[labnetwork] ALD of Copper, Silver, Gold or Aluminum
Bill Flounders
bill at eecs.berkeley.edu
Mon Dec 12 20:52:30 EST 2016
John,
I'd start 20 miles down the road with Ultratech
http://www.cambridgenanotechald.com/services/index.shtml
If they have already said no, Picosun claims gold, silver and copper
using gold and copper precursors from Prof. Sean Barry and Jason Coyle,
Carleton University, Canada; and silver precursors from Timo Hatanpää,
University of Helsinki, Finland.
Bill Flounders
UC Berkeley
John Lovaasen wrote:
> I'm looking for someone that has recent work on depositing Copper,
> Silver, Gold or Aluminum on dielectric substrates via ALD. I'm looking
> for less than 10nm coating thickness.
> Thanks,
> John Lovaasen
> /Staff Engineer/
> Triton Systems, Inc.
> 200 Turnpike Road
> Chelmsford, MA 01824
> Ph# 978-856-4152
> Cell# 701-899-0323
> jlovaasen at tritonsystems.com <mailto:jlovaasen at tritonsystems.com>
>
>
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