[labnetwork] Ozonized DI Water

[Noah Clay]

Kamal,

OEM Group has their Cintillio spray ozone tool, which appears to be a great RCA clean alternative.  We're hoping to evaluate this system at UPenn in Philadelphia - their Apps Lab is just north of the city.  I'll keep you posted.

Best,
Noah Clay

Quattrone Nanofabrication Facility
University of Pennsylvania 
Philadelphia, PA

Sent from my iPhone

> On Jul 15, 2015, at 06:42, Kamal Yadav <kamal.yadav at gmail.com> wrote:
> 
> Dear All,
> 
> Due to it being cost effective I am exploring ozonized DI water, as it can be used in photoresist stripping applications, and can replace several other cleaning procedures [RCA] as well to save money on high purity acid chemicals.
> 
> If anybody has any experience regarding putting up such system, knowing that would be helpful. 
> 
> -- 
> Thanks,
> Kamal Yadav
> Sr. Process Technologist
> Electrical Engineering
> IIT Bombay
> Mobile: 7506144798
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