From matthieu.nannini at mcgill.ca Tue Jan 6 16:30:23 2015 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Tue, 6 Jan 2015 21:30:23 +0000 Subject: [labnetwork] Silane quantity Message-ID: Dear colleagues, first of all, happy new year to all of you ! May the force be with you all ! My EHS dept. would like to compare quantity of silane on site in different labs. So, if you can spare 30s to answer those 2 questions then you can go chasing the student that left the evaporator at atmosphere during christmas: - how much silane do you use yearly ? - what is the cylinder volume you have ? cheers Matthieu McGill Nanotools From codreanu at udel.edu Tue Jan 6 16:54:20 2015 From: codreanu at udel.edu (Iulian Codreanu) Date: Tue, 06 Jan 2015 16:54:20 -0500 Subject: [labnetwork] High accuracy temperature probe and transmitter Message-ID: <54AC598C.6070209@udel.edu> Dear Colleagues, I need your help to identify the make/model of a temperature probe and transmitter combination to achieve the following specs for the room that will house the e-beam writer (Vistec EBPG 5200): -Setpoint: 20 C -Stability: +/-0.25 C -Rate of change: <0.1 C/hr The engineer recommends a 0.04 C accuracy but the controls contractor cannot find such a thing. They did find a RTD probe with Class 1/10 DIN accuracy from Omega that meets the spec; however, the accuracy of the transmitter that comes with the RTD is only 0.2 C. The transmitter must be able to provide an analog output to the BAS. Any controls-related words of wisdom would also be much appreciated. Thank you very much. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD NanoFab 163 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu From vamsinittala at gmail.com Wed Jan 7 00:59:06 2015 From: vamsinittala at gmail.com (N P VAMSI KRISHNA) Date: Wed, 7 Jan 2015 11:29:06 +0530 Subject: [labnetwork] Silane quantity In-Reply-To: References: Message-ID: Dear Matthieu, Happy New Year !! At the National Nano Fabrication center, CeNSE, Indian Institute of Science we: how much silane do you use yearly ? Ans : We use 0.4 - 0.5 m^3 of gas. - what is the cylinder volume you have ? Ans : Size of cylinder is 47 ltrs and 7 m^3 of gas. Thanks & best regards, Vamsi On Wed, Jan 7, 2015 at 3:00 AM, Matthieu Nannini, Dr. < matthieu.nannini at mcgill.ca> wrote: > Dear colleagues, > > first of all, happy new year to all of you ! May the force be with you all > ! > > My EHS dept. would like to compare quantity of silane on site in different > labs. So, if you can spare 30s to answer those 2 questions then you can go > chasing the student that left the evaporator at atmosphere during christmas: > - how much silane do you use yearly ? > - what is the cylinder volume you have ? > > cheers > > Matthieu > McGill Nanotools > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- -- Thanks & Best Regards, ----------------- *N.P.Vamsi Krishna* Center for Nano Science and Engineering (CeNSE), Indian Institute of Science(IISc), Bangalore. INDIA-560012 *A bird sitting on the branch of a tree is not afraid of the branch shaking or breaking, because it trusts not the branches but its OWN WINGS.* -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Wed Jan 7 12:04:48 2015 From: schweig at umich.edu (Dennis Schweiger) Date: Wed, 7 Jan 2015 12:04:48 -0500 Subject: [labnetwork] Silane quantity Message-ID: Matthie, good morning. Here at UofMichigan, we have two cylinders on-line, both are about 40 cubic feet. We also have a single spare cylinder in storage. Our current cadence for change-out is about every 8 months. It can vary +/- 2 months with usage. Dennis Schweiger University of Michigan/LNF 734.647.2055 Ofc On Tue, Jan 6, 2015 at 4:30 PM, Matthieu Nannini, Dr. < matthieu.nannini at mcgill.ca> wrote: > Dear colleagues, > > first of all, happy new year to all of you ! May the force be with you all > ! > > My EHS dept. would like to compare quantity of silane on site in different > labs. So, if you can spare 30s to answer those 2 questions then you can go > chasing the student that left the evaporator at atmosphere during christmas: > - how much silane do you use yearly ? > - what is the cylinder volume you have ? > > cheers > > Matthieu > McGill Nanotools > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From PhilH at ee.montana.edu Wed Jan 7 13:01:19 2015 From: PhilH at ee.montana.edu (Himmer, Phil) Date: Wed, 7 Jan 2015 11:01:19 -0700 Subject: [labnetwork] expired process gas Message-ID: <70AB7A57-48C2-43B0-B3FB-8BD9F972252E@ece.montana.edu> Hello, Does anyone have any practical experience using Chlorine and Hydrogen Bromide gas past it?s expiration date? We use the gas for ICP etching of chrome and aluminum. We have small cylinders(air liquide 7-size) of each that still have gas in them but are now years past the expiration date. I have pulled them from the gas cabinet with the plan to replace them but am having difficulty finding a vendor who offers these gasses in these small volumes. We are trying to not use lecture bottles due to disposal considerations. looking forward to suggestions phil Dr. Phillip Himmer Manager Montana Microfabrication Facility Montana State University Bozeman Mt 59717 Office Ph: 406-994-7178 email: philh at ece.montana.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From thejohnnicholson at gmail.com Wed Jan 7 13:07:29 2015 From: thejohnnicholson at gmail.com (John Nicholson) Date: Wed, 7 Jan 2015 13:07:29 -0500 Subject: [labnetwork] Precious metal targets: how to charge for and keep track of use In-Reply-To: <20141222144259.6574229.60907.59158@uwaterloo.ca> References: <20141222144259.6574229.60907.59158@uwaterloo.ca> Message-ID: Matthieu, Since we only use silane for growth of silicon oxide and silicon nitride thin films and aren't concerned about keeping an elevated growth rate, we buy our silane mixed down to 2% in nitrogen. EH&S was much more amenable to this approach. The cylinders are size 80 (~80 ft^3, 2265 ltrs) and in seven years I've ordered 3 of them. Regards, John -- John Nicholson Nanofabrication Laboratories Manager MassNanoTech Nanofabrication Facility Conte Center for Polymer Research, Rm. B111 University of Massachusetts Amherst 120 Governor's Drive Amherst,MA 01003-9305 Phone: 413-545-2772 Fax: 413-577-0165 On Mon, Dec 22, 2014 at 9:42 AM, Vito Logiudice wrote: > Dear Colleagues, > > I would be curious to know your thoughts on the following questions > regarding precious metal sputter targets: > > 1. Who pays for the initial purchase of the target: end user(s) or fab > operations? > > 2. If the fab owns the target how do you keep track of the amount used > per user? > > 3. If the user owns the target, is it installed/removed for each run? If > it is kept in the chamber, how do you keep non-owners of the target from > using it? > > 4. Any suggestions on how to minimize errors/abuses would be appreciated. > > Thank you > Vito > > -- > Vito Logiudice MASc, PEng > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From Jacob.Trevino at asrc.cuny.edu Wed Jan 7 13:50:49 2015 From: Jacob.Trevino at asrc.cuny.edu (Jacob Trevino) Date: Wed, 7 Jan 2015 18:50:49 +0000 Subject: [labnetwork] Printer for Photolithography Masks Message-ID: Happy New Year All, Does anyone have any recommendations for specs on a printer to be used for quick and easy (lower resolution) photolithography masks. These would be printed on transparencies to be used with a blank glass plates and standard contact lithography. Laser jet verses ink jet? Resolution in both techniques these days seems impressively high and sufficient, but maybe there are advantages to one vs the other. Any input would be greatly appreciated. Best regards, Jacob -------------------------------- Jacob Trevino, PhD NanoFabrication Facility Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-9468 Cel. (646) 629-1179 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From roberthamilton at berkeley.edu Wed Jan 7 14:32:45 2015 From: roberthamilton at berkeley.edu (Bob Hamilton) Date: Wed, 07 Jan 2015 11:32:45 -0800 Subject: [labnetwork] Silane quantity In-Reply-To: References: Message-ID: <54AD89DD.6090803@berkeley.edu> Fab Colleagues, I'll add, as a general policy about gas cylinder safety, given modern gas cabinets, toxic gas monitoring systems and orbitally-welded distribution the most likely time for a corrosive, pyrophoric or toxic gas incident to occur is during a cylinder change-out. My statement draws on presentations by Eugene Ngai who is often described as the "silane guru". Retired chemical eningeer Eugene Ngai has done an excellent job of documenting silane incidents and safety practices. Arguing for smaller quantities of dangerous gases is in many cases an argument for less safety. Bob Hamilton -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred On 1/7/2015 9:04 AM, Dennis Schweiger wrote: > Matthie, > > good morning. Here at UofMichigan, we have two cylinders on-line, > both are about 40 cubic feet. We also have a single spare cylinder in > storage. Our current cadence for change-out is about every 8 months. > It can vary +/- 2 months with usage. > > Dennis Schweiger > University of Michigan/LNF > 734.647.2055 Ofc > > On Tue, Jan 6, 2015 at 4:30 PM, Matthieu Nannini, Dr. > > wrote: > > Dear colleagues, > > first of all, happy new year to all of you ! May the force be with > you all ! > > My EHS dept. would like to compare quantity of silane on site in > different labs. So, if you can spare 30s to answer those 2 > questions then you can go chasing the student that left the > evaporator at atmosphere during christmas: > - how much silane do you use yearly ? > - what is the cylinder volume you have ? > > cheers > > Matthieu > McGill Nanotools > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From mne at iseclab.org Wed Jan 7 14:48:34 2015 From: mne at iseclab.org (Markus Kammerstetter) Date: Wed, 07 Jan 2015 20:48:34 +0100 Subject: [labnetwork] Printer for Photolithography Masks In-Reply-To: References: Message-ID: <54AD8D92.3060201@iseclab.org> Dear Jacob, On 01/07/2015 07:50 PM, Jacob Trevino wrote: > Happy New Year All, > > Does anyone have any recommendations for specs on a printer to be > used for quick and easy (lower resolution) photolithography masks. > These would be printed on transparencies to be used with a blank > glass plates and standard contact lithography. Laser jet verses ink > jet? Resolution in both techniques these days seems impressively high > and sufficient, but maybe there are advantages to one vs the other. > Any input would be greatly appreciated. we have made good experiences with inkjet transparencies (for overhead projectors) and an off-the-shelf HP photo inkjet printer. Make sure that you print only with the black ink and be careful that the ink is dry before removing the transparency sheet from the printer. When using it for lithography also ensure that the side with the ink is directly pressed onto the photosensitive coating. We also tried the same with laser printers, but had the problem that the toner film on the transparency was not thick enough causing UV light to pass through which negatively affected the photosensitive coating. The third thing we tried was a commercial (very large) Agfa Advantage laser fotosetter (http://en.wikipedia.org/wiki/Computer_to_plate) that also outputs films. The films it produced had by far the highest quality, but if you don't happen to have one of these huge machines nearby they are out of the question. Markus > > Best regards, Jacob > > > -------------------------------- > Jacob Trevino, PhD NanoFabrication > Facility Director The City University of New York (CUNY) Advanced > Science Research Center (ASRC) Tel. (646) 664-9468 Cel. (646) > 629-1179 Email: > Jacob.Trevino at asrc.cuny.edu Web: > http://asrc.cuny.edu/ > > > > _______________________________________________ labnetwork mailing > list labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- DI. Markus Kammerstetter Head of Hardware Security Lab Vienna University of Technology Institute of Computer Aided Automation Automation Systems Group E183-1 International Secure Systems Lab Treitlstrasse 1-3/4, Floor/E183-1 A-1040 Vienna, Austria Phone: +43 1 58801-183305 Fax: +43 1 58801-18391 DVR: 0005886 PGP Key-Id: 0CD99EE4 From jim at photomaskportal.com Wed Jan 7 15:17:01 2015 From: jim at photomaskportal.com (Jim Carroll) Date: Wed, 7 Jan 2015 14:17:01 -0600 Subject: [labnetwork] Printer for Photolithography Masks Message-ID: Hello Jacob, There has been a lot of consolidation in this space as the big driver for this equipment -- PCB manufacturers -- have migrated to LDI. But there are still numerous companies selling this specialty equipment (photoplotters) such as Dai Nippon Screen , First EIE , Mivatec , Orbotech , and UCamCo . It may take a very high volume to justify the ROI of an in-house printer as you can buy these film masks for very reasonable prices. Good luck! Jim Carroll *PhotomaskPORTAL* *We help you make masks* (415) 448-6275 - On Wed, Jan 7, 2015 at 12:50 PM, Jacob Trevino < Jacob.Trevino at asrc.cuny.edu> wrote: > Happy New Year All, > > Does anyone have any recommendations for specs on a printer to be used > for quick and easy (lower resolution) photolithography masks. These would > be printed on transparencies to be used with a blank glass plates and > standard contact lithography. Laser jet verses ink jet? Resolution in both > techniques these days seems impressively high and sufficient, but maybe > there are advantages to one vs the other. Any input would be greatly > appreciated. > > Best regards, > Jacob > > > -------------------------------- > > *Jacob Trevino, PhD* > NanoFabrication Facility Director > The City University of New York (CUNY) > Advanced Science Research Center (ASRC) > Tel. (646) 664-9468 > > Cel. (646) 629-1179 > > Email: Jacob.Trevino at asrc.cuny.edu > Web: http://asrc.cuny.edu/ > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Wed Jan 7 15:26:03 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Wed, 7 Jan 2015 20:26:03 +0000 Subject: [labnetwork] Silane quantity In-Reply-To: Message-ID: Hi Matthieu, We've got one cylinder of 5% silane (balance N2) (AL size 16, approx 16L internal water volume) and one cylinder of 100% silane (AL size 44, approx 44L internal water volume). The 5% silane is used for PECVD depositions and at our rate of consumption, it usually gets replaced before empty, typically at or near its expiry date. We haven't yet gained any experience with silane consumption but I suspect the cylinder will expire before the entire volume gets consumed. Cheers, Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -----Original Message----- From: "", Matthieu Nannini Date: Tuesday, 6 January, 2015 4:30 PM To: "Labnetwork ?