[labnetwork] Suggestions for interlocking O2 plasma & HMDS systems

[Vito Logiudice]

Dear Colleagues,

I’d greatly appreciate hearing from those of you whom have devised ways of safely interlocking a couple of systems we’re currently working on. These include the following:

Oxygen plasma strip system: http://www.yieldengineering.com/Portals/0/YES-CV200RFS_specs.pdf
HMDS prime oven: http://www.yieldengineering.com/Portals/0/YES-310TA_specs.pdf

Thank you very much for any insights.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20160208/05fdda63/attachment.html>