From sbhas at uchicago.edu Fri Sep 4 11:32:44 2015 From: sbhas at uchicago.edu (Shivakumar Bhaskaran) Date: Fri, 4 Sep 2015 15:32:44 +0000 Subject: [labnetwork] ALD deposition of CrO2 using CrO2Cl2 Message-ID: We had request from a user group to deposit Chromium Oxide using CrO2Cl2 using the Atomic Layer Deposition (ALD). Due to the highly oxidizing nature and toxicity I am worried to use this precursor in our ALD Do anyone have used CrO2Cl2 in your facility if so what sort of precautions you followed and what type of pumps or other requirements needed. -Thanks -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Fri Sep 11 15:47:23 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Fri, 11 Sep 2015 19:47:23 +0000 Subject: [labnetwork] Temperature specification for facility process chilled water Message-ID: Dear Colleagues, The process chilled water loop in our cleanroom has consistently oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our Plant Operations group is looking into the possibility of tightening this up for us by tuning the control sequence. They have asked for guidance on an acceptable specification. In light of this I would appreciate hearing from you as to your facility?s PCW temperature target and tolerance. Thank you much. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at upenn.edu Mon Sep 14 14:26:26 2015 From: nclay at upenn.edu (Noah Clay) Date: Mon, 14 Sep 2015 14:26:26 -0400 Subject: [labnetwork] Temperature specification for facility process chilled water In-Reply-To: References: Message-ID: <07911428-3D1C-4D13-807F-0AB45A421D6A@upenn.edu> Vito, We're controlling PCW temp to 59F +/-2F. Thanks, Noah Sent from my iPhone > On Sep 11, 2015, at 15:47, Vito Logiudice wrote: > > Dear Colleagues, > > The process chilled water loop in our cleanroom has consistently oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our Plant Operations group is looking into the possibility of tightening this up for us by tuning the control sequence. They have asked for guidance on an acceptable specification. > > In light of this I would appreciate hearing from you as to your facility?s PCW temperature target and tolerance. Thank you much. > > Best regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Mon Sep 14 16:03:00 2015 From: schweig at umich.edu (Dennis Schweiger) Date: Mon, 14 Sep 2015 16:03:00 -0400 Subject: [labnetwork] Temperature specification for facility process chilled water Message-ID: Vito, here at UofMichigan, one of our PCW systems runs about 62.5F (16.9C) with a daily deviation of about 1F. The second runs about 59-60F (15C). It too has a daily deviation of about 1F. For both systems we may see a seasonal deviation of 3-4F as the main chiller plant transitions from "free cooling" to the use of chillers to create cooling water for the campus wide loop. We also "polish" both loops to 1 meg-ohm so that we have a "high resistance" in the RF cooling circuits. Dennis Schweiger University of Mighigan/LNF 734.647.2055 Ofc On Fri, Sep 11, 2015 at 3:47 PM, Vito Logiudice wrote: > Dear Colleagues, > > The process chilled water loop in our cleanroom has consistently > oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our > Plant Operations group is looking into the possibility of tightening this > up for us by tuning the control sequence. They have asked for guidance on > an acceptable specification. > > In light of this I would appreciate hearing from you as to your facility?s > PCW temperature target and tolerance. Thank you much. > > Best regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From I.M.Anteney at soton.ac.uk Tue Sep 15 02:16:24 2015 From: I.M.Anteney at soton.ac.uk (Anteney I.M.) Date: Tue, 15 Sep 2015 06:16:24 +0000 Subject: [labnetwork] Temperature specification for facility process chilled water In-Reply-To: References: Message-ID: <8B28A798-B2E8-4142-8F4A-35E018119475@soton.ac.uk> Denis, I'm particularly interested in your comment about polishing the loops to get 1 mega-ohm resistance as we have struggled to do this especially when we dose the system with biocide and corrosion inhibitors. What are you using to polish the system, what inhibitors/biocides do you use and how do these affect the conductivity. Regards Iain Cleanroom Manager University of Southampton Sent from my iPhone On 15 Sep 2015, at 00:36, Dennis Schweiger > wrote: Vito, here at UofMichigan, one of our PCW systems runs about 62.5F (16.9C) with a daily deviation of about 1F. The second runs about 59-60F (15C). It too has a daily deviation of about 1F. For both systems we may see a seasonal deviation of 3-4F as the main chiller plant transitions from "free cooling" to the use of chillers to create cooling water for the campus wide loop. We also "polish" both loops to 1 meg-ohm so that we have a "high resistance" in the RF cooling circuits. Dennis Schweiger University of Mighigan/LNF 734.647.2055 Ofc On Fri, Sep 11, 2015 at 3:47 PM, Vito Logiudice > wrote: Dear Colleagues, The process chilled water loop in our cleanroom has consistently oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our Plant Operations group is looking into the possibility of tightening this up for us by tuning the control sequence. They have asked for guidance on an acceptable specification. In light of this I would appreciate hearing from you as to your facility?s PCW temperature target and tolerance. Thank you much. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From schweig at umich.edu Tue Sep 15 05:33:57 2015 From: schweig at umich.edu (Dennis Schweiger) Date: Tue, 15 Sep 2015 05:33:57 -0400 Subject: [labnetwork] Temperature specification for facility process chilled water In-Reply-To: <8B28A798-B2E8-4142-8F4A-35E018119475@soton.ac.uk> References: <8B28A798-B2E8-4142-8F4A-35E018119475@soton.ac.uk> Message-ID: Iain, good morning. We run nothing for a corrosion inhibitor, or biocide, in either system. We are running a side stream UV lamp. Haven't had any problems with corrosion, or algae in either system. Both are open tank return, so there's essentially zero back pressure, though that shouldn't matter. Polishing is done with a pair of DI tanks that pass about 4-6GPM as needed from the high pressure side, right back into the tank. We measure resistivity on the high pressure side. One system has been operational since 2007 (150GPM), the other (200GPM) probably twice that long. We've had zero problems with either system. Dennis 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? On Tue, Sep 15, 2015 at 2:16 AM, Anteney I.M. wrote: > Denis, > > I'm particularly interested in your comment about polishing the loops to > get 1 mega-ohm resistance as we have struggled to do this especially when > we dose the system with biocide and corrosion inhibitors. What are you > using to polish the system, what inhibitors/biocides do you use and how do > these affect the conductivity. > > Regards > > Iain > > Cleanroom Manager > University of Southampton > > Sent from my iPhone > > On 15 Sep 2015, at 00:36, Dennis Schweiger schweig at umich.edu>> wrote: > > Vito, > > here at UofMichigan, one of our PCW systems runs about 62.5F (16.9C) with > a daily deviation of about 1F. The second runs about 59-60F (15C). It too > has a daily deviation of about 1F. For both systems we may see a seasonal > deviation of 3-4F as the main chiller plant transitions from "free cooling" > to the use of chillers to create cooling water for the campus wide loop. > We also "polish" both loops to 1 meg-ohm so that we have a "high > resistance" in the RF cooling circuits. > > Dennis Schweiger > University of Mighigan/LNF > > 734.647.2055 Ofc > > On Fri, Sep 11, 2015 at 3:47 PM, Vito Logiudice < > vito.logiudice at uwaterloo.ca> wrote: > Dear Colleagues, > > The process chilled water loop in our cleanroom has consistently > oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our > Plant Operations group is looking into the possibility of tightening this > up for us by tuning the control sequence. They have asked for guidance on > an acceptable specification. > > In light of this I would appreciate hearing from you as to your facility?s > PCW temperature target and tolerance. Thank you much. > > Best regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. > 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Tue Sep 15 05:39:40 2015 From: schweig at umich.edu (Dennis Schweiger) Date: Tue, 15 Sep 2015 05:39:40 -0400 Subject: [labnetwork] Temperature specification for facility process chilled water In-Reply-To: <8B28A798-B2E8-4142-8F4A-35E018119475@soton.ac.uk> References: <8B28A798-B2E8-4142-8F4A-35E018119475@soton.ac.uk> Message-ID: Iain, one thing I forgot to mention, both of our systems are fabricated from CPVC materials, so we don't have much in the way of metal ions in the stream. The pumps are stainless. Dennis 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? On Tue, Sep 15, 2015 at 2:16 AM, Anteney I.M. wrote: > Denis, > > I'm particularly interested in your comment about polishing the loops to > get 1 mega-ohm resistance as we have struggled to do this especially when > we dose the system with biocide and corrosion inhibitors. What are you > using to polish the system, what inhibitors/biocides do you use and how do > these affect the conductivity. > > Regards > > Iain > > Cleanroom Manager > University of Southampton > > Sent from my iPhone > > On 15 Sep 2015, at 00:36, Dennis Schweiger schweig at umich.edu>> wrote: > > Vito, > > here at UofMichigan, one of our PCW systems runs about 62.5F (16.9C) with > a daily deviation of about 1F. The second runs about 59-60F (15C). It too > has a daily deviation of about 1F. For both systems we may see a seasonal > deviation of 3-4F as the main chiller plant transitions from "free cooling" > to the use of chillers to create cooling water for the campus wide loop. > We also "polish" both loops to 1 meg-ohm so that we have a "high > resistance" in the RF cooling circuits. > > Dennis Schweiger > University of Mighigan/LNF > > 734.647.2055 Ofc > > On Fri, Sep 11, 2015 at 3:47 PM, Vito Logiudice < > vito.logiudice at uwaterloo.ca> wrote: > Dear Colleagues, > > The process chilled water loop in our cleanroom has consistently > oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our > Plant Operations group is looking into the possibility of tightening this > up for us by tuning the control sequence. They have asked for guidance on > an acceptable specification. > > In light of this I would appreciate hearing from you as to your facility?s > PCW temperature target and tolerance. Thank you much. > > Best regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. > 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From miller at purdue.edu Wed Sep 16 09:51:07 2015 From: miller at purdue.edu (Miller, Timothy J) Date: Wed, 16 Sep 2015 13:51:07 +0000 Subject: [labnetwork] FW: Temperature specification for facility process chilled water In-Reply-To: <8B28A798-B2E8-4142-8F4A-35E018119475@soton.ac.uk> References: <8B28A798-B2E8-4142-8F4A-35E018119475@soton.ac.uk> Message-ID: <7E4F526EF5F18B4BA90905AC52DF05F179B84EE4@WPVEXCMBX08.purdue.lcl> Iain, Normally Jeff Kuhn would answer this, but he is out this week on family business. All of the components in our PCW system are stainless steel, CPVC, or fiberglass. We haven't really worried about corrosion preventers since the building was commissioned. In ten years of operation we have had one problem with bacteria. The system was dosed once with biocide, which was then removed by dilution. No UV sterilizers or mixed beds. If there is a catastrophic loss of water we can refill from the RO on the UPW system, which runs 1-2 MegOhmcm. If the resistivity of the water drops below .95 Meg the system is topped off with concentrate water from the ultrafilters on the UPW system (18.2 Meg) with the excess water overflowing to drain until the resistivity returns to 1.05 Meg. Very simple and very inexpensive. Tim Timothy J. Miller Purdue University Birck Nanotechnology Center 1205 West State Street West Lafayette, IN 47907-2057 765-427-4712 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Anteney I.M. Sent: Tuesday, September 15, 2015 2:16 AM To: Dennis Schweiger Cc: Vito Logiudice; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Temperature specification for facility process chilled water Denis, I'm particularly interested in your comment about polishing the loops to get 1 mega-ohm resistance as we have struggled to do this especially when we dose the system with biocide and corrosion inhibitors. What are you using to polish the system, what inhibitors/biocides do you use and how do these affect the conductivity. Regards Iain Cleanroom Manager University of Southampton Sent from my iPhone On 15 Sep 2015, at 00:36, Dennis Schweiger > wrote: Vito, here at UofMichigan, one of our PCW systems runs about 62.5F (16.9C) with a daily deviation of about 1F. The second runs about 59-60F (15C). It too has a daily deviation of about 1F. For both systems we may see a seasonal deviation of 3-4F as the main chiller plant transitions from "free cooling" to the use of chillers to create cooling water for the campus wide loop. We also "polish" both loops to 1 meg-ohm so that we have a "high resistance" in the RF cooling circuits. Dennis Schweiger University of Mighigan/LNF 734.647.2055 Ofc On Fri, Sep 11, 2015 at 3:47 PM, Vito Logiudice > wrote: Dear Colleagues, The process chilled water loop in our cleanroom has consistently oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our Plant Operations group is looking into the possibility of tightening this up for us by tuning the control sequence. They have asked for guidance on an acceptable specification. In light of this I would appreciate hearing from you as to your facility's PCW temperature target and tolerance. Thank you much. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From vito.logiudice at uwaterloo.ca Wed Sep 16 13:16:06 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Wed, 16 Sep 2015 17:16:06 +0000 Subject: [labnetwork] Suggestions for interlocking fume hoods Message-ID: Dear Colleagues, Our efforts to physically interlock our tools via our lab management platform (Badger in our case) is progressing well. In most cases we are interlocking computer monitors, keyboards or computer mice with good results. My team and I have discussed how to best interlock our numerous fume hoods but were unable to settle on any one approach. For safety reasons we certainly do not want to make the hoods entirely unavailable when not enabled by Badger; ie., we want to encourage their use when lab users handle chemicals. However we do believe it would be beneficial to physically interlock them in some fashion to at least make them somewhat less appealing to use unless they are first enabled. I?ve searched past threads on this fantastic network and while I came across some great related discussions I was unable to find anything which dealt specifically with hood interlocks. I?d greatly appreciate hearing from those of you whom have interlocked your hoods or are thinking of doing so soon. I?m curious to know what service or feature you may have tapped into on a typical hood setup that might include some combination of spin-coaters, hot plates, heated/recirculating chemical baths, N2 guns, DI guns etc. Thanks very much for any insights. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Wed Sep 16 14:11:42 2015 From: shott at stanford.edu (John D Shott) Date: Wed, 16 Sep 2015 18:11:42 +0000 Subject: [labnetwork] Suggestions for interlocking fume hoods In-Reply-To: References: Message-ID: <0D49FAC4-EC96-4065-9386-8A53E0432909@stanford.edu> Vito: If I am not mistaken all of our hoods and wet benches are interlocked in some fashion. However, I think that each may be interlocked in a slightly different fashion. Here is a summary of various things that we use ... but we definitely DO NOT interlock DI spray guns or goosenecks that might be needed or used in an acid spill/exposure situation. For hot pots, we typically tie the interlock into the pneumatic low-level detector. If the hot pot thinks the level is too low, it won't heat. For hot plates, we typically just shut off AC power with a high-current interlock. For spin coaters, putting the interlock in the chuck vacuum sense circuit is often effective. No vacuum on the chuck means no spin ... We often interlock the SRD associated with a bench. I can't remember for certain, but I think that we disable the start switch which doesn't defeat a periodically timed cycle of an inactive SRD. In some cases, turning off the light in the good helps discourage use. I expect that others will have different approaches, but this should be a start. Thanks, John Sent from my iPhone On Sep 16, 2015, at 10:52 AM, "Vito Logiudice" > wrote: Dear Colleagues, Our efforts to physically interlock our tools via our lab management platform (Badger in our case) is progressing well. In most cases we are interlocking computer monitors, keyboards or computer mice with good results. My team and I have discussed how to best interlock our numerous fume hoods but were unable to settle on any one approach. For safety reasons we certainly do not want to make the hoods entirely unavailable when not enabled by Badger; ie., we want to encourage their use when lab users handle chemicals. However we do believe it would be beneficial to physically interlock them in some fashion to at least make them somewhat less appealing to use unless they are first enabled. I've searched past threads on this fantastic network and while I came across some great related discussions I was unable to find anything which dealt specifically with hood interlocks. I'd greatly appreciate hearing from those of you whom have interlocked your hoods or are thinking of doing so soon. I'm curious to know what service or feature you may have tapped into on a typical hood setup that might include some combination of spin-coaters, hot plates, heated/recirculating chemical baths, N2 guns, DI guns etc. Thanks very much for any insights. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From mdwyer87 at gmail.com Wed Sep 16 14:25:00 2015 From: mdwyer87 at gmail.com (Matt Dwyer) Date: Wed, 16 Sep 2015 13:25:00 -0500 Subject: [labnetwork] Crucible liner for platinum Message-ID: <00c501d0f0ac$ffdae0c0$ff90a240$@gmail.com> Hi all, I have a 7cc vitreous carbon crucible liner with platinum melt that has cracked along the walls and base. I want to send this off for reclaim and put together a new platinum melt but would like advice on what crucible liner to use. The crucible will be used in two ebeam evap tools, but in one tool only the crucible base touches the hearth (i.e. not the sides). The platinum has bonded with the VC crucible and thus cannot be transferred to a new crucible (I presume I can't just crack the crucible off from the platinum and put it in a new crucible?). My crucible material options are graphite, Fabmate, vitreous carbon, and tungsten. Neyco recommend graphite or tungsten. VEM recommend CG (graphite?) or ThO2. Plasmaterials recommend graphite or ThO2. Kurt Lesker recommend graphite or Fabmate (not explicitly recommended). It seems that no one recommends vitreous carbon so perhaps that was the wrong material to use for platinum. I suspect tungsten may alloy with platinum so this may be a poor recommendation by Neyco. As the reclaim value covers only ~50% of the cost of new material, I would like to avoid cracking this crucible for as many depositions as possible. Suppliers I am considering are Kurt Lesker (graphite, Fabmate) and Sage (graphite, vitreous carbon). Any advice would be greatly appreciated. Thanks in advance, Matt Dwyer Grad student, UW-Madison -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrweaver at purdue.edu Wed Sep 16 14:48:58 2015 From: jrweaver at purdue.edu (Weaver, John R) Date: Wed, 16 Sep 2015 18:48:58 +0000 Subject: [labnetwork] Suggestions for interlocking fume hoods In-Reply-To: References: Message-ID: <6A848421F695C54A9210C1A873C96AC225245087@WPVEXCMBX04.purdue.lcl> We have struggled with this as well and have opted not to interlock them. The best approach we came up with was to interlock the lights in the hood. It wouldn't really inhibit the users, but would be very noticeable if someone was working in a hood with the lights off. We didn't really think that it would have a safety impact, but that was a concern - reading bottle labels, etc. John From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice Sent: Wednesday, September 16, 2015 1:16 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Suggestions for interlocking fume hoods Dear Colleagues, Our efforts to physically interlock our tools via our lab management platform (Badger in our case) is progressing well. In most cases we are interlocking computer monitors, keyboards or computer mice with good results. My team and I have discussed how to best interlock our numerous fume hoods but were unable to settle on any one approach. For safety reasons we certainly do not want to make the hoods entirely unavailable when not enabled by Badger; ie., we want to encourage their use when lab users handle chemicals. However we do believe it would be beneficial to physically interlock them in some fashion to at least make them somewhat less appealing to use unless they are first enabled. I've searched past threads on this fantastic network and while I came across some great related discussions I was unable to find anything which dealt specifically with hood interlocks. I'd greatly appreciate hearing from those of you whom have interlocked your hoods or are thinking of doing so soon. I'm curious to know what service or feature you may have tapped into on a typical hood setup that might include some combination of spin-coaters, hot plates, heated/recirculating chemical baths, N2 guns, DI guns etc. Thanks very much for any insights. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From khbeis at uw.edu Wed Sep 16 15:16:30 2015 From: khbeis at uw.edu (Michael Khbeis) Date: Wed, 16 Sep 2015 12:16:30 -0700 Subject: [labnetwork] Suggestions for interlocking fume hoods In-Reply-To: References: Message-ID: Vito, We interlocked the lid sensor and/or vacuum for spinners in hood. We did not interlock the benches for fear of something needing to be rinsed in an emergency etc. What we did instead is link a touch screen interface where users tap their name to log in/out of the wet process area. We created several virtual benches in WebCORAL that are enabled when a user logs in via either the tap interface or WebCORAL. Since nothing is physically interlocked, it is an honor system backed by camera footage and policing by cleanroom staff. Let me know if you need more specifics about implementation. Best, Dr. Michael Khbeis Associate Director, Washington Nanofabrication Facility (WNF) National Nanotechnology Infrastructure Network (NNIN) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (F) 206.221.1681 (C) 443.254.5192 khbeis at uw.edu www.wnf.washington.edu/ > On Sep 16, 2015, at 10:16 AM, Vito Logiudice wrote: > > Dear Colleagues, > > Our efforts to physically interlock our tools via our lab management platform (Badger in our case) is progressing well. In most cases we are interlocking computer monitors, keyboards or computer mice with good results. > > My team and I have discussed how to best interlock our numerous fume hoods but were unable to settle on any one approach. For safety reasons we certainly do not want to make the hoods entirely unavailable when not enabled by Badger; ie., we want to encourage their use when lab users handle chemicals. However we do believe it would be beneficial to physically interlock them in some fashion to at least make them somewhat less appealing to use unless they are first enabled. I?ve searched past threads on this fantastic network and while I came across some great related discussions I was unable to find anything which dealt specifically with hood interlocks. > > I?d greatly appreciate hearing from those of you whom have interlocked your hoods or are thinking of doing so soon. I?m curious to know what service or feature you may have tapped into on a typical hood setup that might include some combination of spin-coaters, hot plates, heated/recirculating chemical baths, N2 guns, DI guns etc. > > Thanks very much for any insights. > > Best regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From schweig at umich.edu Wed Sep 16 16:18:17 2015 From: schweig at umich.edu (Dennis Schweiger) Date: Wed, 16 Sep 2015 16:18:17 -0400 Subject: [labnetwork] Suggestions for interlocking fume hoods Message-ID: Vito, here at UofMichigan, we've done a couple of things with the benches, and the interlocking of them. 1) On some of the newer (vintage 2008 and newer), we're interlocking the E-stop control signal of the bench as part of our tool control network. This circuit shunts the electronics of the benches, but does not impact the QDR bath, spray nozzle, or sink/faucet. 2) On all of the older vintage benches, it's simply an honor system. 