From nannini.matthieu at gmail.com  Fri Jul  3 19:04:23 2015
From: nannini.matthieu at gmail.com (Matthieu Nannini)
Date: Sat, 4 Jul 2015 01:04:23 +0200
Subject: [labnetwork] McGill Nanotools Looking for New manager
Message-ID: <CAOpdsST1BtXaRJnF=vAT+yW_NHMjtcr9Zp+vKu0CMTehJRV4XA@mail.gmail.com>

Dear collegues,

The MCGill Nanotools microfab is looking for a new manager. Please
distribute this offer to your networks. Thanks a lot.

https://www.mcgill.ca/hr/posting/5/microfab-facility-supervisor

Matthieu Nannini
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From kamal.yadav at gmail.com  Sat Jul  4 04:46:18 2015
From: kamal.yadav at gmail.com (Kamal Yadav)
Date: Sat, 4 Jul 2015 14:16:18 +0530
Subject: [labnetwork] Oxidation Furnaces Time/Temperature
Message-ID: <CAOfoCyhv88Kku4PF6_a3gQVXN_Q=AEHBJpMtdc+Ny=NLm9g1-Q@mail.gmail.com>

Dear All,

We have furnaces [Atmospheric pressure and LPCVD] from Ultech Inc., Korea.

We have 4" size substrate size quartz tubes furnaces. After temperature
ramp up to desired temperature, oxygen flow starts and we have done upto a
minimum time of 5 min, after which oxygen flow stops and nitrogen flows for
sometime and furnace gets cooled down to 400/500 before we unload.

We believe there must be some minimum time the oxygen should be flown to
achieve reliable and repeatable oxide thickness as it will take some time
for oxygen to stabilize in the furnace.

As thin oxides are required, we are also considering changing the
temperature to 750 Deg C, to achieve minimum thickness. Both temperature
and time could be optimized in order to achieve minimum thickness.

Which, Temperature or time or both, is best to change and how far one can
go, is my question to achieve minimum thickness.

Thanks a lot!

-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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From vito.logiudice at uwaterloo.ca  Mon Jul  6 16:53:37 2015
From: vito.logiudice at uwaterloo.ca (Vito Logiudice)
Date: Mon, 6 Jul 2015 20:53:37 +0000
Subject: [labnetwork] Oxidation Furnaces Time/Temperature
In-Reply-To: <CAOfoCyhv88Kku4PF6_a3gQVXN_Q=AEHBJpMtdc+Ny=NLm9g1-Q@mail.gmail.com>
References: <CAOfoCyhv88Kku4PF6_a3gQVXN_Q=AEHBJpMtdc+Ny=NLm9g1-Q@mail.gmail.com>
Message-ID: <D1C06038.5E6D1%vlogiudi@connect.uwaterloo.ca>

Dear Kamal,

I would stay away from oxidation times that are too short. Five minutes seems extremely short to me; I would probably keep it to a minimum of 15-20 minutes, if not more.

You might be able to improve repeatability in the achievement of ?minimum thickness? oxides by diluting your O2 with UHP N2. For instance, you can try flowing a ratio of 1:1 O2 to N2 during the oxidation step and seeing how that compares with the oxide thickness achieved with 100% O2. You can then try other ratios depending on the results achieved. For each given condition, I would run at least 2-3 test runs to confirm stability/repeatability at that specific condition before experimenting with another condition (remember to only change one furnace variable at a time for each test run). Good luck.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca


From: Kamal Yadav <kamal.yadav at gmail.com<mailto:kamal.yadav at gmail.com>>
Date: Saturday, July 4, 2015 at 4:46 AM
To: "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Oxidation Furnaces Time/Temperature

Dear All,

We have furnaces [Atmospheric pressure and LPCVD] from Ultech Inc., Korea.

We have 4" size substrate size quartz tubes furnaces. After temperature ramp up to desired temperature, oxygen flow starts and we have done upto a minimum time of 5 min, after which oxygen flow stops and nitrogen flows for sometime and furnace gets cooled down to 400/500 before we unload.

We believe there must be some minimum time the oxygen should be flown to achieve reliable and repeatable oxide thickness as it will take some time for oxygen to stabilize in the furnace.

As thin oxides are required, we are also considering changing the temperature to 750 Deg C, to achieve minimum thickness. Both temperature and time could be optimized in order to achieve minimum thickness.

Which, Temperature or time or both, is best to change and how far one can go, is my question to achieve minimum thickness.

Thanks a lot!

--
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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From kamal.yadav at gmail.com  Tue Jul  7 03:45:37 2015
From: kamal.yadav at gmail.com (Kamal Yadav)
Date: Tue, 7 Jul 2015 13:15:37 +0530
Subject: [labnetwork] RTP Oxidation
Message-ID: <CAOfoCygzPCyzEGKaNV59pS2WP_nzOPgBA1dU+Z1-VafQWFA3Wg@mail.gmail.com>

Dear All,

Query regarding RTP:

1. We have AnnealSys RTP: ASOne
2. We need to clean pyrometer windows regularly to maintain the equality in
the actual temperature and set temperature. After around one month, and
after heavy usage, the temperature drift around 80 Deg C. Pyrometer
measures 80 Deg less than actual [randomply measured by TC]. When we clean
the windows this difference is around 2 degrees.

Queries:
1. Is cleaning pyrometer windows a standard practice in your systems as
well?
2. Our 30 sec base line recipe, at 900 deg C, excluding ramp and ramp down
steps. This recipe does not yield consistent thickness and ranges from 7 to
14 nm thickness. At this thickness other factors such as native oxide
thickness variation, ambiance also plays critical role. Any comments would
really help.

Thanks a lot!

-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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From vito.logiudice at uwaterloo.ca  Tue Jul  7 12:29:20 2015
From: vito.logiudice at uwaterloo.ca (Vito Logiudice)
Date: Tue, 7 Jul 2015 16:29:20 +0000
Subject: [labnetwork] Cost of infrastructure operating and maintenance costs
Message-ID: <D1C17699.5E838%vlogiudi@connect.uwaterloo.ca>

Dear Colleagues,

I would like to come up with a reasonably accurate estimate of the infrastructure operating and maintenance costs associated with our 6750 sq.ft. cleanroom. If you've completed such a study in the past I would greatly appreciate hearing from you in regards to the methodology you used at the time and any references or rules of thumb that may have been useful to you.

Using the same terminology used by our own Plant Operations group, the following are the variables I would like to include in my study.  Some of these seem vague to me personally but I suspect this is likely due to the fact that this type of analysis falls beyond my scope of experience.

-Building
-Central Plant
-Mechanical distribution
-Electrical Distribution
-Grounds
-Electricity
-Heat
-Water

In addition, I would also like to hear from the community as to whether their respective administration expects their fab operating revenues to cover these particular infrastructure costs. Specifically, I?d like to know whether you are charged for these types of costs by your internal plant operations or finance groups.

Thank you very much for any insights.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca

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From DWolff at protononsite.com  Tue Jul  7 16:02:28 2015
From: DWolff at protononsite.com (Wolff, Dave at Proton OnSite)
Date: Tue, 7 Jul 2015 16:02:28 -0400
Subject: [labnetwork] Cost of infrastructure operating and maintenance
	costs
In-Reply-To: <D1C17699.5E838%vlogiudi@connect.uwaterloo.ca>
References: <D1C17699.5E838%vlogiudi@connect.uwaterloo.ca>
Message-ID: <7C13DF677CDCCC4F8B6EABFBAF56F825BD4F81@proex1.protononsite.local>

Might you want to include the cost of "utility" gases such as nitrogen
and hydrogen ?

 

Dave Wolff - Regional Manager - Proton OnSite - 860-604-3282 -
dave.wolff at protononsite.com <mailto:dave.wolff at protononsite.com>   

 

From: labnetwork-bounces at mtl.mit.edu
[mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice
Sent: Tuesday, July 07, 2015 12:29 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cost of infrastructure operating and maintenance
costs

 

Dear Colleagues,

 

I would like to come up with a reasonably accurate estimate of the
infrastructure operating and maintenance costs associated with our 6750
sq.ft. cleanroom. If you've completed such a study in the past I would
greatly appreciate hearing from you in regards to the methodology you
used at the time and any references or rules of thumb that may have been
useful to you. 

 

Using the same terminology used by our own Plant Operations group, the
following are the variables I would like to include in my study.  Some
of these seem vague to me personally but I suspect this is likely due to
the fact that this type of analysis falls beyond my scope of experience.


 

-Building 

-Central Plant 

-Mechanical distribution 

-Electrical Distribution

-Grounds

-Electricity

-Heat

-Water

 

In addition, I would also like to hear from the community as to whether
their respective administration expects their fab operating revenues to
cover these particular infrastructure costs. Specifically, I'd like to
know whether you are charged for these types of costs by your internal
plant operations or finance groups.

 

Thank you very much for any insights.

 

Best regards,

Vito

--

Vito Logiudice  P.Eng.

Director of Operations, Quantum NanoFab

University of Waterloo

Lazaridis QNC 1207

200 University Avenue West

Waterloo, ON           Canada N2L 3G1

Tel.: (519) 888-4567  ext. 38703

Email: vito.logiudice at uwaterloo.ca

Website: https://fab.qnc.uwaterloo.ca

 

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From vito.logiudice at uwaterloo.ca  Tue Jul  7 17:02:46 2015
From: vito.logiudice at uwaterloo.ca (Vito Logiudice)
Date: Tue, 7 Jul 2015 21:02:46 +0000
Subject: [labnetwork] Cost of infrastructure operating and maintenance
 costs
In-Reply-To: <7C13DF677CDCCC4F8B6EABFBAF56F825BD4F81@proex1.protononsite.local>
References: <D1C17699.5E838%vlogiudi@connect.uwaterloo.ca>
 <7C13DF677CDCCC4F8B6EABFBAF56F825BD4F81@proex1.protononsite.local>
Message-ID: <D1C1B5C2.5E85F%vlogiudi@connect.uwaterloo.ca>

Dave,

House and high purity nitrogen gas consumption is separately tracked via meters dedicated to cleanroom operations so we already have a good handle on those specific costs. All other gases, including hydrogen, are supplied via cylinders dedicated to cleanroom ops.

Best regards,
Vito


From: <Wolff>, Dave at Proton OnSite <DWolff at protononsite.com<mailto:DWolff at protononsite.com>>
Date: Tuesday, July 7, 2015 at 4:02 PM
To: Vito Logiudice <vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>>, "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: RE: [labnetwork] Cost of infrastructure operating and maintenance costs

Might you want to include the cost of ?utility? gases such as nitrogen and hydrogen ?

Dave Wolff - Regional Manager - Proton OnSite - 860-604-3282 - dave.wolff at protononsite.com<mailto:dave.wolff at protononsite.com>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice
Sent: Tuesday, July 07, 2015 12:29 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cost of infrastructure operating and maintenance costs

Dear Colleagues,

I would like to come up with a reasonably accurate estimate of the infrastructure operating and maintenance costs associated with our 6750 sq.ft. cleanroom. If you've completed such a study in the past I would greatly appreciate hearing from you in regards to the methodology you used at the time and any references or rules of thumb that may have been useful to you.

Using the same terminology used by our own Plant Operations group, the following are the variables I would like to include in my study.  Some of these seem vague to me personally but I suspect this is likely due to the fact that this type of analysis falls beyond my scope of experience.

-Building
-Central Plant
-Mechanical distribution
-Electrical Distribution
-Grounds
-Electricity
-Heat
-Water

In addition, I would also like to hear from the community as to whether their respective administration expects their fab operating revenues to cover these particular infrastructure costs. Specifically, I?d like to know whether you are charged for these types of costs by your internal plant operations or finance groups.

Thank you very much for any insights.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca

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From nclay at upenn.edu  Tue Jul  7 18:38:20 2015
From: nclay at upenn.edu (Noah Clay)
Date: Tue, 7 Jul 2015 18:38:20 -0400
Subject: [labnetwork] Cost of infrastructure operating and maintenance
	costs
In-Reply-To: <D1C17699.5E838%vlogiudi@connect.uwaterloo.ca>
References: <D1C17699.5E838%vlogiudi@connect.uwaterloo.ca>
Message-ID: <E4E6D3C4-D34F-483E-A939-AF330A917768@upenn.edu>

Vito,

I believe that the vast majority of university fabs recover operational costs through fee income.  This obviously varies tremendously by facility, research thrusts, geographic region, etc.  Offline, I'd be happy to share the profile of our user base and open the books for our operations at Penn.

Usually, a core group of staff salaries are covered by hard funds and others through grants or additional fee income on revolving two year appointments.  

Residual funds are reinvested in the operation or absorbed into the governing school, provost's office or similar.  Central plant facilities, as mentioned below, are typically not covered by the fab.  

Frankly, the latter would sink my ship.

Best,
Noah Clay

Quattrone Nanofabrication Facility
University of Pennsylvania 
Philadelphia, PA

Sent from my iPhone

> On Jul 7, 2015, at 12:29, Vito Logiudice <vito.logiudice at uwaterloo.ca> wrote:
> 
> Dear Colleagues,
> 
> I would like to come up with a reasonably accurate estimate of the infrastructure operating and maintenance costs associated with our 6750 sq.ft. cleanroom. If you've completed such a study in the past I would greatly appreciate hearing from you in regards to the methodology you used at the time and any references or rules of thumb that may have been useful to you. 
> 
> Using the same terminology used by our own Plant Operations group, the following are the variables I would like to include in my study.  Some of these seem vague to me personally but I suspect this is likely due to the fact that this type of analysis falls beyond my scope of experience. 
> 
> -Building 
> -Central Plant 
> -Mechanical distribution 
> -Electrical Distribution
> -Grounds
> -Electricity
> -Heat
> -Water
> 
> In addition, I would also like to hear from the community as to whether their respective administration expects their fab operating revenues to cover these particular infrastructure costs. Specifically, I?d like to know whether you are charged for these types of costs by your internal plant operations or finance groups.
> 
> Thank you very much for any insights.
> 
> Best regards,
> Vito
> --
> Vito Logiudice  P.Eng.
> Director of Operations, Quantum NanoFab
> University of Waterloo
> Lazaridis QNC 1207
> 200 University Avenue West
> Waterloo, ON           Canada N2L 3G1
> Tel.: (519) 888-4567  ext. 38703
> Email: vito.logiudice at uwaterloo.ca
> Website: https://fab.qnc.uwaterloo.ca
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From shott at stanford.edu  Tue Jul  7 18:44:30 2015
From: shott at stanford.edu (John Shott)
Date: Tue, 07 Jul 2015 15:44:30 -0700
Subject: [labnetwork] Cost of infrastructure operating and maintenance
 costs
In-Reply-To: <D1C17699.5E838%vlogiudi@connect.uwaterloo.ca>
References: <D1C17699.5E838%vlogiudi@connect.uwaterloo.ca>
Message-ID: <559C564E.3070200@stanford.edu>

Vito:

While I'm not sure that I have any of the specific numbers that you are 
seeking, I do have reasonably precise building-wide utility consumption 
numbers.  While these include office spaces and about a dozen small, 
private labs, it is safe to assume that our 10,000 sq. ft. clean room is 
the dominant consumer of all of these utilities. Note: we don't directly 
pay for any of these utilities: they are taken out of the ~60% overhead 
rate paid by all federally-sponsored and non-Stanford research 
activity.  The most recent month for which I have numbers is March 2015 
but that is probably a pretty typical month.

