[labnetwork] Suggestions for interlocking mask aligners

Thu Oct 29 13:45:19 EDT 2015

Was the screen lock function that you have was developed by you or it comes with coral lab management software.

-Thanks
-Shiva

Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

From: Ryan Taylor [mailto:ryant at nanofab.utah.edu]
Sent: Thursday, October 29, 2015 11:46 AM
To: Hiren Trada <hirent at gmail.com>; Shivakumar Bhaskaran <sbhas at uchicago.edu>; 'Vito Logiudice' <vito.logiudice at uwaterloo.ca>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Suggestions for interlocking mask aligners

Speaking of software solutions, we developed a simple screen lock for our lab to integrate with the coral lab management software, though it could be adopted to other systems without much effort.  It runs a coral client in the foreground and only allows access to that client -- no other software, until the instrument is enabled in coral.  The screenlock can be controlled remotely with a web interface.  There is also a local override by password for administrators.  Attached are screenshots of the screenlock and the web interface.

Thanks,
Ryan
On 10/28/15 2:39 PM, Hiren Trada wrote:
One possible solution is to use remote login programs.
Remote login programs like Logmein and TeamViewer allow users to log into remote computers and lock out the keyboard, mouse and monitor.
If the equipment laptop is connected to the internet, you can connect to the laptop (or any computer for that matter) from any other computer.
TeamViewer will allow you to remotely lock the computer as well as any local input devices on the computer, including the keyboard, trackpad & mouse.
TeamViewer is free for use and has apps for Windows, Mac, Android and iOS.
So it can used on any computer, laptop, phone or tablet.
Also, it can connect to multiple computers from one computer, so it is possible to control and lock more than one piece of equipment.
I'm not sure if there is a connection limitation with the free usage.

[cid:image001.jpg at 01D11247.88CB5520]

Hiren Trada, Ph.D.
University of Louisville

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran
Sent: Wednesday, October 28, 2015 1:06 PM
To: Vito Logiudice
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Suggestions for interlocking mask aligners

Hello Vito,

Sorry I should have mentioned more clearly. For example one of my tool I am planning to turn off/on the computer screen using the relay.

But for laptop I cant turn off/on the screen using relay or activate the screen using relay. May be I am wrong,
I checked with outside vendor regarding this but he mentioned it can be done, but it involves quite an effort to be done, there is also code to just turn off/on the laptop screen, but I couldn't find with the relay.

-Thanks
-Shiva

Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

From: Vito Logiudice [mailto:vito.logiudice at uwaterloo.ca]
Sent: Wednesday, October 28, 2015 11:52 AM
To: Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>>
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: Suggestions for interlocking mask aligners

Hello Shiva,

If I'm not mistaken some laptops can be configured to remain active even when the monitor is folded over to the closed position. In this position the monitor will turn off but the CPU will remain in operation which I think would solve your problem. Perhaps you can have someone in your local IT department have a look at your particular laptops to see if they can be configured this way.

Best regards,
Vito

From: Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>>
Date: Wednesday, October 28, 2015 at 12:30 PM
To: Leif Johansen <lej at danchip.dtu.dk<mailto:lej at danchip.dtu.dk>>, Vito Logiudice <vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>>, "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: RE: Suggestions for interlocking mask aligners

Hello All,

Since you all are exchanging emails regarding the interlock, I myself planning to do in my facility. I was able to figure out for some of the tool that I have. But two of my tool is hooked up to laptop, if I shutdown the laptop or close the lid of the laptop the software stops working and then the vacuum valve or heater shuts off which I don't want to have like this. I don't want to add computer screen or load the software in desktop due to space constraint.

The two tools that I am having are one is Arradiance Gemstar ALD and another is PE 100 O2 plasma etch. I don't want to pump to be turned off/on using relay, because I want the system to in vacuum even if its not in use.

-Thanks
-Shiva

Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leif Johansen
Sent: Wednesday, October 28, 2015 9:47 AM
To: 'Vito Logiudice' <vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Suggestions for interlocking mask aligners

Hello Vito,

At DTU Danchip we have two MA-6 aligners. On both tools we have interlocked the electrical signal for the solenoid controlling the CDA for the shutter. It works fine. If you want, we can mail you some pictures of how we did it.

Of course, if a user really wanted to cheat, he or she could perform all work before the exposure (i.e. mask load, wafer load and alignment) without logging in, and then only log in during exposure. In reality, we do not see such misuse.

Best regards,

Leif

From:labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice
Sent: 26. oktober 2015 21:43
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Suggestions for interlocking mask aligners

Dear Colleagues,

I would appreciate hearing how you may have interlocked the mask aligners in your respective facilities. In our particular case we have a Suss-Microtec MA6 aligner and we are struggling to identify a parameter that can be interlocked without causing the system additional wear and tear. Any insights would be appreciated. Thank you.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca

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Ryan Taylor

Software Systems Development Engineer

University of Utah Nanofab

www.nanofab.utah.edu<http://www.nanofab.utah.edu>

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Email: ryant at nanofab.utah.edu<mailto:ryant at nanofab.utah.edu>
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