3) All of the benches have a stack-lite assembly (green lamp, see picture) that lets us see from the cleanroom, or outside hallways, if the bench has been enabled by a user. You shouldn't be at the bench unless the light is green. This is something we've just adopted in the last 6-8 months, so we're still doing some training on it. 4) In addition to the green lamp mentioned above, each primary bench in the process bay has a second lamp on the stack that is amber. This amber lamp is lit whenever our body count drops to less than three people. It's part of our "single user alert" system that we implemented as part of a safety program. This "helps" to alert the users that they're getting close to that "no user can process alone in a bench" criteria, since our fab area is so spread out. Again, this is an honor system, but it's worked well so far. Dennis Schweiger University of Michigan/LNF 734.647.2055 Ofc On Wed, Sep 16, 2015 at 1:16 PM, Vito Logiudice wrote: > Dear Colleagues, > > Our efforts to physically interlock our tools via our lab management > platform (Badger in our case) is progressing well. In most cases we are > interlocking computer monitors, keyboards or computer mice with good > results. > > My team and I have discussed how to best interlock our numerous fume hoods > but were unable to settle on any one approach. For safety reasons we > certainly do not want to make the hoods entirely unavailable when not > enabled by Badger; ie., we want to encourage their use when lab users > handle chemicals. However we do believe it would be beneficial to > physically interlock them in some fashion to at least make them somewhat > less appealing to use unless they are first enabled. I?ve searched past > threads on this fantastic network and while I came across some great > related discussions I was unable to find anything which dealt specifically > with hood interlocks. > > I?d greatly appreciate hearing from those of you whom have interlocked > your hoods or are thinking of doing so soon. I?m curious to know what > service or feature you may have tapped into on a typical hood setup that > might include some combination of spin-coaters, hot plates, > heated/recirculating chemical baths, N2 guns, DI guns etc. > > Thanks very much for any insights. > > Best regards, > Vito > -- > Vito Logiudice P.Eng. > Director of Operations, Quantum NanoFab > University of Waterloo > Lazaridis QNC 1207 > 200 University Avenue West > Waterloo, ON Canada N2L 3G1 > Tel.: (519) 888-4567 ext. 38703 > Email: vito.logiudice at uwaterloo.ca > Website: https://fab.qnc.uwaterloo.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: IMG_1143.JPG Type: image/jpeg Size: 75807 bytes Desc: not available URL: From sbhas at uchicago.edu Wed Sep 16 16:30:39 2015 From: sbhas at uchicago.edu (Shivakumar Bhaskaran) Date: Wed, 16 Sep 2015 20:30:39 +0000 Subject: [labnetwork] Crucible liner for platinum In-Reply-To: <00c501d0f0ac$ffdae0c0$ff90a240$@gmail.com> References: <00c501d0f0ac$ffdae0c0$ff90a240$@gmail.com> Message-ID: Matt, First of all your crucible liner should touch all the surface of the hearth else you might not have uniform temperature on your material/crucible and due this the hearth might crack. If you know the make or model of the Hearth any vendor can tell you what size of the crucible part need to be ordered. Graphite liner is the one you need. Do not fill the liner full with material. For Platinum fill atelast 25% volume, in my experience if you fill more than 50% volume then there is a chance of Pt coming out of your crucible and might get in contact with hearth and then this will crack your crucible. We add only less amount of Pt and replenish as needed. I use graphite crucible from lesker, ours is 15cc, there are two types on with thick and thin wall I use thick wall graphite crucible liner. But for 7cc getting a thick wall might be an issue. Yes Pt sticks to our liner all the time but my liner don't crack and I set up the recipe as slow ramp until we get desired rate and soak atleast 1min before you start evaporating. Hope this helps -Best -Shiva Shivakumar Bhaskaran, Ph.D. Searle CleanRoom Manager The University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 https://searle-cleanroom.uchicago.edu/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matt Dwyer Sent: Wednesday, September 16, 2015 1:25 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Crucible liner for platinum Hi all, I have a 7cc vitreous carbon crucible liner with platinum melt that has cracked along the walls and base. I want to send this off for reclaim and put together a new platinum melt but would like advice on what crucible liner to use. The crucible will be used in two ebeam evap tools, but in one tool only the crucible base touches the hearth (i.e. not the sides). The platinum has bonded with the VC crucible and thus cannot be transferred to a new crucible (I presume I can't just crack the crucible off from the platinum and put it in a new crucible?). My crucible material options are graphite, Fabmate, vitreous carbon, and tungsten. Neyco recommend graphite or tungsten. VEM recommend CG (graphite?) or ThO2. Plasmaterials recommend graphite or ThO2. Kurt Lesker recommend graphite or Fabmate (not explicitly recommended). It seems that no one recommends vitreous carbon so perhaps that was the wrong material to use for platinum. I suspect tungsten may alloy with platinum so this may be a poor recommendation by Neyco. As the reclaim value covers only ~50% of the cost of new material, I would like to avoid cracking this crucible for as many depositions as possible. Suppliers I am considering are Kurt Lesker (graphite, Fabmate) and Sage (graphite, vitreous carbon). Any advice would be greatly appreciated. Thanks in advance, Matt Dwyer Grad student, UW-Madison -------------- next part -------------- An HTML attachment was scrubbed... URL: From bill at eecs.berkeley.edu Thu Sep 17 19:59:16 2015 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Thu, 17 Sep 2015 16:59:16 -0700 Subject: [labnetwork] FW: Temperature specification for facility process chilled water In-Reply-To: <7E4F526EF5F18B4BA90905AC52DF05F179B84EE4@WPVEXCMBX08.purdue.lcl> References: <8B28A798-B2E8-4142-8F4A-35E018119475@soton.ac.uk> <7E4F526EF5F18B4BA90905AC52DF05F179B84EE4@WPVEXCMBX08.purdue.lcl> Message-ID: <55FB53D4.6050402@eecs.berkeley.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: PCW_Resistivity.jpg Type: image/jpeg Size: 35238 bytes Desc: not available URL: From bill at eecs.berkeley.edu Thu Sep 17 20:23:19 2015 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Thu, 17 Sep 2015 17:23:19 -0700 Subject: [labnetwork] Suggestions for interlocking fume hoods In-Reply-To: <6A848421F695C54A9210C1A873C96AC225245087@WPVEXCMBX04.purdue.lcl> References: <6A848421F695C54A9210C1A873C96AC225245087@WPVEXCMBX04.purdue.lcl> Message-ID: <55FB5977.3030902@eecs.berkeley.edu> An HTML attachment was scrubbed... URL: From stuart.pearce at huawei.com Fri Sep 18 08:45:36 2015 From: stuart.pearce at huawei.com (Stuart Pearce) Date: Fri, 18 Sep 2015 12:45:36 +0000 Subject: [labnetwork] Cameras in cleanroom Message-ID: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> Dear All, I've just had cameras installed in our cleanroom as we have had a couple of incidents with acids. I'm interested how many other cleanrooms have them installed and whether or not you have experienced backlash from doing so. I hope to hear your views. Thanks, Stuart __________________ Dr Stuart Pearce Senior Process Engineer and Cleanroom Manager CIP Technologies (Huawei Technologies Co., Ltd) Office: +44 (0) 147 366 3153 Mobile: +44 (0) 798 028 5288 Email: stuart.pearce at huawei.com Web: www.ciphotonics.com [cid:image007.jpg at 01CD52EB.AD060EE0] CIP Technologies is the trading name of The Centre for Integrated Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) Co., Ltd. Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, Ipswich, Suffolk IP5 3RE. Registered in England no. 4905488 This E-mail and its attachments contain confidential information from HUAWEI, which is intended only for the person or entity whose address is listed above. Any use of the information contained herein in any way (including, but not limited to, total or partial disclosure, reproduction, or dissemination) by persons other than the intended recipient(s) is prohibited. If you receive this e-mail in error, please notify the sender by phone or email immediately and delete it. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 3331 bytes Desc: image001.jpg URL: From myoung6 at nd.edu Fri Sep 18 09:01:09 2015 From: myoung6 at nd.edu (Mike Young) Date: Fri, 18 Sep 2015 09:01:09 -0400 Subject: [labnetwork] Suggestions for interlocking fume hoods In-Reply-To: <55FB5977.3030902@eecs.berkeley.edu> References: <6A848421F695C54A9210C1A873C96AC225245087@WPVEXCMBX04.purdue.lcl> <55FB5977.3030902@eecs.berkeley.edu> Message-ID: Sehr gut, Herr Bill! :) We have used this approach with exactly one bench, namely the MOS-clean RCA bench. We hacked/edited the code in the bench PLC and the touchscreen HMI to recognize a spare PLC input as a bench-enable signal. The input, in turn, is driven from one of our hardware interlock boxes (8-channel IP power controller) which in turn is driven by the Coral hardware interlock code. Using this approach, the HMI will reflect the current status of the bench (enabled/disabled), and will not display the normal bench screens until/unless the bench is enabled.The ladder logic in the PLC can be arranged to disable any desired bench functions when coral disables the bench. ?Mike > On Sep 17, 2015, at 8:23 PM, Bill Flounders wrote: > > All our sinks /hoods are at least partially interlocked. > > Interlock has no impact on exhaust. > Vendor (Wafab) installed easily accessible separate relay > in front of 24V DIN rail so all accessories are defeated > when tool is not 'enabled'. (e.g. QDR, rinse resistivity etc are all off). > Some heated baths (e.g., general clean) are bypassed from DIN control and left hot. > Other heated baths (e.g., special etch) are linked to DIN control and can not > be heated until tool is 'enabled' by researcher. > Any heated bath requires level sensor, over temp sensor and integrated sprinkler. > > DI deck hose was spec'd independent of the accessory panel > and is active at all times for emergency water access. > > Before posting response - I had to finally look up what the acronym > DIN stood for... what a surprise - the NIST of Germany?! Danke Schon > https://en.wikipedia.org/wiki/DIN_rail > https://en.wikipedia.org/wiki/Deutsches_Institut_f%C3%BCr_Normung > > Bill Flounders > UC Berkeley > > > Weaver, John R wrote: >> We have struggled with this as well and have opted not to interlock them. >> The best approach we came up with was to interlock the lights in the hood. It wouldn?t really inhibit the users, but would be very noticeable if someone was working in a hood with the lights off. We didn?t really think that it would have a safety impact, but that was a concern ? reading bottle labels, etc. >> >> John >> >> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu ] On Behalf Of Vito Logiudice >> Sent: Wednesday, September 16, 2015 1:16 PM >> To: labnetwork at mtl.mit.edu >> Subject: [labnetwork] Suggestions for interlocking fume hoods >> >> Dear Colleagues, >> >> Our efforts to physically interlock our tools via our lab management platform (Badger in our case) is progressing well. In most cases we are interlocking computer monitors, keyboards or computer mice with good results. >> >> My team and I have discussed how to best interlock our numerous fume hoods but were unable to settle on any one approach. For safety reasons we certainly do not want to make the hoods entirely unavailable when not enabled by Badger; ie., we want to encourage their use when lab users handle chemicals. However we do believe it would be beneficial to physically interlock them in some fashion to at least make them somewhat less appealing to use unless they are first enabled. I?ve searched past threads on this fantastic network and while I came across some great related discussions I was unable to find anything which dealt specifically with hood interlocks. >> >> I?d greatly appreciate hearing from those of you whom have interlocked your hoods or are thinking of doing so soon. I?m curious to know what service or feature you may have tapped into on a typical hood setup that might include some combination of spin-coaters, hot plates, heated/recirculating chemical baths, N2 guns, DI guns etc. >> >> Thanks very much for any insights. >> >> Best regards, >> Vito >> >> >> >> > -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 412-6728 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 -------------- next part -------------- An HTML attachment was scrubbed... URL: From hft at ncsu.edu Fri Sep 18 09:44:15 2015 From: hft at ncsu.edu (Henry Taylor) Date: Fri, 18 Sep 2015 09:44:15 -0400 Subject: [labnetwork] Cameras in cleanroom In-Reply-To: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> References: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> Message-ID: Stuart, We have 9 cameras installed in our cleanroom. We have found them to be very helpful in discovering unsafe lab practices by our users. Henry Taylor NCSU On Fri, Sep 18, 2015 at 8:45 AM, Stuart Pearce wrote: > Dear All, > > > > I?ve just had cameras installed in our cleanroom as we have had a couple > of incidents with acids. I?m interested how many other cleanrooms have > them installed and whether or not you have experienced backlash from doing > so. > > > > I hope to hear your views. > > > > Thanks, Stuart > > > > __________________ > > Dr Stuart Pearce > > Senior Process Engineer and Cleanroom Manager > CIP Technologies (Huawei Technologies Co., Ltd) > > Office: +44 (0) 147 366 3153 > Mobile: +44 (0) 798 028 5288 > > Email: stuart.pearce at huawei.com > Web: www.ciphotonics.com > > > > [image: cid:image007.jpg at 01CD52EB.AD060EE0] > > > CIP Technologies is the trading name of The Centre for Integrated > Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) Co., > Ltd. > Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, > Ipswich, Suffolk IP5 3RE. > > Registered in England no. 4905488 > > > > This E-mail and its attachments contain confidential information from > HUAWEI, which is intended only for the person or entity whose address is > listed above. Any use of the information contained herein in any way > (including, but not limited to, total or partial disclosure, reproduction, > or dissemination) by persons other than the intended recipient(s) is > prohibited. If you receive this e-mail in error, please notify the sender > by phone or email immediately and delete it. > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 3331 bytes Desc: not available URL: From julia.aebersold at louisville.edu Fri Sep 18 10:21:13 2015 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Fri, 18 Sep 2015 14:21:13 +0000 Subject: [labnetwork] Cameras in cleanroom In-Reply-To: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> References: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> Message-ID: Our cameras were installed when our cleanroom was built and are tied in with campus security. If someone has an issue of being videotaped while working in our cleanroom then I really don't want them there. Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Stuart Pearce Sent: Friday, September 18, 2015 8:46 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cameras in cleanroom Dear All, I've just had cameras installed in our cleanroom as we have had a couple of incidents with acids. I'm interested how many other cleanrooms have them installed and whether or not you have experienced backlash from doing so. I hope to hear your views. Thanks, Stuart __________________ Dr Stuart Pearce Senior Process Engineer and Cleanroom Manager CIP Technologies (Huawei Technologies Co., Ltd) Office: +44 (0) 147 366 3153 Mobile: +44 (0) 798 028 5288 Email: stuart.pearce at huawei.com Web: www.ciphotonics.com [cid:image007.jpg at 01CD52EB.AD060EE0] CIP Technologies is the trading name of The Centre for Integrated Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) Co., Ltd. Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, Ipswich, Suffolk IP5 3RE. Registered in England no. 4905488 This E-mail and its attachments contain confidential information from HUAWEI, which is intended only for the person or entity whose address is listed above. Any use of the information contained herein in any way (including, but not limited to, total or partial disclosure, reproduction, or dissemination) by persons other than the intended recipient(s) is prohibited. If you receive this e-mail in error, please notify the sender by phone or email immediately and delete it. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 3331 bytes Desc: image001.jpg URL: From mtang at stanford.edu Fri Sep 18 10:43:43 2015 From: mtang at stanford.edu (Mary Tang) Date: Fri, 18 Sep 2015 14:43:43 +0000 Subject: [labnetwork] Cameras in cleanroom In-Reply-To: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> References: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> Message-ID: Dear Stuart -- At the Stanford Nanofab, we've had cameras for about 18 months now. The University has a camera policy, but because of our lab environment, we have additional provisions. We wanted to make sure that, while disclosing to our labmembers that cameras are in use, that there are established limitations on how and when they would be used. Mostly, we didn't want them to think they could, for example, request footage to resolve disputes. By the same token, we invoke their use as little as possible. We've followed Berkeley's example and have two large TV's displaying live feed, as a way of supporting the buddy system. I think people are used to them being part of the landscape and largely ignore them. These cameras have been valuable in investigating safety incidents. They've allowed us to narrow down the time window and circumstances. However, they only supplement and can't replace good old fashioned detective work -- we still look through door and machine logs, review hardware and protocols, interview potential eyewitnesses, etc. When we have to follow up (retrain students, change/announce new procedures, whatever) we've yet to even mention that cameras were involved. I'd still like to pretend we don't have them or that they are at least just incidental tools. Ours was the first lab to have cameras installed under the new University camera policy. Partly because of this, the local fire and police departments have been interested and seen our system. The police told us that while video surveillance is valuable, in a court of law, everyone looks the same in a bunnysuit and it's hard to tell exactly what people are doing with their hands and what they are holding -- camera footage is only one piece of evidence in building a case. So far in 18 months, we've heard a few comments, but not experienced backlash. I expect "privacy" means something different to the students than the rest of us. I'm hoping that we can continue to maintain a light touch on how we use them -- otherwise, I fear we'd end up with an administrative overhead to rival MLB's expanded instant replay. Mary _____ Mary X. Tang, Ph.D. Lab Manager Stanford Nanofabrication Facility Paul G. Allen Building Stanford, CA. 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Stuart Pearce Sent: Friday, September 18, 2015 5:45 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cameras in cleanroom Dear All, I've just had cameras installed in our cleanroom as we have had a couple of incidents with acids. I'm interested how many other cleanrooms have them installed and whether or not you have experienced backlash from doing so. I hope to hear your views. Thanks, Stuart __________________ Dr Stuart Pearce Senior Process Engineer and Cleanroom Manager CIP Technologies (Huawei Technologies Co., Ltd) Office: +44 (0) 147 366 3153 Mobile: +44 (0) 798 028 5288 Email: stuart.pearce at huawei.com Web: www.ciphotonics.com [cid:image007.jpg at 01CD52EB.AD060EE0] CIP Technologies is the trading name of The Centre for Integrated Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) Co., Ltd. Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, Ipswich, Suffolk IP5 3RE. Registered in England no. 4905488 This E-mail and its attachments contain confidential information from HUAWEI, which is intended only for the person or entity whose address is listed above. Any use of the information contained herein in any way (including, but not limited to, total or partial disclosure, reproduction, or dissemination) by persons other than the intended recipient(s) is prohibited. If you receive this e-mail in error, please notify the sender by phone or email immediately and delete it. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 3331 bytes Desc: image001.jpg URL: From jrweaver at purdue.edu Fri Sep 18 10:59:28 2015 From: jrweaver at purdue.edu (Weaver, John R) Date: Fri, 18 Sep 2015 14:59:28 +0000 Subject: [labnetwork] Cameras in cleanroom In-Reply-To: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> References: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> Message-ID: <6A848421F695C54A9210C1A873C96AC225246AC4@WPVEXCMBX04.purdue.lcl> At the BNC, we've had cameras installed from the beginning. No backlash, and very helpful after the fact. They are not continuously monitored so they don't help real-time. John John R. Weaver Strategic Facilities Officer Birck Nanotechnology Center 1205 West State Street West Lafayette IN 47907 (765) 494-5494 jrweaver at purdue.edu nano.purdue.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Stuart Pearce Sent: Friday, September 18, 2015 8:46 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cameras in cleanroom Dear All, I've just had cameras installed in our cleanroom as we have had a couple of incidents with acids. I'm interested how many other cleanrooms have them installed and whether or not you have experienced backlash from doing so. I hope to hear your views. Thanks, Stuart __________________ Dr Stuart Pearce Senior Process Engineer and Cleanroom Manager CIP Technologies (Huawei Technologies Co., Ltd) Office: +44 (0) 147 366 3153 Mobile: +44 (0) 798 028 5288 Email: stuart.pearce at huawei.com Web: www.ciphotonics.com [cid:image007.jpg at 01CD52EB.AD060EE0] CIP Technologies is the trading name of The Centre for Integrated Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) Co., Ltd. Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, Ipswich, Suffolk IP5 3RE. Registered in England no. 4905488 This E-mail and its attachments contain confidential information from HUAWEI, which is intended only for the person or entity whose address is listed above. Any use of the information contained herein in any way (including, but not limited to, total or partial disclosure, reproduction, or dissemination) by persons other than the intended recipient(s) is prohibited. If you receive this e-mail in error, please notify the sender by phone or email immediately and delete it. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 3331 bytes Desc: image001.jpg URL: From Thomas_Ferraguto at uml.edu Fri Sep 18 11:59:00 2015 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas) Date: Fri, 18 Sep 2015 15:59:00 +0000 Subject: [labnetwork] Cameras in cleanroom In-Reply-To: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> References: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> Message-ID: Stuart, I installed Logitech Webcams the minute we moved in. They're motion controlled , record audio and video. I've used it as a teaching tool and for people you forget to book equipment. I wouldn't operate without them. I DO post that there is Video Surveillance. There has been NO backlash. Safety, Lowell Fire and police are very happy we have them. First responders can see in the lab before entering. [cid:image002.png at 01D0F209.669EE060] From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Stuart Pearce Sent: Friday, September 18, 2015 8:46 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cameras in cleanroom Dear All, I've just had cameras installed in our cleanroom as we have had a couple of incidents with acids. I'm interested how many other cleanrooms have them installed and whether or not you have experienced backlash from doing so. I hope to hear your views. Thanks, Stuart __________________ Dr Stuart Pearce Senior Process Engineer and Cleanroom Manager CIP Technologies (Huawei Technologies Co., Ltd) Office: +44 (0) 147 366 3153 Mobile: +44 (0) 798 028 5288 Email: stuart.pearce at huawei.com Web: www.ciphotonics.com [cid:image007.jpg at 01CD52EB.AD060EE0] CIP Technologies is the trading name of The Centre for Integrated Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) Co., Ltd. Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, Ipswich, Suffolk IP5 3RE. Registered in England no. 4905488 This E-mail and its attachments contain confidential information from HUAWEI, which is intended only for the person or entity whose address is listed above. Any use of the information contained herein in any way (including, but not limited to, total or partial disclosure, reproduction, or dissemination) by persons other than the intended recipient(s) is prohibited. If you receive this e-mail in error, please notify the sender by phone or email immediately and delete it. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 629331 bytes Desc: image002.