[labnetwork at mtl.mit.edu]?" Subject: [labnetwork] Silane quantity >Dear colleagues, > >first of all, happy new year to all of you ! May the force be with you >all ! > >My EHS dept. would like to compare quantity of silane on site in >different labs. So, if you can spare 30s to answer those 2 questions then >you can go chasing the student that left the evaporator at atmosphere >during christmas: >- how much silane do you use yearly ? >- what is the cylinder volume you have ? > >cheers > >Matthieu >McGill Nanotools >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From Vincent.Luciani at nist.gov Wed Jan 7 15:37:20 2015 From: Vincent.Luciani at nist.gov (Luciani, Vincent) Date: Wed, 7 Jan 2015 20:37:20 +0000 Subject: [labnetwork] Printer for Photolithography Masks In-Reply-To: References: Message-ID: I'm so glad this past experience has finally been called upon, it justifies the time I spent on it years ago. I have made many many masks from transparencies and have found that inkjets set for transparencies with saturation and ink volume set to high make very nice masks with no pinholes. Just give them an extra minute to dry before you touch them. Inkjets work better than laser printers for two reasons. Laser print, even though it looks nice to the eye is filled with very small pinholes which contact lithography will reproduce. Inkjet ink flows to make a solidly opaque feature. Another key difference is that, if you look at a laser jet transparency film. It is foggy. It takes way too much overexposing for this not to leave tiny resist dots (assuming pos. resist). Whereas if you look at an inkjet transparency film, it is clear as glass. Draw a circle around the pattern slightly larger than the wafer or piece so you can line up the mask, cut the transparency down to the size of a clear mask plate, tape it on and expose with the transparency in direct contact. Reverse the image before you print the transparency and you can put the ink in direct contact for maximum resolution. Have fun and good luck! Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino Sent: Wednesday, January 07, 2015 1:51 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Printer for Photolithography Masks Happy New Year All, Does anyone have any recommendations for specs on a printer to be used for quick and easy (lower resolution) photolithography masks. These would be printed on transparencies to be used with a blank glass plates and standard contact lithography. Laser jet verses ink jet? Resolution in both techniques these days seems impressively high and sufficient, but maybe there are advantages to one vs the other. Any input would be greatly appreciated. Best regards, Jacob -------------------------------- Jacob Trevino, PhD NanoFabrication Facility Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-9468 Cel. (646) 629-1179 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From matthieu.nannini at mcgill.ca Wed Jan 7 16:24:09 2015 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Wed, 7 Jan 2015 21:24:09 +0000 Subject: [labnetwork] Silane quantity In-Reply-To: <54AD89DD.6090803@berkeley.edu> References: <54AD89DD.6090803@berkeley.edu> Message-ID: Bob: Fully agreed. Most large spectacular accidents that scare the hell of EHS dept. (at least mine) when they google ? silane safety ? are from large PV solar factories where bottle changes occur much more often that in our academic fabs. As such, danger there might be underestimated. So smaller quantities leading to more bottle changes might very well be less secure. Matthieu Le 2015-01-07 ? 14:32, Bob Hamilton > a ?crit : Fab Colleagues, I'll add, as a general policy about gas cylinder safety, given modern gas cabinets, toxic gas monitoring systems and orbitally-welded distribution the most likely time for a corrosive, pyrophoric or toxic gas incident to occur is during a cylinder change-out. My statement draws on presentations by Eugene Ngai who is often described as the "silane guru". Retired chemical eningeer Eugene Ngai has done an excellent job of documenting silane incidents and safety practices. Arguing for smaller quantities of dangerous gases is in many cases an argument for less safety. Bob Hamilton -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred On 1/7/2015 9:04 AM, Dennis Schweiger wrote: Matthie, good morning. Here at UofMichigan, we have two cylinders on-line, both are about 40 cubic feet. We also have a single spare cylinder in storage. Our current cadence for change-out is about every 8 months. It can vary +/- 2 months with usage. Dennis Schweiger University of Michigan/LNF 734.647.2055 Ofc On Tue, Jan 6, 2015 at 4:30 PM, Matthieu Nannini, Dr. > wrote: Dear colleagues, first of all, happy new year to all of you ! May the force be with you all ! My EHS dept. would like to compare quantity of silane on site in different labs. So, if you can spare 30s to answer those 2 questions then you can go chasing the student that left the evaporator at atmosphere during christmas: - how much silane do you use yearly ? - what is the cylinder volume you have ? cheers Matthieu McGill Nanotools _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From davis.2316 at osu.edu Wed Jan 7 16:38:41 2015 From: davis.2316 at osu.edu (Robert J. Davis) Date: Wed, 7 Jan 2015 16:38:41 -0500 Subject: [labnetwork] Silane quantity In-Reply-To: <54AD89DD.6090803@berkeley.edu> References: <54AD89DD.6090803@berkeley.edu> Message-ID: <54ADA761.9090402@osu.edu> An HTML attachment was scrubbed... URL: From loik.gence at cetuc.puc-rio.br Wed Jan 7 19:45:53 2015 From: loik.gence at cetuc.puc-rio.br (=?utf-8?Q?Lo=C3=AFk_Gence?=) Date: Wed, 7 Jan 2015 19:45:53 -0500 Subject: [labnetwork] Printer for Photolithography Masks In-Reply-To: References: Message-ID: <33907960-881E-4757-818C-EC40423AC2AF@cetuc.puc-rio.br> Dear All, Recently I tried to produce masks for UV litho, with the printers available (only laser) in our lab. Just by looking with a simple optical microscope, one sees the pinholes you are talking about... What are the requirements (resolution,...) of ink-jet printers for enabling the production of masks can you advice any model? what were the smallest features obtained ? I thank you for your comments. Best, Lo?k. Dr. Lo?k Gence LABSEM ? PUC-RIO End Rua Marques de S?o Vicente, 225-G?vea CEP:22451-900 ? Rio de Janeiro, RJ-Brasil (Telefone) +55 (021) 3527-2193 loik.gence at cetuc.puc-rio.br > Le 07/01/2015 ? 15:37, Luciani, Vincent a ?crit : > > I?m so glad this past experience has finally been called upon, it justifies the time I spent on it years ago. I have made many many masks from transparencies and have found that inkjets set for transparencies with saturation and ink volume set to high make very nice masks with no pinholes. Just give them an extra minute to dry before you touch them. > > Inkjets work better than laser printers for two reasons. Laser print, even though it looks nice to the eye is filled with very small pinholes which contact lithography will reproduce. Inkjet ink flows to make a solidly opaque feature. > Another key difference is that, if you look at a laser jet transparency film. It is foggy. It takes way too much overexposing for this not to leave tiny resist dots (assuming pos. resist). Whereas if you look at an inkjet transparency film, it is clear as glass. > > Draw a circle around the pattern slightly larger than the wafer or piece so you can line up the mask, cut the transparency down to the size of a clear mask plate, tape it on and expose with the transparency in direct contact. Reverse the image before you print the transparency and you can put the ink in direct contact for maximum resolution. Have fun and good luck! > > > Vince > > > Vincent K. Luciani > NanoFab Manager > Center for Nanoscale Science and Technology > National Institute of Standards and Technology > 100 Bureau Drive, MS 6201 > Gaithersburg, MD 20899-6200 USA > +1-301-975-2886 > > > > > > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino > Sent: Wednesday, January 07, 2015 1:51 PM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Printer for Photolithography Masks > > Happy New Year All, > > Does anyone have any recommendations for specs on a printer to be used for quick and easy (lower resolution) photolithography masks. These would be printed on transparencies to be used with a blank glass plates and standard contact lithography. Laser jet verses ink jet? Resolution in both techniques these days seems impressively high and sufficient, but maybe there are advantages to one vs the other. Any input would be greatly appreciated. > > Best regards, > Jacob > > > -------------------------------- > Jacob Trevino, PhD > NanoFabrication Facility Director > The City University of New York (CUNY) > Advanced Science Research Center (ASRC) > Tel. (646) 664-9468 > Cel. (646) 629-1179 > Email: Jacob.Trevino at asrc.cuny.edu > Web: http://asrc.cuny.edu/ > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From vozguz at sabanciuniv.edu Thu Jan 8 03:27:39 2015 From: vozguz at sabanciuniv.edu (Volkan Ozguz) Date: Thu, 8 Jan 2015 10:27:39 +0200 Subject: [labnetwork] High accuracy temperature probe and transmitter In-Reply-To: <54AC598C.6070209@udel.edu> References: <54AC598C.6070209@udel.edu> Message-ID: Dear Julian We have a similar equipment (EBPG5000plusES) in our Class 100 clean room. We have a nominal control of 0.25C using Siemens TE controllers. The variation of the relative humidity of the EBL room is on average 45.19RH% ? 0.27RH%, and the variation of the temperature is on average 21.98 C ? 0.12 C(5-hour trend data). The equipment works fine down to 10 nm resolution. Volkan Volkan ?zg?z ?Director? Sabanc? University Nanotechnology Research and Application Center - SUNUM Orhanl?, Tuzla, ?stanbul 34956 Office: 90 216 483 9834 Fax: 90 216 483 9885 Email: vozguz at sabanciuniv.edu Web: http://sunum.sabanciuniv.edu On Tue, Jan 6, 2015 at 11:54 PM, Iulian Codreanu wrote: > Dear Colleagues, > > I need your help to identify the make/model of a temperature probe and > transmitter combination to achieve the following specs for the room that > will house the e-beam writer (Vistec EBPG 5200): > -Setpoint: 20 C > -Stability: +/-0.25 C > -Rate of change: <0.1 C/hr > > The engineer recommends a 0.04 C accuracy but the controls contractor > cannot find such a thing. They did find a RTD probe with Class 1/10 DIN > accuracy from Omega that meets the spec; however, the accuracy of the > transmitter that comes with the RTD is only 0.2 C. > > The transmitter must be able to provide an analog output to the BAS. > > Any controls-related words of wisdom would also be much appreciated. > > Thank you very much. > > Iulian > > -- > iulian Codreanu, Ph.D. > Director of Operations, UD NanoFab > 163 ISE Lab > 221 Academy Street > Newark, DE 19716 > 302-831-2784 > http://udnf.udel.edu > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Thu Jan 8 11:00:13 2015 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Thu, 8 Jan 2015 11:00:13 -0500 Subject: [labnetwork] Silane quantity In-Reply-To: References: <54AD89DD.6090803@berkeley.edu> Message-ID: <54AEA98D.5090008@cns.fas.harvard.edu> Hey All, Here at Harvard CNS, we've got two bottles on line, each in a "normal" 9x51 inch cylinder. One is 100% SiH4, 6x9's purity, 26 lbs when new (not sure the number of cubic feet). The other is 3% SiH4 in Argon, 211 c.f. These have both been on line for the last 7 years or so, and probably have a few more years left on them. We have generally treated expiration dates as more a marketing thing than a technical issue. It would be interesting to hear of any experiences folks have had with gas expiration issues. We have debated going to smaller bottles for these, but the risk balance seems to be favor large bottles and fewer changes. We did reduce our bottle sizes on some other materials due to Homeland Security concerns... Mac Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA02138 617-495-9012 On 1/7/2015 4:24 PM, Matthieu Nannini, Dr. wrote: > Bob: > > Fully agreed. Most large spectacular accidents that scare the hell of > EHS dept. (at least mine) when they google ? silane safety ? are from > large PV solar factories where bottle changes occur much more often > that in our academic fabs. As such, danger there might be > underestimated. So smaller quantities leading to more bottle changes > might very well be less secure. > > > Matthieu > > > Le 2015-01-07 ? 14:32, Bob Hamilton > a ?crit : > >> Fab Colleagues, >> >> I'll add, as a general policy about gas cylinder safety, given modern >> gas cabinets, toxic gas monitoring systems and orbitally-welded >> distribution the most likely time for a corrosive, pyrophoric or >> toxic gas incident to occur is during a cylinder change-out. >> >> My statement draws on presentations by Eugene Ngai who is often >> described as the "silane guru". Retired chemical eningeer Eugene Ngai >> has done an excellent job of documenting silane incidents and safety >> practices. >> >> Arguing for smaller quantities of dangerous gases is in many cases an >> argument for less safety. >> >> Bob Hamilton >> >> -- >> Robert Hamilton >> University of California at Berkeley >> Marvell NanoLab >> Equipment Eng. Mgr. >> Room 520 Sutardja Dai Hall >> Berkeley, CA 94720-1754 >> bob at eecs.berkeley.edu >> Phone: 510-809-8600 >> Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred >> >> >> On 1/7/2015 9:04 AM, Dennis Schweiger wrote: >>> Matthie, >>> >>> good morning. Here at UofMichigan, we have two cylinders on-line, >>> both are about 40 cubic feet. We also have a single spare cylinder >>> in storage. Our current cadence for change-out is about every 8 >>> months. It can vary +/- 2 months with usage. >>> >>> Dennis Schweiger >>> University of Michigan/LNF >>> 734.647.2055 Ofc >>> >>> On Tue, Jan 6, 2015 at 4:30 PM, Matthieu Nannini, Dr. >>> > wrote: >>> >>> Dear colleagues, >>> >>> first of all, happy new year to all of you ! May the force be >>> with you all ! >>> >>> My EHS dept. would like to compare quantity of silane on site in >>> different labs. So, if you can spare 30s to answer those 2 >>> questions then you can go chasing the student that left the >>> evaporator at atmosphere during christmas: >>> - how much silane do you use yearly ? >>> - what is the cylinder volume you have ? >>> >>> cheers >>> >>> Matthieu >>> McGill Nanotools >>> _______________________________________________ >>> labnetwork mailing list >>> labnetwork at mtl.mit.edu >>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >>> >>> >>> >>> >>> >>> _______________________________________________ >>> labnetwork mailing list >>> labnetwork at mtl.mit.edu >>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Thu Jan 8 15:26:26 2015 From: schweig at umich.edu (Dennis Schweiger) Date: Thu, 8 Jan 2015 15:26:26 -0500 Subject: [labnetwork] Silane quantity Message-ID: A couple of items that no one has yet mentioned, or at least I haven't seen them, are; 1) The installation of an RFO (Restrictive Flow Orifice) at the cylinder connection. This is just another level of protection/safety, that minimizes the exposure risk in the event that there is a failure. Especially in the higher cylinder pressure gases, like Silane, Arsine, and Phosphine. These can be either installed at your vendors facility (best practice, but you have to be confident of the size), or can be installed at the time of cylinder installation. 