Chilled water: 154,562 ton-hours @ $0.6205 per ton-hour = $95,906.
Electricity: 602,402 kWh @ $0.1384 per kWh = $83,372.
Hot water: 620,484 kBtu @ 39.95 per 1000 kBtu = $24,540.
Domestic water: 556,662 gal @ $11.29 per 1000 gal = $6,285.
Waste sewer: 556,662 gal @ $6.14 per 1000 gal = $3,418.

Total monthly building energy cost: $213,521.  While I don't know for 
certain, my guess is that our 10,000 sq ft clean room consumes 60-70% of 
most of the above categories for either powering/heating/cooling the 
tools themselves or pushing 600,000 CFM of temperature-controlled air 
through the space.

As I indicated, we don't actually pay that directly, but it comes out of 
indirect costs of 60% that are paid by all federally-sponsored and 
non-Stanford research activity.  Also, the School of Engineering gets a 
baseline electrical allocation and does pay for any excess usage beyond 
the baseline and also gets a "rebate" for any amount under the baseline 
usage.  That is the incentive to save energy and will likely be extended 
to chilled water, hot water, and domestic water usage in the near future.

Note: our lab is also not charged for the monthly DI service contact, 
maintenance of our CDA compressors, or maintenance of our TGO sensors 
... those are all deemed to be a facility cost and are not charged 
directly to a research group or service center.

I must confess that I am not familiar with the some of the terms on your 
list:  in particular, mechanical and electrical distribution are new 
terms to me.

Let me know if you have any further questions,

John





On 7/7/2015 9:29 AM, Vito Logiudice wrote:
> Dear Colleagues,
>
> I would like to come up with a reasonably accurate estimate of the 
> infrastructure operating and maintenance costs associated with our 
> 6750 sq.ft. cleanroom. If you've completed such a study in the past I 
> would greatly appreciate hearing from you in regards to the 
> methodology you used at the time and any references or rules of thumb 
> that may have been useful to you.
>
> Using the same terminology used by our own Plant Operations group, the 
> following are the variables I would like to include in my study.  Some 
> of these seem vague to me personally but I suspect this is likely due 
> to the fact that this type of analysis falls beyond my scope of 
> experience.
>
> -Building
> -Central Plant
> -Mechanical distribution
> -Electrical Distribution
> -Grounds
> -Electricity
> -Heat
> -Water
>
> In addition, I would also like to hear from the community as to 
> whether their respective administration expects their fab operating 
> revenues to cover these particular infrastructure costs. Specifically, 
> I?d like to know whether you are charged for these types of costs by 
> your internal plant operations or finance groups.
>
> Thank you very much for any insights.
>
> Best regards,
> Vito
> --
> Vito Logiudice P.Eng.
> Director of Operations, Quantum NanoFab
> University of Waterloo
> Lazaridis QNC 1207
> 200 University Avenue West
> Waterloo, ON           Canada N2L 3G1
> Tel.: (519) 888-4567  ext. 38703
> Email: vito.logiudice at uwaterloo.ca <mailto:vito.logiudice at uwaterloo.ca>
> Website: https://fab.qnc.uwaterloo.ca
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From IRHarvey at eng.utah.edu  Wed Jul  8 11:32:41 2015
From: IRHarvey at eng.utah.edu (Ian Harvey)
Date: Wed, 8 Jul 2015 09:32:41 -0600
Subject: [labnetwork] Fwd: Cost of infrastructure operating and maintenance
	costs
References: <E4E6D3C4-D34F-483E-A939-AF330A917768@upenn.edu>
Message-ID: <D63D8504-C101-4711-9B1A-E125E81BFB63@eng.utah.edu>

Dear Vito, Noah, John and colleagues,

Thank you for your question and inputs on this topic.

I would like to further explore the financial implications of what makes facilities sink or swim in the next UGIM, June, 2016.  

A very practical aspect potentially benefitting all facilities, is the data and information that helps each of us justify our existence and our subsidies to our benefactors and stakeholders.  Comparisons to other facilities should be enlightening and benefit the annual ritual of budgeting and groveling.

With that in mind, UGIM '16 is seeking a group of collaborators who would be willing to design, assemble a formal survey, and then present the compilation of best/typical practices with regard to facility subsidies and personnel subsidies, perhaps as a ratio to operating expenses a/or on-campus and off-campus revenues.  We expect this discussion will help all facilities convey the message of the real costs of these facilities.  The goal would be to provide information sufficient for each facility to convey to their own institution an expectation for an on-going base budget, rather than having to grovel for a subsidy every year, each time facing the scorn of not being "self-sustaining" in revenue.  What does self-sustaining even mean, given the extensive facilities subsidies that we usually take for granted, per the below thread?

We have enjoyed multiple presentations in past UGIMs regarding comparative analysis of user facility billing systems, cost recovery and cost of research.  There will be room for one more talk on that subject in UGIM '16 (Dennis Grimard and Sandrine Martin have volunteered).  Otherwise we are dedicating a full session to the general topic of financial sustainability, including the survey of institutional operational subsidies, and also generating new sources of revenue in the face of declining state and federal subsidies.  

With just under a year to go to UGIM '16, such a systematic study will require coordination, planning and execution.  Perhaps this could be the basis of a document that could be updated for every UGIM?  Any volunteers?

thanks,

?Ian

********************************************
Ian R. Harvey, Ph.D.

Associate Director
Utah Nanofab 
Cleanroom Fabrication and Surface Analysis & nano-scale Imaging
801/585-6162 (voicemail)
www.nanofab.utah.edu

Chair, UGIM '16, SLC, Utah
http://ugim.nanofab.utah.edu/



Begin forwarded message:

From: Noah Clay <nclay at upenn.edu>
Subject: Re: [labnetwork] Cost of infrastructure operating and maintenance costs
Date: July 7, 2015 4:38:20 PM MDT
To: Vito Logiudice <vito.logiudice at uwaterloo.ca>
Cc: "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>

Vito,

I believe that the vast majority of university fabs recover operational costs through fee income.  This obviously varies tremendously by facility, research thrusts, geographic region, etc.  Offline, I'd be happy to share the profile of our user base and open the books for our operations at Penn.

Usually, a core group of staff salaries are covered by hard funds and others through grants or additional fee income on revolving two year appointments.  

Residual funds are reinvested in the operation or absorbed into the governing school, provost's office or similar.  Central plant facilities, as mentioned below, are typically not covered by the fab.  

Frankly, the latter would sink my ship.

Best,
Noah Clay

Quattrone Nanofabrication Facility
University of Pennsylvania 
Philadelphia, PA

Sent from my iPhone

On Jul 7, 2015, at 12:29, Vito Logiudice <vito.logiudice at uwaterloo.ca> wrote:

> Dear Colleagues,
> 
> I would like to come up with a reasonably accurate estimate of the infrastructure operating and maintenance costs associated with our 6750 sq.ft. cleanroom. If you've completed such a study in the past I would greatly appreciate hearing from you in regards to the methodology you used at the time and any references or rules of thumb that may have been useful to you. 
> 
> Using the same terminology used by our own Plant Operations group, the following are the variables I would like to include in my study.  Some of these seem vague to me personally but I suspect this is likely due to the fact that this type of analysis falls beyond my scope of experience. 
> 
> -Building 
> -Central Plant 
> -Mechanical distribution 
> -Electrical Distribution
> -Grounds
> -Electricity
> -Heat
> -Water
> 
> In addition, I would also like to hear from the community as to whether their respective administration expects their fab operating revenues to cover these particular infrastructure costs. Specifically, I?d like to know whether you are charged for these types of costs by your internal plant operations or finance groups.
> 
> Thank you very much for any insights.
> 
> Best regards,
> Vito
> --
> Vito Logiudice  P.Eng.
> Director of Operations, Quantum NanoFab
> University of Waterloo
> Lazaridis QNC 1207
> 200 University Avenue West
> Waterloo, ON           Canada N2L 3G1
> Tel.: (519) 888-4567  ext. 38703
> Email: vito.logiudice at uwaterloo.ca
> Website: https://fab.qnc.uwaterloo.ca
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From lrehn at tamu.edu  Wed Jul  8 16:52:43 2015
From: lrehn at tamu.edu (Rehn, Larry A)
Date: Wed, 8 Jul 2015 20:52:43 +0000
Subject: [labnetwork] Industry Contacts for Graduating Students
Message-ID: <D4F6110C9F0BBB44B7DB72A25A226E3BF30D89@mb02.ads.tamu.edu>

Dear Colleagues,

I have a question regarding assistance to graduating students who are users of our labs.  Do any of you have a recommendation to provide job leads and contacts into industry or other labs?
Most of our professors do not have prior experience working in industry, so they cannot provide much help.  I have worked in the semiconductor industry before so sometimes the students ask for job leads or industry contacts from me.  This has happened several times in the last few months, so I decided to start a document with people that I know, and who are willing to have students contact them for help in locating that first job.  Many of these folks are not hiring managers, but most can redirect a graduate to someone who is looking to fill a position, or at least the local human resources manager.

I would like to know whether any of you have ideas or developed any better ways to assist our graduates.

Best regards,
Larry A Rehn
Technical Lab Manager
AggieFab Nanofabrication Facility
Texas A&M University
979 845-3199
lrehn at ece.tamu.edu<mailto:lrehn at ece.tamu.edu>
[cid:image001.jpg at 01CEC37D.FAF8C9E0]


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From hbtusainc at yahoo.com  Wed Jul  8 22:20:24 2015
From: hbtusainc at yahoo.com (hbtusainc)
Date: Wed, 8 Jul 2015 22:20:24 -0400
Subject: [labnetwork] Industry Contacts for Graduating Students
In-Reply-To: <D4F6110C9F0BBB44B7DB72A25A226E3BF30D89@mb02.ads.tamu.edu>
References: <D4F6110C9F0BBB44B7DB72A25A226E3BF30D89@mb02.ads.tamu.edu>
Message-ID: <D2B9280C-77AD-452C-B488-2FFC477552C7@yahoo.com>

Larry... Have them join LinkedIn, they can do postings there plus there is a lot of HR people willing to be of help.
www.linkedin.com

Regards

Sent from my iPhone. Mario A. Portillo. High' born Technology USA

> On Jul 8, 2015, at 4:52 PM, Rehn, Larry A <lrehn at tamu.edu> wrote:
> 
> Dear Colleagues,
>  
> I have a question regarding assistance to graduating students who are users of our labs.  Do any of you have a recommendation to provide job leads and contacts into industry or other labs?
> Most of our professors do not have prior experience working in industry, so they cannot provide much help.  I have worked in the semiconductor industry before so sometimes the students ask for job leads or industry contacts from me.  This has happened several times in the last few months, so I decided to start a document with people that I know, and who are willing to have students contact them for help in locating that first job.  Many of these folks are not hiring managers, but most can redirect a graduate to someone who is looking to fill a position, or at least the local human resources manager. 
>  
> I would like to know whether any of you have ideas or developed any better ways to assist our graduates.
>  
> Best regards,
> Larry A Rehn
> Technical Lab Manager
> AggieFab Nanofabrication Facility
> Texas A&M University
> 979 845-3199
> lrehn at ece.tamu.edu
> 
>  
>  
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From lino.eugene at mcgill.ca  Thu Jul  9 09:56:38 2015
From: lino.eugene at mcgill.ca (Lino Eugene, Dr)
Date: Thu, 9 Jul 2015 13:56:38 +0000
Subject: [labnetwork] pH neutralization system
Message-ID: <7F3DC325FF6D6249B261422DED6D10514DD1075A@EXMBX2010-6.campus.MCGILL.CA>

Dear All,

I've just joined the labnetwork mailing list and it is my first e-mail.

I would like to know what kind of neutralization system is installed in your fab and its capacity (volume, flow).

Is there any restriction for certain acids (nitric, Piranha mixture)?

Do some of you dispose of acids and bases in waste containers? If so, which acids do you dispose of in the same container or separately?

Thanks,
_______________________________________________________________________________
Lino EUGENE, Ph.D., Jr. Eng.
Research assistant
McGill Nanotools - Microfab

Mcgill University
Rutherford Physics Building - Room 016
3600 University Street
Montreal (Quebec) Canada
H3A 2T8

Phone : 514 398 7329
Fax : 514 398 8434
E-mail : lino.eugene at mcgill.ca<mailto:lino.eugene at mcgill.ca>
Website : www.mcgill.ca/microfab/

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From bob at eecs.berkeley.edu  Thu Jul  9 11:24:16 2015
From: bob at eecs.berkeley.edu (Robert M. HAMILTON)
Date: Thu, 9 Jul 2015 08:24:16 -0700
Subject: [labnetwork] RTP Oxidation
In-Reply-To: <CAOfoCygzPCyzEGKaNV59pS2WP_nzOPgBA1dU+Z1-VafQWFA3Wg@mail.gmail.com>
References: <CAOfoCygzPCyzEGKaNV59pS2WP_nzOPgBA1dU+Z1-VafQWFA3Wg@mail.gmail.com>
Message-ID: <CAK9WbAf97cS7oWSSMJrtoVpRU4wUowVvh8jrx_4RS09nvOns8Q@mail.gmail.com>

Kamal Yadav,

I held back offering a response to your question about RTP/infrared
pyrometry windows because the UC Berkeley NanoLab does not have experience
with AnnealSys RTP systems. We operate five AllWin21 Corp RTP's which are
improvements of the historic AG Heatpulse designs.

The IR pyrometry of our systems relies on providing constant temperature
cooling for the units IR sensor via a small, remote chiller (we use one
unit per two RTP's to save on space).

Our RTP chambers have windows made of a special grade of hydroxy-free (OH)
fused silica. Low-OH fused silica, such as Heraeus "Suprasil" resolves
issues with an IR absorption peak at ~2.7u:



These windows are made very thin to minimize IR absorption and therefore
fragile. The IR intensity is proportional to temperature of the substrate
being viewed. Any occlusion of this optical path, such as deposition on the
window surfaces, will result in a lower-than-actual temperature reading.

We clean the interior of our chambers and these window surfaces with ~5% HF
in water. Some mild mechanical force from a cotton swab to the window
surface helps speed up the process and reduces etching of the window.
Because HF cleaning reduces the thickness of these windows we re-calibrate
the system after cleaning. The system software is automated to correlate
the IR pyrometer against a reference Type-K TC built as an
"instrumented-wafer" (SenseArray).

