[labnetwork] DRIE tools

[Morrison, Richard H., Jr.]

Hi everyone,

I am in evaluation DRIE vendors, purchasing a tool in the next few weeks. I was wondering if you could contact me by phone or email with recommendations for SPTS, Plasma-Therm and Oxford.

I am wondering about field service support and process support.

Thanks in advance.

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

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