2) The use of DISS cylinder connections for all HPM gases, versus the use of CGA. The DISS, with it's gasket interface, is by far the best choice for any HPM gas. About two years ago we were visited/audited by DHS because of the combination of gases we had on hand. It wasn't the pure gases that put us on the list, but the premixes for the HPM's, the Silane/Phosphine dopants to be exact. There were some additional things we had to do to become "more compliant" (three levels of security on the cylinders, primary key card access, chain of custody documentation, limiting the number of individuals that can access cylinders, etc..), all of them were relatively small changes in our "handling of HPM's, and some we already had in place. DennisSchweiger University of Michigan/LNF 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? On Wed, Jan 7, 2015 at 4:24 PM, Matthieu Nannini, Dr. < matthieu.nannini at mcgill.ca> wrote: > Bob: > > Fully agreed. Most large spectacular accidents that scare the hell of > EHS dept. (at least mine) when they google ? silane safety ? are from large > PV solar factories where bottle changes occur much more often that in our > academic fabs. As such, danger there might be underestimated. So smaller > quantities leading to more bottle changes might very well be less secure. > > > Matthieu > > > Le 2015-01-07 ? 14:32, Bob Hamilton a > ?crit : > > Fab Colleagues, > > I'll add, as a general policy about gas cylinder safety, given modern gas > cabinets, toxic gas monitoring systems and orbitally-welded distribution > the most likely time for a corrosive, pyrophoric or toxic gas incident to > occur is during a cylinder change-out. > > My statement draws on presentations by Eugene Ngai who is often described > as the "silane guru". Retired chemical eningeer Eugene Ngai has done an > excellent job of documenting silane incidents and safety practices. > > Arguing for smaller quantities of dangerous gases is in many cases an > argument for less safety. > > Bob Hamilton > > -- > Robert Hamilton > University of California at Berkeley > Marvell NanoLab > Equipment Eng. Mgr. > Room 520 Sutardja Dai Hall > Berkeley, CA 94720-1754bob at eecs.berkeley.edu > Phone: 510-809-8600 > Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred > > > > On 1/7/2015 9:04 AM, Dennis Schweiger wrote: > > Matthie, > > good morning. Here at UofMichigan, we have two cylinders on-line, both > are about 40 cubic feet. We also have a single spare cylinder in storage. > Our current cadence for change-out is about every 8 months. It can vary > +/- 2 months with usage. > > Dennis Schweiger > University of Michigan/LNF > > 734.647.2055 Ofc > > On Tue, Jan 6, 2015 at 4:30 PM, Matthieu Nannini, Dr. < > matthieu.nannini at mcgill.ca> wrote: > >> Dear colleagues, >> >> first of all, happy new year to all of you ! May the force be with you >> all ! >> >> My EHS dept. would like to compare quantity of silane on site in >> different labs. So, if you can spare 30s to answer those 2 questions then >> you can go chasing the student that left the evaporator at atmosphere >> during christmas: >> - how much silane do you use yearly ? >> - what is the cylinder volume you have ? >> >> cheers >> >> Matthieu >> McGill Nanotools >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > > > > _______________________________________________ > labnetwork mailing listlabnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Thu Jan 8 17:09:59 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Thu, 8 Jan 2015 22:09:59 +0000 Subject: [labnetwork] Fab invoice payment terms & repercussions of non-payment Message-ID: Dear Colleagues, I would appreciate hearing about the policy in place at your respective facilities regarding your fab invoice payment terms. We're working on a formal policy here and I would value our community's input. Specifically, I'd like to hear from you on the following points. Any other relevant insights are of course welcome. 1. At what frequency do you issue your invoices? 2. How long after an invoice has been issued must it be paid? 3. What course of action do you take if the invoice is not paid? 4. Are you ever faced with having to suspend a PI's facility access? 5. If the answer to 4 is yes, what level of authority within your organization is required to enforce this suspension: Facility Manager or Director? Facility Faculty Director? Dean? Other? 6. If you've been through a PI suspension, what was the impact on the students in the PI's research group? Thank you much. Regards, Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From sandrine at umich.edu Fri Jan 9 10:59:25 2015 From: sandrine at umich.edu (Sandrine Martin) Date: Fri, 9 Jan 2015 10:59:25 -0500 Subject: [labnetwork] Fab invoice payment terms & repercussions of non-payment In-Reply-To: References: Message-ID: Hello Vito, Here are answers for us at the Michigan LNF: 1- At what frequency do you issue your invoices? Monthly invoices are issued during the month following usage for our external users. Internal users are billed automatically on the same schedule. 2- How long after an invoice has been issued must it be paid? Invoices are sent "Net 30days" for external users. Money transfers are effective immediately for internal users. 3- What course of action do you take if the invoice is not paid? We review unpaid invoices on a monthly basis and look at them case by case. Some external universities have a payment process that takes more than 30 days after receipt of invoice, so we take that into account. If payment is not completed after 60days, we will typically follow up with the financial admin on record for the user/account, and with the user/PI as needed. The initial follow up is done by our financial staff, and then me (user services director) if needed. 4- Are you ever faced with having to suspend a PI's facility access? Yes... Although in most cases, we try to establish a payment plan that allows the group to continue using the facility while gradually paying off their debt. Most of these cases have been industrial users and if we just cut their access off, we know that chances to recover the balance due become negligible. We have had good success with companies being able to pay off their debt to us and stay in business. 5- If the answer to 4 is yes, what level of authority within your organization is required to enforce this suspension: Facility Manager or Director? Facility Faculty Director? Dean? Other? Decision is made by the Managing Director, with Faculty Director aware of the decision. 6- If you've been through a PI suspension, what was the impact on the students in the PI's research group? In rare cases when we have suspended an academic PI, these were groups that had occasional usage of the facility, and so the impact was typically just a delay for them. Good luck with this! Sandrine On Thu, Jan 8, 2015 at 5:09 PM, Vito Logiudice wrote: > Dear Colleagues, > > I would appreciate hearing about the policy in place at your respective > facilities regarding your fab invoice payment terms. We're working on a > formal policy here and I would value our community's input. > > Specifically, I'd like to hear from you on the following points. Any > other relevant insights are of course welcome. > > 1. At what frequency do you issue your invoices? > 2. How long after an invoice has been issued must it be paid? > 3. What course of action do you take if the invoice is not paid? > 4. Are you ever faced with having to suspend a PI's facility access? > 5. If the answer to 4 is yes, what level of authority within your > organization is required to enforce this suspension: Facility Manager or > Director? Facility Faculty Director? Dean? Other? > 6. If you've been through a PI suspension, what was the impact on the > students in the PI's research group? > > Thank you much. > > Regards, > Vito > -- > Vito Logiudice MASc, PEng > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Sandrine Martin, Ph.D. University of Michigan LNF/NNIN 1239 EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu www.NNIN.org -------------- next part -------------- An HTML attachment was scrubbed... URL: From matthieu.nannini at mcgill.ca Fri Jan 9 13:36:14 2015 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Fri, 9 Jan 2015 18:36:14 +0000 Subject: [labnetwork] Temporary Foreign Worker Message-ID: To Canadian Fab managers, Do you have to apply for a Temporary foreign Work Permit when a service engineer from the US comes to Canada to repair a tool ? Cheers ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ -------------- next part -------------- An HTML attachment was scrubbed... URL: From matthieu.nannini at mcgill.ca Fri Jan 9 13:45:40 2015 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Fri, 9 Jan 2015 18:45:40 +0000 Subject: [labnetwork] Fab invoice payment terms & repercussions of non-payment In-Reply-To: References: Message-ID: Hi Vito see below, Le 2015-01-08 ? 17:09, Vito Logiudice > a ?crit : Dear Colleagues, I would appreciate hearing about the policy in place at your respective facilities regarding your fab invoice payment terms. We're working on a formal policy here and I would value our community's input. Specifically, I'd like to hear from you on the following points. Any other relevant insights are of course welcome. 1. At what frequency do you issue your invoices? monthly 1. How long after an invoice has been issued must it be paid? ASAP for internals NET30day for externals: in our case, the university issues an official invoice 1. What course of action do you take if the invoice is not paid? Internal: since internals are not charged automatically but rather we wait for them to provide an internal fund number, my only weapon is email, email and?also email until they pay. Academic director helps a lot putting pressure on internal bad payers. external: university takes care of late payments. Note: if you are deploying your invoicing system, I strongly suggest you get an automatic payment setup done for internals. Basically you would just have to upload the monthly charges into the university accounting database and the PI will arrange payment. Or better, they provide a fund# in advance and like they do @ MIT (I think) you check every night if the fund has a non zero balance otherwise access to students is suspended right away. Chasing money from internal is really a loss of time for me. 1. Are you ever faced with having to suspend a PI's facility access? no 1. If the answer to 4 is yes, what level of authority within your organization is required to enforce this suspension: Facility Manager or Director? Facility Faculty Director? Dean? Other? 1. If you've been through a PI suspension, what was the impact on the students in the PI's research group? Thank you much. Regards, Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From PhilH at ee.montana.edu Fri Jan 9 15:09:50 2015 From: PhilH at ee.montana.edu (Himmer, Phil) Date: Fri, 9 Jan 2015 13:09:50 -0700 Subject: [labnetwork] expired process gas In-Reply-To: References: <70AB7A57-48C2-43B0-B3FB-8BD9F972252E@ece.montana.edu> Message-ID: <6FB4EB2B-CAAD-40BF-A103-0808A6AEFEB6@ece.montana.edu> Hello Thanks to all for your input about the expired gas. The general consensus is that expiration dates are not relevant for process stability so I?ll continue using what I have. regards phil Dr. Phillip Himmer Manager Montana Microfabrication Facility Montana State University Bozeman Mt 59717 Office Ph: 406-994-7178 email: philh at ece.montana.edu On Jan 7, 2015, at 2:44 PM, Janney, Peter J. > wrote: It's my understanding that the gas doesn't really expire, it's only the certification on the tank. -- Pete Janney -------- Original message -------- From: "Himmer, Phil" Date:01/07/2015 2:14 PM (GMT-05:00) To: labnetwork at mtl.mit.edu Subject: [labnetwork] expired process gas Hello, Does anyone have any practical experience using Chlorine and Hydrogen Bromide gas past it?s expiration date? We use the gas for ICP etching of chrome and aluminum. We have small cylinders(air liquide 7-size) of each that still have gas in them but are now years past the expiration date. I have pulled them from the gas cabinet with the plan to replace them but am having difficulty finding a vendor who offers these gasses in these small volumes. We are trying to not use lecture bottles due to disposal considerations. looking forward to suggestions phil Dr. Phillip Himmer Manager Montana Microfabrication Facility Montana State University Bozeman Mt 59717 Office Ph: 406-994-7178 email: philh at ece.montana.