[labnetwork] PVD of YB66

[Himmer, Phil]

Hello,

Does anyone have experience with PVD of Yttrium Boride, YB66 specifically. I am reluctant use it in our tools because the research group cannot come up with a MSDS for this material nor do I know how it will effect other processes in our system. Besides possible health concerns is boron a significant concern for cross contamination?

thanks
phil


Dr. Phillip Himmer
Manager Montana Microfabrication Facility
Montana State University
Bozeman Mt 59717

Office Ph: 406-994-7178
email: philh at ece.montana.edu<mailto:philh at ece.montana.edu>



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