[labnetwork] Lithium Compound target in the Sputtering

[Shivakumar Bhaskaran]

Due to interest of fabricating battery device, we have users requesting for sputtering LiCoO2 and Li3PO4.

Have anyone used this materials in your sputtering system. Will this material have contamination issue with other processes (mostly metals). Do I need to follow any safety procedures before/after sputtering.

Thanks
-Shiva


Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

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