Following a calibration run this TC-wafer is removed and we rely on the IR
pyrometer for our high temperature runs. For runs at temperatures lower
than ~600 C, where the IR signal is nil we use an instrumented off-axis
Type-K TC built onto a silicon support structure

Regards,
Bob Hamilton


Robert Hamilton
University of CA, Berkeley
Marvell NanoLab Equipment Manager
Rm 520 Sutardja Dai Hall, MC 1754
Berkeley, CA 94720
Phone 510-809-8618 (desk - preferred)
Mobile 510-325-7557 (my personal mobile)
E-mail preferred: bob at eecs.berkeley.edu
http://nanolab.berkeley.edu/



On Tue, Jul 7, 2015 at 12:45 AM, Kamal Yadav <kamal.yadav at gmail.com> wrote:

> Dear All,
>
> Query regarding RTP:
>
> 1. We have AnnealSys RTP: ASOne
> 2. We need to clean pyrometer windows regularly to maintain the equality
> in the actual temperature and set temperature. After around one month, and
> after heavy usage, the temperature drift around 80 Deg C. Pyrometer
> measures 80 Deg less than actual [randomply measured by TC]. When we clean
> the windows this difference is around 2 degrees.
>
> Queries:
> 1. Is cleaning pyrometer windows a standard practice in your systems as
> well?
> 2. Our 30 sec base line recipe, at 900 deg C, excluding ramp and ramp down
> steps. This recipe does not yield consistent thickness and ranges from 7 to
> 14 nm thickness. At this thickness other factors such as native oxide
> thickness variation, ambiance also plays critical role. Any comments would
> really help.
>
> Thanks a lot!
>
> --
> Thanks,
> Kamal Yadav
> Sr. Process Technologist
> Electrical Engineering
> IIT Bombay
> Mobile: 7506144798
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
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From kuhn1 at purdue.edu  Thu Jul  9 14:06:28 2015
From: kuhn1 at purdue.edu (Kuhn, Jeffrey G)
Date: Thu, 9 Jul 2015 18:06:28 +0000
Subject: [labnetwork] pH neutralization system
In-Reply-To: <7F3DC325FF6D6249B261422DED6D10514DD1075A@EXMBX2010-6.campus.MCGILL.CA>
References: <7F3DC325FF6D6249B261422DED6D10514DD1075A@EXMBX2010-6.campus.MCGILL.CA>
Message-ID: <06C167B22748364D85BCA1AA812FDA1A6950F176@wpvexcmbx02.purdue.lcl>

Hello Dr. Eugene,

Welcome to labnetwork!

At Birck, we have a neutralization system consisting of three treatment tanks, each with its own set of pH probes and chemical pumps. We use dual pH electrodes in each tank, one in service and one in standby in case the lead electrode fails. Tank 1 has a capacity of 1,500 gallons, and Tanks 2 & 3 hold 1,000 gallons each. On average, we process about 12,000 gallons of wastewater per day, or about 500 gallons per hour. The majority of influent comes from the UPW system (RO reject, softener regeneration, etc.). The rest is obviously from fume hoods, process equipment, and facility equipment. Influent passes through each tank in series and therefore has three opportunities for neutralization. A final set of pH electrodes monitors the effluent leaving the facility and controls a valve that can automatically close to prevent out-of-spec water from being discharged. All parameters are monitored by our building control software and appropriate personnel are notified automatically if there is a problem.

We currently have no restrictions on the type or amount of acids or bases being introduced to the neutralization system, but that was not always the case. As built, the system was seriously lacking in certain areas and those shortcomings caused issues for some of our users, especially when it came to quartz tube cleaning. It took several hours for them to drain a three-gallon tank of Piranha. That slow draining rate was necessary in order to prevent the Piranha from overwhelming the chemical feed pumps of the neutralization system. That lengthy drain time often caused spots on their quartz ware and necessitated a re-cleaning.

Over the years, we have made numerous improvements to our neutralization system that have virtually eliminated the problems we experienced initially. If you are in the design stages, or if you would simply like more details, please feel free to email me directly and I would be happy to help.

Best Regards,

Jeff Kuhn
Facility Engineer
Birck Nanotechnology Center
Purdue University
1205 W. State St.
West Lafayette, IN 47907
Ph:  (765) 496-8329
Fax: (765) 496-2018
kuhn1 at purdue.edu<mailto:kuhn1 at purdue.edu>


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Lino Eugene, Dr
Sent: Thursday, July 09, 2015 9:57 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] pH neutralization system

Dear All,

I've just joined the labnetwork mailing list and it is my first e-mail.

I would like to know what kind of neutralization system is installed in your fab and its capacity (volume, flow).

Is there any restriction for certain acids (nitric, Piranha mixture)?

Do some of you dispose of acids and bases in waste containers? If so, which acids do you dispose of in the same container or separately?

Thanks,
_______________________________________________________________________________
Lino EUGENE, Ph.D., Jr. Eng.
Research assistant
McGill Nanotools - Microfab

Mcgill University
Rutherford Physics Building - Room 016
3600 University Street
Montreal (Quebec) Canada
H3A 2T8

Phone : 514 398 7329
Fax : 514 398 8434
E-mail : lino.eugene at mcgill.ca<mailto:lino.eugene at mcgill.ca>
Website : www.mcgill.ca/microfab/

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From kurt.kupcho at wisc.edu  Thu Jul  9 14:55:11 2015
From: kurt.kupcho at wisc.edu (Kurt Kupcho)
Date: Thu, 09 Jul 2015 18:55:11 +0000
Subject: [labnetwork] glassware drying
Message-ID: <CO2PR0601MB757D4B59C0BA4A6AA49E0DA92900@CO2PR0601MB757.namprd06.prod.outlook.com>

Hi all -

Our cleanroom users supply their own glassware and are kept in their storage boxes after being rinsed thoroughly and dried.  Sometimes we have too many beakers sitting around air drying and taking up counter space.  I was wondering how other labs handle glassware and if anyone can recommend an automated glassware rinser/dryer that does not take long, as in the student waits for the it to be done instead of leaving and coming back.  Kind of like a spin rinse dryer for wafers, but for a quick final rinsing and drying of glassware that the students can use and put their glassware right back in their storage box instead of leaving it sit around on Texwipes to dry.

Thanks!


---------------------------------------------------
Kurt Kupcho
Process Engineer

WCAM
1550 Engineering Drive
ECB Room 3110
Madison, WI  53706

E:  kurt.kupcho at wisc.edu<mailto:kurt.kupcho at wisc.edu>
T:  608-262-2982
F:  608-265-2614

[http://wcam.engr.wisc.edu/logos/pics/wcam420x80.png]

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From bill at eecs.berkeley.edu  Thu Jul  9 20:56:30 2015
From: bill at eecs.berkeley.edu (Bill Flounders)
Date: Thu, 09 Jul 2015 17:56:30 -0700
Subject: [labnetwork] glassware drying
In-Reply-To: <CO2PR0601MB757D4B59C0BA4A6AA49E0DA92900@CO2PR0601MB757.namprd06.prod.outlook.com>
References: <CO2PR0601MB757D4B59C0BA4A6AA49E0DA92900@CO2PR0601MB757.namprd06.prod.outlook.com>
Message-ID: <559F183E.1030603@eecs.berkeley.edu>

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From gregg.cure at gmail.com  Mon Jul 13 14:21:48 2015
From: gregg.cure at gmail.com (Gregg Cure)
Date: Mon, 13 Jul 2015 11:21:48 -0700
Subject: [labnetwork] 2nd source for parts
Message-ID: <CAB5QBGxdESKqEEWm1t7QH87-97mDsL+9mBTE=Y6Mmk75pvb76g@mail.gmail.com>

Hello all -
I have an Edwards Auto 306 ebeam deposition system. The tool is high usage
and very popular in our lab.
Edwards recently transferred its ebeam line to HHV, whose operations are
mostly in India, although HHV has a UK presence. Parts availability and
order delay times are untenable (12 weeks ARO in some cases).
Does anyone know of a second source for ebeam parts (HV Penning gauge
anodes, pirani gauges, leadthroughs, filaments, ceramic insulators, etc).
We use Filtech in Boston for film thickness monitor crystals, but have had
little success finding a local (US) vendor for other parts.

Thanks in advance for any help you can offer.
Gregg Cure`

-- 
-- 
Gregg D. Cure`
The University of Arizona
Arizona Research Laboratories
Nano Fabrication and Processing Center
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987
Cell: 520.307.2760
Fax: 520.626.7877
Website: http://mfc.engr.arizona.edu
Website: http://www.arl.arizona.edu/
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From kamal.yadav at gmail.com  Wed Jul 15 06:42:42 2015
From: kamal.yadav at gmail.com (Kamal Yadav)
Date: Wed, 15 Jul 2015 16:12:42 +0530
Subject: [labnetwork] Ozonized DI Water
Message-ID: <CAOfoCygok3h7_-TzuOad2NKV615RbWQ6i1cKFz5B97_-gueCYQ@mail.gmail.com>

Dear All,

Due to it being cost effective I am exploring ozonized DI water, as it can
be used in photoresist stripping applications, and can replace several
other cleaning procedures [RCA] as well to save money on high purity acid
chemicals.

If anybody has any experience regarding putting up such system, knowing
that would be helpful.

-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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From nclay at upenn.edu  Wed Jul 15 08:51:14 2015
From: nclay at upenn.edu (Noah Clay)
Date: Wed, 15 Jul 2015 08:51:14 -0400
Subject: [labnetwork] Ozonized DI Water
In-Reply-To: <CAOfoCygok3h7_-TzuOad2NKV615RbWQ6i1cKFz5B97_-gueCYQ@mail.gmail.com>
References: <CAOfoCygok3h7_-TzuOad2NKV615RbWQ6i1cKFz5B97_-gueCYQ@mail.gmail.com>
Message-ID: <792EE1FF-27CE-40B2-88EF-E8A382768BC4@upenn.edu>

Kamal,

OEM Group has their Cintillio spray ozone tool, which appears to be a great RCA clean alternative.  We're hoping to evaluate this system at UPenn in Philadelphia - their Apps Lab is just north of the city.  I'll keep you posted.

Best,
Noah Clay

Quattrone Nanofabrication Facility
University of Pennsylvania 
Philadelphia, PA

Sent from my iPhone

> On Jul 15, 2015, at 06:42, Kamal Yadav <kamal.yadav at gmail.com> wrote:
> 
> Dear All,
> 
> Due to it being cost effective I am exploring ozonized DI water, as it can be used in photoresist stripping applications, and can replace several other cleaning procedures [RCA] as well to save money on high purity acid chemicals.
> 
> If anybody has any experience regarding putting up such system, knowing that would be helpful. 
> 
> -- 
> Thanks,
> Kamal Yadav
> Sr. Process Technologist
> Electrical Engineering
> IIT Bombay
> Mobile: 7506144798
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork



From betemc at rit.edu  Wed Jul 15 09:10:07 2015
From: betemc at rit.edu (Bruce Tolleson)
Date: Wed, 15 Jul 2015 13:10:07 +0000
Subject: [labnetwork] Column for a Cambridge 360 SEM
Message-ID: <91CE152971DAD64F890FD8BE59734DB73F819293@ex03mail02.ad.rit.edu>

We have a complete column for a Cambridge 360 SEM with Ion Pump, Pirrani Gage tube and Xray detector available to anyone needing one.  We can shrink wrap it and palletize it to anyone willing to send a truck to get it.

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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From dkeck at usc.edu  Wed Jul 15 16:25:25 2015
From: dkeck at usc.edu (Daniel Keck)
Date: Wed, 15 Jul 2015 13:25:25 -0700
Subject: [labnetwork] Toxic Gas Services in Southern CA
Message-ID: <7623F799635EF44B93F4154EC73DF9B65E9CB4D81A@VSOEEXCH07>

Hi,

I am looking for recommendations for vendors that can provide gas cylinder changing services for highly toxic and pyrophoric gases. Any suggestions would be much appreciated, thanks!

Daniel Keck, MS
Lab Safety Specialist
Viterbi Business Affairs - Facilities Division
3710 McClintock Ave., RTH 411, MC: 1454
http://viterbi.usc.edu/facilities/
Office: (213) 821-8307
Mobile: (213) 663-8379
[cid:image001.jpg at 01D0BF01.76231EB0]

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From john_sweeney at harvard.edu  Wed Jul 15 20:22:22 2015
From: john_sweeney at harvard.edu (Sweeney, John)
Date: Thu, 16 Jul 2015 00:22:22 +0000
Subject: [labnetwork] Toxic Gas Services in Southern CA
In-Reply-To: <7623F799635EF44B93F4154EC73DF9B65E9CB4D81A@VSOEEXCH07>
References: <7623F799635EF44B93F4154EC73DF9B65E9CB4D81A@VSOEEXCH07>
Message-ID: <F2D7D143-FCFD-4DDD-9012-4F0FAE042269@harvard.edu>

Matheson Gas changes toxic gas cylinders for Skyworks Solutions Inc and Analog Devices so you can start w them.

Sent from my iPhone

On Jul 15, 2015, at 8:16 PM, Daniel Keck <dkeck at usc.edu<mailto:dkeck at usc.edu>> wrote:

Hi,

I am looking for recommendations for vendors that can provide gas cylinder changing services for highly toxic and pyrophoric gases. Any suggestions would be much appreciated, thanks!

Daniel Keck, MS
Lab Safety Specialist
Viterbi Business Affairs - Facilities Division
3710 McClintock Ave., RTH 411, MC: 1454
http://viterbi.usc.edu/facilities/
Office: (213) 821-8307
Mobile: (213) 663-8379
<image001.jpg>

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From kamal.yadav at gmail.com  Thu Jul 16 11:59:30 2015
From: kamal.yadav at gmail.com (Kamal Yadav)
Date: Thu, 16 Jul 2015 21:29:30 +0530
Subject: [labnetwork] Ozonized DI Water
In-Reply-To: <792EE1FF-27CE-40B2-88EF-E8A382768BC4@upenn.edu>
References: <CAOfoCygok3h7_-TzuOad2NKV615RbWQ6i1cKFz5B97_-gueCYQ@mail.gmail.com>
 <792EE1FF-27CE-40B2-88EF-E8A382768BC4@upenn.edu>
Message-ID: <CAOfoCyjFsicMYxUV9dC7QQLJ4DGFMHNCuhOsWwWz5Qb+HfpM4w@mail.gmail.com>

Dear Noah,

Thanks for your reply. I will wait for your feedback.

I am also looking water systems which are capable of producing ozonized DI
water with required/tunable ppm range [1 - 50 ppm].

