply and return lines, I, for one, don't worry >> about the resistivity aspects of our water. In fact, earlier >> this week, I was comparing these DI analytical test results with >> another frequent contributor to this forum from the Bay Area >> institution with the longest history as a university laboratory >> in this field. >> >> Finally, when you say "periodic monitoring" do you mean that you >> have a probe in a continuously recirculating loop and you want to >> look at the resistivity of that periodically ... or that you >> occasionally collect a sample of water and are trying to measure >> it's resistivity? If it is the latter, that can be tricky: when >> exposed to air, DI water absorbs CO2 which forms carbonic acid >> that can cause your resistivity numbers to degrade. >> >> My guess is some of the folks that run newer labs than ours will >> have more details about the way that they monitor the DI water in >> these newer operations. >> >> Let me know if you have any additional questions. >> >> John >> >> On 1/30/2015 2:01 AM, Kamal Yadav wrote: >>> Dear All, >>> >>> What is the best way to calibrate conductivity meters for DI >>> water resistivity periodic monitoring. >>> >>> Standard known conductivity solutions are available but which >>> one is good and stable for this range of measurement. [18 >>> MOhm-cm or ~ 0.06 uS/cm] >>> >>> Thanks a lot! >>> >>> -- >>> Thanks, >>> Kamal Yadav >>> Sr. Process Technologist >>> IITBNF, EE Department, Annexe, >>> IIT Bombay, Powai >>> Mumbai 400076 >>> Internal: 4435 >>> Cell: 7506144798 >>> Email: kamal.yadav at gmail.com , >>> kamalyadav at ee.iitb.ac.in >>> >>> >>> _______________________________________________ >>> labnetwork mailing list >>> labnetwork at mtl.mit.edu >>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com , > kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From anava at tauex.tau.ac.il Tue Feb 3 02:48:41 2015 From: anava at tauex.tau.ac.il (Nava Ariel- Sternberg) Date: Tue, 3 Feb 2015 07:48:41 +0000 Subject: [labnetwork] Piranha disposal Message-ID: Dear all, Sorry for the lame-man question but our safety unit managed to confuse us with weird recommendations so I'm checking with you guys: What is the best, safest, and most practical way to dispose piranha solution? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director MNCF Manager Phone: 03-640-5619 Mobile: 054-9984959 Email: anava at tauex.tau.ac.il -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrweaver at purdue.edu Tue Feb 3 08:13:22 2015 From: jrweaver at purdue.edu (Weaver, John R) Date: Tue, 3 Feb 2015 13:13:22 +0000 Subject: [labnetwork] Piranha disposal In-Reply-To: References: Message-ID: <6A848421F695C54A9210C1A873C96AC22511BF1F@WPVEXCMBX04.purdue.lcl> Nava - I'm in favor of aspirating it from the bath into a significant stream of running water. That would, of course, go to an acid-neutralization system. The big advantage of this approach, of course, is the cooling as well as diluting effect of the water stream. It is important to be sure the aspirator and associated tubing will withstand the heat and oxidizing properties of the stream. John From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel- Sternberg Sent: Tuesday, February 03, 2015 2:49 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Piranha disposal Dear all, Sorry for the lame-man question but our safety unit managed to confuse us with weird recommendations so I'm checking with you guys: What is the best, safest, and most practical way to dispose piranha solution? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director MNCF Manager Phone: 03-640-5619 Mobile: 054-9984959 Email: anava at tauex.tau.ac.il -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Tue Feb 3 12:56:54 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Tue, 3 Feb 2015 17:56:54 +0000 Subject: [labnetwork] Piranha disposal In-Reply-To: <6A848421F695C54A9210C1A873C96AC22511BF1F@WPVEXCMBX04.purdue.lcl> Message-ID: Hi Nava, We have yet to come up with a formal standard operating procedure for our dedicated piranha hood. I suspect we will very likely proceed in a manner that is identical with John's description after letting the solution cool down for some minimum amount of time. The hood is equipped with a proper aspirator and the facility is served by an acid waste neutralizing system. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca From: , John R > Date: Tuesday, 3 February, 2015 8:13 AM To: 'Nava Ariel- Sternberg' >, "labnetwork at mtl.mit.edu" > Subject: Re: [labnetwork] Piranha disposal Nava ? I?m in favor of aspirating it from the bath into a significant stream of running water. That would, of course, go to an acid-neutralization system. The big advantage of this approach, of course, is the cooling as well as diluting effect of the water stream. It is important to be sure the aspirator and associated tubing will withstand the heat and oxidizing properties of the stream. John From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel- Sternberg Sent: Tuesday, February 03, 2015 2:49 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Piranha disposal Dear all, Sorry for the lame-man question but our safety unit managed to confuse us with weird recommendations so I'm checking with you guys: What is the best, safest, and most practical way to dispose piranha solution? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director MNCF Manager Phone: 03-640-5619 Mobile: 054-9984959 Email: anava at tauex.tau.ac.il -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Tue Feb 3 17:28:15 2015 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Tue, 3 Feb 2015 22:28:15 +0000 Subject: [labnetwork] Piranha disposal In-Reply-To: References: <6A848421F695C54A9210C1A873C96AC22511BF1F@WPVEXCMBX04.purdue.lcl>, Message-ID: We do the same as John mentioned in his response with a long plenum flush to help neutralize it as much as possible. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ ________________________________ From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Vito Logiudice [vito.logiudice at uwaterloo.ca] Sent: Tuesday, February 03, 2015 12:56 PM To: 'Nava Ariel- Sternberg' Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Piranha disposal Hi Nava, We have yet to come up with a formal standard operating procedure for our dedicated piranha hood. I suspect we will very likely proceed in a manner that is identical with John's description after letting the solution cool down for some minimum amount of time. The hood is equipped with a proper aspirator and the facility is served by an acid waste neutralizing system. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca From: , John R > Date: Tuesday, 3 February, 2015 8:13 AM To: 'Nava Ariel- Sternberg' >, "labnetwork at mtl.mit.edu" > Subject: Re: [labnetwork] Piranha disposal Nava ? I?m in favor of aspirating it from the bath into a significant stream of running water. That would, of course, go to an acid-neutralization system. The big advantage of this approach, of course, is the cooling as well as diluting effect of the water stream. It is important to be sure the aspirator and associated tubing will withstand the heat and oxidizing properties of the stream. John From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel- Sternberg Sent: Tuesday, February 03, 2015 2:49 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Piranha disposal Dear all, Sorry for the lame-man question but our safety unit managed to confuse us with weird recommendations so I'm checking with you guys: What is the best, safest, and most practical way to dispose piranha solution? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director MNCF Manager Phone: 03-640-5619 Mobile: 054-9984959 Email: anava at tauex.tau.ac.il -------------- next part -------------- An HTML attachment was scrubbed... URL: From mark.walters at duke.edu Tue Feb 3 18:33:44 2015 From: mark.walters at duke.edu (Mark Walters, Ph.D.) Date: Tue, 3 Feb 2015 23:33:44 +0000 Subject: [labnetwork] Contamination control in PVD systems In-Reply-To: References: <90069614.15740707.1422726767061.JavaMail.zimbra@stanford.edu> <1302126497.15747884.1422727299551.JavaMail.zimbra@stanford.edu> Message-ID: Related to this topic - does anyone in this group have systems or experience with depositing chalcogenide films (containing Te, Se, S, Sn, etc) and flourides (e.g., MgF2)? These are the types of materials we won't allow in our current systems, but given the high level of interest from several groups at Duke University, we are thinking about acquiring an RF sputter system dedicated for these films. I'm aware that we'll need to consider special pump packages and possibly chamber materials, but any experience from this group would be helpful. We're also wondering if it's even possible to combine all these "nasty" materials in one system, or will they just tend to contaminate each other and we end up with poor films. As far as our current systems go, at the Duke University SMIF we keep a list of allowable materials for each of our evaporators and sputter systems. If a user wants to deposit a material that is not on the list, they submit a "New Material Request" form, and this is reviewed by myself and the "major" faculty users of the systems. In general, we dedicate one e-beam evaporator for metals approved for semiconductor processing (plus gold), and a second e-beam/thermal evaporator for these types of metals, plus a few oxides, and "odd" requests that we're comfortable won't mess up our system. Our DC sputter system is dedicated for approved metals, and our RF sputter system is dedicated for approved dielectrics. Thanks, Mark D. Walters, Ph.D. Director, Shared Materials Instrumentation Facility (SMIF) Duke University Box 90271 Durham, NC 27708-0271 http://smif.lab.duke.edu Phone: (919) 660-5486 Fax: (919) 660-5491 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Fouad Karouta Sent: Saturday, January 31, 2015 6:48 PM To: Carsen Kline; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Contamination control in PVD systems Dear Carsen, Here at the Australian National University, Canberra, we do have an open access e-beam evaporator reserved for metals and we started with: Au, Pt, Ni, Ti, Ge, Al, Cr and later we added Pd, Mo, Hf and Nb. So far we haven't heard from our users any negative feedback about deterioration/contamination of contacts. We do not allow oxides nor metals like Zn, Cu, Te, Sn etc. where we believe these metals have a more serious contamination risk. In our facility we do have a sputter system w/o materials restriction and it is used for metals to oxides, nitrides offering more than 50 materials/targets. We do know from users that some contamination is found at level clearly below 1%. Hope this helps a bit and I am curious to learn from others their experience. Cheers, Fouad Karouta ********************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics and Engineering Australian National University ACT 0200, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Carsen Kline Sent: Sunday, 1 February 2015 5:02 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Contamination control in PVD systems Hello all, We're looking to expand our PVD capabilities and we're curious to know how other labs control contamination as it relates to safety, process, and equipment condition. Can anyone share your general philosophy or policies on approaching contamination control in PVD systems? (For example, categorizing systems based on allowed contaminants, or having multiple levels of controlled access to specific tools, etc.) Thanks for your input, I'm looking forward to your responses. Carsen Carsen Kline Stanford Nanofabrication Facility http://snf.stanford.edu carsen at stanford.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From khbeis at uw.edu Wed Feb 4 15:35:19 2015 From: khbeis at uw.edu (Michael Khbeis) Date: Wed, 4 Feb 2015 12:35:19 -0800 Subject: [labnetwork] Piranha disposal In-Reply-To: References: <6A848421F695C54A9210C1A873C96AC22511BF1F@WPVEXCMBX04.purdue.lcl> <, > Message-ID: Nava, We have drains in our dedicated piranha tanks. They have a 10:1 dilution valve with water during the draining. This goes to Acid Waste Neutralization system where it is pH balanced with caustic soda (aka sodium hydroxide) before going to sanitary sewer. Dr. Michael Khbeis Associate Director, Washington Nanofabrication Facility (WNF) National Nanotechnology Infrastructure Network (NNIN) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (F) 206.221.1681 (C) 443.254.5192 khbeis at uw.edu www.wnf.washington.edu/ > On Feb 3, 2015, at 2:28 PM, julia.aebersold at louisville.edu wrote: > > We do the same as John mentioned in his response with a long plenum flush to help neutralize it as much as possible. > > Cheers! > > Julia Aebersold, Ph.D. > MNTC Cleanroom Manager > University of Louisville > 2210 South Brook Street > Shumaker Research Building, Room 233 > Louisville, KY 40292 > > (502) 852-1572 > http://louisville.edu/micronano/ > From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Vito Logiudice [vito.logiudice at uwaterloo.ca] > Sent: Tuesday, February 03, 2015 12:56 PM > To: 'Nava Ariel- Sternberg' > Cc: labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Piranha disposal > > Hi Nava, > > We have yet to come up with a formal standard operating procedure for our dedicated piranha hood. I suspect we will very likely proceed in a manner that is identical with John's description after letting the solution cool down for some minimum amount of time. The hood is equipped with a proper aspirator and the facility is served by an acid waste neutralizing system. > > Best regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > > From: , John R > Date: Tuesday, 3 February, 2015 8:13 AM > To: 'Nava Ariel- Sternberg' , "labnetwork at mtl.mit.edu" > Subject: Re: [labnetwork] Piranha disposal > > Nava ? > I?m in favor of aspirating it from the bath into a significant stream of running water. That would, of course, go to an acid-neutralization system. > The big advantage of this approach, of course, is the cooling as well as diluting effect of the water stream. It is important to be sure the aspirator and associated tubing will withstand the heat and oxidizing properties of the stream. > John > > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel- Sternberg > Sent: Tuesday, February 03, 2015 2:49 AM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Piranha disposal > > Dear all, > > Sorry for the lame-man question but our safety unit managed to confuse us with weird recommendations so I'm checking with you guys: > > What is the best, safest, and most practical way to dispose piranha solution? > > Thanks, > > Nava > > > > > Nava Ariel-Sternberg, Ph.D. > Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director > MNCF Manager > Phone: 03-640-5619 > Mobile: 054-9984959 > Email: anava at tauex.tau.ac.il > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From thejohnnicholson at gmail.com Wed Feb 4 17:22:21 2015 From: thejohnnicholson at gmail.com (John Nicholson) Date: Wed, 4 Feb 2015 17:22:21 -0500 Subject: [labnetwork] Humidification System Design Message-ID: Hello all, We are currently in a design review process for a new class 1000 clean room on campus and the design architects have come up with a scheme that mixes RO steam with the existing building steam (containing softeners and whatever minerals the local city water has) to humidify the clean room. I am of the opinion this is a bad idea. Your opinions would be greatly appreciated as well as references to any design standards (ASHRAE?) you may know of for this type of humidification system. Regards, John -- John Nicholson Nanofabrication Laboratories Manager MassNanoTech Nanofabrication Facility Conte Center for Polymer Research, Rm. B111 University of Massachusetts Amherst 120 Governor's Drive Amherst,MA 01003-9305 Phone: 413-545-2772 Fax: 413-577-0165 -------------- next part -------------- An HTML attachment was scrubbed... URL: From thejohnnicholson at gmail.com Wed Feb 4 17:25:04 2015 From: thejohnnicholson at gmail.com (John Nicholson) Date: Wed, 4 Feb 2015 17:25:04 -0500 Subject: [labnetwork] Humidification System Design In-Reply-To: References: Message-ID: Self edit: that should be Class 10,000 clean room On Wed, Feb 4, 2015 at 5:22 PM, John Nicholson wrote: > Hello all, > We are currently in a design review process for a new class 1000 > clean room on campus and the design architects have come up with a scheme > that mixes RO steam with the existing building steam (containing softeners > and whatever minerals the local city water has) to humidify the clean room. > I am of the opinion this is a bad idea. Your opinions would be greatly > appreciated as well as references to any design standards (ASHRAE?) you may > know of for this type of humidification system. > > Regards, > John > > -- > John Nicholson > Nanofabrication Laboratories Manager > MassNanoTech Nanofabrication Facility > Conte Center for Polymer Research, Rm. B111 > University of Massachusetts Amherst > 120 Governor's Drive > Amherst,MA 01003-9305 > Phone: 413-545-2772 > Fax: 413-577-0165 > -------------- next part -------------- An HTML attachment was scrubbed... URL: From Jack.Paul at hdrinc.com Wed Feb 4 20:06:40 2015 From: Jack.Paul at hdrinc.com (Paul, Jack) Date: Thu, 5 Feb 2015 01:06:40 +0000 Subject: [labnetwork] Humidification System Design In-Reply-To: References: Message-ID: John, We would not recommend the proposed approach to mix the two together. The building steam system (or campus steam system) will be too contaminated, in particular with amines. If you are already making clean steam with RO, that should be used without adding in building steam. A better approach is a steam to steam heat exchanger, using the building steam to heat the RO water. They never touch since they are in separate coils. Clean RO in, clean steam out. Jack Paul, RA, LEED AP BD+C Laboratory Planner/Programmer Vice President HDR 3200 E Camelback Rd, Suite 250 Phoenix, Arizona 85018 D 602.474.3940 M 602.369.2086 jack.paul at hdrinc.com hdrinc.com/follow-us From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of John Nicholson Sent: Wednesday, February 04, 2015 3:22 PM To: Labnetwork Subject: [labnetwork] Humidification System Design Hello all, We are currently in a design review process for a new class 1000 clean room on campus and the design architects have come up with a scheme that mixes RO steam with the existing building steam (containing softeners and whatever minerals the local city water has) to humidify the clean room. I am of the opinion this is a bad idea. Your opinions would be greatly appreciated as well as references to any design standards (ASHRAE?) you may know of for this type of humidification system. Regards, John -- John Nicholson Nanofabrication Laboratories Manager MassNanoTech Nanofabrication Facility Conte Center for Polymer Research, Rm. B111 University of Massachusetts Amherst 120 Governor's Drive Amherst,MA 01003-9305 Phone: 413-545-2772 Fax: 413-577-0165 -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Wed Feb 4 20:12:24 2015 From: codreanu at udel.edu (Iulian Codreanu) Date: Wed, 4 Feb 2015 20:12:24 -0500 Subject: [labnetwork] Humidification System Design In-Reply-To: References: Message-ID: John, It is a terrible idea and I wonder why they would want to do that. A number of fabs across the country (including mine) decided that RO water was not adequate to generate the cleanroom humidification steam so they use DI water instead. Close attention must be paid to the materials used for the piping carrying the "clean" water, steam generation, steam "transport", steam dispersion, steam condensate collection and drainage. Iulian On Wed, Feb 4, 2015 at 5:22 PM, John Nicholson wrote: > Hello all, > We are currently in a design review process for a new class 1000 > clean room on campus and the design architects have come up with a scheme > that mixes RO steam with the existing building steam (containing softeners > and whatever minerals the local city water has) to humidify the clean room. > I am of the opinion this is a bad idea. Your opinions would be greatly > appreciated as well as references to any design standards (ASHRAE?) you may > know of for this type of humidification system. > > Regards, > John > > -- > John Nicholson > Nanofabrication Laboratories Manager > MassNanoTech Nanofabrication Facility > Conte Center for Polymer Research, Rm. B111 > University of Massachusetts Amherst > 120 Governor's Drive > Amherst,MA 01003-9305 > Phone: 413-545-2772 > Fax: 413-577-0165 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 163 ISE Lab Newark, DE 19716 302-831-2784 http://udnf.udel.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From bill at eecs.berkeley.edu Wed Feb 4 22:19:12 2015 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Wed, 04 Feb 2015 19:19:12 -0800 Subject: [labnetwork] Piranha disposal In-Reply-To: References: <6A848421F695C54A9210C1A873C96AC22511BF1F@WPVEXCMBX04.purdue.lcl> <, > Message-ID: <54D2E130.9050706@eecs.berkeley.edu> 10:1 dilution valve. Facility wide pH neutralization system. No discharge until temp <80C. I believe drain valve o-rings were the temp limiter. Bill Flounders UC Berkeley Michael Khbeis wrote: > Nava, > > We have drains in our dedicated piranha tanks. They have a 10:1 dilution valve with water during the draining. This goes to Acid Waste Neutralization system where it is pH balanced with caustic soda (aka sodium hydroxide) before going to sanitary sewer. > > > Dr. Michael Khbeis > Associate Director, Washington Nanofabrication Facility (WNF) > National Nanotechnology Infrastructure Network (NNIN) > University of Washington > Fluke Hall, Box 352143 > (O) 206.543.5101 > (F) 206.221.1681 > (C) 443.254.5192 > khbeis at uw.edu > www.wnf.washington.edu/ > > > >> On Feb 3, 2015, at 2:28 PM, julia.aebersold at louisville.edu wrote: >> >> We do the same as John mentioned in his response with a long plenum flush to help neutralize it as much as possible. >> >> Cheers! >> >> Julia Aebersold, Ph.D. >> MNTC Cleanroom Manager >> University of Louisville >> 2210 South Brook Street >> Shumaker Research Building, Room 233 >> Louisville, KY 40292 >> >> (502) 852-1572 >> http://louisville.edu/micronano/ >> From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Vito Logiudice [vito.logiudice at uwaterloo.ca] >> Sent: Tuesday, February 03, 2015 12:56 PM >> To: 'Nava Ariel- Sternberg' >> Cc: labnetwork at mtl.mit.edu >> Subject: Re: [labnetwork] Piranha disposal >> >> Hi Nava, >> >> We have yet to come up with a formal standard operating procedure for our dedicated piranha hood. I suspect we will very likely proceed in a manner that is identical with John's description after letting the solution cool down for some minimum amount of time. The hood is equipped with a proper aspirator and the facility is served by an acid waste neutralizing system. >> >> Best regards, >> Vito >> -- >> Vito Logiudice P.Eng. >> Director of Operations, Quantum NanoFab >> University of Waterloo >> Lazaridis QNC 1207 >> 200 University Avenue West >> Waterloo, ON Canada N2L 3G1 >> Tel.: (519) 888-4567 ext. 38703 >> Email: vito.logiudice at uwaterloo.ca >> Website: https://fab.qnc.uwaterloo.ca >> >> >> From: , John R >> Date: Tuesday, 3 February, 2015 8:13 AM >> To: 'Nava Ariel- Sternberg' , "labnetwork at mtl.mit.edu" >> Subject: Re: [labnetwork] Piranha disposal >> >> Nava ? >> I?m in favor of aspirating it from the bath into a significant stream of running water. That would, of course, go to an acid-neutralization system. >> The big advantage of this approach, of course, is the cooling as well as diluting effect of the water stream. It is important to be sure the aspirator and associated tubing will withstand the heat and oxidizing properties of the stream. >> John >> >> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel- Sternberg >> Sent: Tuesday, February 03, 2015 2:49 AM >> To: labnetwork at mtl.mit.edu >> Subject: [labnetwork] Piranha disposal >> >> Dear all, >> >> Sorry for the lame-man question but our safety unit managed to confuse us with weird recommendations so I'm checking with you guys: >> >> What is the best, safest, and most practical way to dispose piranha solution? >> >> Thanks, >> >> Nava >> >> >> >> >> Nava Ariel-Sternberg, Ph.D. >> Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director >> MNCF Manager >> Phone: 03-640-5619 >> Mobile: 054-9984959 >> Email: anava at tauex.tau.ac.il >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From jrweaver at purdue.edu Thu Feb 5 08:01:03 2015 From: jrweaver at purdue.edu (Weaver, John R) Date: Thu, 5 Feb 2015 13:01:03 +0000 Subject: [labnetwork] Piranha disposal In-Reply-To: References: <6A848421F695C54A9210C1A873C96AC22511BF1F@WPVEXCMBX04.purdue.lcl> <, > Message-ID: <6A848421F695C54A9210C1A873C96AC22511DC38@WPVEXCMBX04.purdue.lcl> Michael - That sounds