[labnetwork] Heidelberg DWL2000 owner

[CHUNG Wing Leong]

Dear all labnetwork member,

Your input is very useful for me to select a right tool.

Cheers
Chung


> We have owned one of these tools for almost 5 years.  We have also owned a
> DWL66, and a DWL66fs, the latter of which we still have.  The 2000 has
> been
> giving us very good results.  We have seen a few problems with the solid
> state laser with age, but it generally has been a good tool.  We can write
> any mask we need in ~2 hours max using the nominal 0.7um write head.
> There
> are iso/dense bias issues, particularly with smaller features, but that is
> expected.  Precision and accuracy of the stage are very good.
>
>
>
> Garry J. Bordonaro
> Microlithographic Engineer
> Cornell NanoScale Facility
> 250 Duffield Hall
> Cornell University
> Ithaca, NY  14853-2700
> (607) 254-4936
> bordonaro at cnf.cornell.edu
> http://www.cnf.cornell.edu/
>
>
>
>
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu
> [mailto:labnetwork-bounces at mtl.mit.edu]
> On Behalf Of CHUNG Wing Leong
> Sent: Wednesday, January 28, 2015 4:51 AM
> To: labnetwork at mtl.mit.edu
> Subject: [labnetwork] Heidelberg DWL2000 owner
>
> Dear all,
>
> My name is Jeff Chung, Engineer of NFF of HKUST. We are writing a proposal
> to acquire a Heidelberg DWL2000 for mask making. Is there any tool owner
> here? and can give me some recommendation of this machine or other
> alternative?
>
> Best Regards
> Jeff Chung
>
>
>
>
>
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>