[labnetwork] MgF2 Ebeam deposition

[Christophe Clément]

Hello All,

I’ve been asked to deposit MgF2 in our Ebeam evaporation tool. According
to suppliers, MgF2 is excellent by Ebeam evaporation with graphite
crucible. My concern is about contamination and how to clean this. We
usually deposit Oxides and Metals in our Ebeam (Au, Cr, SiO2, TiO2
.).

If you have any experience to share, that will be appreciated!



Thank you

Christophe



Christophe Clément

Technicien laboratoire

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM)  <http://www.gcmlab.ca> www.gcmlab.ca

Ecole Polytechnique de Montréal  <http://www.polymtl.ca/> www.polymtl.ca

Département de génie physique

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4


*  <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca

* 514 340 4711

Fax : 514 340 4711 # 2417

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