like a good system. As I'm sure you already know, you need to periodically check the integrity of the seals around the drain - that would be the most likely failure point. John -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis Sent: Wednesday, February 04, 2015 3:35 PM To: julia.aebersold at louisville.edu Cc: Vito Logiudice; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Piranha disposal Nava, We have drains in our dedicated piranha tanks. They have a 10:1 dilution valve with water during the draining. This goes to Acid Waste Neutralization system where it is pH balanced with caustic soda (aka sodium hydroxide) before going to sanitary sewer. Dr. Michael Khbeis Associate Director, Washington Nanofabrication Facility (WNF) National Nanotechnology Infrastructure Network (NNIN) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (F) 206.221.1681 (C) 443.254.5192 khbeis at uw.edu www.wnf.washington.edu/ > On Feb 3, 2015, at 2:28 PM, julia.aebersold at louisville.edu wrote: > > We do the same as John mentioned in his response with a long plenum flush to help neutralize it as much as possible. > > Cheers! > > Julia Aebersold, Ph.D. > MNTC Cleanroom Manager > University of Louisville > 2210 South Brook Street > Shumaker Research Building, Room 233 > Louisville, KY 40292 > > (502) 852-1572 > http://louisville.edu/micronano/ > From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Vito Logiudice [vito.logiudice at uwaterloo.ca] > Sent: Tuesday, February 03, 2015 12:56 PM > To: 'Nava Ariel- Sternberg' > Cc: labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Piranha disposal > > Hi Nava, > > We have yet to come up with a formal standard operating procedure for our dedicated piranha hood. I suspect we will very likely proceed in a manner that is identical with John's description after letting the solution cool down for some minimum amount of time. The hood is equipped with a proper aspirator and the facility is served by an acid waste neutralizing system. > > Best regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > > From: , John R > Date: Tuesday, 3 February, 2015 8:13 AM > To: 'Nava Ariel- Sternberg' , "labnetwork at mtl.mit.edu" > Subject: Re: [labnetwork] Piranha disposal > > Nava - > I'm in favor of aspirating it from the bath into a significant stream of running water. That would, of course, go to an acid-neutralization system. > The big advantage of this approach, of course, is the cooling as well as diluting effect of the water stream. It is important to be sure the aspirator and associated tubing will withstand the heat and oxidizing properties of the stream. > John > > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel- Sternberg > Sent: Tuesday, February 03, 2015 2:49 AM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Piranha disposal > > Dear all, > > Sorry for the lame-man question but our safety unit managed to confuse us with weird recommendations so I'm checking with you guys: > > What is the best, safest, and most practical way to dispose piranha solution? > > Thanks, > > Nava > > > > > Nava Ariel-Sternberg, Ph.D. > Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director > MNCF Manager > Phone: 03-640-5619 > Mobile: 054-9984959 > Email: anava at tauex.tau.ac.il > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From jrweaver at purdue.edu Thu Feb 5 08:07:05 2015 From: jrweaver at purdue.edu (Weaver, John R) Date: Thu, 5 Feb 2015 13:07:05 +0000 Subject: [labnetwork] Humidification System Design In-Reply-To: References: Message-ID: <6A848421F695C54A9210C1A873C96AC22511DC59@WPVEXCMBX04.purdue.lcl> John ? The issue here is not so much particles as airborne molecular contaminants (AMCs). If the work that you are doing is sensitive to these airborne materials, then this is definitely a bad idea. If your work is sensitive only to particles, you can probably get away with this approach. At the BNC, we went to extremes in this regard. We use specialized clean-steam generators (heat exchangers with campus steam) and our full ultrapure water. This minimizes ? virtually eliminates ? AMCs from the humidification process. It is a relatively expensive approach, but we also operate at ISO 3 (Class 1) as we have several very sensitive areas of research. I would think that using pure RO water would be a good compromise, but it really depends on what your process and device sensitivity is. John John R. Weaver Strategic Facilities Officer Birck Nanotechnology Center 1205 West State Street West Lafayette IN 47907 (765) 494-5494 jrweaver at purdue.edu nano.purdue.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of John Nicholson Sent: Wednesday, February 04, 2015 5:22 PM To: Labnetwork Subject: [labnetwork] Humidification System Design Hello all, We are currently in a design review process for a new class 1000 clean room on campus and the design architects have come up with a scheme that mixes RO steam with the existing building steam (containing softeners and whatever minerals the local city water has) to humidify the clean room. I am of the opinion this is a bad idea. Your opinions would be greatly appreciated as well as references to any design standards (ASHRAE?) you may know of for this type of humidification system. Regards, John -- John Nicholson Nanofabrication Laboratories Manager MassNanoTech Nanofabrication Facility Conte Center for Polymer Research, Rm. B111 University of Massachusetts Amherst 120 Governor's Drive Amherst,MA 01003-9305 Phone: 413-545-2772 Fax: 413-577-0165 -------------- next part -------------- An HTML attachment was scrubbed... URL: From thejohnnicholson at gmail.com Thu Feb 5 09:50:09 2015 From: thejohnnicholson at gmail.com (John Nicholson) Date: Thu, 5 Feb 2015 09:50:09 -0500 Subject: [labnetwork] Humidification System Design In-Reply-To: References: Message-ID: Thanks to all who responded as the design was on schedule to wrap up Friday. The information provided will be very helpful. Regards, John On Wed, Feb 4, 2015 at 5:22 PM, John Nicholson wrote: > Hello all, > We are currently in a design review process for a new class 1000 > clean room on campus and the design architects have come up with a scheme > that mixes RO steam with the existing building steam (containing softeners > and whatever minerals the local city water has) to humidify the clean room. > I am of the opinion this is a bad idea. Your opinions would be greatly > appreciated as well as references to any design standards (ASHRAE?) you may > know of for this type of humidification system. > > Regards, > John > > -- > John Nicholson > Nanofabrication Laboratories Manager > MassNanoTech Nanofabrication Facility > Conte Center for Polymer Research, Rm. B111 > University of Massachusetts Amherst > 120 Governor's Drive > Amherst,MA 01003-9305 > Phone: 413-545-2772 > Fax: 413-577-0165 > -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at seas.upenn.edu Thu Feb 5 10:05:47 2015 From: nclay at seas.upenn.edu (Noah Clay) Date: Thu, 5 Feb 2015 10:05:47 -0500 Subject: [labnetwork] Humidification System Design In-Reply-To: References: Message-ID: John, Echoing everyone else: DI should be used for humidification. Campus steam loops are full of amines. Here?s a quick link to an article on what?s used and why you wouldn?t want trace amounts of it in your cleanroom: http://www.momar.com/blog/12/The_Basics_of_Neutralizing_Amines_in_Steam_Line_Treatment Also, if you work with sensitive chemically amplified resists, amine contamination decreases resist sensitivity [ref link below, slide #15]. http://web.eecs.umich.edu/~peicheng/teaching/EECS598_06_Winter/Lecture%2018%20-%20Mar%2016.pdf I hope this helps. Best, Noah Clay Quattrone Nanofabrication Facility School of Engineering & Applied Sciences University of Pennsylvania Philadelphia, PA > On Feb 4, 2015, at 8:12 PM, Iulian Codreanu wrote: > > John, > > It is a terrible idea and I wonder why they would want to do that. A number of fabs across the country (including mine) decided that RO water was not adequate to generate the cleanroom humidification steam so they use DI water instead. Close attention must be paid to the materials used for the piping carrying the "clean" water, steam generation, steam "transport", steam dispersion, steam condensate collection and drainage. > > Iulian > > On Wed, Feb 4, 2015 at 5:22 PM, John Nicholson > wrote: > Hello all, > We are currently in a design review process for a new class 1000 clean room on campus and the design architects have come up with a scheme that mixes RO steam with the existing building steam (containing softeners and whatever minerals the local city water has) to humidify the clean room. I am of the opinion this is a bad idea. Your opinions would be greatly appreciated as well as references to any design standards (ASHRAE?) you may know of for this type of humidification system. > > Regards, > John > > -- > John Nicholson > Nanofabrication Laboratories Manager > MassNanoTech Nanofabrication Facility > Conte Center for Polymer Research, Rm. B111 > University of Massachusetts Amherst > 120 Governor's Drive > Amherst,MA 01003-9305 > Phone: 413-545-2772 > Fax: 413-577-0165 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > > -- > iulian Codreanu, Ph.D. > Director of Operations, UD Nanofab > 163 ISE Lab > Newark, DE 19716 > 302-831-2784 > http://udnf.udel.edu > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From kamal.yadav at gmail.com Thu Feb 5 14:21:39 2015 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Fri, 6 Feb 2015 00:51:39 +0530 Subject: [labnetwork] Conductivity Standard Solution In-Reply-To: <54CFBB16.5090601@stanford.edu> References: <54CBAD79.1000204@stanford.edu> <54CFBB16.5090601@stanford.edu> Message-ID: Dear John, We do have a resistivity meter mounted on the system, just before [few meters] from tap. And that reads ~18 Mohm. And whenever it drops that is the time we change the filters/beds and do maintenance. I think we need to monitor that meter regularly and need not to check at the tap, though its few meters away. Thanks, Kamal. On Mon, Feb 2, 2015 at 11:29 PM, John Shott wrote: > Kamal: > > OK, I understand that you do not have a circulating system. I suspect > that this is a "once through" system where water goes through a certain > number of polishing beds, UV, and final filters before heading directly to > your DI taps. I've run systems of that type. > > I personally don't think that calibration of your resistivity monitors is > the thing that you should worry about. Even if your conductivity measures > 0.04 uS/cm ... which, yes, is technically impossible because at room > temperature water can be no less than 0.055 uS/cm ... that is indicative of > high-resistivity water. If the conductivity increased to 0.08 uS/cm, > however, then you know that something has changed. > > I would suggest that you try to get the appropriate adapter in your supply > line so that you can install a permanent mounting point for your > resistivity monitor. In that way, you can look at your conductivity any > time that you are flowing water. You can also answer the question in a > once through system: how long after I begin flowing water, does the > conductivity fall to the point that I am getting good resistivity water. > Most importantly, if you normally see a conductivity of 0.04 uS/cm, and it > increases to 0.08 uS/cm, for example, you know that something has changed. > That might be indicative, for example, that it is time to change your resin > beds. > > While absolute calibration is nice, with all due respect to my friends at > NIST, not all instruments need to be fully calibrated to provide useful > diagnostic information. I believe that this may be one of those cases > where being able to detect a change in conductivity may be more important > than the absolute accuracy of the conductivity measurement. > > Good luck, > > John > > > On 2/2/2015 4:22 AM, Kamal Yadav wrote: > > Dear John, Noah, and Miller, > > Thank you for your response. I have gone through the attachment sent by > John and Noah, which is identical and discusses about the topic in detail. > I did not know this one is going to be difficult as well... > > We do not have a circulating DI water loop. We have a conductivity meter > using which we try to periodically check the DI water resistivity in > flowing condition in a beaker waiting for sufficient time. I was happy as > it was showing 0.04 uS/cm :) as that would be around 25 Mohm-cm much more > than 18.2 Mohm, until a faculty pointed out that it is theoretically > impossible at that temperature and is evident from the attachments you sent. > > We have another resistivity meter in Solar Cell Center, that one is new > and gives good reading something on which we can believe, so far. > Calibrating that meter after sometime need to be identified as informed by > the supplier [Merc Millipore]. They do not know as of now!! > > *Two Options I can see: [John, Noah, Miller, please comment].* > > 1. These days 1 uS/cm standard is also available at NIST. But still far > from ~ 0.055. The attachment claims ASTM standard even at 100 uS/cm can be > used to calibrate UPW range resistivity meter? I am little confused whether > I can use the standard, and whether it will be stable with its > conductivity. We are ok as long as it shows more than 16 or 17 MOhm,..but > certainly not 25 :). The good meter from Solar cell lab shows around 15 > Mohm-cm so we know it may be accurate. Since it is flowing DI water in a > beaker it would be little far from 18.2 compare to John's 17.5, I suppose! > > 2. Send out the meter to an outside agency, will work if agency is in > India, otherwise I need to see how much it cost, which may be equal to buy > a new one. > > > Thanks, > Kamal. > > > > > > > > > > > > On Sat, Jan 31, 2015 at 12:03 AM, Noah Clay wrote: > >> Kamal, >> >> Personally, I would send out your meter(s) for calibration by an >> expert. That said, here?s a reference from a company in the Boston area >> (google search: "calibrate ultrapure water conductivity meter?) >> >> http://www.snowpure.com/docs/thornton-upw-resistivity-measurement.pdf >> >> Apparently, one can purchase standards from NIST for this (as stated in >> the above link), but I?m not sure if they have a standard in your range. >> >> Here?s another link from the same search/query: >> >> >> http://www.thermoscientific.com/content/dam/tfs/ATG/EPD/EPD%20Documents/Application%20&%20Technical%20Notes/Water%20Analysis%20Instruments%20and%20Supplies/Lab%20Electrodes%20and%20Sensors/Ion%20Selective%20Electrodes/AN-PUREWATER-E%20RevA-HIGHRES.pdf >> >> Best of luck, >> Noah Clay >> >> *Director, Quattrone Nanofabrication Facility* >> *School of Engineering & Applied Sciences* >> *University of Pennsylvania* >> *nano.upenn.edu * >> >> >> On Jan 30, 2015, at 11:12 AM, John Shott wrote: >> >> Kamal: >> >> Let me start by saying that I've never actually tried to calibrate meters >> of this type. Why? Because it is not easy. Here is a good reference >> article from over 15 years ago that describes the process in great detail >> including the fact that the standard conductivity solutions only go down to >> about 5 uS/cm ... which isn't very close to the 0.06 uS/cm you are hoping >> to measure. They also talk about separating the whole calibration process >> into the steps of calibrating the meter itself (easy), the temperature >> probe (reasonably easy), and the "cell constant" of the probe itself >> (hard). A number of you will recognize that the author of this paper works >> for a company that makes and sells resistivity probes and monitors. This >> is not intended to be an endorsement of that, or any other, company ... >> but, I think, indicates that detailed calibration of DI resistivity >> monitoring systems is typically found primarily in the companies that make >> and sell such instrumentation rather than by the folks that use such >> instrumentation. >> >> Their solution for high-precision calibration was to measure UHP water >> over a range of temperatures as a means of determining and/or calibrating >> the cell constant. If you read this article, however, you will conclude >> that this is not a procedure for the faint of heart. >> >> In recirculating DI systems, I believe that it is more common to have >> continuous resistivity monitoring on both the supply side and return side >> of the system. In our case, we typically see supply and return resistivity >> readings about 17.7 MOhm-cm or higher ... but that rarely, if ever, read >> the theoretically expected 18.2 MOhm-cm. In fact, it is not uncommon to >> see a return resistivity that is slightly higher than the supply-side >> resistivity ... which would seem unlikely. >> >> Then, on an occasional basis ... probably not as frequently as we should >> ... we (well, a third-party analytical laboratory) collect samples and have >> them measured for particle content, bacteria grown, total oxidizable >> carbon, dissolved silica, and a 30-element mass-spec analysis for metal >> levels in the ppt range that is commonly used for DI systems. In short, >> there are lots of things that CAN be wrong with DI water that are not seen >> by even an accurate resistivity measurement. In other words, as long as >> our resistivity readings are on the order of 17.5 MOhm-cm or above on both >> supply and return lines, I, for one, don't worry about the resistivity >> aspects of our water. In fact, earlier this week, I was comparing these DI >> analytical test results with another frequent contributor to this forum >> from the Bay Area institution with the longest history as a university >> laboratory in this field. >> >> Finally, when you say "periodic monitoring" do you mean that you have a >> probe in a continuously recirculating loop and you want to look at the >> resistivity of that periodically ... or that you occasionally collect a >> sample of water and are trying to measure it's resistivity? If it is the >> latter, that can be tricky: when exposed to air, DI water absorbs CO2 which >> forms carbonic acid that can cause your resistivity numbers to degrade. >> >> My guess is some of the folks that run newer labs than ours will have >> more details about the way that they monitor the DI water in these newer >> operations. >> >> Let me know if you have any additional questions. >> >> John >> >> On 1/30/2015 2:01 AM, Kamal Yadav wrote: >> >> Dear All, >> >> What is the best way to calibrate conductivity meters for DI water >> resistivity periodic monitoring. >> >> Standard known conductivity solutions are available but which one is >> good and stable for this range of measurement. [18 MOhm-cm or ~ 0.06 uS/cm] >> >> Thanks a lot! >> >> -- >> Thanks, >> Kamal Yadav >> Sr. Process Technologist >> IITBNF, EE Department, Annexe, >> IIT Bombay, Powai >> Mumbai 400076 >> Internal: 4435 >> Cell: 7506144798 >> Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in >> >> >> _______________________________________________ >> labnetwork mailing listlabnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> >> > > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in > > > -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: 7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Thu Feb 5 20:25:49 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Fri, 6 Feb 2015 01:25:49 +0000 Subject: [labnetwork] Humidification System Design In-Reply-To: References: Message-ID: John, I too will echo everyone else?s comments. In our case we came to what we deemed to be a reasonable compromise with RO water rather than full DI. Something else to consider with the approach your designers have proposed is the risk to your humidification system should you be in an area of very hard water (as is our case) and should the water softening system fail. The attached photo shows the mineral deposits that were noted on stainless steal steam distribution coils when such a failure occurred in one of our non-cleanroom systems. Good luck Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: Quantum NanoFab From: John Nicholson > Date: Wednesday, February 4, 2015 at 5:22 PM To: Labnetwork > Subject: [labnetwork] Humidification System Design Hello all, We are currently in a design review process for a new class 1000 clean room on campus and the design architects have come up with a scheme that mixes RO steam with the existing building steam (containing softeners and whatever minerals the local city water has) to humidify the clean room. I am of the opinion this is a bad idea. Your opinions would be greatly appreciated as well as references to any design standards (ASHRAE?) you may know of for this type of humidification system. Regards, John -- John Nicholson Nanofabrication Laboratories Manager MassNanoTech Nanofabrication Facility Conte Center for Polymer Research, Rm. B111 University of Massachusetts Amherst 120 Governor's Drive Amherst,MA 01003-9305 Phone: 413-545-2772 Fax: 413-577-0165 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: mineral deposits.png Type: image/png Size: 642960 bytes Desc: mineral deposits.png URL: From bcord at umn.edu Fri Feb 6 10:57:33 2015 From: bcord at umn.edu (bryan cord) Date: Fri, 06 Feb 2015 09:57:33 -0600 Subject: [labnetwork] Park AFM impressions? Message-ID: <54D4E46D.20705@umn.edu> Hi all, We're looking into acquiring a new AFM for general characterization work. The Park NX10/NX20 system, from the feature list, looks like a good tool at a fairly reasonable price. Unfortunately, I've never used one before and don't immediately know anyone who has. Does anyone have either of these systems installed, and would you be willing to share your general impressions of it if you do? Thanks, -bryan -- Bryan Cord Minnesota Nano Center (MNC) University of Minnesota 115 Union St SE, Rm 153 Minneapolis, MN 55455 612.626.3287 (work) 857.891.6820 (cell) bcord at umn.edu http://wiki.umn.edu/EBPG From tobi at stanford.edu Sun Feb 8 01:26:53 2015 From: tobi at stanford.edu (Tobias Beetz) Date: Sat, 7 Feb 2015 22:26:53 -0800 (PST) Subject: [labnetwork] Park AFM impressions? In-Reply-To: <54D4E46D.20705@umn.edu> References: <54D4E46D.20705@umn.edu> Message-ID: <39eb5666.00000568.00000030@Wind> Hi Bryan - We have an NX-10 installed in our facility. We also have the XE-70 and the XE-100. Both of the XE systems have seen a lot of usage and are really solid easy to use instruments. Our user base on the NX-10 is much smaller but this is mainly due to our decision to not provide another general purpose AFM but rather try to cater more to the bio/medical community. We have set up the NX-10 to be used mainly with the liquid cell. While we got some good results in that area, we are just now starting to open up the tool to all of our users. Comparing the workhorse XE series to the NX, it is clear that they have put some good work into the new tool. The design and performance is really solid and the noise level seems to be even better than on the XEs. They just came out with their new software (Smartscan) and while I heard that it is supposed to be very user friendly, we have not gotten the upgrade yet. There was some concern from our lab manager that the software is 'too' smart and that some parameters need to be adjusted to get best performance. Our hardware would also need to be modified in order to get the new software, so we have not done the upgrade yet. Cheers, Tobi Tobias Beetz, Ph.D. Associate Director, Stanford Nano Shared Facilities, Stanford University 348 Via Pueblo, Spilker Building, Room 105, Stanford, CA 94305-4088, (m) 650-644-9541 http://snsf.stanford.