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From e.grondin at usherbrooke.ca Fri Jan 9 17:21:48 2015 From: e.grondin at usherbrooke.ca (Etienne Grondin) Date: Fri, 09 Jan 2015 17:21:48 -0500 Subject: [labnetwork] Temporary Foreign Worker In-Reply-To: References: Message-ID: <54B0547C.5080600@usherbrooke.ca> Dear Matthieu, As far as I remember no. Once, a company asked for an invitation letter to present to the custom officers, but just for convenience. If you are not hiring the guy and paying him, I can't see why you would need this ? Best ____________________________ ?tienne Grondin Lab manager CRN? - www.crn2.ca coordonnateur-crn2 at usherbrooke.ca phone : 819-821-8000 x61941 Le 2015-01-09 13:36, Matthieu Nannini, Dr. a ?crit : > To Canadian Fab managers, > > Do you have to apply for a Temporary foreign Work Permit when a > service engineer from the US comes to Canada to repair a tool ? > > Cheers > > ----------------------------------- > Matthieu Nannini > McGill Nanotools Microfab > Manager > t: 514 398 3310 > c: 514 758 3311 > f: 514 398 8434 > http://mnm.physics.mcgill.ca/ > ------------------------------------ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From hbtusainc at yahoo.com Fri Jan 9 17:57:49 2015 From: hbtusainc at yahoo.com (Mario Portillo) Date: Fri, 9 Jan 2015 22:57:49 +0000 (UTC) Subject: [labnetwork] Fw: Temporary Foreign Worker In-Reply-To: <1502886893.1669717.1420843396837.JavaMail.yahoo@jws10762.mail.gq1.yahoo.com> References: <1502886893.1669717.1420843396837.JavaMail.yahoo@jws10762.mail.gq1.yahoo.com> Message-ID: <1192320427.1668975.1420844269775.JavaMail.yahoo@jws10788.mail.gq1.yahoo.com> Mario A. Portillo Sr. HIGH'born Technology USA Inc.. Semiconductor Equipment Services 8130 Glades Road, #229 Boca Raton, FL 33434 561 470-1975 office 561 504-0244 cell hbtusainc at yahoo.com www.hbtusainc.com ----- Forwarded Message ----- From: Mario Portillo To: "Matthieu Nannini, Dr." Cc: Sent: Friday, January 9, 2015 5:43 PM Subject: Re: [labnetwork] Temporary Foreign Worker Mr. Nannini........I have done extensive service repair/maintenance in the Ottawa and Montreal area, once you are in Canada at the airport you can buy the work permit good for one year, also if one carries his/hers tool box there is also a yearly charge. Make sure the service engineer has a letter from you that states he/she is coming to perform this work. Regards Mario A. Portillo Sr. HIGH'born Technology USA Inc.. Semiconductor Equipment Services 8130 Glades Road, #229 Boca Raton, FL 33434 561 470-1975 office 561 504-0244 cell hbtusainc at yahoo.com www.hbtusainc.com ________________________________ From: "Matthieu Nannini, Dr." To: Labnetwork Sent: Friday, January 9, 2015 1:36 PM Subject: [labnetwork] Temporary Foreign Worker To Canadian Fab managers, Do you have to apply for a Temporary foreign Work Permit when a service engineer from the US comes to Canada to repair a tool ? Cheers ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From kamal.yadav at gmail.com Sat Jan 10 02:47:52 2015 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Sat, 10 Jan 2015 13:17:52 +0530 Subject: [labnetwork] expired process gas In-Reply-To: <6FB4EB2B-CAAD-40BF-A103-0808A6AEFEB6@ece.montana.edu> References: <70AB7A57-48C2-43B0-B3FB-8BD9F972252E@ece.montana.edu> <6FB4EB2B-CAAD-40BF-A103-0808A6AEFEB6@ece.montana.edu> Message-ID: Hi, I was also trying to find the affects of expiration of NH3 and Diborane in Hydrogen and silane. In pure gases it does not matter and you can use after expiration we have used 6 years post expiration for NH3. When we changed new cylinder process did not improve... So it does not matter. In Diborane mixtures or similar I have been told that the ratio is not maintained post expiration.. Thanks, Kamal IITBNF On Jan 10, 2015 3:45 AM, "Himmer, Phil" wrote: > Hello > > > Thanks to all for your input about the expired gas. The general consensus > is that expiration dates are not relevant for process stability so I?ll > continue using what I have. > > regards > phil > > > > > Dr. Phillip Himmer > Manager Montana Microfabrication Facility > Montana State University > Bozeman Mt 59717 > > Office Ph: 406-994-7178 > email: philh at ece.montana.edu > > > > On Jan 7, 2015, at 2:44 PM, Janney, Peter J. wrote: > > It's my understanding that the gas doesn't really expire, it's only the > certification on the tank. > > > -- > Pete Janney > > > -------- Original message -------- > From: "Himmer, Phil" > Date:01/07/2015 2:14 PM (GMT-05:00) > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] expired process gas > > Hello, > > Does anyone have any practical experience using Chlorine and Hydrogen > Bromide gas past it?s expiration date? We use the gas for ICP etching of > chrome and aluminum. > We have small cylinders(air liquide 7-size) of each that still have gas in > them but are now years past the expiration date. I have pulled them from > the gas cabinet with the plan to replace them but am having difficulty > finding a vendor who offers these gasses in these small volumes. We are > trying to not use lecture bottles due to disposal considerations. > > looking forward to suggestions > phil > > > Dr. Phillip Himmer > Manager Montana Microfabrication Facility > Montana State University > Bozeman Mt 59717 > > Office Ph: 406-994-7178 > email: philh at ece.montana.edu > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From john_sweeney at harvard.edu Sat Jan 10 07:49:20 2015 From: john_sweeney at harvard.edu (Sweeney, John) Date: Sat, 10 Jan 2015 12:49:20 +0000 Subject: [labnetwork] expired process gas In-Reply-To: <70AB7A57-48C2-43B0-B3FB-8BD9F972252E@ece.montana.edu> References: <70AB7A57-48C2-43B0-B3FB-8BD9F972252E@ece.montana.edu> Message-ID: <4EB8D5DA-674C-49B8-A860-3195DB73DA8F@harvard.edu> I know Airgas has returnable lecture bottles for chlorine. They are low pressure cylinders. They are called Saf-T-Cylinders. Not sure if they have the same in HBr Sent from my iPhone On Jan 7, 2015, at 2:00 PM, Himmer, Phil > wrote: Hello, Does anyone have any practical experience using Chlorine and Hydrogen Bromide gas past it's expiration date? We use the gas for ICP etching of chrome and aluminum. We have small cylinders(air liquide 7-size) of each that still have gas in them but are now years past the expiration date. I have pulled them from the gas cabinet with the plan to replace them but am having difficulty finding a vendor who offers these gasses in these small volumes. We are trying to not use lecture bottles due to disposal considerations. looking forward to suggestions phil Dr. Phillip Himmer Manager Montana Microfabrication Facility Montana State University Bozeman Mt 59717 Office Ph: 406-994-7178 email: philh at ece.montana.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From thejohnnicholson at gmail.com Sat Jan 10 20:11:04 2015 From: thejohnnicholson at gmail.com (thejohnnicholson at gmail.com) Date: Sat, 10 Jan 2015 20:11:04 -0500 Subject: [labnetwork] Fab invoice payment terms & repercussions of non-payment In-Reply-To: Message-ID: <54b1cda5.b4248c0a.3142.ffff904a@mx.google.com> An HTML attachment was scrubbed... URL: From anava at tauex.tau.ac.il Sun Jan 11 02:05:19 2015 From: anava at tauex.tau.ac.il (Nava Ariel- Sternberg) Date: Sun, 11 Jan 2015 07:05:19 +0000 Subject: [labnetwork] Fab invoice payment terms & repercussions of non-payment In-Reply-To: References: Message-ID: Hi Vito, Here are the answers relevant for TAU, Israel: 1. At what frequency do you issue your invoices? Monthly 1. How long after an invoice has been issued must it be paid? TAU customers - optimally immediately, in practice - until the next invoice received. 1. What course of action do you take if the invoice is not paid? At first we try to help the PIs find a way to pay. Phone conversations, emails etc. Eventually, after a few months of invoices not paid and a building up depth - suspend the PI group's access to the facility. For companies, after a few warnings we suspend their access or stop performing work for them. 1. Are you ever faced with having to suspend a PI's facility access? Yes, once. 1. If the answer to 4 is yes, what level of authority within your organization is required to enforce this suspension: Facility Manager or Director? Facility Faculty Director? Dean? Other? Facility managing director. 1. If you've been through a PI suspension, what was the impact on the students in the PI's research group? This specific PI didn't have students working in the fab, he was ordering process jobs to be performed by the facility staff... Hope this helps. Nava Nava Ariel-Sternberg, Ph.D. Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director MNCF Manager Phone: 03-640-5619 Mobile: 054-9984959 Email: anava at tauex.tau.ac.il From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice Sent: Friday, January 09, 2015 12:10 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Fab invoice payment terms & repercussions of non-payment Dear Colleagues, I would appreciate hearing about the policy in place at your respective facilities regarding your fab invoice payment terms. We're working on a formal policy here and I would value our community's input. Specifically, I'd like to hear from you on the following points. Any other relevant insights are of course welcome. 1. At what frequency do you issue your invoices? 2. How long after an invoice has been issued must it be paid? 3. What course of action do you take if the invoice is not paid? 4. Are you ever faced with having to suspend a PI's facility access? 5. If the answer to 4 is yes, what level of authority within your organization is required to enforce this suspension: Facility Manager or Director? Facility Faculty Director? Dean? Other? 6. If you've been through a PI suspension, what was the impact on the students in the PI's research group? Thank you much. Regards, Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From roberthamilton at berkeley.edu Mon Jan 12 10:53:12 2015 From: roberthamilton at berkeley.edu (Bob Hamilton) Date: Mon, 12 Jan 2015 07:53:12 -0800 Subject: [labnetwork] expired process gas In-Reply-To: References: <70AB7A57-48C2-43B0-B3FB-8BD9F972252E@ece.montana.edu> <6FB4EB2B-CAAD-40BF-A103-0808A6AEFEB6@ece.montana.edu> Message-ID: <54B3EDE8.5060204@berkeley.edu> Colleagues, Following up on Kamal's 1/9 post, in the case of excimer laser gas the expiration date is critical. This is confirmed by higher firing voltages, (bad) required with old excimer mix. As in the case of eximcer gas, acid gases react with steel cylinder walls. I would argue smaller cylinders, with a larger surface-to-volume ratio exacerbate this situation. This, along with the often higher price for smaller cylinders is another argument against "smaller is better (safer)" when discussing reactive gas cylinders. In the case of diborane, its stability vs. time is influenced by its percentage and the diluent it is mixed with. From memory diborane's equilibrium is better in H2 than in SiH4. When, after years of use, plumbing for a diborane delivery line is reviewed, one sees the higher order borane polymers coating surfaces. This is an argument to routine evacuate the gas-stick (valves, mfc, P xducer, etc.) post deposition. Bob Hamilton -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred On 1/9/2015 11:47 PM, Kamal Yadav wrote: > > Hi, > > I was also trying to find the affects of > expiration of NH3 and Diborane in Hydrogen and silane. > > In pure gases it does not matter and you can use after expiration we > have used 6 years post expiration for NH3. When we changed new > cylinder process did not improve... So it does not matter. > > In Diborane mixtures or similar I have been told that the ratio is not > maintained post expiration.. > > Thanks, > Kamal > IITBNF > > On Jan 10, 2015 3:45 AM, "Himmer, Phil" > wrote: > > Hello > > > Thanks to all for your input about the expired gas. The general > consensus is that expiration dates are not relevant for process > stability so I?ll continue using what I have. > > regards > phil > > > > > Dr. Phillip Himmer > Manager Montana Microfabrication Facility > Montana State University > Bozeman Mt 59717 > > Office Ph: 406-994-7178 > email:philh at ece.montana.edu > > > > On Jan 7, 2015, at 2:44 PM, Janney, Peter J. > wrote: > >> It's my understanding that the gas doesn't really expire, it's >> only the certification on the tank. >> >> >> -- >> Pete Janney >> >> >> -------- Original message -------- >> From: "Himmer, Phil" >> Date:01/07/2015 2:14 PM (GMT-05:00) >> To: labnetwork at mtl.mit.edu >> Subject: [labnetwork] expired process gas >> >> Hello, >> >> Does anyone have any practical experience using Chlorine and >> Hydrogen Bromide gas past it?s expiration date? We use the gas >> for ICP etching of chrome and aluminum. >> We have small cylinders(air liquide 7-size) of each that still >> have gas in them but are now years past the expiration date. I >> have pulled them from the gas cabinet with the plan to replace >> them but am having difficulty finding a vendor who offers these >> gasses in these small volumes. We are trying to not use lecture >> bottles due to disposal considerations. >> >> looking forward to suggestions >> phil >> >> >> Dr. Phillip Himmer >> Manager Montana Microfabrication Facility >> Montana State University >> Bozeman Mt 59717 >> >> Office Ph: 406-994-7178 >> email:philh at ece.montana.edu >> >> >> > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Mon Jan 12 10:58:06 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Mon, 12 Jan 2015 15:58:06 +0000 Subject: [labnetwork] Temporary Foreign Worker In-Reply-To: Message-ID: Hi Matthieu, In my experience the need for such a permit will vary. As Mario Portillo pointed out, make sure your guest has a signed letter from you (on company letterhead with your contact info including cell phone #) which indicates the purpose of the trip and the nature of his/her visit including the original PO # under which the system was purchased. If the customs agent insists on a temporary permit, your guest will be able to purchase one immediately at that point. I believe the cost is about $150 for a 6 month permit if I remember correctly, less for shorter duration permits. Cheers, Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca From: "", Matthieu Nannini > Date: Friday, 9 January, 2015 1:36 PM To: Labnetwork > Subject: [labnetwork] Temporary Foreign Worker To Canadian Fab managers, Do you have to apply for a Temporary foreign Work Permit when a service engineer from the US comes to Canada to repair a tool ? Cheers ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrweaver at purdue.edu Mon Jan 12 14:12:43 2015 From: jrweaver at purdue.edu (Weaver, John R) Date: Mon, 12 Jan 2015 19:12:43 +0000 Subject: [labnetwork] expired process gas In-Reply-To: <54B3EDE8.5060204@berkeley.edu> References: <70AB7A57-48C2-43B0-B3FB-8BD9F972252E@ece.montana.edu> <6FB4EB2B-CAAD-40BF-A103-0808A6AEFEB6@ece.montana.edu> <54B3EDE8.5060204@berkeley.edu> Message-ID: <6A848421F695C54A9210C1A873C96AC2250F943F@WPVEXCMBX04.purdue.lcl> Just to add a little anecdotal information into the mix, we had an interesting experience (interesting but not surprising) on moving a laser system from the old building - with old, not so careful plumbing - to the BNC. We found that the laser gases lasted an order of magnitude longer with the new plumbing. The new system had very low moisture and oxygen intrusion, which supports Bob's comment about the interaction with the steel cylinder walls. As we all have experienced, those interactions are exacerbated by the presence of moisture (and to a lesser extent oxygen). We therefore believe that the reason that the gas had a dramatically longer lifetime is that it maintained its purity longer. This, then, calls into question the lifetime generalities given by the gas suppliers. John John R. Weaver Strategic Facilities Officer Birck Nanotechnology Center 1205 West State Street West Lafayette IN 47907 (765) 494-5494 jrweaver at purdue.edu nano.purdue.