[labnetwork] Micro fabrication modeling software tools

[Jugessur, Aju S]

Hi,

I am looking to invest on various computational modeling tools for Microfabrication processes, in particular,

(a) Dry-etching
(b) Thin film deposition (ALD/Sputter/Ebeam evaporation)
(c) Ebeam and Optical Lithography

These softwares will be mainly used for teaching purposes but will also be used for research.

Would anyone recommend the software tools that they have been using for the above  processes? We do have Monte Carlo and Beamer.

Thanks
Regards
Aju


Aju Jugessur Ph.D.
Director, University of Iowa Microfabrication Facility
Professor (Adj.), Physics and Astronomy
OSTC, Iowa Advanced Technology Labs
University of Iowa

205 N. Madison St
Iowa City, IA 52242
319 -353-2342
aju-jugessur at uiowa.edu
http://ostc.uiowa.edu/uimf
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