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of bryan cord Sent: Friday, February 6, 2015 7:58 AM To: Labnetwork Mailing List Subject: [labnetwork] Park AFM impressions? Hi all, We're looking into acquiring a new AFM for general characterization work. The Park NX10/NX20 system, from the feature list, looks like a good tool at a fairly reasonable price. Unfortunately, I've never used one before and don't immediately know anyone who has. Does anyone have either of these systems installed, and would you be willing to share your general impressions of it if you do? Thanks, -bryan -- Bryan Cord Minnesota Nano Center (MNC) University of Minnesota 115 Union St SE, Rm 153 Minneapolis, MN 55455 612.626.3287 (work) 857.891.6820 (cell) bcord at umn.edu http://wiki.umn.edu/EBPG _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From kamal.yadav at gmail.com Tue Feb 10 05:17:24 2015 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Tue, 10 Feb 2015 15:47:24 +0530 Subject: [labnetwork] Iron Oxide vs Chrome Mask plates Message-ID: Dear All, Is iron oxide superior or inferior to Chrome mask plates in resolution, sharp edges etc. Chrome mask plates are little more costly. But are Chrome PR coated mask plates in anyway better than PR Iron oxide plates? Thanks a lot! -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: 7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From thejohnnicholson at gmail.com Tue Feb 10 08:49:01 2015 From: thejohnnicholson at gmail.com (John Nicholson) Date: Tue, 10 Feb 2015 08:49:01 -0500 Subject: [labnetwork] Iron Oxide vs Chrome Mask plates In-Reply-To: References: Message-ID: Yamal, If you are aligning to small features and using a positive photoresist with a dark field mask, the ability to see through the iron oxide can aid alignment. Regards, John -- John Nicholson Nanofabrication Laboratories Manager MassNanoTech Nanofabrication Facility Conte Center for Polymer Research, Rm. B111 University of Massachusetts Amherst 120 Governor's Drive Amherst,MA 01003-9305 Phone: 413-545-2772 Fax: 413-577-0165 On Tue, Feb 10, 2015 at 5:17 AM, Kamal Yadav wrote: > Dear All, > > Is iron oxide superior or inferior to Chrome mask plates in resolution, > sharp edges etc. Chrome mask plates are little more costly. But are Chrome > PR coated mask plates in anyway better than PR Iron oxide plates? > > Thanks a lot! > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jeffg at illinois.edu Tue Feb 10 10:21:13 2015 From: jeffg at illinois.edu (Grau, Jeffrey) Date: Tue, 10 Feb 2015 15:21:13 +0000 Subject: [labnetwork] Iron Oxide vs Chrome Mask plates In-Reply-To: References: Message-ID: Hello Kamal, My name is Jeff Grau and I am the Research Engineer at the University of Illinois. I have been involved in Photolithography for over 35 years. The most significant difference between Chrome and Iron Oxide masks is the ability to see through the Iron Oxide. This proves to be most beneficial when aligning the photomask. At extremely high magnification, one might see sharper edge quality on the Chrome photomask, but taking into account the see-through ability of the Iron Oxide mask, this is a small trade off. You mention chrome masks being more expensive than Iron Oxide. Here in the States, the opposite is true. The cost difference between Iron Oxide and Chrome is approximately double. Roughly, 98 percent of all the photomasks being generated here at the University of Illinois are generated on Iron Oxide. I hope this helps?.Jeff From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav Sent: Tuesday, February 10, 2015 4:17 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Iron Oxide vs Chrome Mask plates Dear All, Is iron oxide superior or inferior to Chrome mask plates in resolution, sharp edges etc. Chrome mask plates are little more costly. But are Chrome PR coated mask plates in anyway better than PR Iron oxide plates? Thanks a lot! -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: 7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From cpmcke01 at gmail.com Tue Feb 10 12:53:35 2015 From: cpmcke01 at gmail.com (Curt McKenna) Date: Tue, 10 Feb 2015 12:53:35 -0500 Subject: [labnetwork] sub-micron photomask capabilities Message-ID: <19a901d0455a$7e666f80$7b334e80$@gmail.com> Hello All, Our mask writing capabilities at the University of Louisville are currently down and I was looking for someone who can help with one of our higher resolution masks. Does anyone have the capability or know of a place capable of producing standard photomasks with linewidths as small as 700 nanometers? Curt McKenna Research Engineering Scientist University of Louisville Micro/Nano Technology Center -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Tue Feb 10 13:30:05 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Tue, 10 Feb 2015 18:30:05 +0000 Subject: [labnetwork] Conclusion: Heat trace issues on DCS gas lines In-Reply-To: Message-ID: Dear Colleagues, Thank you very much to everyone whom took the time to write in with their insights on this issue. Special thanks to John Shott and Tom Britton for the photos and reference documents provided. So that others may perhaps benefit from our experience, we've concluded that the cause of the premature failure appears to have been the presence of several "voids" where the heat trace was not in intimate contact with the SS tubing. This occurred even though the trace had been taped every 12 inches per the manufacturer's recommendations. We also noted voids at some elbows where maintaining contact was/is difficult. To keep the issue from repeating itself in the future, our plan is to reinstall two new heat traces along the length of the tubing, one on the bottom and one on the top. One of these will remain active while the backup trace will be kept off and act as an insurance policy should the primary unit fail in the future. If anyone sees a problem with this particular approach, I would be glad to hear from you. In the new installation, conductive putty will be used to fill any voids before aluminum tape is applied along the entire length of the line much like John showed in his attached photo. The entire assembly will then be re-insulated per the original design specification. Fortunately, the problem occurred under warranty so our only out-of-pocket cost will be limited to the cost of the backup heat trace (a few hundred dollars). Regards, Vito From: Vito Logiudice > Date: Wednesday, 21 January, 2015 12:23 PM To: Labnetwork > Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From keithf at ualberta.ca Tue Feb 10 14:13:57 2015 From: keithf at ualberta.ca (Keith Franklin) Date: Tue, 10 Feb 2015 12:13:57 -0700 Subject: [labnetwork] Heidelberg DWL2000 owner In-Reply-To: <52801.143.89.199.196.1422513250.squirrel@sqmail.ust.hk> References: <57168.143.89.199.196.1422438677.squirrel@sqmail.ust.hk> <08bb01d03b44$723b05b0$56b11110$@cnf.cornell.edu> <52801.143.89.199.196.1422513250.squirrel@sqmail.ust.hk> Message-ID: Over the past 15 years ,we have owned a DWL 66 and DWL 200. We've even upgraded our tools a few times. We currently have a recently upgraded DWL 200 with a robotic loader and are quite happ. I can't say enough good things about this vendor. I wish more of our suppliers were as accommodating and hard working. Product quality is excellent, and the customer service is even better. Best of luck, Keith Keith Franklin Operations Manager -nanoFAB Office: 780-492-0170 On Wed, Jan 28, 2015 at 11:34 PM, CHUNG Wing Leong wrote: > Dear all labnetwork member, > > Your input is very useful for me to select a right tool. > > Cheers > Chung > > > > We have owned one of these tools for almost 5 years. We have also owned > a > > DWL66, and a DWL66fs, the latter of which we still have. The 2000 has > > been > > giving us very good results. We have seen a few problems with the solid > > state laser with age, but it generally has been a good tool. We can > write > > any mask we need in ~2 hours max using the nominal 0.7um write head. > > There > > are iso/dense bias issues, particularly with smaller features, but that > is > > expected. Precision and accuracy of the stage are very good. > > > > > > > > Garry J. Bordonaro > > Microlithographic Engineer > > Cornell NanoScale Facility > > 250 Duffield Hall > > Cornell University > > Ithaca, NY 14853-2700 > > (607) 254-4936 > > bordonaro at cnf.cornell.edu > > http://www.cnf.cornell.edu/ > > > > > > > > > > > > -----Original Message----- > > From: labnetwork-bounces at mtl.mit.edu > > [mailto:labnetwork-bounces at mtl.mit.edu] > > On Behalf Of CHUNG Wing Leong > > Sent: Wednesday, January 28, 2015 4:51 AM > > To: labnetwork at mtl.mit.edu > > Subject: [labnetwork] Heidelberg DWL2000 owner > > > > Dear all, > > > > My name is Jeff Chung, Engineer of NFF of HKUST. We are writing a > proposal > > to acquire a Heidelberg DWL2000 for mask making. Is there any tool owner > > here? and can give me some recommendation of this machine or other > > alternative? > > > > Best Regards > > Jeff Chung > > > > > > > > > > > > _______________________________________________ > > labnetwork mailing list > > labnetwork at mtl.mit.edu > > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From dgrimard at umich.edu Tue Feb 10 22:32:00 2015 From: dgrimard at umich.edu (Dennis Grimard) Date: Tue, 10 Feb 2015 22:32:00 -0500 Subject: [labnetwork] Conclusion: Heat trace issues on DCS gas lines In-Reply-To: References: Message-ID: <2DB1C81C-2D72-47A9-A798-6AAC428CA192@umich.edu> Vito: I have watched with great pleasure the discussion on this topic. I too agree that much good info has been discussed ... Great feedback from some very knowledgable people indeed. I need to throw a wrench in the discussion (or prove my ignorance). I have always resisted heat taping for the following reasons: 1) when the tube enters a VMB or any ventilated enclosure there is a significant temperature drop due to the large purging flow rate within the enclosure ... Tending to cool the line at the worst possible point, 2) the VMB type enclosures tend to have many right angle welds and valves which promote condensation .... Rather than long graceful bends typically used external to the enclosure, 3) SS is a horrible heat conductor ... As is n2 gas ... So if I heat trace a double wall tube how much heat actually gets to the inner tube? how consistent is that heat? What is the temperature gradient?, and 4) the actual cold to hot temperature gradient (desired) is difficult to institute along the length of line ... A good feedback loop is required. Also, heat tape gives me the district impression that it can contribute to an out of control heating failure with a possible fire as a result. So, not that it solves your problem but here is what I have tried to always implement: 1) short runs (home runs not a distribution), 2) minimum short radius right angles, 3) minimize VMB's ... Mini gas cabinets with multiple outputs in the cabinet, 4) chilled bottles, 5) vacuum delivery, and 6) large radius bends. Just food for thought ... Dennis S Grimard, Ph.D. Associate Director of Operations, MIT.nano Massachusetts Institute of Technology 60 Vassor Street, Bldg 39-556 Cambridge, MA 02149 C: (734) 368-7172 EM: dgrimard at mit.edu > On Feb 10, 2015, at 1:30 PM, Vito Logiudice wrote: > > Dear Colleagues, > > Thank you very much to everyone whom took the time to write in with their insights on this issue. Special thanks to John Shott and Tom Britton for the photos and reference documents provided. > > So that others may perhaps benefit from our experience, we've concluded that the cause of the premature failure appears to have been the presence of several "voids" where the heat trace was not in intimate contact with the SS tubing. This occurred even though the trace had been taped every 12 inches per the manufacturer's recommendations. We also noted voids at some elbows where maintaining contact was/is difficult. > > To keep the issue from repeating itself in the future, our plan is to reinstall two new heat traces along the length of the tubing, one on the bottom and one on the top. One of these will remain active while the backup trace will be kept off and act as an insurance policy should the primary unit fail in the future. If anyone sees a problem with this particular approach, I would be glad to hear from you. > > In the new installation, conductive putty will be used to fill any voids before aluminum tape is applied along the entire length of the line much like John showed in his attached photo. The entire assembly will then be re-insulated per the original design specification. Fortunately, the problem occurred under warranty so our only out-of-pocket cost will be limited to the cost of the backup heat trace (a few hundred dollars). > > Regards, > Vito > > From: Vito Logiudice > Date: Wednesday, 21 January, 2015 12:23 PM > To: Labnetwork > Subject: [labnetwork] Heat trace issues on DCS gas lines > > Dear Colleagues, > > We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. > > The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. > > I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? > > Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. > > Regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From kamal.yadav at gmail.com Wed Feb 11 04:32:07 2015 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Wed, 11 Feb 2015 15:02:07 +0530 Subject: [labnetwork] Iron Oxide vs Chrome Mask plates In-Reply-To: References: Message-ID: Dear John and Jeffrey, Thanks for your reply. We also use Iron Oxide plates. It looks like both are same performance and Iron oxide has an added advantage in alignment for it being transparent. Thanks a lot! On Tue, Feb 10, 2015 at 8:51 PM, Grau, Jeffrey wrote: > Hello Kamal, > > My name is Jeff Grau and I am the Research Engineer at the > University of Illinois. I have been involved in Photolithography for over > 35 years. The most significant difference between Chrome and Iron Oxide > masks is the ability to see through the Iron Oxide. This proves to be most > beneficial when aligning the photomask. At extremely high magnification, > one might see sharper edge quality on the Chrome photomask, but taking > into account the see-through ability of the Iron Oxide mask, this is a > small trade off. You mention chrome masks being more expensive than Iron > Oxide. Here in the States, the opposite is true. The cost difference > between Iron Oxide and Chrome is approximately double. > > Roughly, 98 percent of all the photomasks being generated > here at the University of Illinois are generated on Iron Oxide. > > I hope this helps?.Jeff > > > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Kamal Yadav > *Sent:* Tuesday, February 10, 2015 4:17 AM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Iron Oxide vs Chrome Mask plates > > > > Dear All, > > > > Is iron oxide superior or inferior to Chrome mask plates in resolution, > sharp edges etc. Chrome mask plates are little more costly. But are Chrome > PR coated mask plates in anyway better than PR Iron oxide plates? > > > > Thanks a lot! > > > > -- > > Thanks, > > Kamal Yadav > > Sr. Process Technologist > > IITBNF, EE Department, Annexe, > > IIT Bombay, Powai > > Mumbai 400076 > > Internal: 4435 > > Cell: 7506144798 > > Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in > -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: 7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrweaver at purdue.edu Wed Feb 11 08:51:23 2015 From: jrweaver at purdue.edu (Weaver, John R) Date: Wed, 11 Feb 2015 13:51:23 +0000 Subject: [labnetwork] Conclusion: Heat trace issues on DCS gas lines In-Reply-To: <2DB1C81C-2D72-47A9-A798-6AAC428CA192@umich.edu> References: <2DB1C81C-2D72-47A9-A798-6AAC428CA192@umich.edu> Message-ID: <6A848421F695C54A9210C1A873C96AC225122541@WPVEXCMBX04.purdue.lcl> Dennis ? Great points. We use heat trace, but do not use VMBs for these gases ? for the reasons you listed. John From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dennis Grimard Sent: Tuesday, February 10, 2015 10:32 PM To: Vito Logiudice Cc: Labnetwork Subject: Re: [labnetwork] Conclusion: Heat trace issues on DCS gas lines Vito: I have watched with great pleasure the discussion on this topic. I too agree that much good info has been discussed ... Great feedback from some very knowledgable people indeed. I need to throw a wrench in the discussion (or prove my ignorance). I have always resisted heat taping for the following reasons: 1) when the tube enters a VMB or any ventilated enclosure there is a significant temperature drop due to the large purging flow rate within the enclosure ... Tending to cool the line at the worst possible point, 2) the VMB type enclosures tend to have many right angle welds and valves which promote condensation .... Rather than long graceful bends typically used external to the enclosure, 3) SS is a horrible heat conductor ... As is n2 gas ... So if I heat trace a double wall tube how much heat actually gets to the inner tube? how consistent is that heat? What is the temperature gradient?, and 4) the actual cold to hot temperature gradient (desired) is difficult to institute along the length of line ... A good feedback loop is required. Also, heat tape gives me the district impression that it can contribute to an out of control heating failure with a possible fire as a result. So, not that it solves your problem but here is what I have tried to always implement: 1) short runs (home runs not a distribution), 2) minimum short radius right angles, 3) minimize VMB's ... Mini gas cabinets with multiple outputs in the cabinet, 4) chilled bottles, 5) vacuum delivery, and 6) large radius bends. Just food for thought ... Dennis S Grimard, Ph.D. Associate Director of Operations, MIT.nano Massachusetts Institute of Technology 60 Vassor Street, Bldg 39-556 Cambridge, MA 02149 C: (734) 368-7172 EM: dgrimard at mit.edu On Feb 10, 2015, at 1:30 PM, Vito Logiudice > wrote: Dear Colleagues, Thank you very much to everyone whom took the time to write in with their insights on this issue. Special thanks to John Shott and Tom Britton for the photos and reference documents provided. So that others may perhaps benefit from our experience, we've concluded that the cause of the premature failure appears to have been the presence of several "voids" where the heat trace was not in intimate contact with the SS tubing. This occurred even though the trace had been taped every 12 inches per the manufacturer's recommendations. We also noted voids at some elbows where maintaining contact was/is difficult. To keep the issue from repeating itself in the future, our plan is to reinstall two new heat traces along the length of the tubing, one on the bottom and one on the top. One of these will remain active while the backup trace will be kept off and act as an insurance policy should the primary unit fail in the future. If anyone sees a problem with this particular approach, I would be glad to hear from you. In the new installation, conductive putty will be used to fill any voids before aluminum tape is applied along the entire length of the line much like John showed in his attached photo. The entire assembly will then be re-insulated per the original design specification. Fortunately, the problem occurred under warranty so our only out-of-pocket cost will be limited to the cost of the backup heat trace (a few hundred dollars). Regards, Vito From: Vito Logiudice > Date: Wednesday, 21 January, 2015 12:23 PM To: Labnetwork > Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Wed Feb 11 10:53:30 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Wed, 11 Feb 2015 15:53:30 +0000 Subject: [labnetwork] Conclusion: Heat trace issues on DCS gas lines In-Reply-To: <2DB1C81C-2D72-47A9-A798-6AAC428CA192@umich.edu> Message-ID: Hi Dennis, Great insights ? thanks very much for sharing. Our aim is to avoid cold spots and keep the entire system at 19C to 20C, especially since the DCS line traverses a loading dock between the gas bunker and the fab. The two roll-up dock doors are equipped with heated air curtains but we wanted the added insurance of a heated/insulated line. In our particular case, we've got a single 120 foot line between the gas cabinet and the point of use (no VMB's) and we did our best to stay true to the use of large radius bends all along the run. The DCS panel design was kept as simple as possible (no regulator) and the entire cabinet is located in a heated bunker in which temperature trends are monitored. Good point about the possible risk of fire. While the heat trace controller is capable of outputting a limited amount of power, we did see some odd "burn" marks at some locations which lead us to conclude that the Armaflex insulation's upper use limit of 105C may have been exceeded at some of the void locations. In light of these findings we've decided to use fiberglass insulation instead of Armaflex for the repair. Best, Vito From: Dennis Grimard > Date: Tuesday, 10 February, 2015 10:32 PM To: Vito Logiudice > Cc: Labnetwork > Subject: Re: [labnetwork] Conclusion: Heat trace issues on DCS gas lines Vito: I have watched with great pleasure the discussion on this topic. I too agree that much good info has been discussed ... Great feedback from some very knowledgable people indeed. I need to throw a wrench in the discussion (or prove my ignorance). I have always resisted heat taping for the following reasons: 1) when the tube enters a VMB or any ventilated enclosure there is a significant temperature drop due to the large purging flow rate within the enclosure ... Tending to cool the line at the worst possible point, 2) the VMB type enclosures tend to have many right angle welds and valves which promote condensation .... Rather than long graceful bends typically used external to the enclosure, 3) SS is a horrible heat conductor ... As is n2 gas ... So if I heat trace a double wall tube how much heat actually gets to the inner tube? how consistent is that heat? What is the temperature gradient?, and 4) the actual cold to hot temperature gradient (desired) is difficult to institute along the length of line ... A good feedback loop is required. Also, heat tape gives me the district impression that it can contribute to an out of control heating failure with a possible fire as a result. So, not that it solves your problem but here is what I have tried to always implement: 1) short runs (home runs not a distribution), 2) minimum short radius right angles, 3) minimize VMB's ... Mini gas cabinets with multiple outputs in the cabinet, 4) chilled bottles, 5) vacuum delivery, and 6) large radius bends. Just food for thought ... Dennis S Grimard, Ph.D. Associate Director of Operations, MIT.nano Massachusetts Institute of Technology 60 Vassor Street, Bldg 39-556 Cambridge, MA 02149 C: (734) 368-7172 EM: dgrimard at mit.edu On Feb 10, 2015, at 1:30 PM, Vito Logiudice > wrote: Dear Colleagues, Thank you very much to everyone whom took the time to write in with their insights on this issue. Special thanks to John Shott and Tom Britton for the photos and reference documents provided. So that others may perhaps benefit from our experience, we've concluded that the cause of the premature failure appears to have been the presence of several "voids" where the heat trace was not in intimate contact with the SS tubing. This occurred even though the trace had been taped every 12 inches per the manufacturer's recommendations. We also noted voids at some elbows where maintaining contact was/is difficult. To keep the issue from repeating itself in the future, our plan is to reinstall two new heat traces along the length of the tubing, one on the bottom and one on the top. One of these will remain active while the backup trace will be kept off and act as an insurance policy should the primary unit fail in the future. If anyone sees a problem with this particular approach, I would be glad to hear from you. In the new installation, conductive putty will be used to fill any voids before aluminum tape is applied along the entire length of the line much like John showed in his attached photo. The entire assembly will then be re-insulated per the original design specification. Fortunately, the problem occurred under warranty so our only out-of-pocket cost will be limited to the cost of the backup heat trace (a few hundred dollars). Regards, Vito From: Vito Logiudice > Date: Wednesday, 21 January, 2015 12:23 PM To: Labnetwork > Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob at eecs.berkeley.edu Wed Feb 11 10:59:56 2015 From: bob at eecs.berkeley.edu (Robert M. HAMILTON) Date: Wed, 11 Feb 2015 07:59:56 -0800 Subject: [labnetwork] Conclusion: Heat trace issues on DCS gas lines In-Reply-To: <2DB1C81C-2D72-47A9-A798-6AAC428CA192@umich.edu> References: <2DB1C81C-2D72-47A9-A798-6AAC428CA192@umich.edu> Message-ID: Colleagues, I have enjoyed the read and ideas about delivering gases that are subject to phase changes in the delivery system. Thus far I have not made a comment because the UC Berkeley Marvell Nanolab is in a part of the country with moderate climate and our lab has gas vaults which are temperature controlled. It seems the topic is near closure; however, I throw in a wrench. We too occasionally face with liquid/gas transition issues. Examples are delivery of liquid CO2 for critical point drying, reducing the delivery pressure of LN from a source at high pressure and delivering gases such as C4F8, SICl4 and SiH2Cl2. These gas deliveries being more inline (no pun intended) with the current dialogue. Besides phase transition within delivery lines there are also issues of phase transitions across the orifices or mfc's and pressure regulators because of adiabatic expansion. Delivery of these types of gases is often tool-specific in a research laboratory. Thus, the use of intermediate pressure vessels is worth consideration. An intermediate pressure vessel receives a source and then passes it forward regulated at the point of use, the tool. This obviates worries about phase changes in long delivery lines. I cannot speak with much experience about this strategy. It may offer a solution in environments that face temperature swings. In the case of liquid CO2, simply keeping the gas cylinders at a slightly elevated temperature assures liquid delivery. Perhaps someone with more experience will illuminate these thoughts? Bob Hamilton Robert Hamilton