On Wed, Jul 15, 2015 at 6:21 PM, Noah Clay <nclay at upenn.edu> wrote:

> Kamal,
>
> OEM Group has their Cintillio spray ozone tool, which appears to be a
> great RCA clean alternative.  We're hoping to evaluate this system at UPenn
> in Philadelphia - their Apps Lab is just north of the city.  I'll keep you
> posted.
>
> Best,
> Noah Clay
>
> Quattrone Nanofabrication Facility
> University of Pennsylvania
> Philadelphia, PA
>
> Sent from my iPhone
>
> > On Jul 15, 2015, at 06:42, Kamal Yadav <kamal.yadav at gmail.com> wrote:
> >
> > Dear All,
> >
> > Due to it being cost effective I am exploring ozonized DI water, as it
> can be used in photoresist stripping applications, and can replace several
> other cleaning procedures [RCA] as well to save money on high purity acid
> chemicals.
> >
> > If anybody has any experience regarding putting up such system, knowing
> that would be helpful.
> >
> > --
> > Thanks,
> > Kamal Yadav
> > Sr. Process Technologist
> > Electrical Engineering
> > IIT Bombay
> > Mobile: 7506144798
> > _______________________________________________
> > labnetwork mailing list
> > labnetwork at mtl.mit.edu
> > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>



-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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From cdwolin at ucdavis.edu  Fri Jul 17 11:57:11 2015
From: cdwolin at ucdavis.edu (Corey David Wolin)
Date: Fri, 17 Jul 2015 15:57:11 +0000
Subject: [labnetwork] TGMS Emergency Response Cordination
Message-ID: <76D36939-801B-48F0-BA26-D1AFB97A7725@ucdavis.edu>

Hi All

After a few false alarm with our toxic gas monitoring system concerns were raised with regards to the response from fire and PD. They approach to to the alarms is as if they are all false alarms.  Our TGMS system is set to evacuate the building on any high level gas alarm, which includes the dean's office among all other engineering administrative staff.  They also don't contact anyone on the alarm contact list for after hours alarms which is very concerning. This was determined after looking through the alarm history.

I'm curious as to how many of you coordinate with campus first responders and EH&S on the serious nature of the the gases to which the sensors are monitoring?  What do many of you feel the proper emergency response to a high level silane alarm should be? Low Level? In addition, at which point should the TGMS evacuate the building if automatic shutoff valves exist for both high and low level alarms?  

Any feedback and/or advice on this would be greatly appreciated.

Thanks,
Corey

-----------------
Corey Wolin
NanoFab Manager
UCDavis Engineering




From hbtusainc at yahoo.com  Fri Jul 17 18:24:57 2015
From: hbtusainc at yahoo.com (Mario Portillo)
Date: Fri, 17 Jul 2015 22:24:57 +0000 (UTC)
Subject: [labnetwork] laser printer for transparencies
Message-ID: <622173137.312923.1437171897934.JavaMail.yahoo@mail.yahoo.com>

Dear Members.....I have a customer looking for information on a laser printer for transparencies able to resolve minimum 25 microns, any such beasts outhere ???? Your information will be appreciated..

Thank you in advance....
 Mario A. Portillo Sr.
HIGH'born Technology USA Inc..
Semiconductor Equipment Services
8130 Glades Road, #229
Boca Raton, FL 33434
561 470-1975 office
561 504-0244 cell
hbtusainc at yahoo.com
www.hbtusainc.com



From shott at stanford.edu  Sat Jul 18 00:59:15 2015
From: shott at stanford.edu (John Shott)
Date: Fri, 17 Jul 2015 21:59:15 -0700
Subject: [labnetwork] TGMS Emergency Response Cordination
In-Reply-To: <76D36939-801B-48F0-BA26-D1AFB97A7725@ucdavis.edu>
References: <76D36939-801B-48F0-BA26-D1AFB97A7725@ucdavis.edu>
Message-ID: <55A9DD23.90103@stanford.edu>

Corey

Let me share some of our experiences at Stanford.  I'm sure that this 
question will get a lively discussion from a number of members of this 
community.

First, if you think that your fire department is beginning to think that 
your alarms are false alarms, then it is a safe bet that your users and 
staff have probably developed that feeling as well. Nothing is more 
dangerous ...

While we all have a certain number of false alarms and, in some ways, 
false alarms are better than real alarms, I think that you need to 
determine whether there needs to something done to reduce their 
frequency.  Is this due to sensor drift?  Cross-sensitivity issues?  
Insufficient sensor replacement frequency?  A system with no "warn" and 
"alarm" levels?

How well does your fire department know you, your staff, your building, 
your TGMS system, and the gases and chemicals you store and use?  Do you 
have enough NFPA 704M placards (the blue, red, yellow, white diamonds) 
in and around your building?  As you know, the sum of those numbers can 
be between 0 (no hazard) and 12 (uh, oh).  Many of our facilities reach 
a sum of 11 if you have silane, germane, hydrofluoric acid, etc.  Most 
fire departments look forward to the opportunity to learn about such a 
facility during the daylight when there are no horns and strobes 
sounding.  Invite them over, show them your facility, let them see your 
TGMS system, etc ...

Stanford has contracted fire protection from the Palo Alto Fire 
Department.  Only one of six fire stations is on the Stanford Campus.  
Despite that, every single firefighter, paramedic, captain, and 
batallion chief in ALL of PAFD (that's 125 people on all three shifts) 
has toured our facility, seen our gas bunkers, clean room, TGMS system, 
etc.)  Also, fewer departments maintain a HazMat team. Palo Alto uses 
the Santa Clara County HazMat team.  Every one of them has also been on 
the tour and knows us and our facility.  If you want to really get on 
their good side, offer to hold a training exercise at your facility ... 
not many industrial facilities will make such an offer.  Not too long 
ago PAFD simulated an anhydrous HCl cylinder leak in our gas bunker.  
Praxair sent their ERT team with the leaker cylinder container.  Note: 
they came from Richmond, CA which is probably closer to you than to us.

If you do things like this, your fire department will make a more 
informed and appropriate to alarms in your building.   They will also be 
more likely to look to you and your staff for technical support the next 
time the alarms sound at 3 a.m.

Note: rather than waiting for fire to call you, I'd suggest looking into 
automating your TGMS system so that  it automatically calls you and your 
staff at the same time that the fire department gets the call.

Final note:  we evacuate {and automatically call PAFD) for breathing air 
alarms, but not for alarms in exhausted spaces such as gas cabinets.

Let me know if you have additional questions along these lines.

John

On 7/17/2015 8:57 AM, Corey David Wolin wrote:

  After a few false alarm with our toxic gas monitoring system concerns 
were raised with regards to the response from fire and PD. They approach 
to to the alarms is as if they are all false alarms. Our TGMS system is 
set to evacuate the building on any high level gas alarm, which includes 
the dean's office among all other engineering administrative staff. They 
also don't contact anyone on the alarm contact list for after hours 
alarms which is very concerning. This was determined after looking 
through the alarm history. I'm curious as to how many of you coordinate 
with campus first responders and EH&S on the serious nature of the the 
gases to which the sensors are monitoring? What do many of you feel the 
proper emergency response to a high level silane alarm should be? Low 
Level? In addition, at which point should the TGMS evacuate the building 
if automatic shutoff valves exist for both high and low level alarms? 
Any feedback and/or advice on this would be greatly appreciated. Thanks, 
Corey ----------------- Corey Wolin NanoFab Manager UCDavis Engineering 
_______________________________________________ labnetwork mailing list 
labnetwork at mtl.mit.edu 
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork





From hgilles at wisc.edu  Mon Jul 20 08:09:07 2015
From: hgilles at wisc.edu (Harold Gilles)
Date: Mon, 20 Jul 2015 12:09:07 +0000
Subject: [labnetwork] KLA Tencor FLX 2320 Stress Measurement System
Message-ID: <BLUPR06MB3877AE81CC189ADB48F8343DE850@BLUPR06MB387.namprd06.prod.outlook.com>

All,
The 2320 system uses a 750 laser that will fail and is no longer available. The replacement is a 780 laser.  Has anyone gone through the process of upgrading to the 780 laser? Is it simply a hardware change with some adjustment to software parameters or did it require a change/upgrade in software as well? If you had the upgrade done, who did you work with to do it?

Thanks in advance,

[cid:image001.png at 01D0C2BA.F7DD1070]
Hal Gilles
Wisconsin Center For Applied Microelectronics
Office rm 3114
608-890-4573

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From bkarmstr at umich.edu  Mon Jul 20 13:34:49 2015
From: bkarmstr at umich.edu (Brian Armstrong)
Date: Mon, 20 Jul 2015 13:34:49 -0400
Subject: [labnetwork] KLA Tencor FLX 2320 Stress Measurement System
In-Reply-To: <BLUPR06MB3877AE81CC189ADB48F8343DE850@BLUPR06MB387.namprd06.prod.outlook.com>
References: <BLUPR06MB3877AE81CC189ADB48F8343DE850@BLUPR06MB387.namprd06.prod.outlook.com>
Message-ID: <c1d605dc24a76d028bddb3bb94b86811@mail.gmail.com>

Hi Hal,



We work with Toho Technology (http://www.tohotechnology.com) for service on
our FLX-2320.  I believe they own rights to this tool now.  Our system
already has the 780nm laser.  If it was upgraded, it was before my time
here.



My contact is Lan Phan  lan.phan at tohotechnology.com



Good luck!



Best Regards,

Brian Armstrong



Lead Engineer in Research

Lurie Nanofabrication Facility (LNF)

University of Michigan
1301 Beal Ave, 1245 EECS
Ann Arbor, MI 48109-2122

Office:  (734) 615-7539

Cell:  (734) 323-0137

Fax:  (734) 647-1781

http://www.lnf.umich.edu







*From:* labnetwork-bounces at mtl.mit.edu [mailto:
labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Harold Gilles
*Sent:* Monday, July 20, 2015 8:09 AM
*To:* labnetwork at mtl.mit.edu
*Subject:* [labnetwork] KLA Tencor FLX 2320 Stress Measurement System



All,

The 2320 system uses a 750 laser that will fail and is no longer available.
The replacement is a 780 laser.  Has anyone gone through the process of
upgrading to the 780 laser? Is it simply a hardware change with some
adjustment to software parameters or did it require a change/upgrade in
software as well? If you had the upgrade done, who did you work with to do
it?



Thanks in advance,



Hal Gilles
Wisconsin Center For Applied Microelectronics

Office rm 3114
608-890-4573
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From Vincent.Luciani at nist.gov  Wed Jul 22 08:07:47 2015
From: Vincent.Luciani at nist.gov (Luciani, Vincent)
Date: Wed, 22 Jul 2015 12:07:47 +0000
Subject: [labnetwork] TGMS Emergency Response Cordination
In-Reply-To: <76D36939-801B-48F0-BA26-D1AFB97A7725@ucdavis.edu>
References: <76D36939-801B-48F0-BA26-D1AFB97A7725@ucdavis.edu>
Message-ID: <BN1PR09MB0257614AE63F3C2F893094A09C830@BN1PR09MB0257.namprd09.prod.outlook.com>

Hello Corey,

A couple quick answers:

Here at NIST, we coordinate closely with the NIST Fire and Police Departments.
We have automatic shut-off valves but evacuate for all high alarms
We treat every alarm response as real even if we have high confidence that it is a false alarm.
We have an auto dialer that alerts me and the whole NanoFab staff to any alarm or system error.

John's response was (as usual) right on but I wanted to put in my 2 cents about false alarms.  I have been forming, training and participating in Fab emergency response teams (ERT's) for over 30 years and I have a particular dislike of false alarms because of the huge risk if people start assuming they are false.  I want to share a bit of what I learned.

You must have an agreement with all responders (ERT, site Fire Dept. etc) that all alarms are treated as real.  This is difficult when you are plagued with false alarms.  However, in return you commit to getting to the root cause of every false alarm and implement a fix.  I have successfully almost eliminated false alarms by tenaciously pursuing the root cause of each until I found it.  If I were to Pareto chart the causes of false alarms it would look like this (we have the Honeywell sensors)

1) Someone doing work near a sensor that they did not anticipate setting it off:  Jarring it, soldering nearby, pulling wires in the same conduit.
2) Sensor cartridges getting old.  We replace many of them every 6 months.  Some can go a year as specified.
3) Cross sensitivity.  A very insidious problem.  I have had teams of chemists working on finding what caused a sensor go off.  For example, we learned that burning mercaptan (the stuff that makes natural gas smell) will set of a chlorine sensor.  Honeywell confirmed this.  I learned this after fumes from our propane powered forklift on the loading dock set off an HCL sensor a couple times.

Summarizing, my personal recommendations:
Treat every alarm as real, no matter how painful.
Go after the root cause of every false alarm like a hound dog.
Keep the responders updated and involved in the effort.

Good Luck,

VInce










-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Corey David Wolin
Sent: Friday, July 17, 2015 11:57 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] TGMS Emergency Response Cordination

Hi All

After a few false alarm with our toxic gas monitoring system concerns were raised with regards to the response from fire and PD. They approach to to the alarms is as if they are all false alarms.  Our TGMS system is set to evacuate the building on any high level gas alarm, which includes the dean's office among all other engineering administrative staff.  They also don't contact anyone on the alarm contact list for after hours alarms which is very concerning. This was determined after looking through the alarm history.

I'm curious as to how many of you coordinate with campus first responders and EH&S on the serious nature of the the gases to which the sensors are monitoring?  What do many of you feel the proper emergency response to a high level silane alarm should be? Low Level? In addition, at which point should the TGMS evacuate the building if automatic shutoff valves exist for both high and low level alarms?  

Any feedback and/or advice on this would be greatly appreciated.

Thanks,
Corey

-----------------
Corey Wolin
NanoFab Manager
UCDavis Engineering


_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork



From nclay at seas.upenn.edu  Wed Jul 22 15:55:04 2015
From: nclay at seas.upenn.edu (Noah Clay)
Date: Wed, 22 Jul 2015 15:55:04 -0400
Subject: [labnetwork] TGMS Emergency Response Cordination
In-Reply-To: <76D36939-801B-48F0-BA26-D1AFB97A7725@ucdavis.edu>
References: <76D36939-801B-48F0-BA26-D1AFB97A7725@ucdavis.edu>
Message-ID: <DDFFDF4C-E84B-4CD0-9571-AA43341D2403@seas.upenn.edu>

Corey,

Here?s our general protocol for the University of Pennsylvania in Philadelphia.  Everyone has agreed to and responds according to this plan.  Below is a from a memo sent last year to our safety group, EHRS (R=radiation), campus police and fire group.

Best,
Noah Clay

Quattrone Nanofabrication Facility
University of Pennsylvania
Philadelphia, PA

*******

-All of our gas cabinets and VMBs can be shut-down remotely by the TGMS.  
-All equipment that handles toxic gases can be shut-down or addressed remotely by the TGMS as well.  
-In some cases, we don?t shut-down the equipment completely; we shut-down gas pods/boxes attached to the equipment.

*******

We are monitoring hazardous gases and alarming at two levels of detection:

	- Level 1: 1/2 TLV or 10% LEL
	- Level 2: TLV or 20% LEL

The system also warns us for non-zero concentration in any sensor.  To avoid noise blips and false alarms, any Level 1 or Level 2 detection is considered real (sounds alarms) if it is measured consecutively for three seconds.

Local evacuation is with horns and blue strobes, which are zoned.  For example, if there is a detection of toxic gas in the cleanroom ambient, then horns and blue strobes will be active there, but not in the gas bunkers.

The TGMS is under service contract with two visits annually (gas challenging) and has an active autodialer (analog line, not VOIP).

