[labnetwork] EVG 620 Mask Aligner issue

[Shivakumar Bhaskaran]

The controller has interlock, the lamp will turn ON only if the cooling and air is ON, may be I can bypass the interlock will check with EVG regarding this.
Thanks
-Shiva

Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

From: Mario Portillo [mailto:hbtusainc at yahoo.com]
Sent: Thursday, January 14, 2016 6:10 AM
To: Shivakumar Bhaskaran <sbhas at uchicago.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] EVG 620 Mask Aligner issue

Shiva, a few suggestions ; make sure lamp is installed correctly, anode side down, anode/ cathode connections nice n tight at the light source n power supply, over cooling ??? Turn cooling off n turn lamp on, for a 500W lamp the normal operating voltage should be around average of 60vdc and 8.5 amps, last but not least .. A bad batch of lamps ??? I have seen this a few times thru the years...

I hope this helps..... Regards


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On Wednesday, January 13, 2016, 4:52 PM, Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>> wrote:
The lamp in the mask aligner is not reaching 500W its stays at 150W. I did send the power supply to EVG to test it in their unit and it works fine. I changed the bulbs and still the same issue. Does anyone had faced similar issue in your Mask Aligner.

-Thanks
-Shiva

Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297<tel:773-795-2297>
https://searle-cleanroom.uchicago.edu/

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