University of CA, Berkeley Marvell NanoLab Equipment Manager Rm 520 Sutardja Dai Hall, MC 1754 Berkeley, CA 94720 Phone 510-809-8618 (desk - preferred) Mobile 510-325-7557 (my personal mobile) E-mail preferred: bob at eecs.berkeley.edu http://nanolab.berkeley.edu/ Robert Hamilton University of CA, Berkeley Marvell NanoLab Equipment Manager Rm 520 Sutardja Dai Hall, MC 1754 Berkeley, CA 94720 Phone 510-809-8618 (desk - preferred) Mobile 510-325-7557 (my personal mobile) E-mail preferred: bob at eecs.berkeley.edu http://nanolab.berkeley.edu/ On Tue, Feb 10, 2015 at 7:32 PM, Dennis Grimard wrote: > Vito: > > I have watched with great pleasure the discussion on this topic. I too > agree that much good info has been discussed ... Great feedback from some > very knowledgable people indeed. > > I need to throw a wrench in the discussion (or prove my ignorance). I > have always resisted heat taping for the following reasons: 1) when the > tube enters a VMB or any ventilated enclosure there is a significant > temperature drop due to the large purging flow rate within the enclosure > ... Tending to cool the line at the worst possible point, 2) the VMB type > enclosures tend to have many right angle welds and valves which promote > condensation .... Rather than long graceful bends typically used external > to the enclosure, 3) SS is a horrible heat conductor ... As is n2 gas ... > So if I heat trace a double wall tube how much heat actually gets to the > inner tube? how consistent is that heat? What is the temperature > gradient?, and 4) the actual cold to hot temperature gradient (desired) is > difficult to institute along the length of line ... A good feedback loop is > required. Also, heat tape gives me the district impression that it can > contribute to an out of control heating failure with a possible fire as a > result. > > So, not that it solves your problem but here is what I have tried to > always implement: 1) short runs (home runs not a distribution), 2) minimum > short radius right angles, 3) minimize VMB's ... Mini gas cabinets with > multiple outputs in the cabinet, 4) chilled bottles, 5) vacuum delivery, > and 6) large radius bends. > > Just food for thought ... > > Dennis S Grimard, Ph.D. > Associate Director of Operations, MIT.nano > > Massachusetts Institute of Technology > 60 Vassor Street, Bldg 39-556 > Cambridge, MA 02149 > > C: (734) 368-7172 > EM: dgrimard at mit.edu > > On Feb 10, 2015, at 1:30 PM, Vito Logiudice > wrote: > > Dear Colleagues, > > Thank you very much to everyone whom took the time to write in with > their insights on this issue. Special thanks to John Shott and Tom Britton > for the photos and reference documents provided. > > So that others may perhaps benefit from our experience, we've concluded > that the cause of the premature failure appears to have been the presence > of several "voids" where the heat trace was not in intimate contact with > the SS tubing. This occurred even though the trace had been taped every 12 > inches per the manufacturer's recommendations. We also noted voids at some > elbows where maintaining contact was/is difficult. > > To keep the issue from repeating itself in the future, our plan is to > reinstall two new heat traces along the length of the tubing, one on the > bottom and one on the top. One of these will remain active while the backup > trace will be kept off and act as an insurance policy should the primary > unit fail in the future. If anyone sees a problem with this particular > approach, I would be glad to hear from you. > > In the new installation, conductive putty will be used to fill any voids > before aluminum tape is applied along the entire length of the line much > like John showed in his attached photo. The entire assembly will then be > re-insulated per the original design specification. Fortunately, the > problem occurred under warranty so our only out-of-pocket cost will be > limited to the cost of the backup heat trace (a few hundred dollars). > > Regards, > Vito > > From: Vito Logiudice > Date: Wednesday, 21 January, 2015 12:23 PM > To: Labnetwork > Subject: [labnetwork] Heat trace issues on DCS gas lines > > Dear Colleagues, > > We are experiencing an issue with the heat trace on our Dichlorosilane > gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer > containment line which is itself heat traced with a single strand of heat > trace that runs the entire length of the coax assembly. The 120 foot line > is insulated as shown in the attached photo. A portion of the heat-trace > appears to have failed prematurely (it was installed less than one year > ago) and we are wondering if the method of installation may be the cause. > > The heat trace was not installed in a spiral fashion around the outer > 1/2" tube. Rather it was installed in a straight fashion along its entire > length with "heat trace fastening tape" located every four feet or so. A > member of my team has suggested that such a straight rather than spiral > installation may have caused hot spots (at the fastening locations) which > may have in turn caused the failure. > > I would appreciate hearing from the community on this point: Are the > heat traces around your low pressure gas lines spiral-wound around the > lines or are they installed in a straight fashion and somehow fastened > along the entire length? > > Other insights/suggestions on the proper heat tracing of gas lines by > experts in the field as well as comments on possible causes of premature > heat trace failure are very much welcome and appreciated. Thank you. > > Regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From matthieu.nannini at mcgill.ca Wed Feb 11 12:39:57 2015 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Wed, 11 Feb 2015 17:39:57 +0000 Subject: [labnetwork] point of detection - Gas sensors In-Reply-To: References: Message-ID: <84DF1F10-9D58-4A5B-963E-FF5E755B2C35@mcgill.ca> Colleagues, first thanks Vito for initiating this discussion. Very important points where made which led me to explore the labnetwork archives about sub-atmospheric setup and TGMS. Fore those interested I will save you the search: https://www-mtl.mit.edu/pipermail/labnetwork/2012-August/000541.html https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/001004.html https://www-mtl.mit.edu/pipermail/labnetwork/2014-July/001346.html https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/000998.html Since we are in a gas discussion timing, If you had to prioritize the following position of the sensors, what would you recommend ? - exhaust of gas cabinet - gas cabinet at the tool - VMB if any - exhaust of pump after the tool ? - exhaust after abatement system ? - free space sensors scattered around most sensitive areas: where human presence is usually high Thanks ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ Le 2015-02-11 ? 10:53, Vito Logiudice > a ?crit : Hi Dennis, Great insights ? thanks very much for sharing. Our aim is to avoid cold spots and keep the entire system at 19C to 20C, especially since the DCS line traverses a loading dock between the gas bunker and the fab. The two roll-up dock doors are equipped with heated air curtains but we wanted the added insurance of a heated/insulated line. In our particular case, we've got a single 120 foot line between the gas cabinet and the point of use (no VMB's) and we did our best to stay true to the use of large radius bends all along the run. The DCS panel design was kept as simple as possible (no regulator) and the entire cabinet is located in a heated bunker in which temperature trends are monitored. Good point about the possible risk of fire. While the heat trace controller is capable of outputting a limited amount of power, we did see some odd "burn" marks at some locations which lead us to conclude that the Armaflex insulation's upper use limit of 105C may have been exceeded at some of the void locations. In light of these findings we've decided to use fiberglass insulation instead of Armaflex for the repair. Best, Vito From: Dennis Grimard > Date: Tuesday, 10 February, 2015 10:32 PM To: Vito Logiudice > Cc: Labnetwork > Subject: Re: [labnetwork] Conclusion: Heat trace issues on DCS gas lines Vito: I have watched with great pleasure the discussion on this topic. I too agree that much good info has been discussed ... Great feedback from some very knowledgable people indeed. I need to throw a wrench in the discussion (or prove my ignorance). I have always resisted heat taping for the following reasons: 1) when the tube enters a VMB or any ventilated enclosure there is a significant temperature drop due to the large purging flow rate within the enclosure ... Tending to cool the line at the worst possible point, 2) the VMB type enclosures tend to have many right angle welds and valves which promote condensation .... Rather than long graceful bends typically used external to the enclosure, 3) SS is a horrible heat conductor ... As is n2 gas ... So if I heat trace a double wall tube how much heat actually gets to the inner tube? how consistent is that heat? What is the temperature gradient?, and 4) the actual cold to hot temperature gradient (desired) is difficult to institute along the length of line ... A good feedback loop is required. Also, heat tape gives me the district impression that it can contribute to an out of control heating failure with a possible fire as a result. So, not that it solves your problem but here is what I have tried to always implement: 1) short runs (home runs not a distribution), 2) minimum short radius right angles, 3) minimize VMB's ... Mini gas cabinets with multiple outputs in the cabinet, 4) chilled bottles, 5) vacuum delivery, and 6) large radius bends. Just food for thought ... Dennis S Grimard, Ph.D. Associate Director of Operations, MIT.nano Massachusetts Institute of Technology 60 Vassor Street, Bldg 39-556 Cambridge, MA 02149 C: (734) 368-7172 EM: dgrimard at mit.edu On Feb 10, 2015, at 1:30 PM, Vito Logiudice > wrote: Dear Colleagues, Thank you very much to everyone whom took the time to write in with their insights on this issue. Special thanks to John Shott and Tom Britton for the photos and reference documents provided. So that others may perhaps benefit from our experience, we've concluded that the cause of the premature failure appears to have been the presence of several "voids" where the heat trace was not in intimate contact with the SS tubing. This occurred even though the trace had been taped every 12 inches per the manufacturer's recommendations. We also noted voids at some elbows where maintaining contact was/is difficult. To keep the issue from repeating itself in the future, our plan is to reinstall two new heat traces along the length of the tubing, one on the bottom and one on the top. One of these will remain active while the backup trace will be kept off and act as an insurance policy should the primary unit fail in the future. If anyone sees a problem with this particular approach, I would be glad to hear from you. In the new installation, conductive putty will be used to fill any voids before aluminum tape is applied along the entire length of the line much like John showed in his attached photo. The entire assembly will then be re-insulated per the original design specification. Fortunately, the problem occurred under warranty so our only out-of-pocket cost will be limited to the cost of the backup heat trace (a few hundred dollars). Regards, Vito From: Vito Logiudice > Date: Wednesday, 21 January, 2015 12:23 PM To: Labnetwork > Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrweaver at purdue.edu Wed Feb 11 16:33:28 2015 From: jrweaver at purdue.edu (Weaver, John R) Date: Wed, 11 Feb 2015 21:33:28 +0000 Subject: [labnetwork] point of detection - Gas sensors In-Reply-To: <84DF1F10-9D58-4A5B-963E-FF5E755B2C35@mcgill.ca> References: <84DF1F10-9D58-4A5B-963E-FF5E755B2C35@mcgill.ca> Message-ID: <6A848421F695C54A9210C1A873C96AC225122CCF@WPVEXCMBX04.purdue.lcl> Matthieu - I have quite strong feelings in this regard, based on a lot of experience in this area. I use, and highly recommend, the following scheme: A sensor in the exhaust of the gas cabinet, a minimum of four feet from the gas cabinet outlet. This maximizes turbulence in the exhaust to ensure that the sensor "sees" the leak. Note that the purge line into the exhaust should be at least two feet beyond (downstream of) the sensor connection. Otherwise you could see alarms every time you purge :). A sensor in the exhaust of each VMB using the same criteria. A sensor in the exhaust of each piece of equipment using the hazardous gas. If the gas has the potential of being in multiple chambers of the equipment with different exhausts, each exhaust needs a sensor. The lines in between the gas cabinet, VMB, and equipment should be doubly contained. I highly recommend a static, inert atmosphere in the interstitial that is set at ? the delivery pressure of the supplied gas. This pressure is sensed real time. There are three possible excursions: 1. The pressure decreases. This indicates in a leak in the outer containment. Automatic notification of appropriate staff results. 2. The pressure increases. This indicates a leak in the delivery line. Automatic notification of appropriate staff results, with a priority to assess the potential hazards. 3. The pressure immediately drops to atmospheric pressure. This indicates a catastrophic failure (such as a fork truck catching the line and ripping it down :(), resulting in immediate evacuation of the facility. I have had no success with "environmental monitoring." With the air changeover rates, it is very rare that a leak would be detected -in the cleanroom, chase, subfab, or the gas rooms. In my experience, these sensors lead to a false sense of security and are therefore more dangerous than not having sensors. That's my two cents, John From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Wednesday, February 11, 2015 12:40 PM To: Labnetwork Subject: [labnetwork] point of detection - Gas sensors Colleagues, first thanks Vito for initiating this discussion. Very important points where made which led me to explore the labnetwork archives about sub-atmospheric setup and TGMS. Fore those interested I will save you the search: https://www-mtl.mit.edu/pipermail/labnetwork/2012-August/000541.html https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/001004.html https://www-mtl.mit.edu/pipermail/labnetwork/2014-July/001346.html https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/000998.html Since we are in a gas discussion timing, If you had to prioritize the following position of the sensors, what would you recommend ? - exhaust of gas cabinet - gas cabinet at the tool - VMB if any - exhaust of pump after the tool ? - exhaust after abatement system ? - free space sensors scattered around most sensitive areas: where human presence is usually high Thanks ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ Le 2015-02-11 ? 10:53, Vito Logiudice > a ?crit : Hi Dennis, Great insights - thanks very much for sharing. Our aim is to avoid cold spots and keep the entire system at 19C to 20C, especially since the DCS line traverses a loading dock between the gas bunker and the fab. The two roll-up dock doors are equipped with heated air curtains but we wanted the added insurance of a heated/insulated line. In our particular case, we've got a single 120 foot line between the gas cabinet and the point of use (no VMB's) and we did our best to stay true to the use of large radius bends all along the run. The DCS panel design was kept as simple as possible (no regulator) and the entire cabinet is located in a heated bunker in which temperature trends are monitored. Good point about the possible risk of fire. While the heat trace controller is capable of outputting a limited amount of power, we did see some odd "burn" marks at some locations which lead us to conclude that the Armaflex insulation's upper use limit of 105C may have been exceeded at some of the void locations. In light of these findings we've decided to use fiberglass insulation instead of Armaflex for the repair. Best, Vito From: Dennis Grimard > Date: Tuesday, 10 February, 2015 10:32 PM To: Vito Logiudice > Cc: Labnetwork > Subject: Re: [labnetwork] Conclusion: Heat trace issues on DCS gas lines Vito: I have watched with great pleasure the discussion on this topic. I too agree that much good info has been discussed ... Great feedback from some very knowledgable people indeed. I need to throw a wrench in the discussion (or prove my ignorance). I have always resisted heat taping for the following reasons: 1) when the tube enters a VMB or any ventilated enclosure there is a significant temperature drop due to the large purging flow rate within the enclosure ... Tending to cool the line at the worst possible point, 2) the VMB type enclosures tend to have many right angle welds and valves which promote condensation .... Rather than long graceful bends typically used external to the enclosure, 3) SS is a horrible heat conductor ... As is n2 gas ... So if I heat trace a double wall tube how much heat actually gets to the inner tube? how consistent is that heat? What is the temperature gradient?, and 4) the actual cold to hot temperature gradient (desired) is difficult to institute along the length of line ... A good feedback loop is required. Also, heat tape gives me the district impression that it can contribute to an out of control heating failure with a possible fire as a result. So, not that it solves your problem but here is what I have tried to always implement: 1) short runs (home runs not a distribution), 2) minimum short radius right angles, 3) minimize VMB's ... Mini gas cabinets with multiple outputs in the cabinet, 4) chilled bottles, 5) vacuum delivery, and 6) large radius bends. Just food for thought ... Dennis S Grimard, Ph.D. Associate Director of Operations, MIT.nano Massachusetts Institute of Technology 60 Vassor Street, Bldg 39-556 Cambridge, MA 02149 C: (734) 368-7172 EM: dgrimard at mit.edu On Feb 10, 2015, at 1:30 PM, Vito Logiudice > wrote: Dear Colleagues, Thank you very much to everyone whom took the time to write in with their insights on this issue. Special thanks to John Shott and Tom Britton for the photos and reference documents provided. So that others may perhaps benefit from our experience, we've concluded that the cause of the premature failure appears to have been the presence of several "voids" where the heat trace was not in intimate contact with the SS tubing. This occurred even though the trace had been taped every 12 inches per the manufacturer's recommendations. We also noted voids at some elbows where maintaining contact was/is difficult. To keep the issue from repeating itself in the future, our plan is to reinstall two new heat traces along the length of the tubing, one on the bottom and one on the top. One of these will remain active while the backup trace will be kept off and act as an insurance policy should the primary unit fail in the future. If anyone sees a problem with this particular approach, I would be glad to hear from you. In the new installation, conductive putty will be used to fill any voids before aluminum tape is applied along the entire length of the line much like John showed in his attached photo. The entire assembly will then be re-insulated per the original design specification. Fortunately, the problem occurred under warranty so our only out-of-pocket cost will be limited to the cost of the backup heat trace (a few hundred dollars). Regards, Vito From: Vito Logiudice > Date: Wednesday, 21 January, 2015 12:23 PM To: Labnetwork > Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Wed Feb 11 16:58:16 2015 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Wed, 11 Feb 2015 21:58:16 +0000 Subject: [labnetwork] point of detection - Gas sensors In-Reply-To: <84DF1F10-9D58-4A5B-963E-FF5E755B2C35@mcgill.ca> References: <84DF1F10-9D58-4A5B-963E-FF5E755B2C35@mcgill.ca> Message-ID: Matthew, TGMS sensors should be placed in gas cabinets, tool gas jungles, VMB's and anywhere else in the circuit that has a mechanical (non welded) connection, valve, or pressure gauge. Sensors should not be placed in any part of the pump exhaust stream, before or after the scrubber unless you wish to dump your fab every time someone runs with toxic/flammables. The N2 commonly used to dilute exhaust streams in pumps simply does not dilute it enough to avoid detection since most TGMS's are detecting PPM. Sensors in gas cabinets and VMB's should be placed in the furthest upstream location of the ductwork in order for it to capture any event within the cabinet. Please keep in mind that the exhaust from the sensor (providing you have Honey **** style with a little vacuum pump) should be placed further downstream to avoid re-detection as the sensor is clearing itself out. An equally, if not more important placement is that of the vacuum generator (venturi) exhaust line, this line should be the furthest downstream connection in the ductwork (at least 12" away from detection points). Ambient sensors are recommended to be placed wherever people are standing when running the tool or any other sensible area that needs detection. In the past, I have poked them through bulkheads in the cleanroom wall aiming at the area that humanoids tend to congregate and have even had them installed from overhead for more difficult installations. I'm not sure if there are specific rules as to how far from a person the end of the nozzle has to be but I have always passed internal safety and insurance expectations. One caveat about ambient sensors; When the occasion comes up that a vacuum chamber needs to be opened (aside from PVD or clean processes) the ambient sensors can and will trip from the residual chemical "fragrances". We have addressed this by purchasing a portable air cleaner with a flexible intake duct that can be pointed right at the offending odor. The charcoal filter abates acid gas odors and is in series with a HEPA to keep clean room bosses happy. My only regret is not buying one 30 years ago ("cough, cough"). Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Wednesday, February 11, 2015 12:40 PM To: Labnetwork Subject: [labnetwork] point of detection - Gas sensors Colleagues, first thanks Vito for initiating this discussion. Very important points where made which led me to explore the labnetwork archives about sub-atmospheric setup and TGMS. Fore those interested I will save you the search: https://www-mtl.mit.edu/pipermail/labnetwork/2012-August/000541.html https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/001004.html https://www-mtl.mit.edu/pipermail/labnetwork/2014-July/001346.html https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/000998.html Since we are in a gas discussion timing, If you had to prioritize the following position of the sensors, what would you recommend ? - exhaust of gas cabinet - gas cabinet at the tool - VMB if any - exhaust of pump after the tool ? - exhaust after abatement system ? - free space sensors scattered around most sensitive areas: where human presence is usually high Thanks ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ Le 2015-02-11 ? 