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bob Hamilton Sent: Monday, January 12, 2015 10:53 AM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] expired process gas Colleagues, Following up on Kamal's 1/9 post, in the case of excimer laser gas the expiration date is critical. This is confirmed by higher firing voltages, (bad) required with old excimer mix. As in the case of eximcer gas, acid gases react with steel cylinder walls. I would argue smaller cylinders, with a larger surface-to-volume ratio exacerbate this situation. This, along with the often higher price for smaller cylinders is another argument against "smaller is better (safer)" when discussing reactive gas cylinders. In the case of diborane, its stability vs. time is influenced by its percentage and the diluent it is mixed with. From memory diborane's equilibrium is better in H2 than in SiH4. When, after years of use, plumbing for a diborane delivery line is reviewed, one sees the higher order borane polymers coating surfaces. This is an argument to routine evacuate the gas-stick (valves, mfc, P xducer, etc.) post deposition. Bob Hamilton -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred On 1/9/2015 11:47 PM, Kamal Yadav wrote: Hi, I was also trying to find the affects of expiration of NH3 and Diborane in Hydrogen and silane. In pure gases it does not matter and you can use after expiration we have used 6 years post expiration for NH3. When we changed new cylinder process did not improve... So it does not matter. In Diborane mixtures or similar I have been told that the ratio is not maintained post expiration.. Thanks, Kamal IITBNF On Jan 10, 2015 3:45 AM, "Himmer, Phil" > wrote: Hello Thanks to all for your input about the expired gas. The general consensus is that expiration dates are not relevant for process stability so I'll continue using what I have. regards phil Dr. Phillip Himmer Manager Montana Microfabrication Facility Montana State University Bozeman Mt 59717 Office Ph: 406-994-7178 email: philh at ece.montana.edu On Jan 7, 2015, at 2:44 PM, Janney, Peter J. > wrote: It's my understanding that the gas doesn't really expire, it's only the certification on the tank. -- Pete Janney -------- Original message -------- From: "Himmer, Phil" Date:01/07/2015 2:14 PM (GMT-05:00) To: labnetwork at mtl.mit.edu Subject: [labnetwork] expired process gas Hello, Does anyone have any practical experience using Chlorine and Hydrogen Bromide gas past it's expiration date? We use the gas for ICP etching of chrome and aluminum. We have small cylinders(air liquide 7-size) of each that still have gas in them but are now years past the expiration date. I have pulled them from the gas cabinet with the plan to replace them but am having difficulty finding a vendor who offers these gasses in these small volumes. We are trying to not use lecture bottles due to disposal considerations. looking forward to suggestions phil Dr. Phillip Himmer Manager Montana Microfabrication Facility Montana State University Bozeman Mt 59717 Office Ph: 406-994-7178 email: philh at ece.montana.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 (Emergencies only poor cell phone service in lab)e-mail preferred -------------- next part -------------- An HTML attachment was scrubbed... URL: From khbeis at uw.edu Mon Jan 12 16:56:05 2015 From: khbeis at uw.edu (Michael Khbeis) Date: Mon, 12 Jan 2015 13:56:05 -0800 Subject: [labnetwork] expired process gas In-Reply-To: <70AB7A57-48C2-43B0-B3FB-8BD9F972252E@ece.montana.edu> References: <70AB7A57-48C2-43B0-B3FB-8BD9F972252E@ece.montana.edu> Message-ID: <1AF13BF6-9A29-44A8-BCE1-9E0BDB5F2D00@uw.edu> Phil, I did have a very bad experience with using HBr several years (~3 yrs) after its expiration date. Eventually moisture ingress created corrosion of the inside of my coaxial lines and the entire line needed to be replaced. Best of luck, Dr. Michael Khbeis Associate Director, Washington Nanofabrication Facility (WNF) National Nanotechnology Infrastructure Network (NNIN) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (F) 206.221.1681 (C) 443.254.5192 khbeis at uw.edu www.wnf.washington.edu/ > On Jan 7, 2015, at 10:01 AM, Himmer, Phil wrote: > > Hello, > > Does anyone have any practical experience using Chlorine and Hydrogen Bromide gas past it?s expiration date? We use the gas for ICP etching of chrome and aluminum. > We have small cylinders(air liquide 7-size) of each that still have gas in them but are now years past the expiration date. I have pulled them from the gas cabinet with the plan to replace them but am having difficulty finding a vendor who offers these gasses in these small volumes. We are trying to not use lecture bottles due to disposal considerations. > > looking forward to suggestions > phil > > > Dr. Phillip Himmer > Manager Montana Microfabrication Facility > Montana State University > Bozeman Mt 59717 > > Office Ph: 406-994-7178 > email: philh at ece.montana.edu > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From nclay at seas.upenn.edu Mon Jan 12 17:56:53 2015 From: nclay at seas.upenn.edu (Noah Clay) Date: Mon, 12 Jan 2015 17:56:53 -0500 Subject: [labnetwork] Lithography Area Manager At Penn. Message-ID: <7347C09E-D3A0-4A5A-AA9B-D080D6B39A0C@seas.upenn.edu> Dear All, I am looking to hire a Lithography Area Manager at the University of Pennsylvania. Here is a brief description of responsibilities: ******* The responsibilities of this position are to serve as the Lithography Area Manager in the Quattrone Nanofabrication Facility, organize and direct the day-to-day operations in lithography at the Singh Center for Nanotechnology. The individual implements strategic plans and applied research to complete daily operations. This position assists in the support, development and leadership of Penn staff members in order to provide high quality lithography services to potential and existing customers. This position implements activities that actively showcase and demonstrate capabilities while hosting potential customers. She/he conducts and assists with the development of long- and short-range goals for lithography services at the Singh Center for Nanotechnology. In parallel, the incumbent runs a core curriculum in lithography to train users to master best practices and methods in lithography while instilling core competencies using technologies such as computational lithography for both direct write and optical lithography which involves intensity/absorbed energy image analysis and 2D/3D resist modeling; advanced data preparation; proximity effect correction; process characterization; and process optimization. She/he instructs, mentors and is a domain expert, assisting users with project integration, process development and process integration. The incumbent will also lead research and development efforts in a small team focused on direct write lithography (electron beam and laser lithography), proximity lithography, nanoimprint and computational lithography to develop and characterize new fabrication processes that directly supports users and Penn resources. She/he will interface with internal and external customers along side staff colleagues to provide program specific yet comprehensive solutions. The responsibilities also include training and support on a variety of Penn lithography equipment. The incumbent screens requests, review proposals, provides rapid technical response via phone and email during normal business hours, and ensures that the results of user work at Penn are properly invoiced, reported and documented. An overarching goal is instructing and assisting users in project and process integration runs in parallel to managing business endeavors to ensure user growth. She/he supports, guides and mentors other Penn technical staff in process integration, assuring that steps done by staff or users on individual disparate instruments all work together properly to deliver the desired final result. ******* If you are aware of anyone interested in this position, please refer them to me, Noah Clay (nclay at upenn.edu ). Best regards, Noah Clay -------------- next part -------------- An HTML attachment was scrubbed... URL: From gcc27 at georgetown.edu Tue Jan 13 09:30:35 2015 From: gcc27 at georgetown.edu (G. Casey Cahill) Date: Tue, 13 Jan 2015 09:30:35 -0500 Subject: [labnetwork] Ductless Fume Hoods Message-ID: Dear All, I am inquiring to see if any other universities are using ductless fume hoods for orgo teaching? I know that data suggest that some filtration technologies are effective for a wide range of chemicals; e.g., aliphatic hydrocarbons, aromatics, esters, aldehydes, ketones, etc. We're considering purchase here for the first time and would be interested in any experiences with these. Thanks very much in advance! Kind regards, Casey Cahill -------------- next part -------------- An HTML attachment was scrubbed... URL: From bill at eecs.berkeley.edu Tue Jan 13 17:15:05 2015 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Tue, 13 Jan 2015 14:15:05 -0800 Subject: [labnetwork] Seismic Sensors Message-ID: <54B598E9.10904@eecs.berkeley.edu> Lab Network, Many of you have toxic gas monitoring systems. Many of these systems have an integrated seismic sensor. The sensor is usually a small box mounted on the wall and located in the basement of your building. I recall at a previous UGIM meeting a colleague telling me an amusing story of placing a wrench on top of the sensor box, activating the switch, unintentionally activating the toxic gas alarm system and evacuating the entire building. I made a mental note... but alas, forgot to post a sign on my own sensor. A visiting campus facility engineer hung a tool bag on our sensor box yesterday. This test of our laboratory seismic sensor was a rousing success. There is now a large sign posted adjacent to our seismic sensor box. Caution Vibration Sensitive Do Not Touch etc etc I encourage you to consider the same. Happy New Year ! Bill Flounders UC Berkeley Marvell NanoLab From lej at danchip.dtu.dk Wed Jan 14 04:25:26 2015 From: lej at danchip.dtu.dk (Leif Johansen) Date: Wed, 14 Jan 2015 09:25:26 +0000 Subject: [labnetwork] Seismic Sensors In-Reply-To: <54B598E9.10904@eecs.berkeley.edu> References: <54B598E9.10904@eecs.berkeley.edu> Message-ID: <879AEF5002D70747B136D02BC86A9C983B999E@ait-pex02mbx05.win.dtu.dk> Hello Bill, That's quite an interesting story indeed. Denmark has a very low seismic activity, but at present we have a seismograph temporarily installed in the cleanroom to monitor construction works going on right next to the cleanroom building. The only alarms we have had so far are from service engineers trying to hammer cleanroom floor tiles back in place with a tool. We are absolute novices in seismic measurements. Are there any general recommendations on where to put a seismic sensor? Best regards, Leif DTU Danchip Technical University of Denmark -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bill Flounders Sent: 13. januar 2015 23:15 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Seismic Sensors Lab Network, Many of you have toxic gas monitoring systems. Many of these systems have an integrated seismic sensor. The sensor is usually a small box mounted on the wall and located in the basement of your building. I recall at a previous UGIM meeting a colleague telling me an amusing story of placing a wrench on top of the sensor box, activating the switch, unintentionally activating the toxic gas alarm system and evacuating the entire building. I made a mental note... but alas, forgot to post a sign on my own sensor. A visiting campus facility engineer hung a tool bag on our sensor box yesterday. This test of our laboratory seismic sensor was a rousing success. There is now a large sign posted adjacent to our seismic sensor box. Caution Vibration Sensitive Do Not Touch etc etc I encourage you to consider the same. Happy New Year ! Bill Flounders UC Berkeley Marvell NanoLab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From vito.logiudice at uwaterloo.ca Wed Jan 21 12:23:04 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Wed, 21 Jan 2015 17:23:04 +0000 Subject: [labnetwork] Heat trace issues on DCS gas lines Message-ID: Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: DCS.png Type: image/png Size: 459813 bytes Desc: DCS.png URL: From spaolini at cns.fas.harvard.edu Wed Jan 21 16:13:42 2015 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Wed, 21 Jan 2015 21:13:42 +0000 Subject: [labnetwork] Heat trace issues on DCS gas lines In-Reply-To: References: Message-ID: Hmmm, Not knowing the watt/foot rating of the trace, my first guess would be that it got too hot under all that insulation. I have never heard of straight vs. spiral advantages or disadvantages but I would be willing to bet that at the fastener locations, the trace would have cool spots since the heat is being transferred to the tubing more efficiently. I quit using heat trace for low vapor pressure materials into vacuum systems years ago, I'm assuming your DCS is being used for LPCVD and that would be a perfect candidate for running the gas at sub-atmospheric pressures to lower the boiling point. I use this method with all my prone-to-liquify-high-vapor pressure gases and have never experienced a "flooded" MFC since doing so. Best of luck Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice Sent: Wednesday, January 21, 2015 12:23 PM To: Labnetwork Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From tbritton at criticalsystemsinc.com Wed Jan 21 17:02:36 2015 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Wed, 21 Jan 2015 22:02:36 +0000 Subject: [labnetwork] Heat trace issues on DCS gas lines In-Reply-To: References: Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2E01277ADC@P3PWEX2MB010.ex2.secureserver.net> http://www.obcorp.com/products/tubing-bundle/tracepak-electric.aspx Hi Vito, More than likely the way they wrapped the tracing didn't cause any issues. I've represented Thermon, Raychem, Obrien and a host of others and for heat tracing, the way they did it is correct. The key to good heat transfer is continual contact with the tube, followed by the aluminum tape and then insulation. I've attached the link to Obrien's Tube Trace bundles so you can see how this is made in a production environment. The trace lays right on the tube in a continual fashion. I've also attached Thermon's installation guide. 