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.jpg Type: image/jpeg Size: 3331 bytes Desc: image003.jpg URL: From bfuchs at chtm.unm.edu Fri Sep 18 12:21:03 2015 From: bfuchs at chtm.unm.edu (Beth Fuchs) Date: Fri, 18 Sep 2015 10:21:03 -0600 Subject: [labnetwork] Cameras in cleanroom In-Reply-To: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> References: <12365E1B3369A349B4716C5F18F5365A58359B@lhreml506-mbx.china.huawei.com> Message-ID: <55FC39EF.4030807@chtm.unm.edu> Hi Stuart- We have had cameras installed in our cleanroom for quite some time. Our users know the cameras are in place and that the camera feeds can be monitored in real time or reviewed if there is any incident. We have experienced no backlash on camera installation. We plan on installing more cameras in the very near future and placing a live feed just outside our cleanroom and streaming that feed on our intranet. Beth On 9/18/2015 6:45 AM, Stuart Pearce wrote: > Dear All, > > I?ve just had cameras installed in our cleanroom as we have had a couple > of incidents with acids. I?m interested how many other cleanrooms have > them installed and whether or not you have experienced backlash from > doing so. > > I hope to hear your views. > > Thanks, Stuart > > __________________ > > Dr Stuart Pearce > > Senior Process Engineer and Cleanroom Manager > CIP Technologies (Huawei Technologies Co., Ltd) > > Office: +44 (0) 147 366 3153 > Mobile: +44 (0) 798 028 5288 > > Email: stuart.pearce at huawei.com > Web: www.ciphotonics.com > > cid:image007.jpg at 01CD52EB.AD060EE0 > > > CIP Technologies is the trading name of The Centre for Integrated > Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) > Co., Ltd. > Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, > Ipswich, Suffolk IP5 3RE. > > Registered in England no. 4905488 > > This E-mail and its attachments contain confidential information from > HUAWEI, which is intended only for the person or entity whose address is > listed above. Any use of the information contained herein in any way > (including, but not limited to, total or partial disclosure, > reproduction, or dissemination) by persons other than the intended > recipient(s) is prohibited. If you receive this e-mail in error, please > notify the sender by phone or email immediately and delete it. > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Beth Fuchs Database Administrator Center for High Tech Materials 1313 Goddard SE Albuquerque, NM 87106-4343 (505) 272-7801 (fax) From duda at uchicago.edu Fri Sep 18 13:25:16 2015 From: duda at uchicago.edu (Peter J Duda III) Date: Fri, 18 Sep 2015 17:25:16 +0000 Subject: [labnetwork] Temperature specification for facility process chilled water In-Reply-To: References: Message-ID: <369CF1861066C244B747413441CCF52908C11374@xm-mbx-08-prod.ad.uchicago.edu> Vito et al In all of the great discussion regarding temperature and treatment of PCW in various facilities, I feel obligated to mention one item: Please be aware of your entire design and operating environment when considering temperature setpoints, especially when it comes to any kind of chilled water. For instance: One response to this thread mentioned they are controlling their PCW to 59 +/- 2F which means you will have 57F water some of the time. That temperature could very well cause condensation if it were implemented in a location where the individual wasn't aware of their design environment and that environment couldn't support such a temperature. PCW often runs in and out of "building" conditioned space with looser tolerances than the cleanroom space. If you are running non-insulated copper and have a higher PCW design temperature that you just lowered - you could have a large problem that could do significant damage before it was discovered (think about spaces above cleanroom ceilings, etc). As well, depending on whether or not your facility has a 1% or even .1% ASHRAE design temperature - you may not have seen the highest dew point in your room yet. A cleanroom that is within temperature spec could easily hit a 57F dew point with only a small drift in humidity due to an extremely hot and humid day. In my experience, I have never needed facility PCW to be colder than 18C, and even if it were required in some instances - I would likely utilize a separate chiller rather than risk problems with condensation. Thanks Peter J Duda Technical Manager, Pritzker Nanofabrication Facility Institute for Molecular Engineering University of Chicago 5555 South Ellis Avenue Young 006D Chicago, IL 60637 Office: 773-702-8903 Cell: 805-636-2323 duda at uchicago.edu ime.uchicago.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice Sent: Friday, September 11, 2015 2:47 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Temperature specification for facility process chilled water Dear Colleagues, The process chilled water loop in our cleanroom has consistently oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our Plant Operations group is looking into the possibility of tightening this up for us by tuning the control sequence. They have asked for guidance on an acceptable specification. In light of this I would appreciate hearing from you as to your facility's PCW temperature target and tolerance. Thank you much. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From rizik at intengr.com Fri Sep 18 15:38:19 2015 From: rizik at intengr.com (Rizik) Date: Fri, 18 Sep 2015 15:38:19 -0400 Subject: [labnetwork] FW: Temperature specification for facility process chilled water In-Reply-To: <55FB53D4.6050402@eecs.berkeley.edu> References: <8B28A798-B2E8-4142-8F4A-35E018119475@soton.ac.uk> <7E4F526EF5F18B4BA90905AC52DF05F179B84EE4@WPVEXCMBX08.purdue.lcl> <55FB53D4.6050402@eecs.berkeley.edu> Message-ID: <405E1151-5E41-4FD9-A1F5-2ECD551C9881@intengr.com> Bill and Tim, Please let me chime in here. Over the past 32 year designing, building and operating PCW systems at various high tech facilities here are my thoughts: 1. Temperature control: tighter temp control range could be easily achieved by using a "Modulating V-Port control ball valves with pneumatic actuators" compared to other types of control valves as long as you have a relatively stable CHWS temperature. 2. Bacteria control: a) open loop: usually such a system includes a storage tank equipped with nitrogen purge to minimize CO2 absorption, hence very low or no bacteria growth. PCW tanks that don't have nitrogen purge will develop bacteria and biofilm growth on the piping surface. b) closed loop: closed loop systems filled with RO water don't experience frequent bacteria growth. Sterilizing the system once every couple of years then refilling with RO water is recommended. You can also add a biocide but it will defeat the purpose if you need to maintain resistivity at a certain level. However, bacteria growth could be better controlled by adding a bacteria UV light in a side stream connected between pumps' discharge then back to the PCWR pipe upstream of the air separator snd pumps suction. 3. Resistivity control: a) open loop: as Bill stated this is usually achieved by the bleed and feed method. DI water is added to the tank when water resistivity drops below a preset level. Excess water overflows from the tank to the AWN. This method uses more water and takes longer to raise resistivity to the preset level. A more effective way is to bleed PCW from the PCWR pipe by activating a side stream solenoid valve then adding DIW to the tank until the desired resistivity level is achieved. This will take less water and time to achieve the preset resistivity level. Another way to control open loop and closed loop resistivity is by running a PCW side stream from the pumps' discharge into ion exchange beds then return the water back to the tank or pump suction respectively. Adding a bacteria sterilizing UV light to this side stream will Be an economical way for controlling bacteria growth in the PCW system. 15 years ago we were invited by Novellus to evaluate their open loop PCW system which developed very high bacteria levels due to the absence of nitrogen purge. Prior to our involvement Novellus attempted to sterilize the system using sodium hypochlorite. Unfortunately they ended up destroying the phosphating layer on the interior surface of the vacuum pumps and causing them to rust. Adding pain to misery the system developed iron eating bacteria which resulted in destroying their vacuum pumps which had to be replaced at $54K a piece. In conclusion, depending on the system that you currently have you can design and install one or a combination of the features described above that will serve your needs. Please feel free to call or write back for any questions. Regards Rizik Michael Cell: 408 718 0927 Sent from my iPhone > On Sep 17, 2015, at 7:59 PM, Bill Flounders wrote: > > No biocide or corrosion inhibitors on the pcw loop. > Piping is copper. 306 SS was rejected for cost savings. > CPVC would have been preferred and additional cost > savings but initial code interpretation would not allow CPVC > since it does not meet 25/50 smoke/flame spread requirement. > > Resistivity target is 200kohm. > At 175k, tank dumps ~20% system volume and is refilled with RO. > Resistivity recovers to ~275k. System resistivity gradually decreases > over 3-5 days and cycle repeats. Recurring fresh water input is what > avoids need for biocide or inhibitor. > > If any failure of pcw pump/flow - system automatically crosses over > to single pass ICW. Resistivity spec is bypassed. When PCW flow > is restored, resistivity control is reimplemented and 4-5 tank dumps > required to restore system to normal. A picture is worth 1000 words: > Appended graph summarizes resistivity as function of time for the > past 1month. 2 cross over events to ICW are noted. > > Bill Flounders > UC Berkeley > > > > > > > Miller, Timothy J wrote: >> Iain, >> >> Normally Jeff Kuhn would answer this, but he is out this week on family business. >> >> All of the components in our PCW system are stainless steel, CPVC, or fiberglass. We haven't really worried about corrosion preventers since the building was commissioned. >> >> In ten years of operation we have had one problem with bacteria. The system was dosed once with biocide, which was then removed by dilution. >> >> No UV sterilizers or mixed beds. If there is a catastrophic loss of water we can refill from the RO on the UPW system, which runs 1-2 MegOhmcm. If the resistivity of the water drops below .95 Meg the system is topped off with concentrate water from the ultrafilters on the UPW system (18.2 Meg) with the excess water overflowing to drain until the resistivity returns to 1.05 Meg. Very simple and very inexpensive. >> >> Tim >> >> Timothy J. Miller >> Purdue University >> Birck Nanotechnology Center >> 1205 West State Street >> West Lafayette, IN 47907-2057 >> 765-427-4712 >> >> >> -----Original Message----- >> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Anteney I.M. >> Sent: Tuesday, September 15, 2015 2:16 AM >> To: Dennis Schweiger >> Cc: Vito Logiudice; labnetwork at mtl.mit.edu >> Subject: Re: [labnetwork] Temperature specification for facility process chilled water >> >> Denis, >> >> I'm particularly interested in your comment about polishing the loops to get 1 mega-ohm resistance as we have struggled to do this especially when we dose the system with biocide and corrosion inhibitors. What are you using to polish the system, what inhibitors/biocides do you use and how do these affect the conductivity. >> >> Regards >> >> Iain >> >> Cleanroom Manager >> University of Southampton >> >> Sent from my iPhone >> >> On 15 Sep 2015, at 00:36, Dennis Schweiger > wrote: >> >> Vito, >> >> here at UofMichigan, one of our PCW systems runs about 62.5F (16.9C) with a daily deviation of about 1F. The second runs about 59-60F (15C). It too has a daily deviation of about 1F. For both systems we may see a seasonal deviation of 3-4F as the main chiller plant transitions from "free cooling" to the use of chillers to create cooling water for the campus wide loop. We also "polish" both loops to 1 meg-ohm so that we have a "high resistance" in the RF cooling circuits. >> >> Dennis Schweiger >> University of Mighigan/LNF >> >> 734.647.2055 Ofc >> >> On Fri, Sep 11, 2015 at 3:47 PM, Vito Logiudice > wrote: >> Dear Colleagues, >> >> The process chilled water loop in our cleanroom has consistently oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our Plant Operations group is looking into the possibility of tightening this up for us by tuning the control sequence. They have asked for guidance on an acceptable specification. >> >> In light of this I would appreciate hearing from you as to your facility's PCW temperature target and tolerance. Thank you much. >> >> Best regards, >> Vito >> -- >> Vito Logiudice P.Eng. >> Director of Operations, Quantum NanoFab >> University of Waterloo >> Lazaridis QNC 1207 >> 200 University Avenue West >> Waterloo, ON Canada N2L 3G1 >> Tel.: (519) 888-4567 ext. 38703 >> Email: vito.logiudice at uwaterloo.ca >> Website: https://fab.qnc.uwaterloo.ca >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: PCW_Resistivity.jpg Type: image/jpeg Size: 35238 bytes Desc: not available URL: From schweig at umich.edu Fri Sep 18 16:14:05 2015 From: schweig at umich.edu (Dennis Schweiger) Date: Fri, 18 Sep 2015 16:14:05 -0400 Subject: [labnetwork] Cameras in cleanroom Message-ID: Stuart, here at UofMichigan, we just went through a large camera upgrade project. We can now see about 95% of the physical space (up from about 30%). All of the cameras are high resolution (5MP), and we have enough storage to save about 7 days worth of video (we're looking at doubling that capacity). Some of the cameras use a "warping" technology to allow us to see a larger 360 degree area. The UofM is pretty particular about what we can save, and who has access to the "film", so there were some hoops to jump through for that. We use the system to look for the "wild west" operators that we occasionally get in the off-hours. So far, it's been pretty handy in correcting bad behavior, and in providing additional security. There hasn't been much complaining about the additional video supervision. It's an expensive facility, we need to protect it, and the