[labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom?

Ida Noddeland ida.noddeland at ntnu.no
Wed Sep 23 02:48:45 EDT 2015


We do not have LED in our cleanroom, but I have heard that it is difficult to see thickness fringes in this kind of light. Another cleanroom (Electrum in Stockholm) installed LED in their EBL area, but had to reinstall some "normal" light sources after requests from the operators.

Best regards,
Ida Noddeland

Head of Laboratory
NTNU NanoLab

Sem Sælands vei 14, K1-123
7491 Trondheim
+47 41288808
www.ntnu.no/nanolab<http://www.ntnu.no/nanolab>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Noah Clay
Sent: Tuesday, September 22, 2015 11:52 PM
To: Tribble, Thomas A.
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom?

Tom,

We use LED strip lights (3M, I believe) in our wet benches from Reynolds Tech.  As far as I know, they install LED lighting circuits in all of their new bench builds and I recommend speaking with Vince Reynolds for further information.  The lighting in our lithography benches have yellow filters on them and have posed no issues with our research community.  For the time being, the overhead cleanroom lighting at Penn is fluorescent.

Thanks,
Noah

Quattrone Nanofabrication Facility
University of Pennsylvania
Philadelphia, PA

On Sep 22, 2015, at 2:30 PM, Tribble, Thomas A. <tribble at fas.harvard.edu<mailto:tribble at fas.harvard.edu>> wrote:

The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is becoming an increasingly popular Facilities practice.  Has there been any experience with this kind of retrofit inside the cleanroom? Specifically, in Lithography and other UV sensitive areas of the cleanroom, have there been any observed (or anticipated) adverse effects from the use of LED lamps?

Thanks . . . Tom

Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street | Cambridge, MA 02138 | (tel) 617 495 0990 |(cell) 617 780 5685 |

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