The autodialer has four outputs (two for exhausted enclosure detection and two for ambient detection):

1. Alarm 1: Level 1 gas detection in an exhaust
	Response: 
		- Shut-down detected gas supply
		- Shut-down equipment connected to detected gases
		- Contact Nanofab facility staff

2. Alarm 2: Level 2 gas detection in an exhaust
	Response:
		- Alarm #1 response 
		- Local evacuation with horns & blue strobes
		- Contact PennComm (campus police), EHRS on-call pager, EHRS Director, Nanofab facility staff

3. Alarm 3: Level 1 gas detection in the ambient 
	Response:
		- Alarm #1 response
		- Ring fire alarm
		- Local evacuation with horns & blue strobes

4. Alarm 4: Level 2 gas detection in the ambient
	Response: 
		- Alarm #3 response
		- Contact PennComm (campus police), EHRS on-call pager, EHRS Director, Nanofab facility staff

Gas cabinets and VMBs shut-down themselves for loss of exhaust and the cleanroom is evacuated.  We do not turn on the TGMS in this case; it?s not a detection event.

> On Jul 17, 2015, at 11:57 AM, Corey David Wolin <cdwolin at ucdavis.edu> wrote:
> 
> I'm curious as to how many of you coordinate with campus first responders and EH&S on the serious nature of the the gases to which the sensors are monitoring?  What do many of you feel the proper emergency response to a high level silane alarm should be? Low Level? In addition, at which point should the TGMS evacuate the building if automatic shutoff valves exist for both high and low level alarms?  

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From kamal.yadav at gmail.com  Thu Jul 23 09:42:28 2015
From: kamal.yadav at gmail.com (Kamal Yadav)
Date: Thu, 23 Jul 2015 19:12:28 +0530
Subject: [labnetwork] High Humidity Issues in Coastal Areas?
Message-ID: <CAOfoCygfo3c79SrzUGyaBLKQWVgKrTqtuRTpPJdhj3jR-f7Avg@mail.gmail.com>

Dear All,

During Monsoon time in India, and specially in Mumbai where it rains
heavily from June to September, we observe high humidity in the lab ~65%.
We have de-humidifiers as well as other HVAC infrastructure. But more
control is required. Is it possible or our infrastructure is not good
enough?

Are there any other known humidity control solutions known to you. Is it
the case with others as well, who are in heavy rains/humid area. This
certainly is not the case with Intel in Portland, OR, where it rains a lot
too.

-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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From Jack.Paul at hdrinc.com  Thu Jul 23 12:53:29 2015
From: Jack.Paul at hdrinc.com (Paul, Jack)
Date: Thu, 23 Jul 2015 16:53:29 +0000
Subject: [labnetwork] High Humidity Issues in Coastal Areas?
In-Reply-To: <CAOfoCygfo3c79SrzUGyaBLKQWVgKrTqtuRTpPJdhj3jR-f7Avg@mail.gmail.com>
References: <CAOfoCygfo3c79SrzUGyaBLKQWVgKrTqtuRTpPJdhj3jR-f7Avg@mail.gmail.com>
Message-ID: <B81F765B8687FB4C8BBC5890A040A23719587D94@OMAC-INEXDAG2N2.intranet.hdr>

Hello Kamal,
In general terms, there are only a couple of methods for removing moisture from large volumes of air as required for the cleanroom make-up air.  You can cool the air enough to condense the water vapor out, or you can absorb the water vapor with a dessicant dryer.

Of the two, the most common is to cool the air, since you need to do that anyway. However, to get good condensation the water temperature must be pretty low, and the air velocity through the air handler and over the cooling coils must be relatively slow.  So my best guess is that your infrastructure may be ?under designed? to squeeze enough moisture out of the air to reduce the humidity to acceptable levels around 43% or so.  In-line duct dehumidifiers just can?t keep up with the large volumes of air and large quantities of moisture to be taken out of such wet air.

Optimally, you would have one or two large make-up air handlers with large cooling coils (maybe even dual coils in sequence) that would run chilled water provided from your chiller plant (in the building or remote on campus?).  The water temp is low enough (typical design range would be around 5 to 7 deg C) that it would cool the incoming outside air (design conditions maybe 32-37 deg C and 75-100% RH?) to around 13 deg C.  The 13 deg air cannot hold as much water and it condenses out.  This low temperature make-up air is then mixed with recirculated air either in your recirculating air handlers or perhaps within the cleanroom volume if you are using fan-filter units, further reducing the RH as the temperature rises to internal cleanroom design conditions about 20 deg C.  (Since the humidity is ?relative? to the capacity of the air to hold water vapor, if the water vapor content remains constant as the temperature rises, the relative humidity decreases as a percentage of capacity).

The other option is dessicant drying, but it consumes very large quantities of energy and actually heats the incoming air, which is in contrast to what you want to accomplish.

Suggest checking your

-        chilled water capacity (how many tons of cooling are available) and the water flow rate

-        chilled water temperature (can it be set lower?)

-        coil size in the make-up air handler- can the air handler be retrofit with a better coil design or in-line dual coils

Hope this helps as a starting point.
Regards,
Jack


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav
Sent: Thursday, July 23, 2015 6:42 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] High Humidity Issues in Coastal Areas?

Dear All,

During Monsoon time in India, and specially in Mumbai where it rains heavily from June to September, we observe high humidity in the lab ~65%. We have de-humidifiers as well as other HVAC infrastructure. But more control is required. Is it possible or our infrastructure is not good enough?

Are there any other known humidity control solutions known to you. Is it the case with others as well, who are in heavy rains/humid area. This certainly is not the case with Intel in Portland, OR, where it rains a lot too.

--
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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From tribble at fas.harvard.edu  Thu Jul 23 14:16:07 2015
From: tribble at fas.harvard.edu (Tribble, Thomas)
Date: Thu, 23 Jul 2015 18:16:07 +0000
Subject: [labnetwork] High Humidity Issues in Coastal Areas?
In-Reply-To: <CAOfoCygfo3c79SrzUGyaBLKQWVgKrTqtuRTpPJdhj3jR-f7Avg@mail.gmail.com>
References: <CAOfoCygfo3c79SrzUGyaBLKQWVgKrTqtuRTpPJdhj3jR-f7Avg@mail.gmail.com>
Message-ID: <2FA135939A3C9644A89D6AF332BE5FD6019A4C4337@harvandmbx05.fasmail.priv>

Your HVAC engineer should be able to confirm for you that your mechanical systems are not able to keep up with the dehumidification demand being placed on them.  Things to do:

1.      Recalibrate your HVAC instrumentation

2.      Check your HVAC setpoints and control algorithems

3.      Check your supply/exhaust air balance

4.      Close any blast gates not providing useful tool ventilation

Tom Tribble

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav
Sent: Thursday, July 23, 2015 9:42 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] High Humidity Issues in Coastal Areas?

Dear All,

During Monsoon time in India, and specially in Mumbai where it rains heavily from June to September, we observe high humidity in the lab ~65%. We have de-humidifiers as well as other HVAC infrastructure. But more control is required. Is it possible or our infrastructure is not good enough?

Are there any other known humidity control solutions known to you. Is it the case with others as well, who are in heavy rains/humid area. This certainly is not the case with Intel in Portland, OR, where it rains a lot too.

--
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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From tribble at fas.harvard.edu  Thu Jul 23 14:44:54 2015
From: tribble at fas.harvard.edu (Tribble, Thomas)
Date: Thu, 23 Jul 2015 18:44:54 +0000
Subject: [labnetwork] High Humidity Issues in Coastal Areas?
In-Reply-To: <CAOfoCygfo3c79SrzUGyaBLKQWVgKrTqtuRTpPJdhj3jR-f7Avg@mail.gmail.com>
References: <CAOfoCygfo3c79SrzUGyaBLKQWVgKrTqtuRTpPJdhj3jR-f7Avg@mail.gmail.com>
Message-ID: <2FA135939A3C9644A89D6AF332BE5FD6019A4C43D5@harvandmbx05.fasmail.priv>

Kamal,

Some years ago I ran into a similar situation of excessive humidity.  The short version of the story was that during rainy conditions, the prefilters and filters were getting wet, increasing the pressure drop across them, and increasing the suction (think vacuum) pressure of the fans between the fan and the filter, which was where the cooling coil resided.  As a result, the cooling coil drain pan didn?t drain effectively because the drip leg of the drain pan was not deep enough to overcome the negative pressure.  This resulted in moisture re-entrainment and high humidity in the conditioned space.  It was fixed by dropping the drain leg down a floor (14 feet) and increasing its size one pipe diameter.

Tom Tribble

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav
Sent: Thursday, July 23, 2015 9:42 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] High Humidity Issues in Coastal Areas?

Dear All,

During Monsoon time in India, and specially in Mumbai where it rains heavily from June to September, we observe high humidity in the lab ~65%. We have de-humidifiers as well as other HVAC infrastructure. But more control is required. Is it possible or our infrastructure is not good enough?

Are there any other known humidity control solutions known to you. Is it the case with others as well, who are in heavy rains/humid area. This certainly is not the case with Intel in Portland, OR, where it rains a lot too.

--
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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From nclay at upenn.edu  Thu Jul 23 16:16:41 2015
From: nclay at upenn.edu (Noah Clay)
Date: Thu, 23 Jul 2015 16:16:41 -0400
Subject: [labnetwork] High Humidity Issues in Coastal Areas?
In-Reply-To: <B81F765B8687FB4C8BBC5890A040A23719587D94@OMAC-INEXDAG2N2.intranet.hdr>
References: <CAOfoCygfo3c79SrzUGyaBLKQWVgKrTqtuRTpPJdhj3jR-f7Avg@mail.gmail.com>
 <B81F765B8687FB4C8BBC5890A040A23719587D94@OMAC-INEXDAG2N2.intranet.hdr>
Message-ID: <66B2E54F-9543-473E-BD32-EEF7A4238365@upenn.edu>

Kamal,

A few things to consider:

1. Ensure that your incoming chilled water temperature/flow is adequate.  We average 43F.

2. Ensure that your chilled water coils are clean.  Ours are inspected quarterly; prefilters are changed quarterly; coils cleaned annually & box filters are changed annually.  Final discharge HEPAs are changed every three years

3. Ensure that your reheat system is operating properly with clean coils for further drying.

4. Ensure that any downstream humidification valves are not passing/defective.

5. Calibrate any sensors in the air handlers.  We calibrate annually.

I can send a screen shot of the air handler from the BAS?

Good luck,
Noah Clay

Quattrone Nanofabrication Facility
University of Pennsylvania 
Philadelphia, PA

Sent from my iPhone

> On Jul 23, 2015, at 12:53, Paul, Jack <Jack.Paul at hdrinc.com> wrote:
> 
> Hello Kamal,
> In general terms, there are only a couple of methods for removing moisture from large volumes of air as required for the cleanroom make-up air.  You can cool the air enough to condense the water vapor out, or you can absorb the water vapor with a dessicant dryer.
>  
> Of the two, the most common is to cool the air, since you need to do that anyway. However, to get good condensation the water temperature must be pretty low, and the air velocity through the air handler and over the cooling coils must be relatively slow.  So my best guess is that your infrastructure may be ?under designed? to squeeze enough moisture out of the air to reduce the humidity to acceptable levels around 43% or so.  In-line duct dehumidifiers just can?t keep up with the large volumes of air and large quantities of moisture to be taken out of such wet air.
>  
> Optimally, you would have one or two large make-up air handlers with large cooling coils (maybe even dual coils in sequence) that would run chilled water provided from your chiller plant (in the building or remote on campus?).  The water temp is low enough (typical design range would be around 5 to 7 deg C) that it would cool the incoming outside air (design conditions maybe 32-37 deg C and 75-100% RH?) to around 13 deg C.  The 13 deg air cannot hold as much water and it condenses out.  This low temperature make-up air is then mixed with recirculated air either in your recirculating air handlers or perhaps within the cleanroom volume if you are using fan-filter units, further reducing the RH as the temperature rises to internal cleanroom design conditions about 20 deg C.  (Since the humidity is ?relative? to the capacity of the air to hold water vapor, if the water vapor content remains constant as the temperature rises, the relative humidity decreases as a percentage of capacity).
>  
> The other option is dessicant drying, but it consumes very large quantities of energy and actually heats the incoming air, which is in contrast to what you want to accomplish.
>  
> Suggest checking your
> -        chilled water capacity (how many tons of cooling are available) and the water flow rate
> -        chilled water temperature (can it be set lower?)
> -        coil size in the make-up air handler- can the air handler be retrofit with a better coil design or in-line dual coils
>  
> Hope this helps as a starting point.
> Regards,
> Jack
>  
>  
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav
> Sent: Thursday, July 23, 2015 6:42 AM
> To: labnetwork at mtl.mit.edu
> Subject: [labnetwork] High Humidity Issues in Coastal Areas?
>  
> Dear All,
>  
> During Monsoon time in India, and specially in Mumbai where it rains heavily from June to September, we observe high humidity in the lab ~65%. We have de-humidifiers as well as other HVAC infrastructure. But more control is required. Is it possible or our infrastructure is not good enough?
>  
> Are there any other known humidity control solutions known to you. Is it the case with others as well, who are in heavy rains/humid area. This certainly is not the case with Intel in Portland, OR, where it rains a lot too.
>  
> --
> Thanks,
> Kamal Yadav
> Sr. Process Technologist
> Electrical Engineering
> IIT Bombay
> Mobile: 7506144798
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From hathaway at cns.fas.harvard.edu  Thu Jul 23 22:41:15 2015
From: hathaway at cns.fas.harvard.edu (Hathaway, Malcolm)
Date: Fri, 24 Jul 2015 02:41:15 +0000
Subject: [labnetwork] TGMS Emergency Response Cordination
In-Reply-To: <DDFFDF4C-E84B-4CD0-9571-AA43341D2403@seas.upenn.edu>
References: <76D36939-801B-48F0-BA26-D1AFB97A7725@ucdavis.edu>,
 <DDFFDF4C-E84B-4CD0-9571-AA43341D2403@seas.upenn.edu>
Message-ID: <A1DD3F105DE57E4CBD0ECD582DF03E9901314B2EF7@HARVANDMBX02.fasmail.priv>

Hi Corey,

So, at Harvard, our response is pretty much the same as what Noah described at UPenn.  Any ambient "sense event" is treated like a major leak.  All trigger levels are very conservative (low = 1/2 x the 8-hour TLV, high = 1 x 8-hour TLV).  For ambient leaks, all available ERT members should respond on-campus, even nights/weekends.

One of the points of discussion here has been exactly what the Emergency Response Team will do in various situations.  Our current goal to provide fast, accurate information to the Fire Department in the event of a "gas sense event".  We call it that to be clear that we do the same thing whether there is an actual leak, or just a "apparent leak".  Our challenge has been to maintain a "fighting posture" until we have definitively demonstrated there is no leak.  This can be tricky as there is a tendency to silence the alarms and get everything "settled down" as quickly as possible.