individuals working inside. Like other facilities, we have a monitor inside of the clean room that displays sixteen of the most important feeds from within the cleanroom. This augments the "single user alert" system we've installed as part of the notification at the wet benches. One thing I need to mention though is that about a year ago, we started implementing a name tag program that allows us to install name tags on the backs of the cleanroom suits. These back tags are in addition to the usual name badges that all users are required to wear on the front of their suit. A revision to that policy, adopted about 6 months ago, is that anyone processing between 6PM and 6AM is required to wear a nametag on the back of their suit. This makes identification on the cameras much easier, and it's easy to cross reference access activity with the saved video. I've attached a picture of the back tag in case you were curious as to what it looked like. Getting our clean room suit supplier on board was probably the most difficult part of the task, second only to deciding how we were going to do it. Dennis Schweiger University of Michigan/LNF 734.647.2055 Ofc On Fri, Sep 18, 2015 at 8:45 AM, Stuart Pearce wrote: > Dear All, > > > > I?ve just had cameras installed in our cleanroom as we have had a couple > of incidents with acids. I?m interested how many other cleanrooms have > them installed and whether or not you have experienced backlash from doing > so. > > > > I hope to hear your views. > > > > Thanks, Stuart > > > > __________________ > > Dr Stuart Pearce > > Senior Process Engineer and Cleanroom Manager > CIP Technologies (Huawei Technologies Co., Ltd) > > Office: +44 (0) 147 366 3153 > Mobile: +44 (0) 798 028 5288 > > Email: stuart.pearce at huawei.com > Web: www.ciphotonics.com > > > > [image: cid:image007.jpg at 01CD52EB.AD060EE0] > > > CIP Technologies is the trading name of The Centre for Integrated > Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) Co., > Ltd. > Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, > Ipswich, Suffolk IP5 3RE. > > Registered in England no. 4905488 > > > > This E-mail and its attachments contain confidential information from > HUAWEI, which is intended only for the person or entity whose address is > listed above. Any use of the information contained herein in any way > (including, but not limited to, total or partial disclosure, reproduction, > or dissemination) by persons other than the intended recipient(s) is > prohibited. If you receive this e-mail in error, please notify the sender > by phone or email immediately and delete it. > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 3331 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Back name tag.jpg Type: image/jpeg Size: 148251 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Front nametag.jpg Type: image/jpeg Size: 133271 bytes Desc: not available URL: From anava at tauex.tau.ac.il Mon Sep 21 00:39:30 2015 From: anava at tauex.tau.ac.il (Nava Ariel- Sternberg) Date: Mon, 21 Sep 2015 04:39:30 +0000 Subject: [labnetwork] Suggestions for interlocking fume hoods In-Reply-To: References: Message-ID: Hi Vito, What we did with the hoods is connect them to a loud voice alarm which will go off if you didn't sign up. It's not optimal but it's another direction, something to be a reminder and make it almost impossible to work but without interfering with the hood itself. Nava Nava Ariel-Sternberg, Ph.D. Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director MNCF Manager Phone: 03-640-5619 Mobile: 054-9984959 Email: anava at tauex.tau.ac.il From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice Sent: Wednesday, September 16, 2015 8:16 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Suggestions for interlocking fume hoods Dear Colleagues, Our efforts to physically interlock our tools via our lab management platform (Badger in our case) is progressing well. In most cases we are interlocking computer monitors, keyboards or computer mice with good results. My team and I have discussed how to best interlock our numerous fume hoods but were unable to settle on any one approach. For safety reasons we certainly do not want to make the hoods entirely unavailable when not enabled by Badger; ie., we want to encourage their use when lab users handle chemicals. However we do believe it would be beneficial to physically interlock them in some fashion to at least make them somewhat less appealing to use unless they are first enabled. I've searched past threads on this fantastic network and while I came across some great related discussions I was unable to find anything which dealt specifically with hood interlocks. I'd greatly appreciate hearing from those of you whom have interlocked your hoods or are thinking of doing so soon. I'm curious to know what service or feature you may have tapped into on a typical hood setup that might include some combination of spin-coaters, hot plates, heated/recirculating chemical baths, N2 guns, DI guns etc. Thanks very much for any insights. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Mon Sep 21 10:12:38 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Mon, 21 Sep 2015 14:12:38 +0000 Subject: [labnetwork] Cameras in cleanroom Message-ID: Hi Stuart, I will echo the many excellent responses here already and confirm that we?ve had *safety* cameras officially in place since we started operations in our new building in September 2014, but have also used them prior to that since 2011. We worked with the university?s Privacy Officer as well as our Director of Police Services before proceeding to make sure we did not step on any sensitive toes. Video feeds may be viewed real-time at dedicated terminals (not web-enabled as our Privacy Officer was less than enthusiastic about this) and recordings are kept for two weeks but are only accessible when needed via campus police. Together we worked out a policy that was palatable to all. At UGIM 2012 which was hosted by our friends at UC Berkeley I was impressed with the live feeds sent to TV panels in and outside the cleanroom so we went ahead and copied the excellent idea here. Great for PR and also great for encouraging the buddy system since we?ve installed two panels in the cleanroom which are near equipment booking terminals: we encourage everyone to glance at these regularly to help out a peer in need in an emergency situation. If it can help here are a couple of links to the relevant policies in place here: https://fab.qnc.uwaterloo.ca/data/access/safety/tv-panels https://fab.qnc.uwaterloo.ca/data/access/safety/video-recordings Good luck, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca From: Stuart Pearce > Date: Friday, September 18, 2015 at 8:45 AM To: "labnetwork at mtl.mit.edu" > Subject: [labnetwork] Cameras in cleanroom Dear All, I?ve just had cameras installed in our cleanroom as we have had a couple of incidents with acids. I?m interested how many other cleanrooms have them installed and whether or not you have experienced backlash from doing so. I hope to hear your views. Thanks, Stuart __________________ Dr Stuart Pearce Senior Process Engineer and Cleanroom Manager CIP Technologies (Huawei Technologies Co., Ltd) Office: +44 (0) 147 366 3153 Mobile: +44 (0) 798 028 5288 Email: stuart.pearce at huawei.com Web: www.ciphotonics.com [cid:image007.jpg at 01CD52EB.AD060EE0] CIP Technologies is the trading name of The Centre for Integrated Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) Co., Ltd. Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, Ipswich, Suffolk IP5 3RE. Registered in England no. 4905488 This E-mail and its attachments contain confidential information from HUAWEI, which is intended only for the person or entity whose address is listed above. Any use of the information contained herein in any way (including, but not limited to, total or partial disclosure, reproduction, or dissemination) by persons other than the intended recipient(s) is prohibited. If you receive this e-mail in error, please notify the sender by phone or email immediately and delete it. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 3331 bytes Desc: image001.jpg URL: From vito.logiudice at uwaterloo.ca Mon Sep 21 10:33:48 2015 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Mon, 21 Sep 2015 14:33:48 +0000 Subject: [labnetwork] FW: Temperature specification for facility process chilled water In-Reply-To: <405E1151-5E41-4FD9-A1F5-2ECD551C9881@intengr.com> References: <8B28A798-B2E8-4142-8F4A-35E018119475@soton.ac.uk> <7E4F526EF5F18B4BA90905AC52DF05F179B84EE4@WPVEXCMBX08.purdue.lcl> <55FB53D4.6050402@eecs.berkeley.edu> <405E1151-5E41-4FD9-A1F5-2ECD551C9881@intengr.com> Message-ID: Thank you all for taking the time to share so many great insights and experiences. In my experience running PCW at a set point anywhere from 17C to 18C is usually acceptable for most tools. We?ve run as high as 20C when faced with some desperate conditions at our temporary facility a few years ago and did not see any obvious issues at that time. I share Peter J. Duda?s concerns about condensation but so far running at no less than 15.4C or so (at worst) has not given rise to any issues in any of the past four seasons. In our particular case, the cleanroom PCW loop is CPVC and it has its own dedicated heat exchanger, filters and primary & backup pumps. However, the water (set & maintained to a conductivity of 20 microsiemens) is shared with the rest of the building with all of it flowing back common to a large, common reservoir (this is an open-loop system with near-zero back pressure on the returns). For a variety of reasons which I am open to discuss over a beer one day, SS was used throughout the rest of the building. What has made matters difficult here is that many of the labs to which the water is distributed have since been fitted with copper pipes. We are seeing minor signs of corrosion of these particular pipes likely due to galvanic effects and the water?s resistivity. No major issues have been noted in our facility or any of the labs so far but this is the sort of thing that sometimes keeps me up at night. Best, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca From: Rizik > Date: Friday, September 18, 2015 at 3:38 PM To: Bill Flounders > Cc: "labnetwork at mtl.mit.edu" > Subject: Re: [labnetwork] FW: Temperature specification for facility process chilled water Bill and Tim, Please let me chime in here. Over the past 32 year designing, building and operating PCW systems at various high tech facilities here are my thoughts: 1. Temperature control: tighter temp control range could be easily achieved by using a "Modulating V-Port control ball valves with pneumatic actuators" compared to other types of control valves as long as you have a relatively stable CHWS temperature. 2. Bacteria control: a) open loop: usually such a system includes a storage tank equipped with nitrogen purge to minimize CO2 absorption, hence very low or no bacteria growth. PCW tanks that don't have nitrogen purge will develop bacteria and biofilm growth on the piping surface. b) closed loop: closed loop systems filled with RO water don't experience frequent bacteria growth. Sterilizing the system once every couple of years then refilling with RO water is recommended. You can also add a biocide but it will defeat the purpose if you need to maintain resistivity at a certain level. However, bacteria growth could be better controlled by adding a bacteria UV light in a side stream connected between pumps' discharge then back to the PCWR pipe upstream of the air separator snd pumps suction. 3. Resistivity control: a) open loop: as Bill stated this is usually achieved by the bleed and feed method. DI water is added to the tank when water resistivity drops below a preset level. Excess water overflows from the tank to the AWN. This method uses more water and takes longer to raise resistivity to the preset level. A more effective way is to bleed PCW from the PCWR pipe by activating a side stream solenoid valve then adding DIW to the tank until the desired resistivity level is achieved. This will take less water and time to achieve the preset resistivity level. Another way to control open loop and closed loop resistivity is by running a PCW side stream from the pumps' discharge into ion exchange beds then return the water back to the tank or pump suction respectively. Adding a bacteria sterilizing UV light to this side stream will Be an economical way for controlling bacteria growth in the PCW system. 