1 strip of heat trace unless you're doing pipe, and then 2. They don't suggest spiraling as you get different distances between the spirals and the heat isn't even. I spoke to our Operations Manager, Troy at our shop as he was the Gas Systems' manager at ON Semi for 14 years, and his response was: Based on my experience, I would say they had a soft spot on the insulation of the heat trace itself upon installation. I would highly doubt that the tape caused the issue. I've never installed it with the method of spiral winding around the tubing. We always used fiberglass tape and tape it every 3-5 feet depending on the configuration of the tubing run. The key is inspecting the heat trace for damage during installation if there is any place that it has a scuff or rub on the insulation surrounding the conductor wires and that comes in contact with the tube it will fail. Over the years I have seen issues where a cable was scuffed, like Troy comments on, as well as incorrect termination of the tracing. I've also seen times where the tracing has an issue when it was manufactured and it shorts out. Gotta love maintenance issues! Have a great day Vito and good luck! Tom Tom Britton Director of Sales Critical Systems, Inc. Direct: 208-890-1417 Office: 877-572-5515 www.CriticalSystemsInc.com [logo for email signature png] From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice Sent: Wednesday, January 21, 2015 10:23 AM To: Labnetwork Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9501 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Thermon Heat Tracing Installation Guide.pdf Type: application/pdf Size: 455821 bytes Desc: Thermon Heat Tracing Installation Guide.pdf URL: From myoung6 at nd.edu Wed Jan 21 17:06:35 2015 From: myoung6 at nd.edu (Mike Young) Date: Wed, 21 Jan 2015 17:06:35 -0500 Subject: [labnetwork] Heat trace issues on DCS gas lines In-Reply-To: References: Message-ID: Hi Vito. I would posture that failure might have been more likely *in between* the fastening tape locations, where the ?heat sinking? of the tape is the worst, and hence the temperature of the heat tape was the highest, yeah? The spiral wrap would have left the tape in intimate contact with the tube over the tape's entire length, thereby minimizing hot spots... ?Mike > On Jan 21, 2015, at 12:23 PM, Vito Logiudice wrote: > > Dear Colleagues, > > We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. > > The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. > > I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? > > Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. > > Regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 637-6302 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Wed Jan 21 17:24:47 2015 From: shott at stanford.edu (John Shott) Date: Wed, 21 Jan 2015 14:24:47 -0800 Subject: [labnetwork] Heat trace issues on DCS gas lines In-Reply-To: References: Message-ID: <54C0272F.3090902@stanford.edu> Vito: While I do not profess to be Mr. DCS ... and, some would argue, being in California I have no right to weigh in on the topic ... I will share what we have done on our DCS lines. As a qualifier, however, our DCS runs in single-walled, rather than double-contained, tubing. We have two DCS lines and each is about 400 feet in length and nearly half of that runs outdoors between our gas bunker and the main lab. We don't run spiral wrap ... we simply run our heat trace along the length of the line. We do, however, use sticky aluminum tape along virtually the entire length of the line to try to improve the thermal conductivity between the heat trace and the actual gas line. While we believe that is reasonably effective from a thermal standpoint, it's a real mess to undo if you ever remove the line. In our case, the line/heat trace/tape assembly is encased by inexpensive black foam insulation normally used on 1/2" plumbing lines. Here is a low-quality image of what we have with the foam pulled away: Good luck, John On 1/21/2015 9:23 AM, Vito Logiudice wrote: > Dear Colleagues, > > We are experiencing an issue with the heat trace on our Dichlorosilane > gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS > outer containment line which is itself heat traced with a single > strand of heat trace that runs the entire length of the coax assembly. > The 120 foot line is insulated as shown in the attached photo. A > portion of the heat-trace appears to have failed prematurely (it was > installed less than one year ago) and we are wondering if the method > of installation may be the cause. > > The heat trace was not installed in a spiral fashion around the outer > 1/2" tube. Rather it was installed in a straight fashion along its > entire length with "heat trace fastening tape" located every four feet > or so. A member of my team has suggested that such a straight rather > than spiral installation may have caused hot spots (at the fastening > locations) which may have in turn caused the failure. > > I would appreciate hearing from the community on this point: Are the > heat traces around your low pressure gas lines spiral-wound around the > lines or are they installed in a straight fashion and somehow fastened > along the entire length? > > Other insights/suggestions on the proper heat tracing of gas lines by > experts in the field as well as comments on possible causes of > premature heat trace failure are very much welcome and appreciated. > Thank you. > > Regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 500276 bytes Desc: not available URL: From shott at stanford.edu Thu Jan 22 13:17:52 2015 From: shott at stanford.edu (John Shott) Date: Thu, 22 Jan 2015 10:17:52 -0800 Subject: [labnetwork] Heat trace issues on DCS gas lines In-Reply-To: References: Message-ID: <54C13ED0.7020600@stanford.edu> Steve: Thanks for your comments about use of sub-atmospheric regulators to avoid the problems associated with heat tape on low vapor-pressure gases. As I've never used these regulators, I've got a few followup questions. In particular, my guess is that you are balancing the pressure set point so that you have a low enough line pressure that you don't have liquification problems but high enough pressure that you maintain enough differential pressure across your MFCs. Correct? In LPCVD systems, what is your recommended pressure set point for DCS and BCl3? Do you have an anhydrous HF vapor etch tool and, if so, do you also use a sub-atmospheric regulator on it? Do you find that some MFCs are better than others when they have less than 15 PSI differential pressure across them? If you have a considerable line length between your gas cylinder and the tool, would you place your sub-atmospheric regulator closer to the tool or closer to the cylinder? Does that choice depend on the magnitude of temperature variation at the cylinder and/or along the line, assuming that temperature stability is pretty good at the tool ... but maybe not so good along the line or at the cylinder? If you had a VMB between your cylinder and multiple tools, would you use a single sub-atmospheric regulator upstream of the VMB or individual regulators on each tool? Do you expect that this approach would work equally well for a higher pressure process like epi where deposition pressures might be as high as 100 Torr (~2 PSIA)? I, for one, wish I didn't have so much experience with heat tape ... and thank you for your insights on an alternative approach. Thanks again, John On 1/21/2015 1:13 PM, Paolini, Steven wrote: > > Hmmm, > > Not knowing the watt/foot rating of the trace, my first guess would be > that it got too hot under all that insulation. I have never heard of > straight vs. spiral advantages or disadvantages but I would be willing > to bet that at the fastener locations, the trace would have /cool > /spots since the heat is being transferred to the tubing more > efficiently. > > I quit using heat trace for low vapor pressure materials into vacuum > systems years ago, I?m assuming your DCS is being used for LPCVD and > that would be a perfect candidate for running the gas at > sub-atmospheric pressures to lower the boiling point. I use this > method with all my prone-to-liquify-high-vapor pressure gases and have > never experienced a ?flooded? MFC since doing so. > > Best of luck > > Steve Paolini > > Equipment Dood > > Harvard University Center for Nanoscale Systems > > *From:*labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Vito Logiudice > *Sent:* Wednesday, January 21, 2015 12:23 PM > *To:* Labnetwork > *Subject:* [labnetwork] Heat trace issues on DCS gas lines > > Dear Colleagues, > > We are experiencing an issue with the heat trace on our Dichlorosilane > gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS > outer containment line which is itself heat traced with a single > strand of heat trace that runs the entire length of the coax assembly. > The 120 foot line is insulated as shown in the attached photo. A > portion of the heat-trace appears to have failed prematurely (it was > installed less than one year ago) and we are wondering if the method > of installation may be the cause. > > The heat trace was not installed in a spiral fashion around the outer > 1/2" tube. Rather it was installed in a straight fashion along its > entire length with "heat trace fastening tape" located every four feet > or so. A member of my team has suggested that such a straight rather > than spiral installation may have caused hot spots (at the fastening > locations) which may have in turn caused the failure. > > I would appreciate hearing from the community on this point: Are the > heat traces around your low pressure gas lines spiral-wound around the > lines or are they installed in a straight fashion and somehow fastened > along the entire length? > > Other insights/suggestions on the proper heat tracing of gas lines by > experts in the field as well as comments on possible causes of > premature heat trace failure are very much welcome and appreciated. > Thank you. > > Regards, > > Vito > > -- > > Vito Logiudice P.Eng. > > Director of Operations, Quantum NanoFab > > University of Waterloo > > Lazaridis QNC 1207 > > 200 University Avenue West > > Waterloo, ON Canada N2L 3G1 > > Tel.: (519) 888-4567 ext. 38703 > > Email: vito.logiudice at uwaterloo.ca > > Website: https://fab.qnc.uwaterloo.ca > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Thu Jan 22 14:24:46 2015 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Thu, 22 Jan 2015 19:24:46 +0000 Subject: [labnetwork] Heat trace issues on DCS gas lines In-Reply-To: <54C13ED0.7020600@stanford.edu> References: <54C13ED0.7020600@stanford.edu> Message-ID: John, I'll try to answer your questions to the best of my knowledge in a different color below. From: John Shott [mailto:shott at stanford.edu] Sent: Thursday, January 22, 2015 1:18 PM To: Paolini, Steven; Vito Logiudice; Labnetwork Subject: Re: [labnetwork] Heat trace issues on DCS gas lines Steve: Thanks for your comments about use of sub-atmospheric regulators to avoid the problems associated with heat tape on low vapor-pressure gases. As I've never used these regulators, I've got a few followup questions. In particular, my guess is that you are balancing the pressure set point so that you have a low enough line pressure that you don't have liquification problems but high enough pressure that you maintain enough differential pressure across your MFCs. Correct? Correct. In LPCVD systems, what is your recommended pressure set point for DCS and BCl3? Do you have an anhydrous HF vapor etch tool and, if so, do you also use a sub-atmospheric regulator on it? Tricky question to answer, it is dependent of your flow requirements. My rule of thumb is to call for full flow in the MFC and slowly back of the regulator until the flow begins to suffer. I then add about 10%, this works for me. I do not have any experience with an HF vapor etch tool yet. Do you find that some MFCs are better than others when they have less than 15 PSI differential pressure across them? Brand wise- no. Orientation-yes! Vertical MFC installations have a constant convective flow across the sample tube that helps minimize "flooding". You must specify orientation when ordering them. Some of the newfangled digital units claim to not be orientation sensitive. I refrain from mentioning brand names since the moderator of this awesome site has asked us not to. If you have a considerable line length between your gas cylinder and the tool, would you place your sub-atmospheric regulator closer to the tool or closer to the cylinder? Does that choice depend on the magnitude of temperature variation at the cylinder and/or along the line, assuming that temperature stability is pretty good at the tool ... but maybe not so good along the line or at the cylinder? Given the choice, I would place the regulator right at the gas source to keep the material in gaseous form for the entire circuit. Liquid condensing in any part of the circuit will have a behavior effect on components like regulators. Better to