[labnetwork] Chamber Cleaning With Gold Contamination

[Rob Vandusen]

Hi Kamal.

Here at Carleton University our main annual undergrad project is a CMOS device chip. For what it worth our Aluminum evaporation system is also deposits quite a bit of gold for bio sensor type projects.  We do try to keep anything that touches the substrates or source material (ie  wafer holder jigs, tweezers etc) separate but the chamber and shielding itself just gets coated over and over with no special cleaning.  Sodium of course is the one big contaminate we are most concerned with.

To my knowledge we have not have had any issues with gold contamination since we started the CMOS/NMOS process more than 15years ago.

Though I’m not sure if the same would hold true for your  ICP CVD system. Depositing a nitride or polysilicon layer would probably help.

 

Regards

Robert Vandusen
Technical Officer, Microfabrication Lab
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-5761
rvanduse at doe.carleton.ca 



 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav
Sent: June-05-15 5:33 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Chamber Cleaning With Gold Contamination

 

Dear All,

 

Though may not make much sense, but would wanted to know if there are any successful cleaning procedures for chamber to remove affect of gold usage/contamination in that chamber.

 

We want to use the chamber with gold pads exposed to the plasma, but at the same time, need to allow those whose devices may get affected from gold [in CMOS]. Any intermediate cleaning/deposition that could significantly (?) reduce the affect. 

 

Our chamber [ICPCVD] has been used [5+ years] with gold pads [exposed to plasma] and so far other groups have not reported any issues with their devices, so its working out fine till now.

 

But we want to take precautionary measures if any.

 

Thanks a lot!

 

-- 

Thanks,

Kamal Yadav

Sr. Process Technologist

Electrical Engineering

IIT Bombay

Mobile: 7506144798

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