Most of our (relatively few) events have been sensors needing to be changed (1 or 2 times), cross-sensitivity (a couple of times), and maintenance chamber openings.  The cross-sensitivity issues involved IPA triggering a TEOS sensor (we decommissioned the TEOS sensors), and some acetylene triggering an LEL sensor.  The chamber-maintenance issues (and smells) have gone away since we go a hepa/carbon-filtered portable fume abatement "snorkel".  We have our bump-test guys come every four months, and that has worked pretty well keeping the sensors happy.  We also have Cambridge Fire come to visit annually (the whole lot of them, in three big batches).

One nice/bad thing about this being Harvard is that if anything bad happens (or might happen), it is automatically a Big Deal.  So, the Cambridge Fire Dept. and certainly the campus police/EHS take everything really seriously.  In the case of your support organizations not seeing the seriousness of the situation, the best thing is to get them in, maybe even for the captains/chiefs to come in for a 40 min powerpoint show featuring the Best of Eugene Ngai (Silane Guy), blown up buildings, destroyed fabs, and the like, followed by a tour, so they can see what could go wrong.  Just having face time with these folks (and university administrators) helps build mutual respect and cooperative attitudes.  Unless you have industry fabs nearby, I can imagine locals may not have much familiarity with the hazards.

And, as Vince at NIST pointed out, fix those false alarms.  Real leaks last longer than a few seconds, so trigger after two polling cycles (for instance).  Make sure vendors know what triggers gas alarms.

Hope this helps.  Good luck!


Mac Hathaway
Toxic Gas Monitoring Guy
Harvard CNS



________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Noah Clay [nclay at seas.upenn.edu]
Sent: Wednesday, July 22, 2015 3:55 PM
To: Corey David Wolin
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] TGMS Emergency Response Cordination

Corey,

Here?s our general protocol for the University of Pennsylvania in Philadelphia.  Everyone has agreed to and responds according to this plan.  Below is a from a memo sent last year to our safety group, EHRS (R=radiation), campus police and fire group.

Best,
Noah Clay

Quattrone Nanofabrication Facility
University of Pennsylvania
Philadelphia, PA

*******

-All of our gas cabinets and VMBs can be shut-down remotely by the TGMS.
-All equipment that handles toxic gases can be shut-down or addressed remotely by the TGMS as well.
-In some cases, we don?t shut-down the equipment completely; we shut-down gas pods/boxes attached to the equipment.

*******

We are monitoring hazardous gases and alarming at two levels of detection:

- Level 1: 1/2 TLV or 10% LEL
- Level 2: TLV or 20% LEL

The system also warns us for non-zero concentration in any sensor.  To avoid noise blips and false alarms, any Level 1 or Level 2 detection is considered real (sounds alarms) if it is measured consecutively for three seconds.

Local evacuation is with horns and blue strobes, which are zoned.  For example, if there is a detection of toxic gas in the cleanroom ambient, then horns and blue strobes will be active there, but not in the gas bunkers.

The TGMS is under service contract with two visits annually (gas challenging) and has an active autodialer (analog line, not VOIP).

The autodialer has four outputs (two for exhausted enclosure detection and two for ambient detection):

1. Alarm 1: Level 1 gas detection in an exhaust
Response:
- Shut-down detected gas supply
- Shut-down equipment connected to detected gases
- Contact Nanofab facility staff

2. Alarm 2: Level 2 gas detection in an exhaust
Response:
- Alarm #1 response
- Local evacuation with horns & blue strobes
- Contact PennComm (campus police), EHRS on-call pager, EHRS Director, Nanofab facility staff

3. Alarm 3: Level 1 gas detection in the ambient
Response:
- Alarm #1 response
- Ring fire alarm
- Local evacuation with horns & blue strobes

4. Alarm 4: Level 2 gas detection in the ambient
Response:
- Alarm #3 response
- Contact PennComm (campus police), EHRS on-call pager, EHRS Director, Nanofab facility staff

Gas cabinets and VMBs shut-down themselves for loss of exhaust and the cleanroom is evacuated.  We do not turn on the TGMS in this case; it?s not a detection event.

On Jul 17, 2015, at 11:57 AM, Corey David Wolin <cdwolin at ucdavis.edu<mailto:cdwolin at ucdavis.edu>> wrote:

I'm curious as to how many of you coordinate with campus first responders and EH&S on the serious nature of the the gases to which the sensors are monitoring?  What do many of you feel the proper emergency response to a high level silane alarm should be? Low Level? In addition, at which point should the TGMS evacuate the building if automatic shutoff valves exist for both high and low level alarms?

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From ncrews at latech.edu  Fri Jul 24 17:18:22 2015
From: ncrews at latech.edu (Niel Crews)
Date: Fri, 24 Jul 2015 16:18:22 -0500
Subject: [labnetwork] Coral software
Message-ID: <D264AD11-278F-4EB7-B864-3FF188420CE1@latech.edu>

It looks like Coral is what many folks are using for online cleanroom and equipment management. How do I find out more about it? Is it a commercial product? Open source? 
Niel Crews
Louisiana Tech University





From nannini.matthieu at gmail.com  Sat Jul 25 12:06:18 2015
From: nannini.matthieu at gmail.com (Matthieu Nannini)
Date: Sat, 25 Jul 2015 12:06:18 -0400
Subject: [labnetwork] Coral software
In-Reply-To: <D264AD11-278F-4EB7-B864-3FF188420CE1@latech.edu>
References: <D264AD11-278F-4EB7-B864-3FF188420CE1@latech.edu>
Message-ID: <D3395E1E-F4FD-4267-80A1-4D80FD0012B6@gmail.com>


https://opencoral.mit.edu/


> Le 2015-07-24 ? 17:18, Niel Crews <ncrews at latech.edu> a ?crit :
> 
> It looks like Coral is what many folks are using for online cleanroom and equipment management. How do I find out more about it? Is it a commercial product? Open source? 
> Niel Crews
> Louisiana Tech University
> 
> 
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From kamal.yadav at gmail.com  Mon Jul 27 03:21:46 2015
From: kamal.yadav at gmail.com (Kamal Yadav)
Date: Mon, 27 Jul 2015 12:51:46 +0530
Subject: [labnetwork] High Humidity Issues in Coastal Areas?
Message-ID: <CAOfoCygy_JpTt_DC60-5U6mHfueLBBj-HOCNh7H4uzGpSK0TEQ@mail.gmail.com>

Dear All,

Thanks for the responses from Noah, Jack, Paul, Thomas.

Looks like more maintenance gets critical in such ambiance, but its
possible.

Thanks a lot!



On Fri, Jul 24, 2015 at 1:46 AM, Noah Clay <nclay at upenn.edu> wrote:

> Kamal,
>
> A few things to consider:
>
> 1. Ensure that your incoming chilled water temperature/flow is adequate.
> We average 43F.
>
> 2. Ensure that your chilled water coils are clean.  Ours are inspected
> quarterly; prefilters are changed quarterly; coils cleaned annually & box
> filters are changed annually.  Final discharge HEPAs are changed every
> three years
>
> 3. Ensure that your reheat system is operating properly with clean coils
> for further drying.
>
> 4. Ensure that any downstream humidification valves are not
> passing/defective.
>
> 5. Calibrate any sensors in the air handlers.  We calibrate annually.
>
> I can send a screen shot of the air handler from the BAS?
>
> Good luck,
> Noah Clay
>
> Quattrone Nanofabrication Facility
> University of Pennsylvania
> Philadelphia, PA
>
> Sent from my iPhone
>
> On Jul 23, 2015, at 12:53, Paul, Jack <Jack.Paul at hdrinc.com> wrote:
>
>  Hello Kamal,
>
> In general terms, there are only a couple of methods for removing moisture
> from large volumes of air as required for the cleanroom make-up air.  You
> can cool the air enough to condense the water vapor out, or you can absorb
> the water vapor with a dessicant dryer.
>
>
>
> Of the two, the most common is to cool the air, since you need to do that
> anyway. However, to get good condensation the water temperature must be
> pretty low, and the air velocity through the air handler and over the
> cooling coils must be relatively slow.  So my best guess is that your
> infrastructure may be ?under designed? to squeeze enough moisture out of
> the air to reduce the humidity to acceptable levels around 43% or so.
> In-line duct dehumidifiers just can?t keep up with the large volumes of air
> and large quantities of moisture to be taken out of such wet air.
>
>
>
> Optimally, you would have one or two large make-up air handlers with large
> cooling coils (maybe even dual coils in sequence) that would run chilled
> water provided from your chiller plant (in the building or remote on
> campus?).  The water temp is low enough (typical design range would be
> around 5 to 7 deg C) that it would cool the incoming outside air (design
> conditions maybe 32-37 deg C and 75-100% RH?) to around 13 deg C.  The 13
> deg air cannot hold as much water and it condenses out.  This low
> temperature make-up air is then mixed with recirculated air either in your
> recirculating air handlers or perhaps within the cleanroom volume if you
> are using fan-filter units, further reducing the RH as the temperature
> rises to internal cleanroom design conditions about 20 deg C.  (Since the
> humidity is ?relative? to the capacity of the air to hold water vapor, if
> the water vapor content remains constant as the temperature rises, the
> relative humidity decreases as a percentage of capacity).
>
>
>
> The other option is dessicant drying, but it consumes very large
> quantities of energy and actually heats the incoming air, which is in
> contrast to what you want to accomplish.
>
>
>
> Suggest checking your
>
> -        chilled water capacity (how many tons of cooling are available)
> and the water flow rate
>
> -        chilled water temperature (can it be set lower?)
>
> -        coil size in the make-up air handler- can the air handler be
> retrofit with a better coil design or in-line dual coils
>
>
>
> Hope this helps as a starting point.
>
> Regards,
>
> Jack
>
>
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [
> mailto:labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu>] *On
> Behalf Of *Kamal Yadav
> *Sent:* Thursday, July 23, 2015 6:42 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] High Humidity Issues in Coastal Areas?
>
>
>
> Dear All,
>
>
>
> During Monsoon time in India, and specially in Mumbai where it rains
> heavily from June to September, we observe high humidity in the lab ~65%.
> We have de-humidifiers as well as other HVAC infrastructure. But more
> control is required. Is it possible or our infrastructure is not good
> enough?
>
>
>
> Are there any other known humidity control solutions known to you. Is it
> the case with others as well, who are in heavy rains/humid area. This
> certainly is not the case with Intel in Portland, OR, where it rains a lot
> too.
>
>
>
> --
>
> Thanks,
>
> Kamal Yadav
>
> Sr. Process Technologist
>
> Electrical Engineering
>
> IIT Bombay
>
> Mobile: 7506144798
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>


-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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From julia.aebersold at louisville.edu  Mon Jul 27 11:31:15 2015
From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu)
Date: Mon, 27 Jul 2015 15:31:15 +0000
Subject: [labnetwork] Coral software
In-Reply-To: <D3395E1E-F4FD-4267-80A1-4D80FD0012B6@gmail.com>
References: <D264AD11-278F-4EB7-B864-3FF188420CE1@latech.edu>
 <D3395E1E-F4FD-4267-80A1-4D80FD0012B6@gmail.com>
Message-ID: <D84411B2FA8CBA42BC4868D5382CA1BB015560E259@EXMBX17.ad.louisville.edu>

Niel, this was a big topic of discussion at the last UGIM conference.  We opted for the commercial software FOM for it was a good fit for our facility, but there are more choices becoming available.

Cheers!

Julia Aebersold, Ph.D.
Cleanroom Manager
Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini
Sent: Saturday, July 25, 2015 12:06 PM
To: Niel Crews <ncrews at latech.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Coral software


https://opencoral.mit.edu/<https://urldefense.proofpoint.com/v2/url?u=https-3A__opencoral.mit.edu_&d=AwMFaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=gcH8xiFbdW85DCRc7ykPjCcEGXC_soMp31tFkRJYDvc&s=2NGUY53ekGVnNNszC_hLgU0UjHg8_xx-o4Quidguhko&e=>


Le 2015-07-24 ? 17:18, Niel Crews <ncrews at latech.edu<mailto:ncrews at latech.edu>> a ?crit :
It looks like Coral is what many folks are using for online cleanroom and equipment management. How do I find out more about it? Is it a commercial product? Open source?
Niel Crews
Louisiana Tech University



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork<https://urldefense.proofpoint.com/v2/url?u=https-3A__www-2Dmtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=AwMFaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=gcH8xiFbdW85DCRc7ykPjCcEGXC_soMp31tFkRJYDvc&s=0k6xSXlpQqaw62xAykk4lDqUCSha9yb6VyvTHu-wVsI&e=>
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From michael.rooks at yale.edu  Tue Jul 28 13:22:40 2015
From: michael.rooks at yale.edu (Michael Rooks)
Date: Tue, 28 Jul 2015 13:22:40 -0400
Subject: [labnetwork] Coral software
In-Reply-To: <D264AD11-278F-4EB7-B864-3FF188420CE1@latech.edu>
References: <D264AD11-278F-4EB7-B864-3FF188420CE1@latech.edu>
Message-ID: <55B7BA60.3090702@yale.edu>

We use the new commercial version of Coral, called Badger. 
<http://badgerlms.com/> Our system is hosted on an Amazon server and 
administered by the company in California.

The old (free) Coral system is no longer a good choice, in my opinion. 
We used it for a few years, but are now much better off with Badger.


--------------------------------
Michael Rooks
Yale Institute of Nanoscience and Quantum Engineering
nano.yale.edu <http://nano.yale.edu>



On 07/24/2015 05:18 PM, Niel Crews wrote:
> It looks like Coral is what many folks are using for online cleanroom and equipment management. How do I find out more about it? Is it a commercial product? Open source?
> Niel Crews
> Louisiana Tech University
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://urldefense.proofpoint.com/v2/url?u=https-3A__www-2Dmtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=AwICAg&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=ZPR_Z7UixyQKQssshPBf4HgWNzM_3RKL3m9AQYdKEAA&s=M2TDYrQADUAWV6jc8x4Olh_wyN68tVFWeMh5J1f4V04&e=

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From vito.logiudice at uwaterloo.ca  Wed Jul 29 17:27:05 2015
From: vito.logiudice at uwaterloo.ca (Vito Logiudice)
Date: Wed, 29 Jul 2015 21:27:05 +0000
Subject: [labnetwork] Coral software
In-Reply-To: <55B7BA60.3090702@yale.edu>
References: <D264AD11-278F-4EB7-B864-3FF188420CE1@latech.edu>
 <55B7BA60.3090702@yale.edu>
Message-ID: <D1DEBB7F.5F59F%vlogiudi@connect.uwaterloo.ca>

Hi Niel,

If it can help, our experience with Badger over the past 1.5 years has been excellent. We had originally planned to implement Coral but due to varying opinions within the IT group responsible for implementing the platform here, we decided to opt for Badger about two years ago and have never looked back. We have about 50 tools plus another 15 or so tools in another lab running on the platform with over 100 users. We?re now in the process of implementing physical interlocks and support has been excellent all around.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca


From: Michael Rooks <michael.rooks at yale.edu<mailto:michael.rooks at yale.edu>>
Date: Tuesday, July 28, 2015 at 1:22 PM
To: "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: Re: [labnetwork] Coral software

We use the new commercial version of Coral, called Badger.<http://badgerlms.com/> Our system is hosted on an Amazon server and administered by the company in California.