keep gas a gas. If you had a VMB between your cylinder and multiple tools, would you use a single sub-atmospheric regulator upstream of the VMB or individual regulators on each tool? I presently run a sub-atmospheric both at the gas cabinet and VMB. The gas cabinet target pressure is 0 PSI and we reduce it down to around 5"hg at the VMB for both gases. Please keep in mind that a non sub-atmospheric regulator MIGHT appear to control at first but you will have problems with it hanging up and choking the delivery from time to time. Do you expect that this approach would work equally well for a higher pressure process like epi where deposition pressures might be as high as 100 Torr (~2 PSIA)? I would use the same approach to setting the regulator on these higher pressure processes. There will, undoubtedly, be a needed increase in pressure to provide the differential to obtain higher flows at a higher pressure. I, for one, wish I didn't have so much experience with heat tape ... and thank you for your insights on an alternative approach. Thanks again, John I'm always happy to help, Steve On 1/21/2015 1:13 PM, Paolini, Steven wrote: Hmmm, Not knowing the watt/foot rating of the trace, my first guess would be that it got too hot under all that insulation. I have never heard of straight vs. spiral advantages or disadvantages but I would be willing to bet that at the fastener locations, the trace would have cool spots since the heat is being transferred to the tubing more efficiently. I quit using heat trace for low vapor pressure materials into vacuum systems years ago, I'm assuming your DCS is being used for LPCVD and that would be a perfect candidate for running the gas at sub-atmospheric pressures to lower the boiling point. I use this method with all my prone-to-liquify-high-vapor pressure gases and have never experienced a "flooded" MFC since doing so. Best of luck Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice Sent: Wednesday, January 21, 2015 12:23 PM To: Labnetwork Subject: [labnetwork] Heat trace issues on DCS gas lines Dear Colleagues, We are experiencing an issue with the heat trace on our Dichlorosilane gas line. The all-welded 1/4" SS line is encapsulated with a 1/2" SS outer containment line which is itself heat traced with a single strand of heat trace that runs the entire length of the coax assembly. The 120 foot line is insulated as shown in the attached photo. A portion of the heat-trace appears to have failed prematurely (it was installed less than one year ago) and we are wondering if the method of installation may be the cause. The heat trace was not installed in a spiral fashion around the outer 1/2" tube. Rather it was installed in a straight fashion along its entire length with "heat trace fastening tape" located every four feet or so. A member of my team has suggested that such a straight rather than spiral installation may have caused hot spots (at the fastening locations) which may have in turn caused the failure. I would appreciate hearing from the community on this point: Are the heat traces around your low pressure gas lines spiral-wound around the lines or are they installed in a straight fashion and somehow fastened along the entire length? Other insights/suggestions on the proper heat tracing of gas lines by experts in the field as well as comments on possible causes of premature heat trace failure are very much welcome and appreciated. Thank you. Regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From mfcchung at ust.hk Wed Jan 28 04:51:17 2015 From: mfcchung at ust.hk (CHUNG Wing Leong) Date: Wed, 28 Jan 2015 17:51:17 +0800 (HKT) Subject: [labnetwork] Heidelberg DWL2000 owner References: In-Reply-To: Message-ID: <57168.143.89.199.196.1422438677.squirrel@sqmail.ust.hk> Dear all, My name is Jeff Chung, Engineer of NFF of HKUST. We are writing a proposal to acquire a Heidelberg DWL2000 for mask making. Is there any tool owner here? and can give me some recommendation of this machine or other alternative? Best Regards Jeff Chung From julia.aebersold at louisville.edu Wed Jan 28 11:55:37 2015 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Wed, 28 Jan 2015 16:55:37 +0000 Subject: [labnetwork] Heidelberg DWL2000 owner In-Reply-To: <57168.143.89.199.196.1422438677.squirrel@sqmail.ust.hk> References: In-Reply-To: <57168.143.89.199.196.1422438677.squirrel@sqmail.ust.hk> Message-ID: I can't speak for that specific model of Heidelberg, but we have been very happy with our DWL-66FS with greyscale capabilities. Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY? 40292 502-852-1572 http://louisville.edu/micronano/ -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of CHUNG Wing Leong Sent: Wednesday, January 28, 2015 4:51 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Heidelberg DWL2000 owner Dear all, My name is Jeff Chung, Engineer of NFF of HKUST. We are writing a proposal to acquire a Heidelberg DWL2000 for mask making. Is there any tool owner here? and can give me some recommendation of this machine or other alternative? Best Regards Jeff Chung _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From bordonaro at cnf.cornell.edu Wed Jan 28 16:50:33 2015 From: bordonaro at cnf.cornell.edu (Garry J. Bordonaro) Date: Wed, 28 Jan 2015 16:50:33 -0500 Subject: [labnetwork] Heidelberg DWL2000 owner In-Reply-To: <57168.143.89.199.196.1422438677.squirrel@sqmail.ust.hk> References: In-Reply-To: <57168.143.89.199.196.1422438677.squirrel@sqmail.ust.hk> Message-ID: <08bb01d03b44$723b05b0$56b11110$@cnf.cornell.edu> We have owned one of these tools for almost 5 years. We have also owned a DWL66, and a DWL66fs, the latter of which we still have. The 2000 has been giving us very good results. We have seen a few problems with the solid state laser with age, but it generally has been a good tool. We can write any mask we need in ~2 hours max using the nominal 0.7um write head. There are iso/dense bias issues, particularly with smaller features, but that is expected. Precision and accuracy of the stage are very good. Garry J. Bordonaro Microlithographic Engineer Cornell NanoScale Facility 250 Duffield Hall Cornell University Ithaca, NY 14853-2700 (607) 254-4936 bordonaro at cnf.cornell.edu http://www.cnf.cornell.edu/ -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of CHUNG Wing Leong Sent: Wednesday, January 28, 2015 4:51 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Heidelberg DWL2000 owner Dear all, My name is Jeff Chung, Engineer of NFF of HKUST. We are writing a proposal to acquire a Heidelberg DWL2000 for mask making. Is there any tool owner here? and can give me some recommendation of this machine or other alternative? Best Regards Jeff Chung _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From anava at tauex.tau.ac.il Thu Jan 29 00:49:09 2015 From: anava at tauex.tau.ac.il (Nava Ariel- Sternberg) Date: Thu, 29 Jan 2015 05:49:09 +0000 Subject: [labnetwork] Heidelberg DWL2000 owner In-Reply-To: References: In-Reply-To: <57168.143.89.199.196.1422438677.squirrel@sqmail.ust.hk> Message-ID: Same here. We have a DWL-66fs. Works great fabrication litho masks up to ~1um resolution. We don't have much experience with the greyscale litho. Nava Ariel-Sternberg, Ph.D. Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director MNCF Manager Phone: 03-640-5619 Mobile: 054-9984959 Email: anava at tauex.tau.ac.il -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu Sent: Wednesday, January 28, 2015 6:56 PM To: CHUNG Wing Leong; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Heidelberg DWL2000 owner I can't speak for that specific model of Heidelberg, but we have been very happy with our DWL-66FS with greyscale capabilities. Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY? 40292 502-852-1572 http://louisville.edu/micronano/ -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of CHUNG Wing Leong Sent: Wednesday, January 28, 2015 4:51 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Heidelberg DWL2000 owner Dear all, My name is Jeff Chung, Engineer of NFF of HKUST. We are writing a proposal to acquire a Heidelberg DWL2000 for mask making. Is there any tool owner here? and can give me some recommendation of this machine or other alternative? Best Regards Jeff Chung _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From mfcchung at ust.hk Thu Jan 29 01:34:10 2015 From: mfcchung at ust.hk (CHUNG Wing Leong) Date: Thu, 29 Jan 2015 14:34:10 +0800 (HKT) Subject: [labnetwork] Heidelberg DWL2000 owner In-Reply-To: <08bb01d03b44$723b05b0$56b11110$@cnf.cornell.edu> References: In-Reply-To: <57168.143.89.199.196.1422438677.squirrel@sqmail.ust.hk> <08bb01d03b44$723b05b0$56b11110$@cnf.cornell.edu> Message-ID: <52801.143.89.199.196.1422513250.squirrel@sqmail.ust.hk> Dear all labnetwork member, Your input is very useful for me to select a right tool. Cheers Chung > We have owned one of these tools for almost 5 years. We have also owned a > DWL66, and a DWL66fs, the latter of which we still have. The 2000 has > been > giving us very good results. We have seen a few problems with the solid > state laser with age, but it generally has been a good tool. We can write > any mask we need in ~2 hours max using the nominal 0.7um write head. > There > are iso/dense bias issues, particularly with smaller features, but that is > expected. Precision and accuracy of the stage are very good. > > > > Garry J. Bordonaro > Microlithographic Engineer > Cornell NanoScale Facility > 250 Duffield Hall > Cornell University > Ithaca, NY 14853-2700 > (607) 254-4936 > bordonaro at cnf.cornell.edu > http://www.cnf.cornell.edu/ > > > > > > -----Original Message----- > From: labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] > On Behalf Of CHUNG Wing Leong > Sent: Wednesday, January 28, 2015 4:51 AM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Heidelberg DWL2000 owner > > Dear all, > > My name is Jeff Chung, Engineer of NFF of HKUST. We are writing a proposal > to acquire a Heidelberg DWL2000 for mask making. Is there any tool owner > here? and can give me some recommendation of this machine or other > alternative? > > Best Regards > Jeff Chung > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > From mheiden at engr.ucr.edu Thu Jan 29 15:22:31 2015 From: mheiden at engr.ucr.edu (Mark Heiden) Date: Thu, 29 Jan 2015 20:22:31 +0000 Subject: [labnetwork] Job Opportunity in Riverside Ca. Message-ID: The University of California Riverside Center for Nanoscale Science and Engineering is seeking a very experienced Semiconductor Process engineer for full a time position in the CNSE NanoFabrication Cleanroom. The job posting will remain open until filled. For complete details, please visit this link: https://irecruitportal.ucr.edu/irecruit/!Controller?action=jobs_webui.show_page&page=jobs_detail&requisition_id=201402104243&profile_id=&module=jobs Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 -------------- next part -------------- An HTML attachment was scrubbed... URL: From kamal.yadav at gmail.com Fri Jan 30 05:01:33 2015 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Fri, 30 Jan 2015 15:31:33 +0530 Subject: [labnetwork] Conductivity Standard Solution Message-ID: Dear All, What is the best way to calibrate conductivity meters for DI water resistivity periodic monitoring. Standard known conductivity solutions are available but which one is good and stable for this range of measurement. [18 MOhm-cm or ~ 0.06 uS/cm] Thanks a lot! -- Thanks, Kamal Yadav Sr. Process Technologist IITBNF, EE Department, Annexe, IIT Bombay, Powai Mumbai 400076 Internal: 4435 Cell: 7506144798 Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Fri Jan 30 11:12:41 2015 From: shott at stanford.edu (John Shott) Date: Fri, 30 Jan 2015 08:12:41 -0800 Subject: [labnetwork] Conductivity Standard Solution In-Reply-To: References: Message-ID: <54CBAD79.1000204@stanford.edu> Kamal: Let me start by saying that I've never actually tried to calibrate meters of this type. Why? Because it is not easy. Here is a good reference article from over 15 years ago that describes the process in great detail including the fact that the standard conductivity solutions only go down to about 5 uS/cm ... which isn't very close to the 0.06 uS/cm you are hoping to measure. They also talk about separating the whole calibration process into the steps of calibrating the meter itself (easy), the temperature probe (reasonably easy), and the "cell constant" of the probe itself (hard). A number of you will recognize that the author of this paper works for a company that makes and sells resistivity probes and monitors. This is not intended to be an endorsement of that, or any other, company ... but, I think, indicates that detailed calibration of DI resistivity monitoring systems is typically found primarily in the companies that make and sell such instrumentation rather than by the folks that use such instrumentation. Their solution for high-precision calibration was to measure UHP water over a range of temperatures as a means of determining and/or calibrating the cell constant. If you read this article, however, you will conclude that this is not a procedure for the faint of heart. In recirculating DI systems, I believe that it is more common to have continuous resistivity monitoring on both the supply side and return side of the system. In our case, we typically see supply and return resistivity readings about 17.7 MOhm-cm or higher ... but that rarely, if ever, read the theoretically expected 18.2 MOhm-cm. In fact, it is not uncommon to see a return resistivity that is slightly higher than the supply-side resistivity ... which would seem unlikely. Then, on an occasional basis ... probably not as frequently as we should ... we (well, a third-party analytical laboratory) collect samples and have them measured for particle content, bacteria grown, total oxidizable carbon, dissolved silica, and a 30-element mass-spec analysis for metal levels in the ppt range that is commonly used for DI systems. In short, there are lots of things that CAN be wrong with DI water that are not seen by even an accurate resistivity measurement. In other words, as long as our resistivity readings are on the order of 17.5 MOhm-cm or above on both supply and return lines, I, for one, don't worry about the resistivity aspects of our water. In fact, earlier this week, I was comparing