15 years ago we were invited by Novellus to evaluate their open loop PCW system which developed very high bacteria levels due to the absence of nitrogen purge. Prior to our involvement Novellus attempted to sterilize the system using sodium hypochlorite. Unfortunately they ended up destroying the phosphating layer on the interior surface of the vacuum pumps and causing them to rust. Adding pain to misery the system developed iron eating bacteria which resulted in destroying their vacuum pumps which had to be replaced at $54K a piece. In conclusion, depending on the system that you currently have you can design and install one or a combination of the features described above that will serve your needs. Please feel free to call or write back for any questions. Regards Rizik Michael Cell: 408 718 0927 Sent from my iPhone On Sep 17, 2015, at 7:59 PM, Bill Flounders > wrote: No biocide or corrosion inhibitors on the pcw loop. Piping is copper. 306 SS was rejected for cost savings. CPVC would have been preferred and additional cost savings but initial code interpretation would not allow CPVC since it does not meet 25/50 smoke/flame spread requirement. Resistivity target is 200kohm. At 175k, tank dumps ~20% system volume and is refilled with RO. Resistivity recovers to ~275k. System resistivity gradually decreases over 3-5 days and cycle repeats. Recurring fresh water input is what avoids need for biocide or inhibitor. If any failure of pcw pump/flow - system automatically crosses over to single pass ICW. Resistivity spec is bypassed. When PCW flow is restored, resistivity control is reimplemented and 4-5 tank dumps required to restore system to normal. A picture is worth 1000 words: Appended graph summarizes resistivity as function of time for the past 1month. 2 cross over events to ICW are noted. Bill Flounders UC Berkeley Miller, Timothy J wrote: Iain, Normally Jeff Kuhn would answer this, but he is out this week on family business. All of the components in our PCW system are stainless steel, CPVC, or fiberglass. We haven't really worried about corrosion preventers since the building was commissioned. In ten years of operation we have had one problem with bacteria. The system was dosed once with biocide, which was then removed by dilution. No UV sterilizers or mixed beds. If there is a catastrophic loss of water we can refill from the RO on the UPW system, which runs 1-2 MegOhmcm. If the resistivity of the water drops below .95 Meg the system is topped off with concentrate water from the ultrafilters on the UPW system (18.2 Meg) with the excess water overflowing to drain until the resistivity returns to 1.05 Meg. Very simple and very inexpensive. Tim Timothy J. Miller Purdue University Birck Nanotechnology Center 1205 West State Street West Lafayette, IN 47907-2057 765-427-4712 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Anteney I.M. Sent: Tuesday, September 15, 2015 2:16 AM To: Dennis Schweiger Cc: Vito Logiudice; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Temperature specification for facility process chilled water Denis, I'm particularly interested in your comment about polishing the loops to get 1 mega-ohm resistance as we have struggled to do this especially when we dose the system with biocide and corrosion inhibitors. What are you using to polish the system, what inhibitors/biocides do you use and how do these affect the conductivity. Regards Iain Cleanroom Manager University of Southampton Sent from my iPhone On 15 Sep 2015, at 00:36, Dennis Schweiger > wrote: Vito, here at UofMichigan, one of our PCW systems runs about 62.5F (16.9C) with a daily deviation of about 1F. The second runs about 59-60F (15C). It too has a daily deviation of about 1F. For both systems we may see a seasonal deviation of 3-4F as the main chiller plant transitions from "free cooling" to the use of chillers to create cooling water for the campus wide loop. We also "polish" both loops to 1 meg-ohm so that we have a "high resistance" in the RF cooling circuits. Dennis Schweiger University of Mighigan/LNF 734.647.2055 Ofc On Fri, Sep 11, 2015 at 3:47 PM, Vito Logiudice > wrote: Dear Colleagues, The process chilled water loop in our cleanroom has consistently oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our Plant Operations group is looking into the possibility of tightening this up for us by tuning the control sequence. They have asked for guidance on an acceptable specification. In light of this I would appreciate hearing from you as to your facility's PCW temperature target and tolerance. Thank you much. Best regards, Vito -- Vito Logiudice P.Eng. Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From tribble at fas.harvard.edu Tue Sep 22 14:30:28 2015 From: tribble at fas.harvard.edu (Tribble, Thomas A.) Date: Tue, 22 Sep 2015 18:30:28 +0000 Subject: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? Message-ID: The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is becoming an increasingly popular Facilities practice. Has there been any experience with this kind of retrofit inside the cleanroom? Specifically, in Lithography and other UV sensitive areas of the cleanroom, have there been any observed (or anticipated) adverse effects from the use of LED lamps? Thanks . . . Tom Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street | Cambridge, MA 02138 | (tel) 617 495 0990 |(cell) 617 780 5685 | -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at seas.upenn.edu Tue Sep 22 17:52:28 2015 From: nclay at seas.upenn.edu (Noah Clay) Date: Tue, 22 Sep 2015 17:52:28 -0400 Subject: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? In-Reply-To: References: Message-ID: <9043F250-2A85-40FF-8EEC-EE4AC0F1DBD0@seas.upenn.edu> Tom, We use LED strip lights (3M, I believe) in our wet benches from Reynolds Tech. As far as I know, they install LED lighting circuits in all of their new bench builds and I recommend speaking with Vince Reynolds for further information. The lighting in our lithography benches have yellow filters on them and have posed no issues with our research community. For the time being, the overhead cleanroom lighting at Penn is fluorescent. Thanks, Noah Quattrone Nanofabrication Facility University of Pennsylvania Philadelphia, PA > On Sep 22, 2015, at 2:30 PM, Tribble, Thomas A. wrote: > > The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is becoming an increasingly popular Facilities practice. Has there been any experience with this kind of retrofit inside the cleanroom? Specifically, in Lithography and other UV sensitive areas of the cleanroom, have there been any observed (or anticipated) adverse effects from the use of LED lamps? > > Thanks . . . Tom > > Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street | Cambridge, MA 02138 | (tel) 617 495 0990 |(cell) 617 780 5685 | > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From ida.noddeland at ntnu.no Wed Sep 23 02:48:45 2015 From: ida.noddeland at ntnu.no (Ida Noddeland) Date: Wed, 23 Sep 2015 06:48:45 +0000 Subject: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? In-Reply-To: <9043F250-2A85-40FF-8EEC-EE4AC0F1DBD0@seas.upenn.edu> References: <9043F250-2A85-40FF-8EEC-EE4AC0F1DBD0@seas.upenn.edu> Message-ID: We do not have LED in our cleanroom, but I have heard that it is difficult to see thickness fringes in this kind of light. Another cleanroom (Electrum in Stockholm) installed LED in their EBL area, but had to reinstall some "normal" light sources after requests from the operators. Best regards, Ida Noddeland Head of Laboratory NTNU NanoLab Sem S?lands vei 14, K1-123 7491 Trondheim +47 41288808 www.ntnu.no/nanolab From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Noah Clay Sent: Tuesday, September 22, 2015 11:52 PM To: Tribble, Thomas A. Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? Tom, We use LED strip lights (3M, I believe) in our wet benches from Reynolds Tech. As far as I know, they install LED lighting circuits in all of their new bench builds and I recommend speaking with Vince Reynolds for further information. The lighting in our lithography benches have yellow filters on them and have posed no issues with our research community. For the time being, the overhead cleanroom lighting at Penn is fluorescent. Thanks, Noah Quattrone Nanofabrication Facility University of Pennsylvania Philadelphia, PA On Sep 22, 2015, at 2:30 PM, Tribble, Thomas A. > wrote: The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is becoming an increasingly popular Facilities practice. Has there been any experience with this kind of retrofit inside the cleanroom? Specifically, in Lithography and other UV sensitive areas of the cleanroom, have there been any observed (or anticipated) adverse effects from the use of LED lamps? Thanks . . . Tom Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street | Cambridge, MA 02138 | (tel) 617 495 0990 |(cell) 617 780 5685 | _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From cibuzar at umn.edu Wed Sep 23 08:53:14 2015 From: cibuzar at umn.edu (Gregory Cibuzar) Date: Wed, 23 Sep 2015 07:53:14 -0500 Subject: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? In-Reply-To: References: Message-ID: Tom, See below for a response I made to a similar inquiry to labnetwork from last spring. I might add that we used G10 yellow film from Encapsulite for the filtering. Greg -------------------------------------------------------------------------------- A few years ago we replaced 630 40 watt T12 florescent lamps in our cleanroom with 20 watt T8 LED lamps from Phillips. The T12 lamps had to go since they were being phased out of production. We looked at moving to T8 fluorescents, but that would have required considerable rewiring to replace all the remote ballasts that worked with the T12 lamps but would not work with the T8 lamps. Our local energy company had a rebate program for LED lighting, and that combined with the energy savings convinced our energy management department to fund the replacement. The LED lamps did not require a ballast, only some minor rewiring to route line voltage to the fixtures. It took a few electricians 3-4 days to do the work, but in the end it worked out pretty well. After 3 years we have not lost a lamp. The energy management team told me together with the occupancy sensors that were also added we were saving around $13K/yr in energy costs. Here is a link to the LED lamps we used: http://www.lighting.philips.com/pwc_li/us_en/connect/tools_literature/downloads/p-6206.pdf Before we agreed to this change, we investigated the resist exposure issue. Our T12 lamps had the yellow sleeves, but we did not want to go with these sleeves on the LED T8 lamps due to concerns that the lamp temp would rise too high and reduce the lifetime. Instead we ended up buying some UV filtering film (we tested several for resist exposure) and manually cutting pieces to snugly fit inside the plastic housing surrounding the lamp (we have the old "teardrop" style lights in that cleanroom). That was a pain to do, but in the end it worked pretty well. Regards, Greg Greg Cibuzar Manager, Minnesota Nano Center www.mnc.umn.edu University of Minnesota 612-625-8079 On Tue, Sep 22, 2015 at 1:30 PM, Tribble, Thomas A. wrote: > The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is > becoming an increasingly popular Facilities practice. Has there been any > experience with this kind of retrofit inside the cleanroom? Specifically, > in Lithography and other UV sensitive areas of the cleanroom, have there > been any observed (or anticipated) adverse effects from the use of LED > lamps? > > > > Thanks . . . Tom > > > > *Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street | > Cambridge, MA 02138 | (tel) 617 495 0990 <617%20495%200990> |(cell) 617 780 > 5685 <617%20780%205685> |* > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From dean.sutter at ien.gatech.edu Wed Sep 23 14:58:13 2015 From: dean.sutter at ien.gatech.edu (Dean A Sutter) Date: Wed, 23 Sep 2015 14:58:13 -0400 Subject: [labnetwork] Sr. Researcher Seeking Laboratory Support Opportunity Message-ID: <5602F645.5010809@ien.gatech.edu> Hello Network, I don't normally post job requests on this network that I get from folks, however, I know of a sr. research individual in the Atl area, looking to relocate, with the skill set listed below. I also know how difficult it is to find trained folks. So, if any interest, send me an email and I will connect. Bioelectronics/Microelectronics Demonstrated the following prototype construction, low cost, fast and simple fabrication methods that can be scaled easily and transferred to the industrial world for next generation smart devices. * Nanobiosensors -ZnO nanowire based biosensor * 3-D ICs Technologies: TSVs filled with metal/metal composite/conducting polymers * Nanointerconnects - Reactive Nanobonding * Nanoparticles based High density capacitors * Nanocomposite Thermal Interface Materials (TIM) ?Test Structures * Nano Magneto-Dielectric Antennas * Electrospun linear nanoscaffolds for neuroengineering * Microbial Fuel Cells : CNTs functionalized working electrode with bacteria/encapsulated enzyme * Bioelectronic /Chem/fabrication Skills * * Surface modification and Biofunctionalization for biosensors fabrication. * Synthesis and encapsulation of metallic and non-metallic nanoparticles.