The old (free) Coral system is no longer a good choice, in my opinion. We used it for a few years, but are now much better off with Badger.


--------------------------------
Michael Rooks
Yale Institute of Nanoscience and Quantum Engineering
nano.yale.edu<http://nano.yale.edu>



On 07/24/2015 05:18 PM, Niel Crews wrote:

It looks like Coral is what many folks are using for online cleanroom and equipment management. How do I find out more about it? Is it a commercial product? Open source?
Niel Crews
Louisiana Tech University



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>https://urldefense.proofpoint.com/v2/url?u=https-3A__www-2Dmtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=AwICAg&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=ZPR_Z7UixyQKQssshPBf4HgWNzM_3RKL3m9AQYdKEAA&s=M2TDYrQADUAWV6jc8x4Olh_wyN68tVFWeMh5J1f4V04&e=


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From vito.logiudice at uwaterloo.ca  Wed Jul 29 17:47:24 2015
From: vito.logiudice at uwaterloo.ca (Vito Logiudice)
Date: Wed, 29 Jul 2015 21:47:24 +0000
Subject: [labnetwork] TGMS Emergency Response Cordination
Message-ID: <D1DEBD71.5F5B0%vlogiudi@connect.uwaterloo.ca>

Hi Corey,

I can?t add much to the many excellent insights which have already been
contributed. In our particular case, we have fortunately not had many
false alarms since the start of our operations last September. The 2-3
false alarms that we did have occurred during the first couple of months
and were due to excessive TEOS sensor sensitivities to IPA; this has since
been addressed and resolved. I should mention that our TGMS system is not
connected to the building fire panel so the entire building is not
evacuated should a level 2 alarm be triggered; only the cleanroom is
evacuated. Some may question the sensibility of this approach but there is
a long story behind this which I won?t get into here.

I have met with our Director of Police Services to establish a proper
response protocol for their dispatchers and first responders. I have also
met with someone from our local fire department and since there was
significant interest in learning more about our facility, I plan to invite
a large crew to tour the facility and to answer questions this coming
fall. I agree with others on here that it is a good thing for first
responders to be familiar with the installations and the people whom run
them.

Finally, if it can help you can find a copy of our facility?s emergency
response plan here:
https://fab.qnc.uwaterloo.ca/data/access/safety/emergency-response

UWaterloo Police Services has their own response plan for their officers
which is separate from but consistent with the procedures listed in this
document.

Best of luck to you as you deal with this important issue. Glad to speak
with you offline if you have any questions in regards to our particular
setup and procedures.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca
Website: https://fab.qnc.uwaterloo.ca





-----Original Message-----
From: Corey David Wolin <cdwolin at ucdavis.edu>
Date: Friday, July 17, 2015 at 11:57 AM
To: "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
Subject: [labnetwork] TGMS Emergency Response Cordination

>Hi All
>
>After a few false alarm with our toxic gas monitoring system concerns
>were raised with regards to the response from fire and PD. They approach
>to to the alarms is as if they are all false alarms.  Our TGMS system is
>set to evacuate the building on any high level gas alarm, which includes
>the dean's office among all other engineering administrative staff.  They
>also don't contact anyone on the alarm contact list for after hours
>alarms which is very concerning. This was determined after looking
>through the alarm history.
>
>I'm curious as to how many of you coordinate with campus first responders
>and EH&S on the serious nature of the the gases to which the sensors are
>monitoring?  What do many of you feel the proper emergency response to a
>high level silane alarm should be? Low Level? In addition, at which point
>should the TGMS evacuate the building if automatic shutoff valves exist
>for both high and low level alarms?
>
>Any feedback and/or advice on this would be greatly appreciated.
>
>Thanks,
>Corey
>
>-----------------
>Corey Wolin
>NanoFab Manager
>UCDavis Engineering
>
>
>_______________________________________________
>labnetwork mailing list
>labnetwork at mtl.mit.edu
>https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork




From dongshink at gmail.com  Thu Jul 30 15:05:51 2015
From: dongshink at gmail.com (Dongshin Kim)
Date: Thu, 30 Jul 2015 15:05:51 -0400
Subject: [labnetwork] Film photomask service in Boston
Message-ID: <6C5AFE19-B6AB-4A55-9451-10918263CA1F@gmail.com>

Dear Colleagues,

I was wondering if you could recommend a couple of film photomask service companies in the greater Boston area. I am currently using a company in CA but sometimes it is not convenient when I am in a hurry. 
Thank you for your help, in advance. 

Best regards,

Dongshin Kim, PhD
Microflow Laboratory
www.microflowlab.com


From elliscd at auburn.edu  Thu Jul 30 16:07:20 2015
From: elliscd at auburn.edu (Charles Ellis)
Date: Thu, 30 Jul 2015 20:07:20 +0000
Subject: [labnetwork] Film photomask service in Boston
In-Reply-To: <6C5AFE19-B6AB-4A55-9451-10918263CA1F@gmail.com>
References: <6C5AFE19-B6AB-4A55-9451-10918263CA1F@gmail.com>
Message-ID: <E44AE5E6-D791-467A-B950-F4107B65E14C@auburn.edu>

We have been using Garrett for many years - they are in Texas, but are extremely fast.




> On Jul 30, 2015, at 2:42 PM, Dongshin Kim <dongshink at gmail.com> wrote:
> 
> Dear Colleagues,
> 
> I was wondering if you could recommend a couple of film photomask service companies in the greater Boston area. I am currently using a company in CA but sometimes it is not convenient when I am in a hurry. 
> Thank you for your help, in advance. 
> 
> Best regards,
> 
> Dongshin Kim, PhD
> Microflow Laboratory
> www.microflowlab.com
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork



From mheiden at engr.ucr.edu  Thu Jul 30 18:12:55 2015
From: mheiden at engr.ucr.edu (Mark Heiden)
Date: Thu, 30 Jul 2015 22:12:55 +0000
Subject: [labnetwork] Nitrogen Purity for Sputtering
Message-ID: <234caf9bd524420cb27be4056824c923@pobox.engr.local>

We are moving a sputtering system from a remote installation into our cleanroom and the intent has been to take it "off the bottle" and use the building process nitrogen system for process gas as well as venting. The bottles on the old install were 99.999% but the building process nitrogen is not certified to any exact number. The piping comes out of the 9000 gal. tank and through a vaporizer, then it goes through filters then splits into "house" nitrogen which is copper piping and "process" nitrogen which is all stainless steel with 10ra polished inside.

>From the stainless building process nitrogen line regulator, we ran high purity Teflon PFA tubing to the point of use filter on the MFC. Since I can't provide a precise purity for the evaporated nitrogen gas coming from the bulk tank and the tubing from the regulator to the filters is not stainless, a PI that was using the system is terrified that the nitrogen won't be pure enough. Could I get your opinions on what the purity may be expected to be and if it is less than 99.999% would the filters correct this anyway?

I'm sure most operations that spent the money for a "process" nitrogen system are not then running everything on bottles anyway so how do you ensure that the nitrogen being delivered to the systems is pure enough?

Thanks in advance,


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551


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From dongshink at gmail.com  Thu Jul 30 18:16:10 2015
From: dongshink at gmail.com (Dongshin Kim)
Date: Thu, 30 Jul 2015 18:16:10 -0400
Subject: [labnetwork] Film photomask service in Boston
In-Reply-To: <6C5AFE19-B6AB-4A55-9451-10918263CA1F@gmail.com>
References: <6C5AFE19-B6AB-4A55-9451-10918263CA1F@gmail.com>
Message-ID: <FE21A9A7-596C-416B-99E7-AF91BDF021D8@gmail.com>

Thank you all who replied with helpful info. 
Now I have a couple of options.

Best,
Dongshin

> On Jul 30, 2015, at 3:05 PM, Dongshin Kim <dongshink at gmail.com> wrote:
> 
> Dear Colleagues,
> 
> I was wondering if you could recommend a couple of film photomask service companies in the greater Boston area. I am currently using a company in CA but sometimes it is not convenient when I am in a hurry. 
> Thank you for your help, in advance. 
> 
> Best regards,
> 
> Dongshin Kim, PhD
> Microflow Laboratory
> www.microflowlab.com



From shott at stanford.edu  Fri Jul 31 01:44:34 2015
From: shott at stanford.edu (John D Shott)
Date: Fri, 31 Jul 2015 05:44:34 +0000
Subject: [labnetwork] Nitrogen Purity for Sputtering
In-Reply-To: <234caf9bd524420cb27be4056824c923@pobox.engr.local>
References: <234caf9bd524420cb27be4056824c923@pobox.engr.local>
Message-ID: <6A046248-6314-4555-B8C3-DF63C0006236@stanford.edu>

Mark:

In general, I believe that boiled off gas from a cryogenic source is always going to be higher quality in terms of background moisture and oxygen than just about any bottled source.

We also have a single tank that supplies both a copper-piped house N2 system and SS-piped UHP nitrogen system. Other than piping differences, the UHP system also has a purifier at the vaporizer end of the system.

As I recall ... I don't have my data at hand ... our house system in pretty good: on the order of 0.5-0.6 ppm moisture and oxygen both at the source and well downstream. As I recall, our UHP nitrogen is on the order of 5X lower in both moisture and oxygen. Those are based on occasional spot checks ... meaning only once in several years.

We are in the process of adding hygrometers on both nitrogen systems, as well as on our argon and CDA. Too early to say much, but we don't see much in the way of wild swings in moisture including immediately after a tank fill.

A couple of other comments:

1. Do you mean POU filters or purifiers?

2. Someone probably knows better than I, but is diffusion of moisture and oxygen through Teflon that much slower than through polyflo or other plastic tubing?  Maybe Teflon is OK, but plastic tubing is a no-no if you want to deliver high purity gas. I'd suggest going to SS with, if you have to, a short length of SS flex line. We have some polyflo and Teflon tubing in use ... but I am not proud of myself to have to confess that in this public forum.

3. I'd consider brining in a reputable analytical lab to look at oxygen and moisture levels, particularly if you can compare your bottled gas to you process gas.

4. In my experience, house gases are an easy scapegoat for process problems, but I have never found them to be the real culprit .... Also, moisture is easy to get into a system, but takes forever to get out unless you can bake it out, trap it with titanium sublimation, etc.

Let me know if you have further questions or would like me to sent that actual data that I mentioned.

I vote for using your bulk system and eliminating the bottles ...

John

Sent from my iPhone

On Jul 30, 2015, at 4:43 PM, "Mark Heiden" <mheiden at engr.ucr.edu<mailto:mheiden at engr.ucr.edu>> wrote:

We are moving a sputtering system from a remote installation into our cleanroom and the intent has been to take it "off the bottle" and use the building process nitrogen system for process gas as well as venting. The bottles on the old install were 99.999% but the building process nitrogen is not certified to any exact number. The piping comes out of the 9000 gal. tank and through a vaporizer, then it goes through filters then splits into "house" nitrogen which is copper piping and "process" nitrogen which is all stainless steel with 10ra polished inside.

>From the stainless building process nitrogen line regulator, we ran high purity Teflon PFA tubing to the point of use filter on the MFC. Since I can't provide a precise purity for the evaporated nitrogen gas coming from the bulk tank and the tubing from the regulator to the filters is not stainless, a PI that was using the system is terrified that the nitrogen won't be pure enough. Could I get your opinions on what the purity may be expected to be and if it is less than 99.999% would the filters correct this anyway?

I'm sure most operations that spent the money for a "process" nitrogen system are not then running everything on bottles anyway so how do you ensure that the nitrogen being delivered to the systems is pure enough?

Thanks in advance,


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551


_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From schweig at umich.edu  Fri Jul 31 09:11:46 2015
From: schweig at umich.edu (Dennis Schweiger)
Date: Fri, 31 Jul 2015 09:11:46 -0400
Subject: [labnetwork] Nitrogen Purity for Sputtering
Message-ID: <CAKzi2_P+oTJhs-JX=-yUJj2O9j8VTkXPgDgfzre74YhwoJJxbA@mail.gmail.com>

Mark,

one thing you might consider is a point of use purifier. Something like
this;

http://www.saespuregas.com/Products/Gas-Purifier/Rare-Gas-and-Nitrogen-Ambient-Temperature-Canister.html

We've used them, and have installed them, in a variety of applications for
the reasons you mentioned.

Dennis Schweiger
University of Michigan/LNF

734.647.2055 Ofc

On Thu, Jul 30, 2015 at 6:12 PM, Mark Heiden <mheiden at engr.ucr.edu> wrote:

> We are moving a sputtering system from a remote installation into our
> cleanroom and the intent has been to take it ?off the bottle? and use the
> building process nitrogen system for process gas as well as venting. The
> bottles on the old install were 99.999% but the building process nitrogen
> is not certified to any exact number. The piping comes out of the 9000 gal.
> tank and through a vaporizer, then it goes through filters then splits into
> ?house? nitrogen which is copper piping and ?process? nitrogen which is all
> stainless steel with 10ra polished inside.
>
>
>
> From the stainless building process nitrogen line regulator, we ran high
> purity Teflon PFA tubing to the point of use filter on the MFC. Since I
> can?t provide a precise purity for the evaporated nitrogen gas coming from
> the bulk tank and the tubing from the regulator to the filters is not
> stainless, a PI that was using the system is terrified that the nitrogen
> won?t be pure enough. Could I get your opinions on what the purity may be
> expected to be and if it is less than 99.999% would the filters correct
> this anyway?
>
>
>
> I?m sure most operations that spent the money for a ?process? nitrogen
> system are not then running everything on bottles anyway so how do you
> ensure that the nitrogen being delivered to the systems is pure enough?
>
>
>
> Thanks in advance,
>
>
>
>
>
> Mark Heiden
>
> NanoFab Cleanroom Manager
>
> Center for Nanoscale Science and Engineering
>
> University of California, Riverside
>
> 951-827-2551
>
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
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From tbritton at criticalsystemsinc.com  Fri Jul 31 10:28:09 2015
From: tbritton at criticalsystemsinc.com (Tom Britton)
Date: Fri, 31 Jul 2015 14:28:09 +0000
Subject: [labnetwork] Nitrogen Purity for Sputtering
In-Reply-To: <234caf9bd524420cb27be4056824c923@pobox.engr.local>
References: <234caf9bd524420cb27be4056824c923@pobox.engr.local>
Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2E01363CF1@P3PWEX2MB006.ex2.secureserver.net>

Hi Mark,

A couple of items to point out.