10:53, Vito Logiudice > a ?crit : Hi Dennis, Great insights - thanks very much for sharing. Our aim is to avoid cold spots and keep the entire system at 19C to 20C, especially since the DCS line traverses a loading dock between the gas bunker and the fab. The two roll-up dock doors are equipped with heated air curtains but we wanted the added insurance of a heated/insulated line. In our particular case, we've got a single 120 foot line between the gas cabinet and the point of use (no VMB's) and we did our best to stay true to the use of large radius bends all along the run. The DCS panel design was kept as simple as possible (no regulator) and the entire cabinet is located in a heated bunker in which temperature trends are monitored. Good point about the possible risk of fire. While the heat trace controller is capable of outputting a limited amount of power, we did see some odd "burn" marks at some locations which lead us to conclude that the Armaflex insulation's upper use limit of 105C may have been exceeded at some of the void locations. In light of these findings we've decided to use fiberglass insulation instead of Armaflex for the repair. Best, Vito From: Dennis Grimard > Date: Tuesday, 10 February, 2015 10:32 PM To: Vito Logiudice > Cc: Labnetwork > Subject: Re: [labnetwork] Conclusion: Heat trace issues on DCS gas lines Vito: I have watched with great pleasure the discussion on this topic. I too agree that much good info has been discussed ... Great feedback from some very knowledgable people indeed. I need to throw a wrench in the discussion (or prove my ignorance). I have always resisted heat taping for the following reasons: 1) when the tube enters a VMB or any ventilated enclosure there is a significant temperature drop due to the large purging flow rate within the enclosure ... Tending to cool the line at the worst possible point, 2) the VMB type enclosures tend to have many right angle welds and valves which promote condensation .... Rather than long graceful bends typically used external to the enclosure, 3) SS is a horrible heat conductor ... As is n2 gas ... So if I heat trace a double wall tube how much heat actually gets to the inner tube? how consistent is that heat? What is the temperature gradient?, and 4) the actual cold to hot temperature gradient (desired) is difficult to institute along the length of line ... A good feedback loop is required. Also, heat tape gives me the district impression that it can contribute to an out of control heating failure with a possible fire as a result. So, not that it solves your problem but here is what I have tried to always implement: 1) short runs (home runs not a distribution), 2) minimum short radius right angles, 3) minimize VMB's ... Mini gas cabinets with multiple outputs in the cabinet, 4) chilled bottles, 5) vacuum delivery, and 6) large radius bends. Just food for thought ... Dennis S Grimard, Ph.D. Associate Director of Operations, MIT.nano Massachusetts Institute of Technology 60 Vassor Street, Bldg 39-556 Cambridge, MA 02149 C: (734) 368-7172 EM: dgrimard at mit.edu On Feb 10, 2015, at 1:30 PM, Vito Logiudice > wrote: Dear Colleagues, Thank you very much to everyone whom took the time to write in with their insights on this issue. Special thanks to John Shott and Tom Britton for the photos and reference documents provided. So that others may perhaps benefit from our experience, we've concluded that the cause of the premature failure appears to have been the presence of several "voids" where the heat trace was not in intimate contact with the SS tubing. This occurred even though the trace had been taped every 12 inches per the manufacturer's recommendations. We also noted voids at some elbows where maintaining contact was/is difficult. To keep the issue from repeating itself in the future, our plan is to reinstall two new heat traces along the length of the tubing, one on the bottom and one on the top. One of these will remain active while the backup trace will be kept off and act as an insurance policy should the primary unit fail in the future. If anyone sees a problem with this particular approach, I would be glad to hear from you. In the new installation, conductive putty will be used to fill any voids before aluminum tape is applied along the entire length of the line much like John showed in his attached photo. The entire assembly will then be re-insulated per the original design specification. Fortunately, the problem occurred under warranty so our only out-of-pocket cost will be limited to the cost of the backup heat trace (a few hundred dollars). Regards, Vito From: Vito Logiudice > Date: Wednesday, 21 January, 2015 12:23 PM To: Labnetwork > Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From vidicba at pitt.edu Wed Feb 11 17:10:07 2015 From: vidicba at pitt.edu (Vidic, Brian A) Date: Wed, 11 Feb 2015 22:10:07 +0000 Subject: [labnetwork] Scientific/Managing Director - Job Description Guidance Message-ID: <4edef2f0ecda4adfbb6431623321f8c2@pitt-prodx-10.univ.pitt.edu> Colleagues: The University of Pittsburgh will soon be posting for a Scientific/Managing Director to oversee the University's Petersen Institute of Nanoscience and Engineering. The position will serve as managing director for the Institute's Nanoscale Fabrication and Characterization Facility, overseeing its expansion/development, be responsible for building and managing a team to oversee these activities, and be established as a scientific leader at the University in the area of nanoscale science and engineering, building relationships with academic and industrial partners worldwide. My hope (and request!) was to gain some guidance from all of you on the key elements in the formal job descriptions you've used for similar positions in your organization. We have pieces documented here but would love to get feedback from all of you as we finalized the composition of the job description to attract the best and brightest candidates to Pitt! Thank you in advance! Best, Brian Brian Vidic Director of Technology Interim Director of Operations, PINSE-NFCF Swanson School of Engineering University of Pittsburgh 3700 O'Hara St Suite 148 Benedum Hall Pittsburgh, PA 15261 *: 412/624-8101 | 7: 412/624-2027 | *: vidicba at pitt.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From mheiden at engr.ucr.edu Wed Feb 11 18:11:34 2015 From: mheiden at engr.ucr.edu (Mark Heiden) Date: Wed, 11 Feb 2015 23:11:34 +0000 Subject: [labnetwork] Cambridge ALD Precursor Vendor Message-ID: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich? We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable.. Thanks in advance, Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 -------------- next part -------------- An HTML attachment was scrubbed... URL: From Milan.Begliarbekov at asrc.cuny.edu Wed Feb 11 20:01:46 2015 From: Milan.Begliarbekov at asrc.cuny.edu (Milan Begliarbekov) Date: Thu, 12 Feb 2015 01:01:46 +0000 Subject: [labnetwork] Cambridge ALD Precursor Vendor In-Reply-To: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> References: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> Message-ID: <7EB621C923665D458D0ED5D9E722D7210C4260DD@EXPM5704.enterpriseapps.cuny.adlan> Strem Chemicals (http://www.strem.com/) is an alternate vendor that is suggested by Cambridge. Milan Begliarbekov, Technical Cleanroom Manager CUNY Advanced Science Research Center From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Heiden Sent: Wednesday, February 11, 2015 6:12 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cambridge ALD Precursor Vendor Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich? We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable.. Thanks in advance, Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Wed Feb 11 20:10:07 2015 From: shott at stanford.edu (John Shott) Date: Wed, 11 Feb 2015 17:10:07 -0800 Subject: [labnetwork] point of detection - Gas sensors In-Reply-To: <84DF1F10-9D58-4A5B-963E-FF5E755B2C35@mcgill.ca> References: <84DF1F10-9D58-4A5B-963E-FF5E755B2C35@mcgill.ca> Message-ID: <54DBFD6F.3060200@stanford.edu> Matt: I think that this is a very good point of discussion and expect that a number of folks will weigh in. I certainly expect to learn some things from many of my esteemed colleagues, but will also share with you what I believe to be an appropriate prioritization. Of course, my disclaimer is that I am not a registered PE and certainly would not claim to be an authority on fire and other relevant code ... plus, what I do know about code is based almost exclusively on California Fire Code and may not be applicable in other states or countries. I certainly believe that there are likely to be locale-to-locale code variations that have an impact plus probably an even greater variation in how your AHJ (Authority Having Jurisdiction) interprets a given set of code. Plus, most of the relevant code of which I am aware tells you WHEN you need to have gas detection but often doesn't tell you either where those detectors need to be located or how many of them you need. Of course, this discussion is all heavily influenced by the level of toxicity of the gas we are describing. My assumption is that we are discussing either toxic or highly toxic materials where California code, at least, requires gas detection. Finally, at the end of the day, regardless of what code requires, I believe that we all want/need to be comfortable that we have an appropriate collection of detectors that are able to detect leaks in an appropriate fashion so as to protect the people in and around our laboratories. Even though we have a facility that is about 30 years old, we completely replaced our aging gas monitoring system in January, 2012 so that is the relevant date to think of in terms of when we (and the officials at Santa Clara County Fire) last considered these issues. I believe that California code requires us to have gas detectors for any toxic or highly toxic gas in the gas cabinet and in any location where there are non-welded connections. That typically means that we have to have a detector in the gas box/vented enclosure of the tool and in the VMB if there is one. California code, at least, only requires that those be set at 1/2 IDLH alarm points. We, however, choose to set all of our detectors ... even in enclosed spaces ... to alarm at PEL, rather than 1/2 IDLH levels. There are a few reasons for this: 1. Small leaks tend to become big leaks over time. I'd personally rather deal with a small leak today than a bigger leak tomorrow. 2. In gas cabinets in particular, where exhaust flow is very high, even a good sized leak will be diluted by that air flow and may not reach 1/2 IDLH. 3. Since exhausted spaces will be at negative pressure relative to their surroundings, the presence of gas outside the enclosure (which is generally an occupied breathing space) will be drawn into the enclosure and be detected there. If detectors are set to alarm at PEL levels, you can often successfully argue that a detector monitoring the exhausted tool enclosure is also doing "double duty" and detecting that same gas close to, but outside of, the exhausted enclosure. However, we do not rely entirely on detectors in exhausted cabinets. In the clean room, we do have a reasonable number of breathing air detectors. In general, we do not have detectors at the exhaust of pumps after the tools. For the most part, we know that there will be nasty stuff in there. We rely on our breathing air detectors to tell us when something (such as a flex line ...) in the pump exhaust system has failed. We do have one detector in the exhaust of an abatement system that is actually monitoring ammonia abatement in a GaN system. Why monitor the ammonia abatement when we don't monitor the other abatement systems that often have more toxic gases? Vendor-specific requirement ... To answer your question of prioritization I would include an appropriate number of sensors in the exhaust of gas cabinets, the exhaust of tools (and in a VMB, if any) plus the appropriate number of sensors in breathing air all in the High Priority category. I would include detectors in exhaust after abatement systems as a "Nice to Have" feature. I believe that having detectors in the pump exhaust of a tool is Low Priority and only confirms what you already know: if toxic stuff is going into the system, toxic stuff is coming out too. However, beyond that prioritization, the immediate follow up question is: how many detectors do you need. Particularly for the breathing air sensors, the number and spatial density of them is an important consideration. Let me give you the number of sensors that we have for a 10,000 Sq Ft (1000 SqM) clean room facility: We have a total of about 120 gas sensors that directly support/monitor this facility and about 25-30 more that support other private laboratories. Of those 120 sensors, approximately 30 monitor gas cabinets and the 4 empty cabinets that we use for in-bunker storage. Approximately 75 sensors are in the clean room itself with about 50 of them monitoring exhausted enclosures associated with individual tools and the remaining 25 monitor breathing air close to places where that gas might be found. Finally, we have 17 detectors in the sub-fab. Four of those monitor VMBs or the one BCl3 cabinet that lives outside the bunker, 9 monitor breathing air, and four monitor for low oxygen (we don't have LN2 down there, but we do have 2" distribution lines that could deplete a lot of air if they ever ruptured.) Please let me know if you have any questions and I will looking forward to reading the responses from a number of other facilities. Note: we probably have more gases that need detection than some facilities. Our list of detected gases includes the hydrides (silane, germane, diborane, arsine, and phosphine), DCS, chlorine, hydrogen bromide, boron trichloride, anhydrous hydrogen chloride, anhydrous hydogen fluoride, and ozone. Also, I should add that our 120 gas sensors probably includes 15-20 hydrogen detectors (we use 0-1000 ppm rather than LEL hydrogen sensors). Thanks, John On 2/11/2015 9:39 AM, Matthieu Nannini, Dr. wrote: > Colleagues, first thanks Vito for initiating this discussion. Very > important points where made which led me to explore the labnetwork > archives about sub-atmospheric setup and TGMS. Fore those interested I > will save you the search: > https://www-mtl.mit.edu/pipermail/labnetwork/2012-August/000541.html > https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/001004.html > https://www-mtl.mit.edu/pipermail/labnetwork/2014-July/001346.html > https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/000998.html > > Since we are in a gas discussion timing, > > If you had to prioritize the following position of the sensors, what > would you recommend ? > > - exhaust of gas cabinet > - gas cabinet at the tool > - VMB if any > - exhaust of pump after the tool ? > - exhaust after abatement system ? > - free space sensors scattered around most sensitive areas: where > human presence is usually high > > Thanks > > ----------------------------------- > Matthieu Nannini > McGill Nanotools Microfab > Manager > t: 514 398 3310 > c: 514 758 3311 > f: 514 398 8434 > http://mnm.physics.mcgill.ca/ > ------------------------------------ > > Le 2015-02-11 ? 10:53, Vito Logiudice > a ?crit : > >> Hi Dennis, >> >> Great insights ? thanks very much for sharing. >> >> Our aim is to avoid cold spots and keep the entire system at 19C to >> 20C, especially since the DCS line traverses a loading dock between >> the gas bunker and the fab. The two roll-up dock doors are equipped >> with heated air curtains but we wanted the added insurance of a >> heated/insulated line. >> >> In our particular case, we've got a single 120 foot line between the >> gas cabinet and the point of use (no VMB's) and we did our best to >> stay true to the use of large radius bends all along the run. The DCS >> panel design was kept as simple as possible (no regulator) and the >> entire cabinet is located in a heated bunker in which temperature >> trends are monitored. >> >> Good point about the possible risk of fire. While the heat trace >> controller is capable of outputting a limited amount of power, we did >> see some odd "burn" marks at some locations which lead us to conclude >> that the Armaflex insulation's upper use limit of 105C may have been >> exceeded at some of the void locations. In light of these findings >> we've decided to use fiberglass insulation instead of Armaflex for >> the repair. >> >> Best, >> Vito >> >> From: Dennis Grimard > >> Date: Tuesday, 10 February, 2015 10:32 PM >> To: Vito Logiudice > > >> Cc: Labnetwork > >> Subject: Re: [labnetwork] Conclusion: Heat trace issues on DCS gas lines >> >> Vito: >> >> I have watched with great pleasure the discussion on this topic. I >> too agree that much good info has been discussed ... Great feedback >> from some very knowledgable people indeed. >> >> I need to throw a wrench in the discussion (or prove my ignorance). >> I have always resisted heat taping for the following reasons: 1) >> when the tube enters a VMB or any ventilated enclosure there is a >> significant temperature drop due to the large purging flow rate >> within the enclosure ... Tending to cool the line at the worst >> possible point, 2) the VMB type enclosures tend to have many right >> angle welds and valves which promote condensation .... Rather than >> long graceful bends typically used external to the enclosure, 3) SS >> is a horrible heat conductor ... As is n2 gas ... So if I heat trace >> a double wall tube how much heat actually gets to the inner tube? >> how consistent is that heat? What is the temperature gradient?, and >> 4) the actual cold to hot temperature gradient (desired) is difficult >> to institute along the length of line ... A good feedback loop is >> required. Also, heat tape gives me the district impression that it >> can contribute to an out of control heating failure with a possible >> fire as a result. >> >> So, not that it solves your problem but here is what I have tried to >> always implement: 1) short runs (home runs not a distribution), 2) >> minimum short radius right angles, 3) minimize VMB's ... Mini gas >> cabinets with multiple outputs in the cabinet, 4) chilled bottles, 5) >> vacuum delivery, and 6) large radius bends. >> >> Just food for thought ... >> >> Dennis S Grimard, Ph.D. >> Associate Director of Operations, MIT.nano >> >> Massachusetts Institute of Technology >> 60 Vassor Street, Bldg 39-556 >> Cambridge, MA 02149 >> >> C: (734) 368-7172 >> EM: dgrimard at mit.edu >> >> On Feb 10, 2015, at 1:30 PM, Vito Logiudice >> > wrote: >> >>> Dear Colleagues, >>> >>> Thank you very much to everyone whom took the time to write in with >>> their insights on this issue. Special thanks to John Shott and Tom >>> Britton for the photos and reference documents provided. >>> >>> So that others may perhaps benefit from our experience, we've >>> concluded that the cause of the premature failure appears to have >>> been the presence of several "voids" where the heat trace was not in >>> intimate contact with the SS tubing. This occurred even though the >>> trace had been taped every 12 inches per the manufacturer's >>> recommendations. We also noted voids at some elbows where >>> maintaining contact was/is difficult. >>> >>> To keep the issue from repeating itself in the future, our plan is >>> to reinstall two new heat traces along the length of the tubing, one >>> on the bottom and one on the top. One of these will remain active >>> while the backup trace will be kept off and act as an insurance >>> policy should the primary unit fail in the future. If anyone sees a >>> problem with this particular approach, I would be glad to hear from you. >>> >>> In the new installation, conductive putty will be used to fill any >>> voids before aluminum tape is applied along the entire length of the >>> line much like John showed in his attached photo. The entire >>> assembly will then be re-insulated per the original design >>> specification. Fortunately, the problem occurred under warranty so >>> our only out-of-pocket cost will be limited to the cost of the >>> backup heat trace (a few hundred dollars). >>> >>> Regards, >>> Vito >>> >>> From: Vito Logiudice >> > >>> Date: Wednesday, 21 January, 2015 12:23 PM >>> To: Labnetwork > >>> Subject: [labnetwork] Heat trace issues on DCS gas lines >>> >>> Dear Colleagues, >>> >>> We are experiencing an issue with the heat trace on our >>> Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated >>> with a 1/2" SS outer containment line which is itself heat traced >>> with a single strand of heat trace that runs the entire length of >>> the coax assembly. The 120 foot line is insulated as shown in the >>> attached photo. A portion of the heat-trace appears to have failed >>> prematurely (it was installed less than one year ago) and we are >>> wondering if the method of installation may be the cause. >>> >>> The heat trace was not installed in a spiral fashion around the >>> outer 1/2" tube. Rather it was installed in a straight fashion along >>> its entire length with "heat trace fastening tape" located every >>> four feet or so. A member of my team has suggested that such a >>> straight rather than spiral installation may have caused hot spots >>> (at the fastening locations) which may have in turn caused the failure. >>> >>> I would appreciate hearing from the community on this point: Are the >>> heat traces around your low pressure gas lines spiral-wound around >>> the lines or are they installed in a straight fashion and somehow >>> fastened along the entire length? >>> >>> Other insights/suggestions on the proper heat tracing of gas lines >>> by experts in the field as well as comments on possible causes of >>> premature heat trace failure are very much welcome and appreciated. >>> Thank you. >>> >>> Regards, >>> Vito >>> -- >>> Vito Logiudice P.Eng. >>> Director of Operations, Quantum NanoFab >>> University of Waterloo >>> Lazaridis QNC 1207 >>> 200 University Avenue West >>> Waterloo, ON Canada N2L 3G1 >>> Tel.: (519) 888-4567 ext. 38703 >>> Email: vito.logiudice at uwaterloo.ca >>> Website: https://fab.qnc.uwaterloo.ca >>> >>> _______________________________________________ >>> labnetwork mailing list >>> labnetwork at mtl.mit.edu >>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Wed Feb 11 21:10:11 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Thu, 12 Feb 2015 02:10:11 +0000 Subject: [labnetwork] point of detection - Gas sensors In-Reply-To: <6A848421F695C54A9210C1A873C96AC225122CCF@WPVEXCMBX04.purdue.lcl> References: <84DF1F10-9D58-4A5B-963E-FF5E755B2C35@mcgill.ca>, <6A848421F695C54A9210C1A873C96AC225122CCF@WPVEXCMBX04.purdue.lcl> Message-ID: <20150212021010.6938780.60460.62603@uwaterloo.ca> ?Hi Matthieu, I share John's opinion in regards to environmental monitoring. A personal experience many years ago while working in the private sector reinforced my opinion that room sensors may not be sensitive enough under some conditions and thus give people a false sense of security as John points out. Someone managed to tear into a H2 line in a class 10 ballroom style cleanroom and the room sensor in that particular instance did not pick it up.? We've stayed away from room sensors in Waterloo and we've placed our sensors in the same locations John described. You'll have the opportunity to see these for yourself when you come visit us. Cheers, Vito From: Weaver, John R Sent: Wednesday, February 11, 2015 7:51 PM To: 'Matthieu Nannini, Dr.'; Labnetwork Subject: Re: [labnetwork] point of detection - Gas sensors Matthieu ? I have quite strong feelings in this regard, based on a lot of experience in this area. I use, and highly recommend, the following scheme: A sensor in the exhaust of the gas cabinet, a minimum of four feet from the gas cabinet outlet. This maximizes turbulence in the exhaust to ensure that the sensor ?sees? the leak. Note that the purge line into the exhaust should be at least two feet beyond (downstream of) the sensor connection. Otherwise you could see alarms every time you purge :). A sensor in the exhaust of each VMB using the same criteria. A sensor in the exhaust of each piece of equipment using the hazardous gas. If the gas has the potential of being in multiple chambers of the equipment with different exhausts, each exhaust needs a sensor. The lines in between the gas cabinet, VMB, and equipment should be doubly contained. I highly recommend a static, inert atmosphere in the interstitial that is set at ? the delivery pressure of the supplied gas. This pressure is sensed real time. There are three possible excursions: 1. The pressure decreases. This indicates in a leak in the outer containment. Automatic notification of appropriate staff results. 2. The pressure increases. This indicates a leak in the delivery line. Automatic notification of appropriate staff results, with a priority to assess the potential hazards. 3. The pressure immediately drops to atmospheric pressure. This indicates a catastrophic failure (such as a fork truck catching the line and ripping it down :(), resulting in immediate evacuation of the facility. I have had no success with ?environmental monitoring.? With the air changeover rates, it is very rare that a leak would be detected ?in the cleanroom, chase, subfab, or the gas rooms. In my experience, these sensors lead to a false sense of security and are therefore more dangerous than not having sensors. That?s my two cents, John From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Wednesday, February 11, 2015 12:40 PM To: Labnetwork Subject: [labnetwork] point of detection - Gas sensors Colleagues, first thanks Vito for initiating this discussion. Very important points where made which led me to explore the labnetwork archives about sub-atmospheric setup and TGMS. Fore those interested I will save you the search: https://www-mtl.mit.edu/pipermail/labnetwork/2012-August/000541.html https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/001004.html https://www-mtl.mit.edu/pipermail/labnetwork/2014-July/001346.html https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/000998.html Since we are in a gas discussion timing, If you had to prioritize the following position of the sensors, what would you recommend ? - exhaust of gas cabinet - gas cabinet at the tool - VMB if any - exhaust of pump after the tool ? - exhaust after abatement system ? - free space sensors scattered around most sensitive areas: where human presence is usually high Thanks ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ Le 2015-02-11 ? 