[labnetwork] Iron Oxide vs Chrome Mask plates

[John Nicholson]

Yamal,
    If you are aligning to small features and using a positive photoresist
with a dark field mask, the ability to see through the iron oxide can aid
alignment.

Regards,
John

-- 
John Nicholson
Nanofabrication Laboratories Manager
MassNanoTech Nanofabrication Facility
Conte Center for Polymer Research, Rm. B111
University of Massachusetts Amherst
120 Governor's Drive
Amherst,MA 01003-9305
Phone: 413-545-2772
Fax: 413-577-0165


On Tue, Feb 10, 2015 at 5:17 AM, Kamal Yadav <kamal.yadav at gmail.com> wrote:

> Dear All,
>
> Is iron oxide superior or inferior to Chrome mask plates in resolution,
> sharp edges etc. Chrome mask plates are little more costly. But are Chrome
> PR coated mask plates in anyway better than PR Iron oxide plates?
>
> Thanks a lot!
>
> --
> Thanks,
> Kamal Yadav
> Sr. Process Technologist
> IITBNF, EE Department, Annexe,
> IIT Bombay, Powai
> Mumbai 400076
> Internal: 4435
> Cell: 7506144798
> Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in
>
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