1. Using Teflon tubing in a high purity gas system can lead to contamination of your nitrogen as Teflon is permeable to gases, including oxygen, hydrogen and moisture. (See attachments) For high purity liquids, Teflon tubing is an excellent material, but is not a good choice for high purity gas. I would recommend replacing the Teflon tubing with electropolished 10Ra stainless steel tubing. The two reasons for this are 1. stainless steel is not permeable to gas/moisture, and 2. the electropolished surface provides a very smooth surface so as not to aid moisture in its ability to stick to the surface of the metal.

2. If the professor's process is moisture sensitive, I would suggest a point of use purifier like the one attached. Depending on required flow rates, the cost is going to be around $1000 - $1,500, and should last for years if sized correctly. Depending on the media chosen in the purifier, you can eliminate moisture to less than 1 ppb, or a host of other contaminants to the same level of removal.

If you want to discuss this deeper, just give me a call and I'd be happy to help.

Good luck sir!

Tom

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208-890-1417
Office: 877-572-5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

[logo for email signature png]



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Heiden
Sent: Thursday, July 30, 2015 4:13 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Nitrogen Purity for Sputtering

We are moving a sputtering system from a remote installation into our cleanroom and the intent has been to take it "off the bottle" and use the building process nitrogen system for process gas as well as venting. The bottles on the old install were 99.999% but the building process nitrogen is not certified to any exact number. The piping comes out of the 9000 gal. tank and through a vaporizer, then it goes through filters then splits into "house" nitrogen which is copper piping and "process" nitrogen which is all stainless steel with 10ra polished inside.

>From the stainless building process nitrogen line regulator, we ran high purity Teflon PFA tubing to the point of use filter on the MFC. Since I can't provide a precise purity for the evaporated nitrogen gas coming from the bulk tank and the tubing from the regulator to the filters is not stainless, a PI that was using the system is terrified that the nitrogen won't be pure enough. Could I get your opinions on what the purity may be expected to be and if it is less than 99.999% would the filters correct this anyway?

I'm sure most operations that spent the money for a "process" nitrogen system are not then running everything on bottles anyway so how do you ensure that the nitrogen being delivered to the systems is pure enough?

Thanks in advance,


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551


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From bob at eecs.berkeley.edu  Fri Jul 31 12:02:24 2015
From: bob at eecs.berkeley.edu (Robert M. HAMILTON)
Date: Fri, 31 Jul 2015 09:02:24 -0700
Subject: [labnetwork] Nitrogen Purity for Sputtering
In-Reply-To: <234caf9bd524420cb27be4056824c923@pobox.engr.local>
References: <234caf9bd524420cb27be4056824c923@pobox.engr.local>
Message-ID: <CAK9WbAfRzbn+aMjjWaxer+zm6jzL2-wrsqHTqrPgRtGzE9t_Bw@mail.gmail.com>

Mark Heiden,

The UC Berkeley Marvell NanoLab has looked into house, high-purityN2 versus
UHP cylinder N2 in reactive sputter applications.Using a RGA we see more
contamination with using cylinder N2 than our house-delivered N2. As per
your note, the NanoLab N2 is also derived from a cryogenic LN vessel. The
spec from the LN vendor gives impurities of <1 ppm.

Having said this, N2 is delivery throughout the lab is branched to
countless uses, including things like N2 blowoff guns. There is also
significant use of plastic tubing and retractile hoses, all of which are
subject to permeation. Partial-pressure laws invariably mean the N2
delivery system is subject to back-diffusion. Long-ago we made sure that
anytime a regulator goes into the N2 circuit, especially those cheap types,
it is a non self-relieving type, yet another source for back-diffusion.

As a sidebar to this conversation I question whether Teflon-PFA tubing and
the associated fittings offer any advantage over polyethylene tubing when
it comes to delivering N2 with high process purity.Teflon tubing and
fittings are subject to compression-set given time and like other polymers
PTFE and extrudable variants have diffusion issues.

Given the above we decided that in processes where N2 becomes part of a
critical thin film, we will add an N2 purifier cartridge. These typically
come as a compact SS cartridge with face-seal (VCR) fittings and can be
exposed to air, for the short time required for installation. If you pick
one of these make sure the reactive purifying material is a metal-alloy and
not an organic.

In system, gas sticks typically have a pneumatic isolation valve (Nupro)
before and after a mass flow controller (mfc). The best place to install a
purifier is in this circuit. Consider adding an additional valve to isolate
the purifier should an mfc needs change-out or have a VCR cap handy to
protect it.

Given such placement the purifier cartridge will only see the actual amount
of N2 requires by the process and otherwise remain isolated. Given good
supply N2 purity it should last a long time - perhaps into retirements?

Regards,
Bob Hamilton




Robert Hamilton
University of CA, Berkeley
Marvell NanoLab Equipment Manager
Rm 520 Sutardja Dai Hall, MC 1754
Berkeley, CA 94720
Phone 510-809-8618 (desk - preferred)
Mobile 510-325-7557 (my personal mobile)
E-mail preferred: bob at eecs.berkeley.edu
http://nanolab.berkeley.edu/



On Thu, Jul 30, 2015 at 3:12 PM, Mark Heiden <mheiden at engr.ucr.edu> wrote:

> We are moving a sputtering system from a remote installation into our
> cleanroom and the intent has been to take it ?off the bottle? and use the
> building process nitrogen system for process gas as well as venting. The
> bottles on the old install were 99.999% but the building process nitrogen
> is not certified to any exact number. The piping comes out of the 9000 gal.
> tank and through a vaporizer, then it goes through filters then splits into
> ?house? nitrogen which is copper piping and ?process? nitrogen which is all
> stainless steel with 10ra polished inside.
>
>
>
> From the stainless building process nitrogen line regulator, we ran high
> purity Teflon PFA tubing to the point of use filter on the MFC. Since I
> can?t provide a precise purity for the evaporated nitrogen gas coming from
> the bulk tank and the tubing from the regulator to the filters is not
> stainless, a PI that was using the system is terrified that the nitrogen
> won?t be pure enough. Could I get your opinions on what the purity may be
> expected to be and if it is less than 99.999% would the filters correct
> this anyway?
>
>
>
> I?m sure most operations that spent the money for a ?process? nitrogen
> system are not then running everything on bottles anyway so how do you
> ensure that the nitrogen being delivered to the systems is pure enough?
>
>
>
> Thanks in advance,
>
>
>
>
>
> Mark Heiden
>
> NanoFab Cleanroom Manager
>
> Center for Nanoscale Science and Engineering
>
> University of California, Riverside
>
> 951-827-2551
>
>
>
>
>
> _______________________________________________
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From agregg at abbiegregg.com  Fri Jul 31 14:14:38 2015
From: agregg at abbiegregg.com (Abbie Gregg)
Date: Fri, 31 Jul 2015 14:14:38 -0400
Subject: [labnetwork] Nitrogen Purity for Sputtering
In-Reply-To: <6A046248-6314-4555-B8C3-DF63C0006236@stanford.edu>
References: <234caf9bd524420cb27be4056824c923@pobox.engr.local>
 <6A046248-6314-4555-B8C3-DF63C0006236@stanford.edu>
Message-ID: <530D6DB8-A98E-4BA0-A9D2-998C33E65639@abbiegregg.com>

I agree.

Sent from Abbie Gregg's iPhone


On Jul 31, 2015, at 4:45 AM, John D Shott <shott at stanford.edu<mailto:shott at stanford.edu>> wrote:

Mark:

In general, I believe that boiled off gas from a cryogenic source is always going to be higher quality in terms of background moisture and oxygen than just about any bottled source.

We also have a single tank that supplies both a copper-piped house N2 system and SS-piped UHP nitrogen system. Other than piping differences, the UHP system also has a purifier at the vaporizer end of the system.

As I recall ? I don't have my data at hand ? our house system in pretty good: on the order of 0.5-0.6 ppm moisture and oxygen both at the source and well downstream. As I recall, our UHP nitrogen is on the order of 5X lower in both moisture and oxygen. Those are based on occasional spot checks ? meaning only once in several years.

We are in the process of adding hygrometers on both nitrogen systems, as well as on our argon and CDA. Too early to say much, but we don't see much in the way of wild swings in moisture including immediately after a tank fill.

A couple of other comments:

1. Do you mean POU filters or purifiers?

2. Someone probably knows better than I, but is diffusion of moisture and oxygen through Teflon that much slower than through polyflo or other plastic tubing?  Maybe Teflon is OK, but plastic tubing is a no-no if you want to deliver high purity gas. I'd suggest going to SS with, if you have to, a short length of SS flex line. We have some polyflo and Teflon tubing in use ? but I am not proud of myself to have to confess that in this public forum.

3. I'd consider brining in a reputable analytical lab to look at oxygen and moisture levels, particularly if you can compare your bottled gas to you process gas.

4. In my experience, house gases are an easy scapegoat for process problems, but I have never found them to be the real culprit ?. Also, moisture is easy to get into a system, but takes forever to get out unless you can bake it out, trap it with titanium sublimation, etc.

Let me know if you have further questions or would like me to sent that actual data that I mentioned.

I vote for using your bulk system and eliminating the bottles ?

John

Sent from my iPhone

On Jul 30, 2015, at 4:43 PM, "Mark Heiden" <mheiden at engr.ucr.edu<mailto:mheiden at engr.ucr.edu>> wrote:

We are moving a sputtering system from a remote installation into our cleanroom and the intent has been to take it ?off the bottle? and use the building process nitrogen system for process gas as well as venting. The bottles on the old install were 99.999% but the building process nitrogen is not certified to any exact number. The piping comes out of the 9000 gal. tank and through a vaporizer, then it goes through filters then splits into ?house? nitrogen which is copper piping and ?process? nitrogen which is all stainless steel with 10ra polished inside.

From the stainless building process nitrogen line regulator, we ran high purity Teflon PFA tubing to the point of use filter on the MFC. Since I can?t provide a precise purity for the evaporated nitrogen gas coming from the bulk tank and the tubing from the regulator to the filters is not stainless, a PI that was using the system is terrified that the nitrogen won?t be pure enough. Could I get your opinions on what the purity may be expected to be and if it is less than 99.999% would the filters correct this anyway?

I?m sure most operations that spent the money for a ?process? nitrogen system are not then running everything on bottles anyway so how do you ensure that the nitrogen being delivered to the systems is pure enough?

Thanks in advance,


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551


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From mheiden at engr.ucr.edu  Fri Jul 31 15:16:28 2015
From: mheiden at engr.ucr.edu (Mark Heiden)
Date: Fri, 31 Jul 2015 19:16:28 +0000
Subject: [labnetwork] Nitrogen Purity for Sputtering
In-Reply-To: <CAK9WbAfRzbn+aMjjWaxer+zm6jzL2-wrsqHTqrPgRtGzE9t_Bw@mail.gmail.com>
References: <234caf9bd524420cb27be4056824c923@pobox.engr.local>
 <CAK9WbAfRzbn+aMjjWaxer+zm6jzL2-wrsqHTqrPgRtGzE9t_Bw@mail.gmail.com>
Message-ID: <dc4bd0d43fee4972b851cb35ab204bc4@pobox.engr.local>

Thank you all for your input!

We have decided to just plumb the process N2 with stainless all the way so there can be no objection to the material any longer. As for the purity of our process nitrogen system from our tank, we will assume it is good enough for now not having an actual number but will plan on having an analysis done for future reference. I am sure this question will come up a year or two down the road and it would help to have some backup documentation.

If anyone knows of a company that comes on site that can test a few points on the system and provide analysis I would appreciate their contact info.

Best Regards!


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551



From: Robert M. HAMILTON [mailto:bob at eecs.berkeley.edu]
Sent: Friday, July 31, 2015 9:02 AM
To: Mark Heiden <mheiden at engr.ucr.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Nitrogen Purity for Sputtering

Mark Heiden,

The UC Berkeley Marvell NanoLab has looked into house, high-purityN2 versus UHP cylinder N2 in reactive sputter applications.Using a RGA we see more contamination with using cylinder N2 than our house-delivered N2. As per your note, the NanoLab N2 is also derived from a cryogenic LN vessel. The spec from the LN vendor gives impurities of <1 ppm.

Having said this, N2 is delivery throughout the lab is branched to countless uses, including things like N2 blowoff guns. There is also significant use of plastic tubing and retractile hoses, all of which are subject to permeation. Partial-pressure laws invariably mean the N2 delivery system is subject to back-diffusion. Long-ago we made sure that anytime a regulator goes into the N2 circuit, especially those cheap types, it is a non self-relieving type, yet another source for back-diffusion.

As a sidebar to this conversation I question whether Teflon-PFA tubing and the associated fittings offer any advantage over polyethylene tubing when it comes to delivering N2 with high process purity.Teflon tubing and fittings are subject to compression-set given time and like other polymers PTFE and extrudable variants have diffusion issues.

Given the above we decided that in processes where N2 becomes part of a critical thin film, we will add an N2 purifier cartridge. These typically come as a compact SS cartridge with face-seal (VCR) fittings and can be exposed to air, for the short time required for installation. If you pick one of these make sure the reactive purifying material is a metal-alloy and not an organic.

In system, gas sticks typically have a pneumatic isolation valve (Nupro) before and after a mass flow controller (mfc). The best place to install a purifier is in this circuit. Consider adding an additional valve to isolate the purifier should an mfc needs change-out or have a VCR cap handy to protect it.

Given such placement the purifier cartridge will only see the actual amount of N2 requires by the process and otherwise remain isolated. Given good supply N2 purity it should last a long time - perhaps into retirements?

Regards,
Bob Hamilton




Robert Hamilton
University of CA, Berkeley
Marvell NanoLab Equipment Manager
Rm 520 Sutardja Dai Hall, MC 1754
Berkeley, CA 94720
Phone 510-809-8618 (desk - preferred)
Mobile 510-325-7557 (my personal mobile)
E-mail preferred: bob at eecs.berkeley.edu<mailto:bob at eecs.berkeley.edu>
http://nanolab.berkeley.edu/



On Thu, Jul 30, 2015 at 3:12 PM, Mark Heiden <mheiden at engr.ucr.edu<mailto:mheiden at engr.ucr.edu>> wrote:
We are moving a sputtering system from a remote installation into our cleanroom and the intent has been to take it ?off the bottle? and use the building process nitrogen system for process gas as well as venting. The bottles on the old install were 99.999% but the building process nitrogen is not certified to any exact number. The piping comes out of the 9000 gal. tank and through a vaporizer, then it goes through filters then splits into ?house? nitrogen which is copper piping and ?process? nitrogen which is all stainless steel with 10ra polished inside.

From the stainless building process nitrogen line regulator, we ran high purity Teflon PFA tubing to the point of use filter on the MFC. Since I can?t provide a precise purity for the evaporated nitrogen gas coming from the bulk tank and the tubing from the regulator to the filters is not stainless, a PI that was using the system is terrified that the nitrogen won?t be pure enough. Could I get your opinions on what the purity may be expected to be and if it is less than 99.999% would the filters correct this anyway?

I?m sure most operations that spent the money for a ?process? nitrogen system are not then running everything on bottles anyway so how do you ensure that the nitrogen being delivered to the systems is pure enough?

Thanks in advance,


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551<tel:951-827-2551>



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