[labnetwork] Micro fabrication modeling software tools

[Noah Clay]

Hi Aju,

We are actively evaluating Coventor.

https://www.coventor.com/

Noah Clay
Director, Quattrone Nanofabrication Facility
University of Pennsylvania 

> On Dec 19, 2016, at 13:28, Jugessur, Aju S <aju-jugessur at uiowa.edu> wrote:
> 
> Hi,
> 
> I am looking to invest on various computational modeling tools for Microfabrication processes, in particular,
> 
> (a) Dry-etching
> (b) Thin film deposition (ALD/Sputter/Ebeam evaporation)
> (c) Ebeam and Optical Lithography
> 
> These softwares will be mainly used for teaching purposes but will also be used for research.
> 
> Would anyone recommend the software tools that they have been using for the above  processes? We do have Monte Carlo and Beamer.
> 
> Thanks
> Regards
> Aju
> 
> 
> Aju Jugessur Ph.D.
> Director, University of Iowa Microfabrication Facility
> Professor (Adj.), Physics and Astronomy
> OSTC, Iowa Advanced Technology Labs
> University of Iowa
> 
> 205 N. Madison St
> Iowa City, IA 52242
> 319 -353-2342 
> aju-jugessur at uiowa.edu
> http://ostc.uiowa.edu/uimf
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