these DI analytical test results with another frequent contributor to this forum from the Bay Area institution with the longest history as a university laboratory in this field. Finally, when you say "periodic monitoring" do you mean that you have a probe in a continuously recirculating loop and you want to look at the resistivity of that periodically ... or that you occasionally collect a sample of water and are trying to measure it's resistivity? If it is the latter, that can be tricky: when exposed to air, DI water absorbs CO2 which forms carbonic acid that can cause your resistivity numbers to degrade. My guess is some of the folks that run newer labs than ours will have more details about the way that they monitor the DI water in these newer operations. Let me know if you have any additional questions. John On 1/30/2015 2:01 AM, Kamal Yadav wrote: > Dear All, > > What is the best way to calibrate conductivity meters for DI water > resistivity periodic monitoring. > > Standard known conductivity solutions are available but which one is > good and stable for this range of measurement. [18 MOhm-cm or ~ 0.06 > uS/cm] > > Thanks a lot! > > -- > Thanks, > Kamal Yadav > Sr. Process Technologist > IITBNF, EE Department, Annexe, > IIT Bombay, Powai > Mumbai 400076 > Internal: 4435 > Cell: 7506144798 > Email: kamal.yadav at gmail.com , > kamalyadav at ee.iitb.ac.in > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: thornton-upw-resistivity-measurement.pdf Type: application/x-msword Size: 153278 bytes Desc: not available URL: From michael.peters at mnsu.edu Fri Jan 30 12:59:16 2015 From: michael.peters at mnsu.edu (Peters, Michael S) Date: Fri, 30 Jan 2015 17:59:16 +0000 Subject: [labnetwork] Positive Photo Resist Message-ID: Our EE cleanroom is looking to reduce the amount of photoresist we have to dispose of due to its age. We have, over the past 10-12 year, been receiving a generous donation of HPR-504 positive photoresist, developer and stripper all in gallon containers. The developer and stripper are used in its donated quantities, however, the photoresist we use less than a pint in a 2 year span. This leaves us over ? of a gallon to dispose of as chemical waste which negates the benefit of the donation. Our EHS would like us to see it there is a way to get the resist in smaller quantity to reduce the cost of disposal. I would appreciate a source where I could get smaller amounts of the photo resist. Thanks Mike Peters Engineering Specialist Sr. Radiation Safety Officer Minnesota State University, Mankato 141 Trafton Science Center North Mankato, Minnesota 56001 Telephone: 507-389-1026 Email: michael.peters at mnsu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at seas.upenn.edu Fri Jan 30 13:33:06 2015 From: nclay at seas.upenn.edu (Noah Clay) Date: Fri, 30 Jan 2015 13:33:06 -0500 Subject: [labnetwork] Conductivity Standard Solution In-Reply-To: <54CBAD79.1000204@stanford.edu> References: <54CBAD79.1000204@stanford.edu> Message-ID: Kamal, Personally, I would send out your meter(s) for calibration by an expert. That said, here?s a reference from a company in the Boston area (google search: "calibrate ultrapure water conductivity meter?) http://www.snowpure.com/docs/thornton-upw-resistivity-measurement.pdf Apparently, one can purchase standards from NIST for this (as stated in the above link), but I?m not sure if they have a standard in your range. Here?s another link from the same search/query: http://www.thermoscientific.com/content/dam/tfs/ATG/EPD/EPD%20Documents/Application%20&%20Technical%20Notes/Water%20Analysis%20Instruments%20and%20Supplies/Lab%20Electrodes%20and%20Sensors/Ion%20Selective%20Electrodes/AN-PUREWATER-E%20RevA-HIGHRES.pdf Best of luck, Noah Clay Director, Quattrone Nanofabrication Facility School of Engineering & Applied Sciences University of Pennsylvania nano.upenn.edu > On Jan 30, 2015, at 11:12 AM, John Shott wrote: > > Kamal: > > Let me start by saying that I've never actually tried to calibrate meters of this type. Why? Because it is not easy. Here is a good reference article from over 15 years ago that describes the process in great detail including the fact that the standard conductivity solutions only go down to about 5 uS/cm ... which isn't very close to the 0.06 uS/cm you are hoping to measure. They also talk about separating the whole calibration process into the steps of calibrating the meter itself (easy), the temperature probe (reasonably easy), and the "cell constant" of the probe itself (hard). A number of you will recognize that the author of this paper works for a company that makes and sells resistivity probes and monitors. This is not intended to be an endorsement of that, or any other, company ... but, I think, indicates that detailed calibration of DI resistivity monitoring systems is typically found primarily in the companies that make and sell such instrumentation rather than by the folks that use such instrumentation. > > Their solution for high-precision calibration was to measure UHP water over a range of temperatures as a means of determining and/or calibrating the cell constant. If you read this article, however, you will conclude that this is not a procedure for the faint of heart. > > In recirculating DI systems, I believe that it is more common to have continuous resistivity monitoring on both the supply side and return side of the system. In our case, we typically see supply and return resistivity readings about 17.7 MOhm-cm or higher ... but that rarely, if ever, read the theoretically expected 18.2 MOhm-cm. In fact, it is not uncommon to see a return resistivity that is slightly higher than the supply-side resistivity ... which would seem unlikely. > > Then, on an occasional basis ... probably not as frequently as we should ... we (well, a third-party analytical laboratory) collect samples and have them measured for particle content, bacteria grown, total oxidizable carbon, dissolved silica, and a 30-element mass-spec analysis for metal levels in the ppt range that is commonly used for DI systems. In short, there are lots of things that CAN be wrong with DI water that are not seen by even an accurate resistivity measurement. In other words, as long as our resistivity readings are on the order of 17.5 MOhm-cm or above on both supply and return lines, I, for one, don't worry about the resistivity aspects of our water. In fact, earlier this week, I was comparing these DI analytical test results with another frequent contributor to this forum from the Bay Area institution with the longest history as a university laboratory in this field. > > Finally, when you say "periodic monitoring" do you mean that you have a probe in a continuously recirculating loop and you want to look at the resistivity of that periodically ... or that you occasionally collect a sample of water and are trying to measure it's resistivity? If it is the latter, that can be tricky: when exposed to air, DI water absorbs CO2 which forms carbonic acid that can cause your resistivity numbers to degrade. > > My guess is some of the folks that run newer labs than ours will have more details about the way that they monitor the DI water in these newer operations. > > Let me know if you have any additional questions. > > John > > On 1/30/2015 2:01 AM, Kamal Yadav wrote: >> Dear All, >> >> What is the best way to calibrate conductivity meters for DI water resistivity periodic monitoring. >> >> Standard known conductivity solutions are available but which one is good and stable for this range of measurement. [18 MOhm-cm or ~ 0.06 uS/cm] >> >> Thanks a lot! >> >> -- >> Thanks, >> Kamal Yadav >> Sr. Process Technologist >> IITBNF, EE Department, Annexe, >> IIT Bombay, Powai >> Mumbai 400076 >> Internal: 4435 >> Cell: 7506144798 >> Email: kamal.yadav at gmail.com , kamalyadav at ee.iitb.ac.in >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From rsavage at calpoly.edu Fri Jan 30 16:33:59 2015 From: rsavage at calpoly.edu (Richard N. Savage) Date: Fri, 30 Jan 2015 13:33:59 -0800 (PST) Subject: [labnetwork] Positive Photo Resist In-Reply-To: References: Message-ID: <1297142171.4997040.1422653639106.JavaMail.zimbra@calpoly.edu> Try Micro Chem in MA. Richard N. Savage, Ph.D. Director Graduate Education Professor & Chair Biomedical Engineering Cal Poly State University Bldg 52-E47 1 Grand Avenue San Luis Obispo, CA 93407 805-756-6519 rsavage at calpoly.edu ----- Original Message ----- From: "Michael S Peters" To: "labnetwork at mtl.mit.edu" Sent: Friday, January 30, 2015 9:59:16 AM Subject: [labnetwork] Positive Photo Resist Our EE cleanroom is looking to reduce the amount of photoresist we have to dispose of due to its age. We have, over the past 10-12 year, been receiving a generous donation of HPR-504 positive photoresist, developer and stripper all in gallon containers. The developer and stripper are used in its donated quantities, however, the photoresist we use less than a pint in a 2 year span. This leaves us over ? of a gallon to dispose of as chemical waste which negates the benefit of the donation. Our EHS would like us to see it there is a way to get the resist in smaller quantity to reduce the cost of disposal. I would appreciate a source where I could get smaller amounts of the photo resist. Thanks Mike Peters Engineering Specialist Sr. Radiation Safety Officer Minnesota State University, Mankato 141 Trafton Science Center North Mankato, Minnesota 56001 Telephone: 507-389-1026 Email: michael.peters at mnsu.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From neil.peters at sjsu.edu Fri Jan 30 18:04:44 2015 From: neil.peters at sjsu.edu (Neil Peters) Date: Fri, 30 Jan 2015 15:04:44 -0800 Subject: [labnetwork] Positive Photo Resist In-Reply-To: References: Message-ID: We purchase 1 liter containers of AZ5214E positive resist from Integrated Micro Materials. A one liter container is $685. Developer is $84 per case, 4x4L. Plus ~$150 for shipping. The contact information is as follows: Integrated Micro Materials 8141 Gateway Dr, Ste 240 Argyle, TX 76226 888-632-0997 Phone 940-228-2234 Fax Customerservice at imicromaterials.com Best Regards Neil On Jan 30, 2015 1:11 PM, "Peters, Michael S" wrote: > Our EE cleanroom is looking to reduce the amount of photoresist we have > to dispose of due to its age. We have, over the past 10-12 year, been > receiving a generous donation of HPR-504 positive photoresist, developer > and stripper all in gallon containers. The developer and stripper are used > in its donated quantities, however, the photoresist we use less than a pint > in a 2 year span. This leaves us over ? of a gallon to dispose of as > chemical waste which negates the benefit of the donation. Our EHS would > like us to see it there is a way to get the resist in smaller quantity to > reduce the cost of disposal. > > > > I would appreciate a source where I could get smaller amounts of the photo > resist. > > > > Thanks > > > > Mike Peters > > Engineering Specialist Sr. > > Radiation Safety Officer > > > > Minnesota State University, Mankato > > 141 Trafton Science Center North > > Mankato, Minnesota 56001 > > > > Telephone: *507-389-1026 <507-389-1026>* > > Email: * michael.peters at mnsu.edu * > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From carsen at stanford.edu Sat Jan 31 13:01:39 2015 From: carsen at stanford.edu (Carsen Kline) Date: Sat, 31 Jan 2015 10:01:39 -0800 (PST) Subject: [labnetwork] Contamination control in PVD systems In-Reply-To: <90069614.15740707.1422726767061.JavaMail.zimbra@stanford.edu> Message-ID: <1302126497.15747884.1422727299551.JavaMail.zimbra@stanford.edu> Hello all, We're looking to expand our PVD capabilities and we're curious to know how other labs control contamination as it relates to safety, process, and equipment condition. Can anyone share your general philosophy or policies on approaching contamination control in PVD systems? (For example, categorizing systems based on allowed contaminants, or having multiple levels of controlled access to specific tools, etc.) Thanks for your input, I'm looking forward to your responses. Carsen Carsen Kline Stanford Nanofabrication Facility http://snf.stanford.edu carsen at stanford.edu From fouad.karouta at anu.edu.au Sat Jan 31 18:48:10 2015 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Sat, 31 Jan 2015 23:48:10 +0000 Subject: [labnetwork] Contamination control in PVD systems In-Reply-To: <1302126497.15747884.1422727299551.JavaMail.zimbra@stanford.edu> References: <90069614.15740707.1422726767061.JavaMail.zimbra@stanford.edu> <1302126497.15747884.1422727299551.JavaMail.zimbra@stanford.edu> Message-ID: Dear Carsen, Here at the Australian National University, Canberra, we do have an open access e-beam evaporator reserved for metals and we started with: Au, Pt, Ni, Ti, Ge, Al, Cr and later we added Pd, Mo, Hf and Nb. So far we haven't heard from our users any negative feedback about deterioration/contamination of contacts. We do not allow oxides nor metals like Zn, Cu, Te, Sn etc. where we believe these metals have a more serious contamination risk. In our facility we do have a sputter system w/o materials restriction and it is used for metals to oxides, nitrides offering more than 50 materials/targets. We do know from users that some contamination is found at level clearly below 1%. Hope this helps a bit and I am curious to learn from others their experience. Cheers, Fouad Karouta ********************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics and Engineering Australian National University ACT 0200, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Carsen Kline Sent: Sunday, 1 February 2015 5:02 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Contamination control in PVD systems Hello all, We're looking to expand our PVD capabilities and we're curious to know how other labs control contamination as it relates to safety, process, and equipment condition. Can anyone share your general philosophy or policies on approaching contamination control in PVD systems? (For example, categorizing systems based on allowed contaminants, or having multiple levels of controlled access to specific tools, etc.) Thanks for your input, I'm looking forward to your responses. Carsen Carsen Kline Stanford Nanofabrication Facility http://snf.stanford.edu carsen at stanford.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork