[labnetwork] How do you handle PDMS in a cleanroom environment?

[Shivakumar Bhaskaran]

We have the soft litho lab outside the cleanroom. These device fabrication can be done outside the cleanroom. Yes these materials outgas if you are using it in RIE, evaporation chambers. Its better to have dedicated system for softlitho.
There are small desktop plasma chambers available.

-Shiva


Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leif Johansen
Sent: Wednesday, November 25, 2015 2:58 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] How do you handle PDMS in a cleanroom environment?

Dear Lab Network,

I have a dilemma. Polydimethylsiloxane (PDMS) is a promising material for soft lithography, and a lot of our users have a strong wish to process this material in our lab - especially for making nanoimprint stamps . However, before being cured, PDMS is basically a silicone oil, and all our front end engineers (plasma chambers, lithography etc. ) are really scared about this substance ending up in their equipment. Our back end engineers (especially the wire bonding engineer) is also strongly opposed to the introduction of PDMS into the back end lab.

Are there any experience out there in the community on how to handle PDMS in a cleanroom environment?

Best regards,
Leif

Leif S. Johansen

Head of Operations

DTU Danchip



Technical University of Denmark

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Danchip

Ørsteds Plads, Byg. 347

2800  Lyngby

Direct +45 45255713
Mobile +45 25348992

lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>

www.danchip.dtu.dk/<http://www.danchip.dtu.dk/>



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