-- formagnetic dielectric antenna fabrication * Co-synthesis and nanocomposite preparation -- for Thermal Interface application. * Synthesis of variety of metallic nanoparticles sol-gel systems-- for Fine Pitch Flip Chip Packaging with metal based interconnections. * Metallic nanopaste preparation and nanopaste based devices fabrication by printing. * Surface polishing * Extensive working experience in Clean-room * Mask based Micro Lithography. * Mask less Lithography * Nanomaterials printing * Electroplating * Electroless plating * Sputtering, TEM, SEM, XRD and other tools used. * Reliability testing((Accelerated Testing, Thermal Testing, Temperature Testing ,Airflow Testing, Humidity Testing, Environmental Testing and other testing) * Electrical measurements * Magnetic measurements using toroid structures for fabrication of Nano Magneto-Dielectric Antennas -- Dean A. Sutter Associate Director, Research Operations and Industry Engagement dean.sutter at ien.gatech.edu ?The man who thinks he can and the man who thinks he can't are both right...." Henry Ford 404 894 3847 - Office 404 558 1844 - Cell www.ien.gatech.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From donghaiz at usc.edu Thu Sep 24 11:28:30 2015 From: donghaiz at usc.edu (Donghai Zhu) Date: Thu, 24 Sep 2015 15:28:30 +0000 Subject: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? In-Reply-To: References: <9043F250-2A85-40FF-8EEC-EE4AC0F1DBD0@seas.upenn.edu> Message-ID: Hello Tom, A couple of years ago, we considered to replace the fluorescent lamp by the LED lamps in clean room. Before we made decision, we got the spectrums of both the LED lamp and the GE fluorescent lamp, and compared them. There is a broad peak close to 450~460 nm besides the broad, main peak around 600 nm in the LED lamp although the intensity in 450 nm is weak. In the fluorescent lamp, the wavelengths of most of the peaks are more than 540 nm. But we still can see the weak peaks around 400~420nm. The issue may be solved If lamps are covered by filters. But we didn't do the further test. Regards, Donghai Zhu Keck Photonics Lab University of Southern California From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ida Noddeland Sent: Tuesday, September 22, 2015 11:49 PM To: Noah Clay ; Tribble, Thomas A. Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? We do not have LED in our cleanroom, but I have heard that it is difficult to see thickness fringes in this kind of light. Another cleanroom (Electrum in Stockholm) installed LED in their EBL area, but had to reinstall some "normal" light sources after requests from the operators. Best regards, Ida Noddeland Head of Laboratory NTNU NanoLab Sem S?lands vei 14, K1-123 7491 Trondheim +47 41288808 www.ntnu.no/nanolab From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Noah Clay Sent: Tuesday, September 22, 2015 11:52 PM To: Tribble, Thomas A. Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? Tom, We use LED strip lights (3M, I believe) in our wet benches from Reynolds Tech. As far as I know, they install LED lighting circuits in all of their new bench builds and I recommend speaking with Vince Reynolds for further information. The lighting in our lithography benches have yellow filters on them and have posed no issues with our research community. For the time being, the overhead cleanroom lighting at Penn is fluorescent. Thanks, Noah Quattrone Nanofabrication Facility University of Pennsylvania Philadelphia, PA On Sep 22, 2015, at 2:30 PM, Tribble, Thomas A. > wrote: The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is becoming an increasingly popular Facilities practice. Has there been any experience with this kind of retrofit inside the cleanroom? Specifically, in Lithography and other UV sensitive areas of the cleanroom, have there been any observed (or anticipated) adverse effects from the use of LED lamps? Thanks . . . Tom Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street | Cambridge, MA 02138 | (tel) 617 495 0990 |(cell) 617 780 5685 | _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From Daniel.Pulver at ll.mit.edu Fri Sep 25 19:01:38 2015 From: Daniel.Pulver at ll.mit.edu (Pulver, Daniel - 0835 - MITLL) Date: Fri, 25 Sep 2015 23:01:38 +0000 Subject: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? In-Reply-To: References: <9043F250-2A85-40FF-8EEC-EE4AC0F1DBD0@seas.upenn.edu> Message-ID: <1BE80EB20883A640AF8925DC762D77FB23E604AD@LLE2K10-MBX02.mitll.ad.local> Coming not long ago from an LED manufacturer Mercury ?Fluorescent? lamps use mercury excitation with familiar excitation spectrum with peaks at G, H and I lines http://zeiss-campus.magnet.fsu.edu/articles/lightsources/images/mercurylamps figure1.jpg. Phosphors are applied to absorb this light and re-emit at target color spectra and can be rated in color temperature. LED lamps use a blue LED, typically with emission spectra in the 430 ? 460nm range, with phosphors absorption and re-emission. The phosphor blend and application scheme is designed to meet target fluorescence and cost criteria and also are rated in color temperature: 2700K & 3000K (warm), 4500K, 6500K (cool). The excitation blue light is typically not all absorbed by the phosphors or there would be low efficiency, hence there is a emission spectra local peak at the blue excitation wavelength. The epi design to emit at wavelengths shorter than ~430nm suffers from low efficiency and is economically unviable unless those wavelengths are desired in the product. So, if your resist is not sensitive below ~430nm, unwanted exposure/desensitization is unlikely. Dan Pulver MIT Lincoln Lab From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ida Noddeland Sent: Wednesday, September 23, 2015 2:49 AM To: Noah Clay; Tribble, Thomas A. Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? We do not have LED in our cleanroom, but I have heard that it is difficult to see thickness fringes in this kind of light. Another cleanroom (Electrum in Stockholm) installed LED in their EBL area, but had to reinstall some ?normal? light sources after requests from the operators. Best regards, Ida Noddeland Head of Laboratory NTNU NanoLab Sem S?lands vei 14, K1-123 7491 Trondheim +47 41288808 www.ntnu.no/nanolab From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Noah Clay Sent: Tuesday, September 22, 2015 11:52 PM To: Tribble, Thomas A. Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom? Tom, We use LED strip lights (3M, I believe) in our wet benches from Reynolds Tech. As far as I know, they install LED lighting circuits in all of their new bench builds and I recommend speaking with Vince Reynolds for further information. The lighting in our lithography benches have yellow filters on them and have posed no issues with our research community. For the time being, the overhead cleanroom lighting at Penn is fluorescent. Thanks, Noah Quattrone Nanofabrication Facility University of Pennsylvania Philadelphia, PA On Sep 22, 2015, at 2:30 PM, Tribble, Thomas A. wrote: The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is becoming an increasingly popular Facilities practice. Has there been any experience with this kind of retrofit inside the cleanroom? Specifically, in Lithography and other UV sensitive areas of the cleanroom, have there been any observed (or anticipated) adverse effects from the use of LED lamps? Thanks . . . Tom Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street | Cambridge, MA 02138 | (tel) 617 495 0990 |(cell) 617 780 5685 | _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: smime.p7s Type: application/pkcs7-signature Size: 5617 bytes Desc: not available URL: From PhilH at ee.montana.edu Mon Sep 28 13:52:16 2015 From: PhilH at ee.montana.edu (Himmer, Phil) Date: Mon, 28 Sep 2015 11:52:16 -0600 Subject: [labnetwork] PVD of YB66 Message-ID: <1B77987E-BD16-417E-84A3-783F6003C88E@ece.montana.edu> Hello, Does anyone have experience with PVD of Yttrium Boride, YB66 specifically. I am reluctant use it in our tools because the research group cannot come up with a MSDS for this material nor do I know how it will effect other processes in our system. Besides possible health concerns is boron a significant concern for cross contamination? thanks phil Dr. Phillip Himmer Manager Montana Microfabrication Facility Montana State University Bozeman Mt 59717 Office Ph: 406-994-7178 email: philh at ece.montana.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From kurt.kupcho at wisc.edu Mon Sep 28 17:42:53 2015 From: kurt.kupcho at wisc.edu (Kurt Kupcho) Date: Mon, 28 Sep 2015 21:42:53 +0000 Subject: [labnetwork] PVD of YB66 In-Reply-To: <1B77987E-BD16-417E-84A3-783F6003C88E@ece.montana.edu> References: <1B77987E-BD16-417E-84A3-783F6003C88E@ece.montana.edu> Message-ID: Whatever supplier they buy the Yttrium Boride from has to legally supply a SDS for it. I would tell them to go back to where they bought it from and ask for one. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Himmer, Phil Sent: Monday, September 28, 2015 12:52 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] PVD of YB66 Hello, Does anyone have experience with PVD of Yttrium Boride, YB66 specifically. I am reluctant use it in our tools because the research group cannot come up with a MSDS for this material nor do I know how it will effect other processes in our system. Besides possible health concerns is boron a significant concern for cross contamination? thanks phil Dr. Phillip Himmer Manager Montana Microfabrication Facility Montana State University Bozeman Mt 59717 Office Ph: 406-994-7178 email: philh at ece.montana.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jun.li at mcgill.ca Tue Sep 29 14:13:39 2015 From: jun.li at mcgill.ca (Jun Li, Mr) Date: Tue, 29 Sep 2015 18:13:39 +0000 Subject: [labnetwork] Information on Aligner: Mikasa MA-8 Message-ID: <0066325AFE8720429E24AC0D4BE10684C0BDCDC6@EXMBX2010-7.campus.MCGILL.CA> Dear Labnetwork colleagues, One of our PI?s Fab has an old, but good aligner: (the tool is: Mikasa MA-8) , Unfortunately, at the last passage of tool travel, from UK to Canada, the power source for the UV lamp was lost. The aligner is from a company called Mikasa, The type they have is MA-8, which is not available for more than 30 years so that they cannot find detail information on their official website. attached is the aligner picture. I am wondering if any one happens to own/use the tool before, and know the model/type of power supply information, or some alternative 2nd hand replacement solution suppliers for the power source. Many Thanks Jun Li Nanotool Fab McGill University Rutherford Physics Building 3600 University Street Montreal, Quebec H3A 2T8 Canada [cid:image003.jpg at 01D0FAAF.D5286700][cid:image004.jpg at 01D0FAAF.D5286700] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.jpg Type: image/jpeg Size: 22886 bytes Desc: image003.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image004.jpg Type: image/jpeg Size: 61765 bytes Desc: image004.jpg URL: From hbtusainc at yahoo.com Tue Sep 29 19:49:53 2015 From: hbtusainc at yahoo.com (Mario Portillo) Date: Tue, 29 Sep 2015 23:49:53 +0000 (UTC) Subject: [labnetwork] Information on Aligner: Mikasa MA-8 In-Reply-To: <0066325AFE8720429E24AC0D4BE10684C0BDCDC6@EXMBX2010-7.campus.MCGILL.CA> References: <0066325AFE8720429E24AC0D4BE10684C0BDCDC6@EXMBX2010-7.campus.MCGILL.CA> Message-ID: <1048536691.2345162.1443570593867.JavaMail.yahoo@mail.yahoo.com> Mr. Li....The model number of power supply for this Mikasa aligner is irrevelant. Back then maybe a 100-200 watts lamp. There are power supplies available today.( Google power supplies companies) Important to know today is; 1) the wattage of lamp,(IE: 100,200, 350 watts etc..) 2) Does the light source has an internal power igniter..??? 3) If light source has not an internal igniter, then power supply has to have one. I hope this helps, it is very straight forward. Regards Mario A. Portillo Sr. HIGH'born Technology USA Inc.. Semiconductor Equipment Services 8130 Glades Road, #229 Boca Raton, FL 33434 561 470-1975 office 561 504-0244 cell hbtusainc at yahoo.com www.hbtusainc.com ________________________________ From: "Jun Li, Mr" To: "labnetwork at mtl.mit.edu" Sent: Tuesday, September 29, 2015 2:13 PM Subject: [labnetwork] Information on Aligner: Mikasa MA-8 Dear Labnetwork colleagues, One of our PI?s Fab has an old, but good aligner: (the tool is: Mikasa MA-8) , Unfortunately, at the last passage of tool travel, from UK to Canada, the power source for the UV lamp was lost. The aligner is from a company called Mikasa, The type they have is MA-8, which is not available for more than 30 years so that they cannot find detail information on their official website. attached is the aligner picture. I am wondering if any one happens to own/use the tool before, and know the model/type of power supply information, or some alternative 2nd hand replacement solution suppliers for the power source. Many Thanks Jun Li Nanotool Fab McGill University Rutherford Physics Building 3600 University Street Montreal, Quebec H3A 2T8 Canada _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork