[labnetwork] Suggestions for interlocking mask aligners

[Shivakumar Bhaskaran]

Hello All,

Since you all are exchanging emails regarding the interlock, I myself planning to do in my facility. I was able to figure out for some of the tool that I have. But two of my tool is hooked up to laptop, if I shutdown the laptop or close the lid of the laptop the software stops working and then the vacuum valve or heater shuts off which I don't want to have like this. I don't want to add computer screen or load the software in desktop due to space constraint.

The two tools that I am having are one is Arradiance Gemstar ALD and another is PE 100 O2 plasma etch. I don't want to pump to be turned off/on using relay, because I want the system to in vacuum even if its not in use.

-Thanks
-Shiva

Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leif Johansen
Sent: Wednesday, October 28, 2015 9:47 AM
To: 'Vito Logiudice' <vito.logiudice at uwaterloo.ca>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Suggestions for interlocking mask aligners

Hello Vito,

At DTU Danchip we have two MA-6 aligners. On both tools we have interlocked the electrical signal for the solenoid controlling the CDA for the shutter. It works fine. If you want, we can mail you some pictures of how we did it.

Of course, if a user really wanted to cheat, he or she could perform all work before the exposure (i.e. mask load, wafer load and alignment) without logging in, and then only log in during exposure. In reality, we do not see such misuse.

Best regards,

Leif


From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice
Sent: 26. oktober 2015 21:43
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Suggestions for interlocking mask aligners

Dear Colleagues,

I would appreciate hearing how you may have interlocked the mask aligners in your respective facilities. In our particular case we have a Suss-Microtec MA6 aligner and we are struggling to identify a parameter that can be interlocked without causing the system additional wear and tear. Any insights would be appreciated. Thank you.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca

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