[labnetwork] Deep silicon etcher
Morrison, Richard H., Jr.
rmorrison at draper.com
Tue Dec 6 08:18:25 EST 2016
In 2015 we installed a SPST Rapier tool in the Draper uFab and it is a work horse, excellent field service response. We run 100mm and 150mm wafer, mostly DRIE of Silicon and RIE etch of thick 2-3um SiO2.
Rick
Draper
Principal Member of the Technical Staff
555 Technology Square
Cambridge Ma, 02139-3563
www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461
-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of CHUNG Wing Leong
Sent: Monday, December 05, 2016 10:21 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Deep silicon etcher
NFF of HKUST is looking for a silicon etcher to enhance our silicon etch capability. Is there any suggestion on tool selection? and users'
feedback/recommendation?
Currently, we are using STS machine which is 15 years old.
Thank You
Jeff
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