[labnetwork] Piranha processing vessels

[Wing Leong CHUNG]

Keith,

Here below are the information of chemical bath which we are using. Hope it can help you.

We have the following Chemical Baths which are purchased from PCT system and Imtec. All product information can be found from PCT system website http://pctsystems.com/products/process-tanks and Imtec website http://www.imtecacculine.com/heated-stainless-steel-tanks.


1. PCT’s Tiger Tank Quartz Constant Temperature Bath, TT4 for Sulfuric Acid

Features
-High-purity virgin quartz liner, molded or GE124

-Excellent sealing integrity
-Available in all standard single- or dual-cassette sizes and custom sizes -Greater reliability, longer life, and superior operational characteristics -Improved safety features -Time-proven in line heater element design -Fire-retardant housing (and FM4910 approved materials) -Improved flange design -Redundant over temperature sensors – TCs (2) and Snap Switch -Superior insulation

2. Tiger Tank™—Nitride Etch (TTN)

Features
-High reliable quartz tank design
-Hydroseal washer standard on all TTN baths for longer RTV seal life -Manual or Auto-lid configurations (side and end configurations) -190°C temperature operation, higher temperatures available on custom baths -Liquid Level Sensors -Dual Panel flow meter for DI water drip and cooling water control -RTD Temperature Sensors -TC and Snap Switch over-temperature device

3. Tiger Tank™ Filtered Recirculating Baths (TTF) for Aluminum Etch Features -Single-vessel design with direct chemistry heating -No swamping of the weir area during boat placement -Most rugged and durable unit of its kind -Available in standard sizes
-Single- or dual-cassette configuration for up to 300mm

4. Tiger Tank™—Stainless Steel for MS2001 Solvent Features
-FM4910 or stainless steel housings
-316, 324 or 304 EP Stainless steel construction -Heated tanks up to 150°C -fabricated from a single sheet of material providing the smoothest and purest material surface available.

Jeff CHUNG, Wing Leong
Engineer, NFF HKUST
www.nff.ust.hk<http://www.nff.ust.hk>

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven
Sent: Friday, April 29, 2016 4:05 AM
To: Keith Franklin; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Piranha processing vessels

Keith,
  Do NOT use PVC. If the acid doesn’t eat it, the heat generated from the exothermic reaction will. This would be quite dangerous. If you have to use glass, quartz is the best way to go. If you want to use polymer, I would highly recommend Teflon over polypropylene or polyethylene for its heat and chemical resistance, it is well worth the added cost. Keep in mind that piranha etch will reach temperatures well over 100 Deg. C. when spiked with H2O2 and increases the corrosive properties of the sulfuric. Even though a particular material might be rated to resist high temperatures, it doesn’t mean that it will resist the abuse it will get from this etch. I have cleaned up my share of piranha mishaps and the majority of them had to do with containers or drain traps in the sink that were PVC.
Steve Paolini
Equipment Dood
Harvard University Center for Nanoscale systems.


From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Keith Franklin
Sent: Thursday, April 28, 2016 1:59 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Piranha processing vessels

Good day all,

We're currently revisiting what vessels or tanks we use for processing with hot piranha.  Our most common application is for cleaning a partially filled cassette of 4" Si wafers.  We typically purchase Pyrex 6944 vessel and have our glass shop cut them down to a more reasonable height.  In our last purchase cycle, we noticed that the ID has changed ever so slightly and it's now challenging to squeeze our standard Entegris cassette into this vessel.  We're currently looking into custom machined PVC, PP,  Teflon & Quartzware, as well as off the shelf small volume tanks, etc.

I'm hoping to better understand what other similar labs are using for this application (& potentially 6" wafers as well).  Any advice or feedback would be greatly appreciated.

Kind Regards,
Keith


Keith Franklin

Operations Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4                     Ph: 780-492-0170
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