[labnetwork] Iron Oxide vs Chrome Mask plates

[Kamal Yadav]

Dear John and Jeffrey,

Thanks for your reply. We also use Iron Oxide plates. It looks like both
are same performance and Iron oxide has an added advantage in alignment for
it being transparent.

Thanks a lot!

On Tue, Feb 10, 2015 at 8:51 PM, Grau, Jeffrey <jeffg at illinois.edu> wrote:

>  Hello Kamal,
>
>                 My name is Jeff Grau and I am the Research Engineer at the
> University of Illinois. I have been involved in Photolithography for over
> 35 years. The most significant difference between Chrome and Iron Oxide
> masks is the ability to see through the Iron Oxide. This proves to be most
> beneficial when aligning the photomask. At extremely high magnification,
> one might see  sharper edge quality on the Chrome photomask, but taking
> into account the see-through ability of the Iron Oxide mask, this is a
> small trade off. You mention chrome masks being more expensive than Iron
> Oxide. Here in the States, the opposite is true. The cost difference
> between Iron Oxide and Chrome is approximately double.
>
>                 Roughly, 98 percent of all the photomasks being generated
> here at the University of Illinois are generated on Iron Oxide.
>
>                 I hope this helps….Jeff
>
>
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [mailto:
> labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Kamal Yadav
> *Sent:* Tuesday, February 10, 2015 4:17 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] Iron Oxide vs Chrome Mask plates
>
>
>
> Dear All,
>
>
>
> Is iron oxide superior or inferior to Chrome mask plates in resolution,
> sharp edges etc. Chrome mask plates are little more costly. But are Chrome
> PR coated mask plates in anyway better than PR Iron oxide plates?
>
>
>
> Thanks a lot!
>
>
>
> --
>
> Thanks,
>
> Kamal Yadav
>
> Sr. Process Technologist
>
> IITBNF, EE Department, Annexe,
>
> IIT Bombay, Powai
>
> Mumbai 400076
>
> Internal: 4435
>
> Cell: 7506144798
>
> Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in
>



-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
IITBNF, EE Department, Annexe,
IIT Bombay, Powai
Mumbai 400076
Internal: 4435
Cell: 7506144798
Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in
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