[labnetwork] ALD deposition of CrO2 using CrO2Cl2

[Shivakumar Bhaskaran]

We had request from a user group to deposit Chromium Oxide using CrO2Cl2 using the Atomic Layer Deposition (ALD).

Due to the highly oxidizing nature and toxicity  I am worried to use this precursor in our ALD

Do anyone have used CrO2Cl2 in your facility if so what sort of precautions you followed and what type of pumps or other requirements needed.

-Thanks
-Shiva


Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

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