10:53, Vito Logiudice > a ?crit : Hi Dennis, Great insights ? thanks very much for sharing. Our aim is to avoid cold spots and keep the entire system at 19C to 20C, especially since the DCS line traverses a loading dock between the gas bunker and the fab. The two roll-up dock doors are equipped with heated air curtains but we wanted the added insurance of a heated/insulated line. In our particular case, we've got a single 120 foot line between the gas cabinet and the point of use (no VMB's) and we did our best to stay true to the use of large radius bends all along the run. The DCS panel design was kept as simple as possible (no regulator) and the entire cabinet is located in a heated bunker in which temperature trends are monitored. Good point about the possible risk of fire. While the heat trace controller is capable of outputting a limited amount of power, we did see some odd "burn" marks at some locations which lead us to conclude that the Armaflex insulation's upper use limit of 105C may have been exceeded at some of the void locations. In light of these findings we've decided to use fiberglass insulation instead of Armaflex for the repair. Best, Vito From: Dennis Grimard > Date: Tuesday, 10 February, 2015 10:32 PM To: Vito Logiudice > Cc: Labnetwork > Subject: Re: [labnetwork] Conclusion: Heat trace issues on DCS gas lines Vito: I have watched with great pleasure the discussion on this topic. I too agree that much good info has been discussed ... Great feedback from some very knowledgable people indeed. I need to throw a wrench in the discussion (or prove my ignorance). I have always resisted heat taping for the following reasons: 1) when the tube enters a VMB or any ventilated enclosure there is a significant temperature drop due to the large purging flow rate within the enclosure ... Tending to cool the line at the worst possible point, 2) the VMB type enclosures tend to have many right angle welds and valves which promote condensation .... Rather than long graceful bends typically used external to the enclosure, 3) SS is a horrible heat conductor ... As is n2 gas ... So if I heat trace a double wall tube how much heat actually gets to the inner tube? how consistent is that heat? What is the temperature gradient?, and 4) the actual cold to hot temperature gradient (desired) is difficult to institute along the length of line ... A good feedback loop is required. Also, heat tape gives me the district impression that it can contribute to an out of control heating failure with a possible fire as a result. So, not that it solves your problem but here is what I have tried to always implement: 1) short runs (home runs not a distribution), 2) minimum short radius right angles, 3) minimize VMB's ... Mini gas cabinets with multiple outputs in the cabinet, 4) chilled bottles, 5) vacuum delivery, and 6) large radius bends. Just food for thought ... Dennis S Grimard, Ph.D. Associate Director of Operations, MIT.nano Massachusetts Institute of Technology 60 Vassor Street, Bldg 39-556 Cambridge, MA 02149 C: (734) 368-7172 EM: dgrimard at mit.edu On Feb 10, 2015, at 1:30 PM, Vito Logiudice > wrote: Dear Colleagues, Thank you very much to everyone whom took the time to write in with their insights on this issue. Special thanks to John Shott and Tom Britton for the photos and reference documents provided. So that others may perhaps benefit from our experience, we've concluded that the cause of the premature failure appears to have been the presence of several "voids" where the heat trace was not in intimate contact with the SS tubing. This occurred even though the trace had been taped every 12 inches per the manufacturer's recommendations. We also noted voids at some elbows where maintaining contact was/is difficult. To keep the issue from repeating itself in the future, our plan is to reinstall two new heat traces along the length of the tubing, one on the bottom and one on the top. One of these will remain active while the backup trace will be kept off and act as an insurance policy should the primary unit fail in the future. If anyone sees a problem with this particular approach, I would be glad to hear from you. In the new installation, conductive putty will be used to fill any voids before aluminum tape is applied along the entire length of the line much like John showed in his attached photo. The entire assembly will then be re-insulated per the original design specification. Fortunately, the problem occurred under warranty so our only out-of-pocket cost will be limited to the cost of the backup heat trace (a few hundred dollars). Regards, Vito From: Vito Logiudice > Date: Wednesday, 21 January, 2015 12:23 PM To: Labnetwork > Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From anava at tauex.tau.ac.il Thu Feb 12 01:11:02 2015 From: anava at tauex.tau.ac.il (Nava Ariel- Sternberg) Date: Thu, 12 Feb 2015 06:11:02 +0000 Subject: [labnetwork] Scientific/Managing Director - Job Description Guidance In-Reply-To: <4edef2f0ecda4adfbb6431623321f8c2@pitt-prodx-10.univ.pitt.edu> References: <4edef2f0ecda4adfbb6431623321f8c2@pitt-prodx-10.univ.pitt.edu> Message-ID: Hi Brian, Let me try to help (since it's kind of my position here at TAU :) ). This is what the position includes here: Managing the activity of the institute of Nanoscience and Engineering including the Nanofabrication and Characterization facility (staff, equipment, materials, users training, safety), responsible for business development with academic and industrial partners, within Israel and international, responsible for supplying research services to X research groups on campus, responsible for the fiscal and administrative activity of the center including budget, billing, reports, seminars, conferences and more. Actively managing the institute technical and administrative staff of Y people. Requirements: Ph.D. degree, practical clean room experience in performing research, experience in project management in micro-nano fabrication. If this is not what you meant - let me know Nava Nava Ariel-Sternberg, Ph.D. Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director MNCF Manager Phone: 03-640-5619 Mobile: 054-9984959 Email: anava at tauex.tau.ac.il From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vidic, Brian A Sent: Thursday, February 12, 2015 12:10 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Scientific/Managing Director - Job Description Guidance Colleagues: The University of Pittsburgh will soon be posting for a Scientific/Managing Director to oversee the University's Petersen Institute of Nanoscience and Engineering. The position will serve as managing director for the Institute's Nanoscale Fabrication and Characterization Facility, overseeing its expansion/development, be responsible for building and managing a team to oversee these activities, and be established as a scientific leader at the University in the area of nanoscale science and engineering, building relationships with academic and industrial partners worldwide. My hope (and request!) was to gain some guidance from all of you on the key elements in the formal job descriptions you've used for similar positions in your organization. We have pieces documented here but would love to get feedback from all of you as we finalized the composition of the job description to attract the best and brightest candidates to Pitt! Thank you in advance! Best, Brian Brian Vidic Director of Technology Interim Director of Operations, PINSE-NFCF Swanson School of Engineering University of Pittsburgh 3700 O'Hara St Suite 148 Benedum Hall Pittsburgh, PA 15261 *: 412/624-8101 | 7: 412/624-2027 | *: vidicba at pitt.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Thu Feb 12 06:59:49 2015 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Thu, 12 Feb 2015 11:59:49 +0000 Subject: [labnetwork] Cambridge ALD Precursor Vendor In-Reply-To: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> References: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> Message-ID: HI, We use a company called STREM Chemicals they may be able to fill your cartridge. Their contact email is sandy at strem.com Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Heiden Sent: Wednesday, February 11, 2015 6:12 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cambridge ALD Precursor Vendor Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich? We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable.. Thanks in advance, Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Thu Feb 12 08:42:23 2015 From: codreanu at udel.edu (Iulian Codreanu) Date: Thu, 12 Feb 2015 08:42:23 -0500 Subject: [labnetwork] Cambridge ALD Precursor Vendor In-Reply-To: References: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> Message-ID: <54DCADBF.7020701@udel.edu> I also used STREM for ALD precursors and they have a strong customer service sense. iulian Codreanu, Ph.D. Director of Operations, UD NanoFab 163 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu On 2/12/2015 6:59 AM, Morrison, Richard H., Jr. wrote: > > HI, > > We use a company called STREM Chemicals they may be able to fill your > cartridge. Their contact email is sandy at strem.com > > > Rick > > Draper Laboratory > > Principal Member of the Technical Staff > > Group Leader Microfabrication Operations > > 555 Technology Square > > Cambridge Ma, 02139-3563 > > www.draper.com > > rmorrison at draper.com > > W 617-258-3420 > > C 508-930-3461 > > *From:*labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Mark Heiden > *Sent:* Wednesday, February 11, 2015 6:12 PM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Cambridge ALD Precursor Vendor > > Has anyone found an alternate vendor for precursors packaged for > Cambridge Labs ALD systems besides Sigma Aldrich? > > We currently have a delivery date for a standard aluminum (TMAH) > cartridge that is in June 2015. Not acceptable.. > > Thanks in advance, > > Mark Heiden > > NanoFab Cleanroom Manager > > Center for Nanoscale Science and Engineering > > University of California, Riverside > > 951-827-2551 > > ------------------------------------------------------------------------ > Notice: This email and any attachments may contain proprietary (Draper > non-public) and/or export-controlled information of Draper Laboratory. > If you are not the intended recipient of this email, please > immediately notify the sender by replying to this email and > immediately destroy all copies of this email. > ------------------------------------------------------------------------ > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Thu Feb 12 08:53:03 2015 From: jprovine at stanford.edu (J Provine) Date: Thu, 12 Feb 2015 05:53:03 -0800 Subject: [labnetwork] Cambridge ALD Precursor Vendor In-Reply-To: References: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> Message-ID: In addition to strem you can use geleste and air liquids as alternatives. J On Thursday, February 12, 2015, Morrison, Richard H., Jr. < rmorrison at draper.com> wrote: > HI, > > > > We use a company called STREM Chemicals they may be able to fill your > cartridge. Their contact email is sandy at strem.com > > > > > Rick > > > > > > Draper Laboratory > > Principal Member of the Technical Staff > > Group Leader Microfabrication Operations > > 555 Technology Square > > Cambridge Ma, 02139-3563 > > > > www.draper.com > > rmorrison at draper.com > > > W 617-258-3420 > > C 508-930-3461 > > > > > > > > > > *From:* labnetwork-bounces at mtl.mit.edu > [mailto: > labnetwork-bounces at mtl.mit.edu > ] *On > Behalf Of *Mark Heiden > *Sent:* Wednesday, February 11, 2015 6:12 PM > *To:* labnetwork at mtl.mit.edu > > *Subject:* [labnetwork] Cambridge ALD Precursor Vendor > > > > Has anyone found an alternate vendor for precursors packaged for Cambridge > Labs ALD systems besides Sigma Aldrich? > > > > We currently have a delivery date for a standard aluminum (TMAH) cartridge > that is in June 2015. Not acceptable.. > > > > Thanks in advance, > > > > > > Mark Heiden > > NanoFab Cleanroom Manager > > Center for Nanoscale Science and Engineering > > University of California, Riverside > > 951-827-2551 > > > > > ------------------------------ > Notice: This email and any attachments may contain proprietary (Draper > non-public) and/or export-controlled information of Draper Laboratory. If > you are not the intended recipient of this email, please immediately notify > the sender by replying to this email and immediately destroy all copies of > this email. > ------------------------------ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From sandrine at umich.edu Thu Feb 12 10:18:38 2015 From: sandrine at umich.edu (Sandrine Martin) Date: Thu, 12 Feb 2015 10:18:38 -0500 Subject: [labnetwork] Scientific/Managing Director - Job Description Guidance In-Reply-To: References: <4edef2f0ecda4adfbb6431623321f8c2@pitt-prodx-10.univ.pitt.edu> Message-ID: Hello Brian, Here is the brief description that we recently used at the U. Michigan Lurie Nanofabrication Facility. Quite similar to what was just sent for the Tel Aviv MNCF. The Managing Director will be ultimately accountable for the seamless, socially responsible, and uninterrupted operation of the LNF. In addition, the Managing Director will assure that space, facilities, safety, planning, finances, human resources, information technology, and the effective and efficient daily operations of a multi-disciplinary and highly complex organizational structure of students, faculty, companies, and plant personnel can proceed with minimal disruptions to user needs. Further, the Managing Director will be responsible for developing, training, motivating, mentoring, and leading a diverse staff of professionals while assuring effective delegation of their work product and assuring adherence to all university and College policies. Requirements: Ph.D. degree in science or engineering. Ten years of demonstrated progressive, mature, goal-oriented, non-risk adverse judgment and experience in the administration and management of a highly diverse and technical research organization. Five years experience in semiconductor, or equivalent, cleanroom operation with a thorough knowledge of semiconductor processes and tooling. Three years of demonstrated ability to create, support, and justify complex financial and disciplined budgetary models in support of a user facility depending on a recharge model. Good luck! Sandrine On Thu, Feb 12, 2015 at 1:11 AM, Nava Ariel- Sternberg < anava at tauex.tau.ac.il> wrote: > Hi Brian, > > > > Let me try to help (since it's kind of my position here at TAU J ). This > is what the position includes here: > > > > Managing the activity of the institute of Nanoscience and Engineering > including the Nanofabrication and Characterization facility (staff, > equipment, materials, users training, safety), responsible for business > development with academic and industrial partners, within Israel and > international, responsible for supplying research services to X research > groups on campus, responsible for the fiscal and administrative activity of > the center including budget, billing, reports, seminars, conferences and > more. Actively managing the institute technical and administrative staff of > Y people. > > Requirements: Ph.D. degree, practical clean room experience in performing > research, experience in project management in micro-nano fabrication. > > > > If this is not what you meant ? let me know > > > > Nava > > > > > > > > Nava Ariel-Sternberg, Ph.D. > > Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing > Director > > MNCF Manager > > Phone: 03-640-5619 > > Mobile: 054-9984959 > > Email: anava at tauex.tau.ac.il > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Vidic, Brian A > *Sent:* Thursday, February 12, 2015 12:10 AM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Scientific/Managing Director - Job Description > Guidance > > > > Colleagues: > > > > The University of Pittsburgh will soon be posting for a > Scientific/Managing Director to oversee the University?s Petersen Institute > of Nanoscience and Engineering. The position will serve as managing > director for the Institute?s Nanoscale Fabrication and Characterization > Facility, overseeing its expansion/development, be responsible for building > and managing a team to oversee these activities, and be established as a > scientific leader at the University in the area of nanoscale science and > engineering, building relationships with academic and industrial partners > worldwide. > > > > My hope (and request!) was to gain some guidance from all of you on the > key elements in the formal job descriptions you?ve used for similar > positions in your organization. We have pieces documented here but would > love to get feedback from all of you as we finalized the composition of the > job description to attract the best and brightest candidates to Pitt! > > > > Thank you in advance! > > > > Best, > > Brian > > > > Brian Vidic > > Director of Technology > > Interim Director of Operations, PINSE-NFCF > > Swanson School of Engineering > > University of Pittsburgh > > 3700 O'Hara St > > Suite 148 Benedum Hall > Pittsburgh, PA 15261 > (: 412/624-8101 *|* 7: 412/624-2027 *|* *: vidicba at pitt.edu > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Sandrine Martin, Ph.D. University of Michigan LNF/NNIN 1239 EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu www.NNIN.org -------------- next part -------------- An HTML attachment was scrubbed... URL: From Jack.Paul at hdrinc.com Thu Feb 12 10:49:19 2015 From: Jack.Paul at hdrinc.com (Paul, Jack) Date: Thu, 12 Feb 2015 15:49:19 +0000 Subject: [labnetwork] point of detection - Gas sensors In-Reply-To: <20150212021010.6938780.60460.62603@uwaterloo.ca> References: <84DF1F10-9D58-4A5B-963E-FF5E755B2C35@mcgill.ca>, <6A848421F695C54A9210C1A873C96AC225122CCF@WPVEXCMBX04.purdue.lcl> <20150212021010.6938780.60460.62603@uwaterloo.ca> Message-ID: Hi Matthieu, While I understand the arguments against environmental monitoring noted below by John and Vito, in many cases it is required by the building and fire codes. It will depend upon the occupancy classification of the spaces (cleanroom, gas room, and any intermediate spaces where you are piping the gases). And of course it depends upon the building and fire codes applicable to your location. The International Building Code and the International Fire Code will require sensors in the breathing air of the room if you using toxic or highly toxic gases in an H-5 Occupancy. H-5 Occupancies are defined as ?semiconductor fabrication and related or similar research operations?. Before omitting the breathing air sensors, please check building code requirements at McGill. In all other respects, I agree with comments below, and with John Schott?s summary as well. Great discussion! Cheers, Jack From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice Sent: Wednesday, February 11, 2015 7:10 PM To: 'Matthieu Nannini, Dr.'; Labnetwork Subject: Re: [labnetwork] point of detection - Gas sensors ?Hi Matthieu, I share John's opinion in regards to environmental monitoring. A personal experience many years ago while working in the private sector reinforced my opinion that room sensors may not be sensitive enough under some conditions and thus give people a false sense of security as John points out. Someone managed to tear into a H2 line in a class 10 ballroom style cleanroom and the room sensor in that particular instance did not pick it up.? We've stayed away from room sensors in Waterloo and we've placed our sensors in the same locations John described. You'll have the opportunity to see these for yourself when you come visit us. Cheers, Vito From: Weaver, John R Sent: Wednesday, February 11, 2015 7:51 PM To: 'Matthieu Nannini, Dr.'; Labnetwork Subject: Re: [labnetwork] point of detection - Gas sensors Matthieu ? I have quite strong feelings in this regard, based on a lot of experience in this area. I use, and highly recommend, the following scheme: A sensor in the exhaust of the gas cabinet, a minimum of four feet from the gas cabinet outlet. This maximizes turbulence in the exhaust to ensure that the sensor ?sees? the leak. Note that the purge line into the exhaust should be at least two feet beyond (downstream of) the sensor connection. Otherwise you could see alarms every time you purge :). A sensor in the exhaust of each VMB using the same criteria. A sensor in the exhaust of each piece of equipment using the hazardous gas. If the gas has the potential of being in multiple chambers of the equipment with different exhausts, each exhaust needs a sensor. The lines in between the gas cabinet, VMB, and equipment should be doubly contained. I highly recommend a static, inert atmosphere in the interstitial that is set at ? the delivery pressure of the supplied gas. This pressure is sensed real time. There are three possible excursions: 1. The pressure decreases. This indicates in a leak in the outer containment. Automatic notification of appropriate staff results. 2. The pressure increases. This indicates a leak in the delivery line. Automatic notification of appropriate staff results, with a priority to assess the potential hazards. 3. The pressure immediately drops to atmospheric pressure. This indicates a catastrophic failure (such as a fork truck catching the line and ripping it down :(), resulting in immediate evacuation of the facility. I have had no success with ?environmental monitoring.? With the air changeover rates, it is very rare that a leak would be detected ?in the cleanroom, chase, subfab, or the gas rooms. In my experience, these sensors lead to a false sense of security and are therefore more dangerous than not having sensors. That?s my two cents, John From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Wednesday, February 11, 2015 12:40 PM To: Labnetwork Subject: [labnetwork] point of detection - Gas sensors Colleagues, first thanks Vito for initiating this discussion. Very important points where made which led me to explore the labnetwork archives about sub-atmospheric setup and TGMS. Fore those interested I will save you the search: https://www-mtl.mit.edu/pipermail/labnetwork/2012-August/000541.html https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/001004.html https://www-mtl.mit.edu/pipermail/labnetwork/2014-July/001346.html https://www-mtl.mit.edu/pipermail/labnetwork/2013-August/000998.html Since we are in a gas discussion timing, If you had to prioritize the following position of the sensors, what would you recommend ? - exhaust of gas cabinet - gas cabinet at the tool - VMB if any - exhaust of pump after the tool ? - exhaust after abatement system ? - free space sensors scattered around most sensitive areas: where human presence is usually high Thanks ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ Le 2015-02-11 ? 10:53, Vito Logiudice > a ?crit : Hi Dennis, Great insights ? thanks very much for sharing. Our aim is to avoid cold spots and keep the entire system at 19C to 20C, especially since the DCS line traverses a loading dock between the gas bunker and the fab. The two roll-up dock doors are equipped with heated air curtains but we wanted the added insurance of a heated/insulated line. In our particular case, we've got a single 120 foot line between the gas cabinet and the point of use (no VMB's) and we did our best to stay true to the use of large radius bends all along the run. The DCS panel design was kept as simple as possible (no regulator) and the entire cabinet is located in a heated bunker in which temperature trends are monitored. Good point about the possible risk of fire. While the heat trace controller is capable of outputting a limited amount of power, we did see some odd "burn" marks at some locations which lead us to conclude that the Armaflex insulation's upper use limit of 105C may have been exceeded at some of the void locations. In light of these findings we've decided to use fiberglass insulation instead of Armaflex for the repair. Best, Vito From: Dennis Grimard > Date: Tuesday, 10 February, 2015 10:32 PM To: Vito Logiudice > Cc: Labnetwork > Subject: Re: [labnetwork] Conclusion: Heat trace issues on DCS gas lines Vito: I have watched with great pleasure the discussion on this topic. I too agree that much good info has been discussed ... Great feedback from some very knowledgable people indeed. I need to throw a wrench in the discussion (or prove my ignorance). I have always resisted heat taping for the following reasons: 1) when the tube enters a VMB or any ventilated enclosure there is a significant temperature drop due to the large purging flow rate within the enclosure ... Tending to cool the line at the worst possible point, 2) the VMB type enclosures tend to have many right angle welds and valves which promote condensation .... Rather than long graceful bends typically used external to the enclosure, 3) SS is a horrible heat conductor ... As is n2 gas ... So if I heat trace a double wall tube how much heat actually gets to the inner tube? how consistent is that heat? What is the temperature gradient?, and 4) the actual cold to hot temperature gradient (desired) is difficult to institute along the length of line ... A good feedback loop is required. Also, heat tape gives me the district impression that it can contribute to an out of control heating failure with a possible fire as a result. So, not that it solves your problem but here is what I have tried to always implement: 1) short runs (home runs not a distribution), 2) minimum short radius right angles, 3) minimize VMB's ... Mini gas cabinets with multiple outputs in the cabinet, 4) chilled bottles, 5) vacuum delivery, and 6) large radius bends. Just food for thought ... Dennis S Grimard, Ph.D. Associate Director of Operations, MIT.nano Massachusetts Institute of Technology 60 Vassor Street, Bldg 39-556 Cambridge, MA 02149 C: (734) 368-7172 EM: dgrimard at mit.edu On Feb 10, 2015, at 1:30 PM, Vito Logiudice > wrote: Dear Colleagues, Thank you very much to everyone whom took the time to write in with their insights on this issue. Special thanks to John Shott and Tom Britton for the photos and reference documents provided. So that others may perhaps benefit from our experience, we've concluded that the cause of the premature failure appears to have been the presence of several "voids" where the heat trace was not in intimate contact with the SS tubing. This occurred even though the trace had been taped every 12 inches per the manufacturer's recommendations. We also noted voids at some elbows where maintaining contact was/is difficult. To keep the issue from repeating itself in the future, our plan is to reinstall two new heat traces along the length of the tubing, one on the bottom and one on the top. One of these will remain active while the backup trace will be kept off and act as an insurance policy should the primary unit fail in the future. If anyone sees a problem with this particular approach, I would be glad to hear from you. In the new installation, conductive putty will be used to fill any voids before aluminum tape is applied along the entire length of the line much like John showed in his attached photo. The entire assembly will then be re-insulated per the original design specification. Fortunately, the problem occurred under warranty so our only out-of-pocket cost will be limited to the cost of the backup heat trace (a few hundred dollars). Regards, Vito From: Vito Logiudice > Date: Wednesday, 21 January, 2015 12:23 PM To: Labnetwork > Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From mheiden at engr.ucr.edu Thu Feb 12 12:33:47 2015 From: mheiden at engr.ucr.edu (Mark Heiden) Date: Thu, 12 Feb 2015 17:33:47 +0000 Subject: [labnetwork] Cambridge ALD Precursor Vendor In-Reply-To: References: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> Message-ID: Thank you all for your quick responses..Looks like Strem is the first choice. Best, Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 From: Morrison, Richard H., Jr. [mailto:rmorrison at draper.com] Sent: Thursday, February 12, 2015 4:00 AM To: Mark Heiden; labnetwork at mtl.mit.edu Subject: RE: Cambridge ALD Precursor Vendor HI, We use a company called STREM Chemicals they may be able to fill your cartridge. Their contact email is sandy at strem.com Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Heiden Sent: Wednesday, February 11, 2015 6:12 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cambridge ALD Precursor Vendor Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich? We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable.. Thanks in advance, Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Thu Feb 12 13:02:18 2015 From: hathaway at cns.fas.harvard.edu (Hathaway, Malcolm) Date: Thu, 12 Feb 2015 18:02:18 +0000 Subject: [labnetwork] Cambridge ALD Precursor Vendor In-Reply-To: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> References: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> Message-ID: Hi Mark, Echoing the comments from others... Strem Chemical of Newburyport, MA is our preferred vendor for most of our precursors, including TMA. They have it in "Cambridge" style cylinders. As it happens, we fill our own, with a glove box. Empty cylinders can be purchased in 3 pieces (cylinder, VCR weldment, and VCR nut) from Swagelok, for much cheaper than Strem and Sigma will sell them for. We just have our gas plumbing guys (New England Orbital) do a quick orbital weld and test them, and we're good to go, for about... $150-$200, as I recall... Mac Harvard CNS ________________________________ From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Mark Heiden [mheiden at engr.ucr.edu] Sent: Wednesday, February 11, 2015 6:11 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cambridge ALD Precursor Vendor Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich? We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable.. Thanks in advance, Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at seas.upenn.edu Thu Feb 12 16:05:05 2015 From: nclay at seas.upenn.edu (Noah Clay) Date: Thu, 12 Feb 2015 16:05:05 -0500 Subject: [labnetwork] Cambridge ALD Precursor Vendor In-Reply-To: References: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> Message-ID: Mark, Try ordering the lower purity TMAH from Sigma. The results will be the same and it ships quickly. We learned from the Harvard Nanofab (Mac Hathaway) that you can buy this in larger quantities and pour it in your own glove boxes. I think this is the right link: http://www.sigmaaldrich.com/catalog/product/aldrich/257222?lang=en®ion=US We had your experience as well?long lead times, tried the competition and weren?t impressed. Your best bet is to buy large, warehouse on site, save your empty precursor bottles and refill within as needed. My two cents, FWIW. Best, Noah Clay Quattrone Nanofabrication Facility School of Engineering & Applied Science University of Pennsylvania > On Feb 12, 2015, at 8:53 AM, J Provine wrote: > > In addition to strem you can use geleste and air liquids as alternatives. > J > > On Thursday, February 12, 2015, Morrison, Richard H., Jr. > wrote: > HI, > > > > We use a company called STREM Chemicals they may be able to fill your cartridge. Their contact email is sandy at strem.com > > > Rick > > > > > > Draper Laboratory > > Principal Member of the Technical Staff > > Group Leader Microfabrication Operations > > 555 Technology Square > > Cambridge Ma, 02139-3563 > > > > www.draper.com > rmorrison at draper.com > W 617-258-3420 > > C 508-930-3461 > > > > > > > > > > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu ] On Behalf Of Mark Heiden > Sent: Wednesday, February 11, 2015 6:12 PM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Cambridge ALD Precursor Vendor > > > > Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich? > > > > We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable.. > > > > Thanks in advance, > > > > > > Mark Heiden > > NanoFab Cleanroom Manager > > Center for Nanoscale Science and Engineering > > University of California, Riverside > > 951-827-2551 > > > > > > Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From sbhas at uchicago.edu Thu Feb 12 16:37:40 2015 From: sbhas at uchicago.edu (Shivakumar Bhaskaran) Date: Thu, 12 Feb 2015 21:37:40 +0000 Subject: [labnetwork] Cambridge ALD Precursor Vendor In-Reply-To: References: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> Message-ID: I have been using Strem Chemicals and Sigma Aldrich. Strem chemicals are flexible in filling in any type of cylinders. With all the conversation that I am following, I don't have experience in transferring TMA from the bottle to the ALD cylinders. But other precursor materials I was able to transfer to the cylinders. Do you guys have any procedure on how you transfer the TMA in glove box. Due to the pyrophoric property, I am worried that TMA might explode if not handled in the correct method, I do have heard accidents happened when using TMA in glove box. --Thanks --Shiva Shivakumar Bhaskaran Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Hathaway, Malcolm Sent: Thursday, February 12, 2015 12:02 PM To: Mark Heiden; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Cambridge ALD Precursor Vendor Hi Mark, Echoing the comments from others... Strem Chemical of Newburyport, MA is our preferred vendor for most of our precursors, including TMA. They have it in "Cambridge" style cylinders. As it happens, we fill our own, with a glove box. Empty cylinders can be purchased in 3 pieces (cylinder, VCR weldment, and VCR nut) from Swagelok, for much cheaper than Strem and Sigma will sell them for. We just have our gas plumbing guys (New England Orbital) do a quick orbital weld and test them, and we're good to go, for about... $150-$200, as I recall... Mac Harvard CNS ________________________________ From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Mark Heiden [mheiden at engr.ucr.edu] Sent: Wednesday, February 11, 2015 6:11 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cambridge ALD Precursor Vendor Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich? We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable.. Thanks in advance, Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Thu Feb 12 17:22:04 2015 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Thu, 12 Feb 2015 17:22:04 -0500 Subject: [labnetwork] Cambridge ALD Precursor Vendor In-Reply-To: References: <40b8eb4c5e844608b98d1e205353e534@mailbox.engr.local> Message-ID: <54DD278C.6030000@cns.fas.harvard.edu> Hello All, Given that many readers of this list-server are not familiar with some of these materials, let me point out that most ALD precursors are moisture sensitive (decomposes, smolders, "goes bad" in contact with room air) as they are intended to react quickly, typically with water, or other oxidizers. Some, like TMA (trimethyl aluminum, for Al2O3) and DEZ (diethyl zinc, for ZnO) are pyrophoric, and /will /burst into flame if exposed to air. While some precursors can, without injury, be transferred in a regular fume hood, I don't do this anymore, since they can still decompose to some extent, without actually killing you. Others, don't even try it, or the bad day will happen right then and there. That said, I will email regarding transfer techniques in a later post, as I must run for the train just now! Mac Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA02138 617-495-9012 On 2/12/2015 4:37 PM, Shivakumar Bhaskaran wrote: > > I have been using Strem Chemicals and Sigma Aldrich. Strem chemicals > are flexible in filling in any type of cylinders. > > With all the conversation that I am following, I don't have experience > in transferring TMA from the bottle to the ALD cylinders. But other > precursor materials I was able to transfer to the cylinders. > > Do you guys have any procedure on how you transfer the TMA in glove > box. Due to the pyrophoric property, I am worried that TMA might > explode if not handled in the correct method, I do have heard > accidents happened when using TMA in glove box. > > --Thanks > > --Shiva > > Shivakumar Bhaskaran > > Searle CleanRoom Manager > > The University of Chicago > > 5735 S.Ellis, Room 032 > > Chicago-60637 > > Ph:773-795-2297 > > https://searle-cleanroom.uchicago.edu/ > > *From:* labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Hathaway, Malcolm > *Sent:* Thursday, February 12, 2015 12:02 PM > *To:* Mark Heiden; labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Cambridge ALD Precursor Vendor > > Hi Mark, > > Echoing the comments from others... > > Strem Chemical of Newburyport, MA is our preferred vendor for most of > our precursors, including TMA. They have it in "Cambridge" style > cylinders. > > As it happens, we fill our own, with a glove box. Empty cylinders can > be purchased in 3 pieces (cylinder, VCR weldment, and VCR nut) from > Swagelok, for much cheaper than Strem and Sigma will sell them for. > We just have our gas plumbing guys (New England Orbital) do a quick > orbital weld and test them, and we're good to go, for about... > $150-$200, as I recall... > > Mac > Harvard CNS > > ------------------------------------------------------------------------ > > *From:*labnetwork-bounces at mtl.mit.edu > > [labnetwork-bounces at mtl.mit.edu] on behalf of Mark Heiden > [mheiden at engr.ucr.edu] > *Sent:* Wednesday, February 11, 2015 6:11 PM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Cambridge ALD Precursor Vendor > > Has anyone found an alternate vendor for precursors packaged for > Cambridge Labs ALD systems besides Sigma Aldrich? > > We currently have a delivery date for a standard aluminum (TMAH) > cartridge that is in June 2015. Not acceptable.. > > Thanks in advance, > > Mark Heiden > > NanoFab Cleanroom Manager > > Center for Nanoscale Science and Engineering > > University of California, Riverside > > 951-827-2551 > -------------- next part -------------- An HTML attachment was scrubbed... URL: From agregg at abbiegregg.com Fri Feb 13 01:24:51 2015 From: agregg at abbiegregg.com (Abbie Gregg) Date: Fri, 13 Feb 2015 01:24:51 -0500 Subject: [labnetwork] Position open: Director of Research Program/Services iCAMR University of Central Florida Message-ID: <5863FB4055D90542A7A7DAE0CEF2ACB0544E9B9DEC@E2K7CCR1.netvigour.com> Hi All, One of our clients has an interesting opening available: http://icamr.net/about.html Functional Title: Director of Research Technology for International Consortium for Advanced Manufacturing Research (iCAMR) Position located in Kissimmee, Florida Responsible for the development of the consortium's technical programs and management of the organization's research, development, and technological needs. Director of Technology examines the short- and long-term needs of the industry, and works with the consortium members and industry supply chain to develop capital equipment, materials, and processes that enable ICAMR members to manufacture next generation products. Development of the consortium technology platforms and programs, and working with consortium members to establish program specific goals and deliverables. Responsible for managing Technical Working Groups and providing program performance reports to the Consortium Executive Technical Advisory Board. Lead the execution of technology programs, platforms, partnerships, and external relationships. Build and manage a top-flight technology team and oversee research and development, as well as manage technical programs and managers. Provide visible leadership for the consortium within the community. Interface with industry members and the complete technology supply chain to identify technology challenges and manufacturing gaps, and develop consortium programs and platforms that provide manufacturable solutions. The Director of Research Program/Services Position for the University of Central Florida has been posted and can be found at https://www.jobswithucf.com/postings/40927 . Please feel free to share it throughout your network. Fran ---------------------------------------------------------------------------------------- Fran Korosec Director, Program Management Office International Consortium for Advanced Manufacturing Research - ICAMR 3 Courthouse Square, 2nd Floor Kissimmee, FL 34741 407-742-4254 office 407-221-4346 cell www.icamr.net [cid:image001.png at 01D0471A.64343810] Abbie Gregg President Abbie Gregg, Inc. 1130 East University Drive, Suite 105 Tempe, Arizona 85281 Phone 480 446-8000 x 107 Cell 480-577-5083 FAX 480-446-8001 email agregg at abbiegregg.com website www.abbiegregg.com CONFIDENTIALITY NOTICE: All information contained in or attached to this email constitutes confidential information belonging to Abbie Gregg, Inc., its affiliates and subsidiaries and/or its clients. This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee(s) only. All other uses or disclosures are strictly prohibited. If the reader is not the intended recipient you are hereby notified that the perusal, copying or dissemination of this email is strictly prohibited. If you have received this communication in error, please notify the sender, and delete all copies of this message and its attachments immediately. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 22441 bytes Desc: image001.png URL: From yuyingtang at mail.pse.umass.edu Fri Feb 13 10:51:40 2015 From: yuyingtang at mail.pse.umass.edu (YuYing Tang) Date: Fri, 13 Feb 2015 10:51:40 -0500 Subject: [labnetwork] Cleanroom ISO 7 (Class 10,000) Specification Message-ID: Does anybody have a cleanroom specification and can share it with me? We need to build a clearnroom in our new Life Science Center, and this clean room is housing our Roll to Roll facilities for flexible electronics fabrication research. We are thinking of a class 10,000 cleanroom, after considering the cost and efficiency compromise. Many of you manage cleanrooms. When the cleanrooms were built, are they just satisfy the ISO 14644 standard, or you have to specify the following items: particulates, air changes, air flow patterns, static control and acceptable humidity ranges.... We currently have a couple of Soft Wall Cleanrooms, and there is some rusty and deposition on metals. We are not sure whether is caused by clean room air or other factors. Thank you very much. YuYing Tang, Ph.D. Director, R2R Processing Lab Center for Hierarchical Manufacturing Department of Polymer Science and Engineering University of Massachusetts at Amherst Amherst, MA 01003 http://r2rnano.org/r2rlab/ Cell: 413-230-1285 Office: 413-577-2125 From jrweaver at purdue.edu Fri Feb 13 13:01:48 2015 From: jrweaver at purdue.edu (Weaver, John R) Date: Fri, 13 Feb 2015 18:01:48 +0000 Subject: [labnetwork] Cleanroom ISO 7 (Class 10,000) Specification In-Reply-To: References: Message-ID: <6A848421F695C54A9210C1A873C96AC225124BF1@WPVEXCMBX04.purdue.lcl> YuYing - The specifications for your cleanroom will depend on the process and research needs and the equipment design and layout. You certainly want to comply with ISO 14644, but also need to specify any other parameters that are critical to your process. From an airflow standpoint, you will most likely want to specify temperature, humidity, and air changes per minute as well as the particle concentration specified in the ISO spec. Whether you specify unidirectionality of the airflow depends on your equipment layout and airflow design. In addition, you may want to specify vibration, static levels, EMI levels, and anything else that will affect your process and equipment. If you drop me a note that describes the equipment and layout as well as the process parameters, I should be able to help. I'm not trying to advertise, but since you are in Amherst you have an easy opportunity to take a course I'm teaching in Boston in April. ESTECH is the foremost conference on cleanrooms, and ESTECH 2015 will be held in Danvers April 27-30, 2015. I'll be teaching a tutorial on Cleanroom Basics on Monday, April 27. It's an all-day tutorial that covers all aspects of cleanrooms and a glance at their operation. I think it would be very useful to you. There is more information at iest.org. Click on Meetings, then ESTECH. John John R. Weaver Strategic Facilities Officer Birck Nanotechnology Center 1205 West State Street West Lafayette IN 47907 (765) 494-5494 jrweaver at purdue.edu nano.purdue.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of YuYing Tang Sent: Friday, February 13, 2015 10:52 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cleanroom ISO 7 (Class 10,000) Specification Does anybody have a cleanroom specification and can share it with me? We need to build a clearnroom in our new Life Science Center, and this clean room is housing our Roll to Roll facilities for flexible electronics fabrication research. We are thinking of a class 10,000 cleanroom, after considering the cost and efficiency compromise. Many of you manage cleanrooms. When the cleanrooms were built, are they just satisfy the ISO 14644 standard, or you have to specify the following items: particulates, air changes, air flow patterns, static control and acceptable humidity ranges.... We currently have a couple of Soft Wall Cleanrooms, and there is some rusty and deposition on metals. We are not sure whether is caused by clean room air or other factors. Thank you very much. YuYing Tang, Ph.D. Director, R2R Processing Lab Center for Hierarchical Manufacturing Department of Polymer Science and Engineering University of Massachusetts at Amherst Amherst, MA 01003 http://r2rnano.org/r2rlab/ Cell: 413-230-1285 Office: 413-577-2125 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From julia.aebersold at louisville.edu Tue Feb 24 19:56:37 2015 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Wed, 25 Feb 2015 00:56:37 +0000 Subject: [labnetwork] Power Conditioning? Message-ID: Hello everyone. Due to the recent weather here in the Midwest we have experienced several instances of power surges due to utility transformers either blowing up or other issues. As a result we have experienced some damage to our equipment. I am thinking of pursuing a variety of power conditioners to help nullify these harmful events. However, I wanted to tap into our wonderful online resources before dropping any funds. Opinion or other suggestions? Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From ulbricht at physics.ucsb.edu Tue Feb 24 22:25:13 2015 From: ulbricht at physics.ucsb.edu (Gerhard Ulbricht) Date: Tue, 24 Feb 2015 19:25:13 -0800 Subject: [labnetwork] advice on work safety when sputtering Osmium Message-ID: <54ED4099.1090903@physics.ucsb.edu> Dear all, I'm looking for advice on Osmium (Os) sputter deposition. We are interested in its superconducting behavior, and I would like to ask you if anyone has experience with Os sputtering and especially with the required safety procedures. More details: - We intend to sputter Os from a bulk 2" Os sputter target in a UHV system. - The main danger with Os is its oxide (OsO4) which is volatile and highly toxic. - It is known that Os powder at room temperature oxidizes on its own to OsO4, but bulk Os has to be heated above 400 C. The sputter process will coat both sample and the inside of the sputter system with thin Os films. Save sample handling is no issue, but what precautions would be advisable for the sputter system itself? My main worry is system maintenance: That's the only time the Os inside will come into contact with Oxygen. Will the thin film inside react like Os powder and form OsO4 even at room temperature? Or should we expect the oxidization to be minimal at room temperature? I appreciate any advice you can give, Gerhard Ulbricht University of California Santa Barbara Santa Barbara CA 93106 ulbricht at physics.ucsb.edu From Thomas_Ferraguto at uml.edu Wed Feb 25 08:19:29 2015 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas) Date: Wed, 25 Feb 2015 13:19:29 +0000 Subject: [labnetwork] Opening for a local Zeiss Fib Workshop Message-ID: Colleagues, We have a few openings for Zeiss FIB workshop sponsored by Zeiss on March 11, 2015 at UMass Lowell The work shop is FREE. 8:00 - 9am: Registration with Coffee and Danish 9 to 10: Introduction to Auriga xbeam and applications: Zeiss talk 10 - 12: first group: Hands-on Max 8 folks 2 - 4: second group: Hands on Folks can sign-up during registration Let me know if you're interested... Best Regards Tom Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax [cid:image001.png at 01D050D3.C6AB21D0] -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: application/octet-stream Size: 57965 bytes Desc: not available URL: From jrweaver at purdue.edu Wed Feb 25 11:23:28 2015 From: jrweaver at purdue.edu (Weaver, John R) Date: Wed, 25 Feb 2015 16:23:28 +0000 Subject: [labnetwork] Cleanroom Seminar Message-ID: <6A848421F695C54A9210C1A873C96AC22513DC43@WPVEXCMBX04.purdue.lcl> I will be doing a four-hour workshop on cleanrooms at Purdue on March 26, 2015, from 8:00 am to 12:00 noon. If you have an interest, please contact Jaime Turner jjturner at purdue.edu to register. For universities and non-profit organizations, the workshop is free of charge. For companies, a $250 per person donation is requested. I've attached a flyer to this email. John John R. Weaver Strategic Facilities Officer Birck Nanotechnology Center 1205 West State Street West Lafayette IN 47907 (765) 494-5494 jrweaver at purdue.edu nano.purdue.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Cleanrooms Flyer 2.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 308240 bytes Desc: Cleanrooms Flyer 2.docx URL: From rmorrison at draper.com Wed Feb 25 11:40:55 2015 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Wed, 25 Feb 2015 16:40:55 +0000 Subject: [labnetwork] DRIE tools Message-ID: Hi everyone, I am in evaluation DRIE vendors, purchasing a tool in the next few weeks. I was wondering if you could contact me by phone or email with recommendations for SPTS, Plasma-Therm and Oxford. I am wondering about field service support and process support. Thanks in advance. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From khbeis at uw.edu Thu Feb 26 04:04:51 2015 From: khbeis at uw.edu (Michael Khbeis) Date: Wed, 25 Feb 2015 23:04:51 -1000 Subject: [labnetwork] Power Conditioning? In-Reply-To: References: Message-ID: <0C58C320-9C5B-457C-921F-DDAF12068D8F@uw.edu> Julia We are looking at a flywheel system for filtering power and handling brown outs. There is lower cost of ownership but it only provides about 10 seconds of uninterrupted power. Dr. Michael Khbeis Washington Nanofab Facility University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (C) 443.254.5192 khbeis at uw.edu > On Feb 24, 2015, at 2:56 PM, julia.aebersold at louisville.edu wrote: > > Hello everyone. Due to the recent weather here in the Midwest we have experienced several instances of power surges due to utility transformers either blowing up or other issues. As a result we have experienced some damage to our equipment. I am thinking of pursuing a variety of power conditioners to help nullify these harmful events. However, I wanted to tap into our wonderful online resources before dropping any funds. > > Opinion or other suggestions? > > Cheers! > > Julia Aebersold, Ph.D. > Cleanroom Manager > Micro/Nano Technology Center > University of Louisville > Shumaker Research Building, Room 233 > 2210 South Brook Street > Louisville, KY 40292 > > 502-852-1572 > http://louisville.edu/micronano/ > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From alex at powerstandards.com Thu Feb 26 09:05:33 2015 From: alex at powerstandards.com (Alex McEachern) Date: Thu, 26 Feb 2015 06:05:33 -0800 Subject: [labnetwork] Power Conditioning? In-Reply-To: References: Message-ID: Hi Julia - SEMI (the semiconductor industry association) has a Working Group, SEMI F47, that specializes in the effects of power disturbances on semiconductor manufacturing equipment. The members are the top power engineers from the big tool manufacturers, and the top power engineers from the big fabs around the world. No academic participants so far, to my regret! As it happens, I'm the Chair of SEMI F47 -- if you think it might be useful, I would be glad to chat by email about the resources that are available publicly from SEMI F47. If anyone else wants to participate, please let me know via email. Best - Alex Alex McEachern (Alex at PowerStandards.com) President, Power Standards Lab Fellow, IEEE On Tue, February 24, 2015 4:56 pm, julia.aebersold at louisville.edu wrote: > Hello everyone. Due to the recent weather here in the Midwest we have > experienced several instances of power surges due to utility transformers > either blowing up or other issues. As a result we have experienced some > damage to our equipment. I am thinking of pursuing a variety of power > conditioners to help nullify these harmful events. However, I wanted to > tap into our wonderful online resources before dropping any funds. > > Opinion or other suggestions? > > Cheers! > > Julia Aebersold, Ph.D. > Cleanroom Manager > Micro/Nano Technology Center > University of Louisville > Shumaker Research Building, Room 233 > 2210 South Brook Street > Louisville, KY 40292 > > 502-852-1572 > http://louisville.edu/micronano/ > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > From schweig at umich.edu Thu Feb 26 09:41:11 2015 From: schweig at umich.edu (Dennis Schweiger) Date: Thu, 26 Feb 2015 09:41:11 -0500 Subject: [labnetwork] Power Conditioning? Message-ID: When we built the addition to our existing fab, we looked into something that would allow us to ride through the 1-10 second power interruptions that seemed to plague this area. We designed our entire power distribution grid for the new addition around a flywheel based system, but as of yet, have never proceeded any farther with the implementation. The three biggest hurdles are cost (at the time it was about $1K/Kw), sizing the unit (both in capacity, and physical location), and finally determining which equipment, or parts of equipment, should be backed up. We were looking at a 500Kw unit, which wasn't large enough to back up everything, but it would have captured all of the computer systems, cryo pumps, and assorted electronic hardware. To back up (ride through) for the entire new facility, we would have needed somewhere between 800-900 Kw. We've been on-line with the new facility since about 2010, and have managed OK without the fly wheel system, however we have added local UPS units at critical locations. The flywheel system would have only helped in the new fab areas. We would still have had about half of the facility (the original fab areas) unsupported. We also have a 60Kw UPS that backs up our life safety systems (computers, gas detection, several dry pumps, some abatement), which is backed up by one of our natural gas fired generators. We've found, that by instilling a 24/7 technical on-call program (voluntary in participation), we've been able to manage the power disturbance risks, and provide a more cost effective support for the entire fab operation. DennisSchweiger University of Michigan/LNF 734.647.2055 Ofc On Tue, Feb 24, 2015 at 7:56 PM, wrote: > Hello everyone. Due to the recent weather here in the Midwest we have > experienced several instances of power surges due to utility transformers > either blowing up or other issues. As a result we have experienced some > damage to our equipment. I am thinking of pursuing a variety of power > conditioners to help nullify these harmful events. However, I wanted to > tap into our wonderful online resources before dropping any funds. > > > > Opinion or other suggestions? > > > > Cheers! > > > > Julia Aebersold, Ph.D. > > Cleanroom Manager > > Micro/Nano Technology Center > > University of Louisville > > Shumaker Research Building, Room 233 > > 2210 South Brook Street > > Louisville, KY 40292 > > > > 502-852-1572 > > http://louisville.edu/micronano/ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From myoung6 at nd.edu Thu Feb 26 11:54:50 2015 From: myoung6 at nd.edu (Mike Young) Date: Thu, 26 Feb 2015 11:54:50 -0500 Subject: [labnetwork] Power Conditioning? In-Reply-To: References: Message-ID: Hi Dennis. Can you elaborate just a bit regarding the 24/7 technical on-call program you mentioned? This is intended for lab users to be able to call a lab staff member if things go weird in the middle of the night? Or is this something different? --Mike > On Feb 26, 2015, at 9:41 AM, Dennis Schweiger wrote: > > > > We've found, that by instilling a 24/7 technical on-call program (voluntary in participation), we've been able to manage the power disturbance risks, and provide a more cost effective support for the entire fab operation. > > DennisSchweiger > University of Michigan/LNF > > -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 637-6302 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 -------------- next part -------------- An HTML attachment was scrubbed... URL: From hbtusainc at yahoo.com Thu Feb 26 13:18:48 2015 From: hbtusainc at yahoo.com (Mario Portillo) Date: Thu, 26 Feb 2015 18:18:48 +0000 (UTC) Subject: [labnetwork] Power Conditioning? In-Reply-To: References: Message-ID: <373902009.249907.1424974728678.JavaMail.yahoo@mail.yahoo.com> In my worldwide travels I see local UPS units with battery back up (not ten seconds) for the critical systems is a money saving and way to go, all pieces in the entire fab is an overkill. My two cents...Regards Mario A. Portillo Sr. HIGH'born Technology USA Inc.. Semiconductor Equipment Services 8130 Glades Road, #229 Boca Raton, FL 33434 561 470-1975 office 561 504-0244 cell hbtusainc at yahoo.com www.hbtusainc.com ________________________________ From: Dennis Schweiger To: "Aebersold,Julia W." Cc: "labnetwork at mtl.mit.edu" Sent: Thursday, February 26, 2015 9:41 AM Subject: Re: [labnetwork] Power Conditioning? When we built the addition to our existing fab, we looked into something that would allow us to ride through the 1-10 second power interruptions that seemed to plague this area. We designed our entire power distribution grid for the new addition around a flywheel based system, but as of yet, have never proceeded any farther with the implementation. The three biggest hurdles are cost (at the time it was about $1K/Kw), sizing the unit (both in capacity, and physical location), and finally determining which equipment, or parts of equipment, should be backed up. We were looking at a 500Kw unit, which wasn't large enough to back up everything, but it would have captured all of the computer systems, cryo pumps, and assorted electronic hardware. To back up (ride through) for the entire new facility, we would have needed somewhere between 800-900 Kw. We've been on-line with the new facility since about 2010, and have managed OK without the fly wheel system, however we have added local UPS units at critical locations. The flywheel system would have only helped in the new fab areas. We would still have had about half of the facility (the original fab areas) unsupported. We also have a 60Kw UPS that backs up our life safety systems (computers, gas detection, several dry pumps, some abatement), which is backed up by one of our natural gas fired generators. We've found, that by instilling a 24/7 technical on-call program (voluntary in participation), we've been able to manage the power disturbance risks, and provide a more cost effective support for the entire fab operation. DennisSchweiger University of Michigan/LNF 734.647.2055 Ofc On Tue, Feb 24, 2015 at 7:56 PM, wrote: > > >Hello everyone. Due to the recent weather here in the Midwest we have experienced several instances of power surges due to utility transformers either blowing up or other issues. As a result we have experienced some damage to our equipment. I am thinking of pursuing a variety of power conditioners to help nullify these harmful events. However, I wanted to tap into our wonderful online resources before dropping any funds. > >Opinion or other suggestions? > >Cheers! > >Julia Aebersold, Ph.D. >Cleanroom Manager >Micro/Nano Technology Center >University of Louisville >Shumaker Research Building, Room 233 >2210 South Brook Street >Louisville, KY 40292 > >502-852-1572 >http://louisville.edu/micronano/ > >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From schweig at umich.edu Thu Feb 26 14:56:33 2015 From: schweig at umich.edu (Dennis Schweiger) Date: Thu, 26 Feb 2015 14:56:33 -0500 Subject: [labnetwork] tool/lab support in the off-hours Message-ID: Mike, our 24/7 on call technical program is strictly voluntary. We implemented it as a way to provide additional coverage for keeping the tools, and fab, running in the off hours. It provides us with a way to track the additional staff time when responding to a problem/event, and allows us to compensate the staff that do respond. All of our staff are using smart phones, provided by the lab, so we essentially have 24/7 coverage if the need should arise. This program isn't free, but it's way cheaper than adding additional staff to cover those off hours. In addition to this on-call support system, we also created a ticketing system that lets a lab user create a work ticket which then provides us with a way to track the problem and resolution from start to completion. I've attached a copy of one of my tickets so you can see what it looks like. Each one has it's own ID number, and as we respond to the ticket, we can track what is being done/happening. Tickets can be created for any one of the following scenarios, or a combination thereof; 1) Repair request, whether it's for a tool, or something within the facility. This could be as simple as a reset after power outage, or a problem with one of the process tools/benches (a wafer stuck in a load chamber or dropped into a rinse bath). 2) Create an appointment for training on a tool/process for certification purposes. Everyone (even process staff) have to go through this process to use any type of process tool. Training and sign off are done by either the tool owner, or one of select staff that are trained on the tool/process. 3) Create a work request for an outside lab support function. This could be a request for Helium leak testing support, gas cylinder change out, tool set up/evaluation, anything that requires our assistance with. It provides us with a way to track the support we give external labs, and a way to recharge them for that support. None of this implementation has been without a few bugs to work out, and some retraining on the part of our user community. We've had both the technical on-call, and ticket system in place for about 3 years. It would be very hard to give either of them up now. The benefits we've realized far surpassed our expectations. Let me know if you need some additional information. We'd be happy to share what we've learned, so far....... Dennis Schweiger University of Michigan/LNF 734.647.2055 Ofc On Thu, Feb 26, 2015 at 11:54 AM, Mike Young wrote: > Hi Dennis. Can you elaborate just a bit regarding the 24/7 technical > on-call program you mentioned? This is intended for lab users to be able to > call a lab staff member if things go weird in the middle of the night? Or > is this something different? > > --Mike > > > On Feb 26, 2015, at 9:41 AM, Dennis Schweiger wrote: > > > > We've found, that by instilling a 24/7 technical on-call program > (voluntary in participation), we've been able to manage the power > disturbance risks, and provide a more cost effective support for the entire > fab operation. > > DennisSchweiger > University of Michigan/LNF > > > > -- > Michael P. Young (574) 631-3268 (office) > Nanofabrication Specialist (574) 631-4393 (fax) > Department of Electrical Engineering (765) 637-6302 (cell) > University of Notre Dame mike.young at nd.edu > B-38 Stinson-Remick Hall > Notre Dame, IN 46556-5637 > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: osTicket __ Staff Control Panel.pdf Type: application/pdf Size: 164166 bytes Desc: not available URL: From julia.aebersold at louisville.edu Thu Feb 26 16:38:33 2015 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Thu, 26 Feb 2015 21:38:33 +0000 Subject: [labnetwork] Power Conditioning? In-Reply-To: References: Message-ID: What I can say about our program is that we receive text alerts from our TGM system and building system when our air makeup system goes down. If we're not on site then we have remote access from home to monitor and control our TGM system. I think our cleanroom misses me for it seems our alarms occur during sleeping hours on the weekends. Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mike Young Sent: Thursday, February 26, 2015 11:55 AM To: Dennis Schweiger Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Power Conditioning? Hi Dennis. Can you elaborate just a bit regarding the 24/7 technical on-call program you mentioned? This is intended for lab users to be able to call a lab staff member if things go weird in the middle of the night? Or is this something different? --Mike On Feb 26, 2015, at 9:41 AM, Dennis Schweiger > wrote: We've found, that by instilling a 24/7 technical on-call program (voluntary in participation), we've been able to manage the power disturbance risks, and provide a more cost effective support for the entire fab operation. DennisSchweiger University of Michigan/LNF -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 637-6302 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mpapakyriakou at gatech.edu Fri Feb 27 09:27:57 2015 From: mpapakyriakou at gatech.edu (Papakyriakou, Marc R) Date: Fri, 27 Feb 2015 14:27:57 +0000 Subject: [labnetwork] Use of strontium in sputtering Message-ID: <1425047278072.25881@gatech.edu> Dear MTL lab network, I am a graduate student at Georgia tech and I have a question about possible use of strontium in a cleanroom environment. I am working to get strontium qualified as a material for use in Georgia Tech's cleanroom, but they want to know what handling procedures other cleanrooms use for dealing for strontium before they agree to let it be used. I am specifically trying to sputter pure strontium. Does anyone in this network have experience with using it in this way? And if not specifically strontium, is there a general handling procedure for use of highly reactive and/or pyrophoric materials? Thank you, Marc Papakyriakou Graduate Research Assistant Woodruff School of Mechanical Engineering Georgia Institute of Technology http://www.yeelab.gatech.edu? From len.olona at ou.edu Fri Feb 27 12:08:03 2015 From: len.olona at ou.edu (Olona, Leonard E.) Date: Fri, 27 Feb 2015 17:08:03 +0000 Subject: [labnetwork] Use of strontium in sputtering In-Reply-To: <1425047278072.25881@gatech.edu> References: <1425047278072.25881@gatech.edu> Message-ID: Hey Marc, I have an extensive background working with Sr. I primarily use it with MBE. IV-VI growth. Strontium is very toxic. It is very porous and reacts immediately when exposed to atmosphere. Its best to load your crucible or cell inside a glove box and in an inert environment. Outgassing post loading is very important. It has a high vapor pressure. (not as bad as Selenium or As) If used in a sputtering system. You need to make sure your chamber is always kept under vacuum and no O2. Be aware that you Sr can oxidize quickly and will react with other constituents inside your chamber. Its a nasty element! But works great when growing lead salts and making Thermal Electric devices!! Good luck and wear your PPE!!! don?t breath it -Len Leonard E. Olona Facility Manager RIL Cleanroom Manager University of Oklahoma web: http://arrc.ou.edu/ web: http://cleanroom.ou.edu/ voice: +1- 405- 325-4374 On 2/27/15 8:27 AM, "Papakyriakou, Marc R" wrote: >Dear MTL lab network, > >I am a graduate student at Georgia tech and I have a question about >possible use of strontium in a cleanroom environment. I am working to get >strontium qualified as a material for use in Georgia Tech's cleanroom, >but they want to know what handling procedures other cleanrooms use for >dealing for strontium before they agree to let it be used. I am >specifically trying to sputter pure strontium. Does anyone in this >network have experience with using it in this way? And if not >specifically strontium, is there a general handling procedure for use of >highly reactive and/or pyrophoric materials? > >Thank you, > >Marc Papakyriakou >Graduate Research Assistant >Woodruff School of Mechanical Engineering >Georgia Institute of Technology >http://www.yeelab.gatech.edu? >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From bernard at mtl.mit.edu Fri Feb 27 12:18:22 2015 From: bernard at mtl.mit.edu (Bernard Alamariu) Date: Fri, 27 Feb 2015 12:18:22 -0500 Subject: [labnetwork] advice on work safety when sputtering Osmium In-Reply-To: <54ED4099.1090903@physics.ucsb.edu> References: <54ED4099.1090903@physics.ucsb.edu> Message-ID: <54F0A6DE.8090303@mtl.mit.edu> Hello, The Os powder is very dangerous. The main danger is when you clean the sputtering machine. There were several instances with terrible consequences ( death & sick) by cross contamination. The people that cleaned the sputtering machines were very carefully and took all the safety measures and were OK, but put their gowns in the common locker room. The dust spread on other people gowns that got sick. Thanks, Bernard On 2/24/15 10:25 PM, Gerhard Ulbricht wrote: > Dear all, > > I'm looking for advice on Osmium (Os) sputter deposition. We are > interested in its superconducting behavior, and I would like to ask > you if anyone has experience with Os sputtering and especially with > the required safety procedures. > > More details: > - We intend to sputter Os from a bulk 2" Os sputter target in a UHV > system. > - The main danger with Os is its oxide (OsO4) which is volatile and > highly toxic. > - It is known that Os powder at room temperature oxidizes on its own > to OsO4, but bulk Os has to be heated above 400 C. > > The sputter process will coat both sample and the inside of the > sputter system with thin Os films. Save sample handling is no issue, > but what precautions would be advisable for the sputter system itself? > My main worry is system maintenance: That's the only time the Os > inside will come into contact with Oxygen. Will the thin film inside > react like Os powder and form OsO4 even at room temperature? Or should > we expect the oxidization to be minimal at room temperature? > > I appreciate any advice you can give, > > Gerhard Ulbricht > University of California Santa Barbara > Santa Barbara CA 93106 > ulbricht at physics.ucsb.edu > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > From bob at eecs.berkeley.edu Fri Feb 27 13:34:18 2015 From: bob at eecs.berkeley.edu (Robert M. HAMILTON) Date: Fri, 27 Feb 2015 10:34:18 -0800 Subject: [labnetwork] Use of strontium in sputtering In-Reply-To: <1425047278072.25881@gatech.edu> References: <1425047278072.25881@gatech.edu> Message-ID: Marc Papakyriakou, Coincidentally regarding your query, a few days ago the topic of Sr deposition, an alkali metal, came up in the Marvell NanoLab. I'll share a few thoughts but first an anecdote. Many of the alkali metals are pyrophoric and strongly react with air and water. With water they liberate H2. I began my career as a research glassblower in a tube lab. Several decades ago, in a clean up of a microwave tube laboratory, we ran across a Copal jar containing metalic sodium (Na) covered in kerosene. My senior colleague asked if I had ever seen what happened when sodium came in contact with water. He filled a large stainless lab sink with water and the lump tossed in the sodium - about the size of an walnut.. It immediately floated (sp. gr. 0.968) and began melting into smaller and smaller droplets, hissing as they spread out over the surface of the water. Each droplet glowed and was surrounded by a the aura of a white cloud. Given the generation of H2 an unanticipated explosion resulted blowing the water in the sink, as well as Na droplets, up onto the ceiling. This came down as a shower of water and some reaming droplets of Na. Fortunately, no one was hurt; everyone was surprised. Thus, a graphic demonstration of a alkali metal reacting with water. An artifact of the event was all of the small holes burned into the fabric of our clothes from the hot Na droplets. I lost a good shirt that day. Na, along with Ba, Ca, Sr and other alkali metals are routinely used as cathodes and photo-cathodes. The technical issue is how to deposit them in such a way the films not react destroying their properties. Air, Oxygen and water vapor will react upon contact. In the case of creating triple-oxide electron tube cathodes we wanted the oxide; however, the oxides quickly and irreversibly hydrate in the presence of the moisture of air destroying low electron work functions. When having to do repair work on cathode assemblies that had been formed we tried a method of using a battery pack to keep the cathodes above 250 C thus preventing oxidation and hydration with some success. In creating photocathodes for photomultipliers we resorted to "dispensers", i.e. an evaporation source that is stable in air and evaporable in situ, under vacuum. SAES Getters Inc. offers dispenser-sources such as cessium (I note Sr is not listed. SAES may do custom work or have experience with Sr . The big question is how do our labs safely handle more and more of the periodic table and how do researches use classic deposition tools to produce reactive films that are retrievable and workable. The safety end of this equation is likely the easiest to solve. Regards, Bob Hamilton Robert Hamilton University of CA, Berkeley Marvell NanoLab Equipment Manager Rm 520 Sutardja Dai Hall, MC 1754 Berkeley, CA 94720 Phone 510-809-8618 (desk - preferred) Mobile 510-325-7557 (my personal mobile) E-mail preferred: bob at eecs.berkeley.edu http://nanolab.berkeley.edu/ On Fri, Feb 27, 2015 at 6:27 AM, Papakyriakou, Marc R < mpapakyriakou at gatech.edu> wrote: > Dear MTL lab network, > > I am a graduate student at Georgia tech and I have a question about > possible use of strontium in a cleanroom environment. I am working to get > strontium qualified as a material for use in Georgia Tech's cleanroom, but > they want to know what handling procedures other cleanrooms use for dealing > for strontium before they agree to let it be used. I am specifically trying > to sputter pure strontium. Does anyone in this network have experience with > using it in this way? And if not specifically strontium, is there a general > handling procedure for use of highly reactive and/or pyrophoric materials? > > Thank you, > > Marc Papakyriakou > Graduate Research Assistant > Woodruff School of Mechanical Engineering > Georgia Institute of Technology > http://www.yeelab.gatech.edu? > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: