From jguo5 at Central.UH.EDU Thu Jul 7 15:12:36 2016 From: jguo5 at Central.UH.EDU (Guo, Jing) Date: Thu, 7 Jul 2016 14:12:36 -0500 Subject: [labnetwork] Reactive sputtering for AlN and TiN Message-ID: <1A0C637B-AE96-44C3-ABF0-53AE146EAB49@central.uh.edu> Hi All, We have a UHV sputtering system. Some users want to use reactive sputtering process to coat AlN and TiN (Al/Ti target with N2 using RF bias on substrate). Right now the deposited film did not show good quality. It also generated tons of flakes inside the gas chimney. They want to try other conditions at a higher power. AJA warned the maximum power can not be over 240 W in our system. Does anyone have experience on these sputtering process? What is the sputtering conditions to get a good Nitride film? How about the pressure, power, flow rate of N2? Thanks a lot. Best Regards, Jing Nanofabrication Facility University of Houston Postal Address: UNIVERSITY OF HOUSTON NANOFABRICATION FACILITY 3605 CULLEN BLVD, RM 1011 HOUSTON TX 77204-5062 Phone: 832-842-8822 From jguo5 at Central.UH.EDU Fri Jul 8 09:49:43 2016 From: jguo5 at Central.UH.EDU (Guo, Jing) Date: Fri, 8 Jul 2016 08:49:43 -0500 Subject: [labnetwork] Reactive sputtering for AlN and TiN Message-ID: <5AC75C27-D128-4233-B827-B8AEA5B65ECF@Central.UH.EDU> Hi All, We have a UHV sputtering system. Some users want to use reactive sputtering process to coat AlN and TiN (Al/Ti target with N2 using RF bias on substrate). Right now the deposited film did not show good quality. It also generated tons of flakes inside the gas chimney. They want to try other conditions at a higher power. AJA warned the maximum power can not be over 240 W in our system. Does anyone have experience on these sputtering process? What is the sputtering conditions to get a good Nitride film? How about the pressure, power, flow rate of N2? Thanks a lot. Best Regards, Jing Nanofabrication Facility University of Houston Postal Address: UNIVERSITY OF HOUSTON NANOFABRICATION FACILITY 3605 CULLEN BLVD, RM 1011 HOUSTON TX 77204-5062 Phone: 832-842-8822 From swolcott at uchicago.edu Mon Jul 18 14:23:45 2016 From: swolcott at uchicago.edu (Sally J. Wolcott) Date: Mon, 18 Jul 2016 18:23:45 +0000 Subject: [labnetwork] Cleanroom Engineer opportunity in Chicago Message-ID: The University of Chicago Pritzker Nanofabrication Facility, is actively recruiting for a Cleanroom Engineer to work on newly installed equipment in our state of the art cleanroom. If you, or someone you know is interested in applying for this positon, the application must be submitted through UChicago Jobs. Please share this posting with all qualified candidates, UChicago Cleanroom Engineer Posting 100885. If this link doesn't work for you, please visit, UChicago Jobs, and search for posting 100885. The IME's Pritzker Nanofabrication Facility is looking for a qualified Cleanroom Engineer to help repair and maintain a suite of specialized tools that can fabricate complex, integrated electronic, mechanical, optical and fluidic structures. The engineer is responsible for preventative and corrective maintenance on a variety of tools and ancillary support equipment. This qualified individual will interface with students, scientists and engineers to provide training and support on all equipment related matters. Job Responsibilities included are: Perform routine preventative maintenance and calibrations on tools in accordance with equipment manufacturer specifications. Perform electrical and mechanical root cause troubleshooting of all equipment. Use test and diagnostic equipment to perform equipment checks, calibrations and characterization. Work closely with process engineers to understand equipment interactions and limitations relative to operating specifications. As needed, modifies equipment to improve up-time or overall process performance. Work with vendors for technical assistance and support Maintain critical spare parts inventory. Perform new equipment installations and assist with start-up and acceptance testing. Establish PM strategies. Trains new users on equipment operations, and assists users with operational support. May perform process development at the request of the technical manager. Willingness to be on call. Thanks, Sally Wolcott Business Manager, Pritzker Nanofabrication Facility Institute for Molecular Engineering University of Chicago 5640 South Ellis Avenue, 105C Chicago, IL 60637 Office: 773-834-3548 Mobile: 773-332-1196 swolcott at uchicago.edu pnf.uchicago.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From Kolin.Brown at mail.wvu.edu Tue Jul 19 10:22:51 2016 From: Kolin.Brown at mail.wvu.edu (Kolin Brown) Date: Tue, 19 Jul 2016 14:22:51 +0000 Subject: [labnetwork] Chemical Inventory Software Message-ID: To all, I have not posted for a while, because in the last year, I have changed jobs from Cleanroom Manager to Safety and Chemical Hygiene Coordinator for our College of Engineering and Mineral Resources. Currently my university is evaluating new software systems for managing its entire chemical inventory. I would like to ask everyone what software their organization uses to manage their Chemical Inventory and Safety Data Sheets, and if they like it or not, or if they have problems? We would like to know what systems work for peoples and which system don't meet your needs. Thanks, Kolin S. Brown / Kolin S. Brown Safety & Chemical Hygiene Coordinator Statler College of Engineering & Mineral Resources West Virginia University (304)293-8900 office (304)366-6551 mobile ksbrown at mail.wvu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Tue Jul 19 15:26:15 2016 From: mmoneck at andrew.cmu.edu (Matt Moneck) Date: Tue, 19 Jul 2016 15:26:15 -0400 Subject: [labnetwork] Chemical Inventory Software In-Reply-To: References: Message-ID: <26f701d1e1f3$6b3e69d0$41bb3d70$@andrew.cmu.edu> Hi Kolin, Our University uses Chemtracker (https://chemtracker.org/) to monitor chemical inventories across campus. It is managed by our Environmental Health & Services Department, or EHS (http://www.cmu.edu/ehs). They provide accounts to individual lab users so that lab managers, PIs, facility managers, etc. can track their own inventories. EHS can track chemicals campus wide and look at entire building inventories to determine whether they are approaching chemical storage limits allowed by occupancy codes. In my experience, it is straightforward to use, and provides a user friendly interface for gathering information on inventories per room, per facility, etc. It also allows for barcode scanning, but I have not utilized this function as of yet. Our University also has a subscription to MSDS online (https://www.msdsonline.com/msds-search). When we click on a chemical in Chemtracker, it links to MSDS Online for easy access to the MSDS of interest. Lastly, we use BioRAFT (http://www.bioraft.com/) to manage safety training, lab inspections, forms, etc. for PIs, staff, students, and postdocs. Each PI has their own BioRAFT account for managing their students, postdocs, etc. As a lab manager, I have an account for managing each of the users of our facility. It is good for managing and monitoring safety training, chemical forms, safety forms, etc. The interface seems to me a bit cumbersome at times, but overall, I do like the package. BioRAFT has been working with our EHS Department to improve the interface and customize it to our needs, but this is the only feedback I have on their customer service at this time. Hope this helps. Best Regards, Matt -- Matthew T. Moneck, Ph.D. Executive Manager, Carnegie Mellon Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.5430 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kolin Brown Sent: Tuesday, July 19, 2016 10:23 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Chemical Inventory Software To all, I have not posted for a while, because in the last year, I have changed jobs from Cleanroom Manager to Safety and Chemical Hygiene Coordinator for our College of Engineering and Mineral Resources. Currently my university is evaluating new software systems for managing its entire chemical inventory. I would like to ask everyone what software their organization uses to manage their Chemical Inventory and Safety Data Sheets, and if they like it or not, or if they have problems? We would like to know what systems work for peoples and which system don't meet your needs. Thanks, Kolin S. Brown / Kolin S. Brown Safety & Chemical Hygiene Coordinator Statler College of Engineering & Mineral Resources West Virginia University (304)293-8900 office (304)366-6551 mobile ksbrown at mail.wvu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From john_sweeney at harvard.edu Tue Jul 19 21:21:26 2016 From: john_sweeney at harvard.edu (Sweeney, John) Date: Wed, 20 Jul 2016 01:21:26 +0000 Subject: [labnetwork] Chemical Inventory Software In-Reply-To: <26f701d1e1f3$6b3e69d0$41bb3d70$@andrew.cmu.edu> References: , <26f701d1e1f3$6b3e69d0$41bb3d70$@andrew.cmu.edu> Message-ID: <6FFA6EDB-8DC5-46DC-9295-800D66EE0A30@harvard.edu> Hi MSDSonline is a great resource for safety data sheets and GHS label printing. Chemtracker was used for 4 years but was clunky and not reliable. They may have made improvements over the past year or two. We almost purchased Biovia for chemical management but decided to wait a year or two. Currently the chemicals are inventoried manually. Biovia was the best out of 3 other software las that we considered for Harvard's Center for Nanoscale systems. Hope this helps. Sent from my iPhone On Jul 19, 2016, at 9:05 PM, Matt Moneck > wrote: Hi Kolin, Our University uses Chemtracker (https://chemtracker.org/) to monitor chemical inventories across campus. It is managed by our Environmental Health & Services Department, or EHS (http://www.cmu.edu/ehs). They provide accounts to individual lab users so that lab managers, PIs, facility managers, etc. can track their own inventories. EHS can track chemicals campus wide and look at entire building inventories to determine whether they are approaching chemical storage limits allowed by occupancy codes. In my experience, it is straightforward to use, and provides a user friendly interface for gathering information on inventories per room, per facility, etc. It also allows for barcode scanning, but I have not utilized this function as of yet. Our University also has a subscription to MSDS online (https://www.msdsonline.com/msds-search). When we click on a chemical in Chemtracker, it links to MSDS Online for easy access to the MSDS of interest. Lastly, we use BioRAFT (http://www.bioraft.com/) to manage safety training, lab inspections, forms, etc. for PIs, staff, students, and postdocs. Each PI has their own BioRAFT account for managing their students, postdocs, etc. As a lab manager, I have an account for managing each of the users of our facility. It is good for managing and monitoring safety training, chemical forms, safety forms, etc. The interface seems to me a bit cumbersome at times, but overall, I do like the package. BioRAFT has been working with our EHS Department to improve the interface and customize it to our needs, but this is the only feedback I have on their customer service at this time. Hope this helps. Best Regards, Matt -- Matthew T. Moneck, Ph.D. Executive Manager, Carnegie Mellon Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.5430 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kolin Brown Sent: Tuesday, July 19, 2016 10:23 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Chemical Inventory Software To all, I have not posted for a while, because in the last year, I have changed jobs from Cleanroom Manager to Safety and Chemical Hygiene Coordinator for our College of Engineering and Mineral Resources. Currently my university is evaluating new software systems for managing its entire chemical inventory. I would like to ask everyone what software their organization uses to manage their Chemical Inventory and Safety Data Sheets, and if they like it or not, or if they have problems? We would like to know what systems work for peoples and which system don't meet your needs. Thanks, Kolin S. Brown / Kolin S. Brown Safety & Chemical Hygiene Coordinator Statler College of Engineering & Mineral Resources West Virginia University (304)293-8900 office (304)366-6551 mobile ksbrown at mail.wvu.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From philh at montana.edu Wed Jul 20 14:11:03 2016 From: philh at montana.edu (Himmer, Phil) Date: Wed, 20 Jul 2016 18:11:03 +0000 Subject: [labnetwork] Ambios XP2 profilometer repair Message-ID: Hello Does anyone know of a company/person that can work on an old Ambios profilometer. We have an XP2 profilometer that needs repair and KLA Tencor who bought Ambios is unable to repair our system. This tool was discontinued before they acquired Ambios so they have minimal documentation and few parts for these tools. Thanks Phil Dr. Phillip Himmer Facility Manager: Montana Microfabrication Facility Montana State University Bozeman Mt, 59717 Ph: 406-994-7178 Email: philh at ece.montana.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Wed Jul 20 16:28:33 2016 From: mtang at stanford.edu (Mary Tang) Date: Wed, 20 Jul 2016 13:28:33 -0700 Subject: [labnetwork] Ambios XP2 profilometer repair In-Reply-To: References: Message-ID: <39f01cde-9258-5c8f-2d1e-8d385e7ac483@stanford.edu> Hi Phil -- Have you checked with Brumley South? I believe this is run by some former KLA Tencor service engineers. We've had great service on legacy tools with them -- and they are generous with advice on repairs and used purchases. Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Bldg 141, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu On 7/20/2016 11:11 AM, Himmer, Phil wrote: > > Hello > > Does anyone know of a company/person that can work on an old Ambios > profilometer. We have an XP2 profilometer that needs repair and KLA > Tencor who bought Ambios is unable to repair our system. This tool was > discontinued before they acquired Ambios so they have minimal > documentation and few parts for these tools. > > Thanks > > Phil > > Dr. Phillip Himmer > > Facility Manager: Montana Microfabrication Facility > > Montana State University > > Bozeman Mt, 59717 > > Ph: 406-994-7178 > > Email: philh at ece.montana.edu > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From djculver at aol.com Wed Jul 20 16:35:08 2016 From: djculver at aol.com (Dennis Culver) Date: Wed, 20 Jul 2016 16:35:08 -0400 Subject: [labnetwork] Ambios XP2 profilometer repair In-Reply-To: References: Message-ID: <1560a04e55d-44ea-11c2d@webprd-a07.mail.aol.com> Hello Phil, One of the folks that started up Ambios is a friend of mine; I just spoke with him and he WILL be available to work on your system! His name is Phil Bosch and his phone number is (805) 570-6479. If he doesn't answer, leave him a message. Best Regards, Dennis J. Culver Culver Consulting 57 W.McFarlane St. Ventura, CA 93001 Ph (805) 648-1184 Fx (805) 648-1485 Cell(805)680-7389 dennis at culverequipment.com Website: www.culverequipment.com 4708 4th St., Units A & B Or 5042 7th St., Units 2 & 3 Carpinteria, CA 93013 Ph & Fax (805) 684-3974 -----Original Message----- From: Himmer, Phil To: labnetwork Sent: Wed, Jul 20, 2016 1:03 pm Subject: [labnetwork] Ambios XP2 profilometer repair Hello Does anyone know of a company/person that can work on an old Ambios profilometer. We have an XP2 profilometer that needs repair and KLA Tencor who bought Ambios is unable to repair our system. This tool was discontinued before they acquired Ambios so they have minimal documentation and few parts for these tools. Thanks Phil Dr. Phillip Himmer Facility Manager: Montana Microfabrication Facility Montana State University Bozeman Mt, 59717 Ph: 406-994-7178 Email: philh at ece.montana.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From kpayer at mtl.mit.edu Fri Jul 22 11:52:28 2016 From: kpayer at mtl.mit.edu (Kristofor Payer) Date: Fri, 22 Jul 2016 11:52:28 -0400 Subject: [labnetwork] High Temperature Wafer Bonder Message-ID: <06F99D9D-0978-4A6B-BD59-A8F4F6AA2082@mtl.mit.edu> Hi All, Does anyone have a piece/wafer bonder that is capable of applying piston-pressure to a stack while heating to high temps (800-1000C) for annealing? We have a student who would like to run a test for a specific application and this is beyond our current capabilities. Thanks in advance for your help. Regards, Kris Kristofor R. Payer Research Specialist Microsystems Technology Laboratories Massachusetts Institute of Technology 60 Vassar Street Building 39, Room 225 Cambridge, MA 02139 617-324-1469 kpayer at mtl.mit.edu From sunanda.babu at cense.iisc.ernet.in Sat Jul 23 08:30:50 2016 From: sunanda.babu at cense.iisc.ernet.in (sunanda.babu at cense.iisc.ernet.in) Date: Sat, 23 Jul 2016 18:00:50 +0530 Subject: [labnetwork] Bubble defects in Ebeam evaporated gold Message-ID: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> Hi all, We see bubble like defects in e-beam evaporated gold. One of the suspect is the graphite crucible that we are currently using. We see small gold nodules sticking to the walls of the graphite crucible. These crucibles were procured from Testbourne(Glossy coated Graphite crucible). The one we are using currently for gold evaporation is almost 2 years old. I was wondering whether there is a lifetime for these crucibles.Do we use these crucibles until they crack? Does the glossy coating degrade with time? Does the C start to contaminate the gold? I plan to do an EDX analysis on this gold. Has someone on Labnetwork faced a similar issue? Can you please advise? thanks and best regards, Sunanda Babu Technology Manager(Thin Films and Dry Etch), National Nanofabrication Centre, Centre for Nanoscience and Engineering, Indian Institute of Science, Bangalore, India -- This message has been scanned for viruses and dangerous content by MailScanner, and is believed to be clean. From sunanda.babu at cense.iisc.ernet.in Sat Jul 23 08:39:13 2016 From: sunanda.babu at cense.iisc.ernet.in (sunanda.babu at cense.iisc.ernet.in) Date: Sat, 23 Jul 2016 18:09:13 +0530 Subject: [labnetwork] Sputter process query Message-ID: <8f7b7fd63bbbef57aa1dff5f83668c00.squirrel@cense.iisc.ernet.in> Hi all, Can someone tell me whether there are any cross-contamination issues if I mix reactive sputtering of AlN, TiN, HfO2, Ta2O5, ITO on my sputter tool? Can I mix metal sputtering and dielectric sputtering processes? Based on this information, I would like to see if the tool utilization can be improved. thanks and best regards, sunanda -- This message has been scanned for viruses and dangerous content by MailScanner, and is believed to be clean. From jfraser96 at byu.edu Sat Jul 23 09:32:32 2016 From: jfraser96 at byu.edu (Jim Fraser) Date: Sat, 23 Jul 2016 13:32:32 +0000 Subject: [labnetwork] Bubble defects in Ebeam evaporated gold In-Reply-To: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> References: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> Message-ID: <1469280751966.29551@byu.edu> Do you use an adhesion layer on your substrate under your Au layer? Thanks, Jim Fraser Integrated Microfabrication Laboratory Manager Brigham Young University ________________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of sunanda.babu at cense.iisc.ernet.in Sent: Saturday, July 23, 2016 6:30 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Bubble defects in Ebeam evaporated gold Hi all, We see bubble like defects in e-beam evaporated gold. One of the suspect is the graphite crucible that we are currently using. We see small gold nodules sticking to the walls of the graphite crucible. These crucibles were procured from Testbourne(Glossy coated Graphite crucible). The one we are using currently for gold evaporation is almost 2 years old. I was wondering whether there is a lifetime for these crucibles.Do we use these crucibles until they crack? Does the glossy coating degrade with time? Does the C start to contaminate the gold? I plan to do an EDX analysis on this gold. Has someone on Labnetwork faced a similar issue? Can you please advise? thanks and best regards, Sunanda Babu Technology Manager(Thin Films and Dry Etch), National Nanofabrication Centre, Centre for Nanoscience and Engineering, Indian Institute of Science, Bangalore, India -- This message has been scanned for viruses and dangerous content by MailScanner, and is believed to be clean. _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From sunanda.babu at cense.iisc.ernet.in Sat Jul 23 09:57:23 2016 From: sunanda.babu at cense.iisc.ernet.in (sunanda.babu at cense.iisc.ernet.in) Date: Sat, 23 Jul 2016 19:27:23 +0530 Subject: [labnetwork] Bubble defects in Ebeam evaporated gold In-Reply-To: <1469280751966.29551@byu.edu> References: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> <1469280751966.29551@byu.edu> Message-ID: <42f9432cdbe0699f196bc9190a50f593.squirrel@cense.iisc.ernet.in> Yes, we do. Do you use an adhesion layer on your substrate under your Au layer? > > Thanks, > > Jim Fraser > Integrated Microfabrication Laboratory Manager > Brigham Young University > ________________________________________ > From: labnetwork-bounces at mtl.mit.edu on > behalf of sunanda.babu at cense.iisc.ernet.in > > Sent: Saturday, July 23, 2016 6:30 AM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Bubble defects in Ebeam evaporated gold > > Hi all, > > We see bubble like defects in e-beam evaporated gold. One of the suspect > is the graphite crucible that we are currently using. > > We see small gold nodules sticking to the walls of the graphite crucible. > These crucibles were procured from Testbourne(Glossy coated Graphite > crucible). The one we are using currently for gold evaporation is almost 2 > years old. I was wondering whether there is a lifetime for these > crucibles.Do we use these crucibles until they crack? Does the glossy > coating degrade with time? Does the C start to contaminate the gold? I > plan to do an EDX analysis on this gold. > > Has someone on Labnetwork faced a similar issue? Can you please advise? > > thanks and best regards, > Sunanda Babu > Technology Manager(Thin Films and Dry Etch), > National Nanofabrication Centre, > Centre for Nanoscience and Engineering, > Indian Institute of Science, Bangalore, India > > > > -- > This message has been scanned for viruses and > dangerous content by MailScanner, and is > believed to be clean. > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > From mmoneck at andrew.cmu.edu Sat Jul 23 11:40:59 2016 From: mmoneck at andrew.cmu.edu (Matt Moneck) Date: Sat, 23 Jul 2016 11:40:59 -0400 Subject: [labnetwork] Bubble defects in Ebeam evaporated gold In-Reply-To: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> References: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> Message-ID: <002e01d1e4f8$9cff62a0$d6fe27e0$@andrew.cmu.edu> Hi Sunanda, We had similar issues in the past with a Fabmate (i.e. graphite) crucible. We had the same gold nodules on the side of the crucible and we had similar "bubbles" in some of our films. We also saw carbon residue on the Au charge. After discussing with some companies, our Process Engineer prompted the switch to a tungsten crucible and it solved all of our problems. The bubbles and nodules went away, and the the sheet resistance of our films improved. Tungsten is more expensive, but it is worth it in my opinion. Best Regards, Matt -- Matthew T. Moneck, Ph.D. Executive Manager, Carnegie Mellon Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.5430 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of sunanda.babu at cense.iisc.ernet.in Sent: Saturday, July 23, 2016 8:31 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Bubble defects in Ebeam evaporated gold Hi all, We see bubble like defects in e-beam evaporated gold. One of the suspect is the graphite crucible that we are currently using. We see small gold nodules sticking to the walls of the graphite crucible. These crucibles were procured from Testbourne(Glossy coated Graphite crucible). The one we are using currently for gold evaporation is almost 2 years old. I was wondering whether there is a lifetime for these crucibles.Do we use these crucibles until they crack? Does the glossy coating degrade with time? Does the C start to contaminate the gold? I plan to do an EDX analysis on this gold. Has someone on Labnetwork faced a similar issue? Can you please advise? thanks and best regards, Sunanda Babu Technology Manager(Thin Films and Dry Etch), National Nanofabrication Centre, Centre for Nanoscience and Engineering, Indian Institute of Science, Bangalore, India -- This message has been scanned for viruses and dangerous content by MailScanner, and is believed to be clean. _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From sgupta at eng.ua.edu Sat Jul 23 12:32:25 2016 From: sgupta at eng.ua.edu (Gupta, Su) Date: Sat, 23 Jul 2016 16:32:25 +0000 Subject: [labnetwork] Sputter process query In-Reply-To: <8f7b7fd63bbbef57aa1dff5f83668c00.squirrel@cense.iisc.ernet.in> References: <8f7b7fd63bbbef57aa1dff5f83668c00.squirrel@cense.iisc.ernet.in> Message-ID: <7C950A0523CDD047B990B0628532BF36326619F3@EX10MBN01.ua-net.ua.edu> Sunanda: There should not be any cross-contamination issues if you pre-sputter and condition the targets before each deposition. You can mix metal and dielectric deposition as lomng as you have a means of presputtering the metal targets. Best, Su Gupta ________________________________________ From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of sunanda.babu at cense.iisc.ernet.in [sunanda.babu at cense.iisc.ernet.in] Sent: Saturday, July 23, 2016 7:39 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Sputter process query Hi all, Can someone tell me whether there are any cross-contamination issues if I mix reactive sputtering of AlN, TiN, HfO2, Ta2O5, ITO on my sputter tool? Can I mix metal sputtering and dielectric sputtering processes? Based on this information, I would like to see if the tool utilization can be improved. thanks and best regards, sunanda -- This message has been scanned for viruses and dangerous content by MailScanner, and is believed to be clean. _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From michael.rooks at yale.edu Sat Jul 23 18:09:05 2016 From: michael.rooks at yale.edu (Michael Rooks) Date: Sat, 23 Jul 2016 18:09:05 -0400 Subject: [labnetwork] Bubble defects in Ebeam evaporated gold In-Reply-To: <002e01d1e4f8$9cff62a0$d6fe27e0$@andrew.cmu.edu> References: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> <002e01d1e4f8$9cff62a0$d6fe27e0$@andrew.cmu.edu> Message-ID: Matt is right. It is well known that gold will form clumps around carbon particles. It's easy to evaporate some of the carbon crucible accidentally, and so it's important to use either Mo or W crucibles. Either type of crucible will cost a lot less than the gold you put in it. By the way, you'll have to throw out the contaminated gold. ---------------------------------- Michael Rooks Yale Institute of Nanoscience and Quantum Engineering nano.yale.edu On 7/23/16 11:40 AM, Matt Moneck wrote: > Hi Sunanda, > > We had similar issues in the past with a Fabmate (i.e. graphite) crucible. > We had the same gold nodules on the side of the crucible and we had similar > "bubbles" in some of our films. We also saw carbon residue on the Au > charge. After discussing with some companies, our Process Engineer prompted > the switch to a tungsten crucible and it solved all of our problems. The > bubbles and nodules went away, and the the sheet resistance of our films > improved. Tungsten is more expensive, but it is worth it in my opinion. > > Best Regards, > > Matt > -------------- next part -------------- An HTML attachment was scrubbed... URL: From hromans at eng.ucsd.edu Mon Jul 25 10:21:07 2016 From: hromans at eng.ucsd.edu (J Romans) Date: Mon, 25 Jul 2016 07:21:07 -0700 Subject: [labnetwork] Bubble defects in Ebeam evaporated gold In-Reply-To: References: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> <002e01d1e4f8$9cff62a0$d6fe27e0$@andrew.cmu.edu> Message-ID: Another downside (besdies cost) is Au sticks to W - not a big problem for most. -Hal On Sat, Jul 23, 2016 at 3:09 PM, Michael Rooks wrote: > Matt is right. It is well known that gold will form clumps around carbon > particles. It's easy to evaporate some of the carbon crucible accidentally, > and so it's important to use either Mo or W crucibles. Either type of > crucible will cost a lot less than the gold you put in it. By the way, > you'll have to throw out the contaminated gold. > > ---------------------------------- > Michael Rooks > Yale Institute of Nanoscience and Quantum Engineering > nano.yale.edu > > > > On 7/23/16 11:40 AM, Matt Moneck wrote: > > Hi Sunanda, > > We had similar issues in the past with a Fabmate (i.e. graphite) crucible. > We had the same gold nodules on the side of the crucible and we had similar > "bubbles" in some of our films. We also saw carbon residue on the Au > charge. After discussing with some companies, our Process Engineer prompted > the switch to a tungsten crucible and it solved all of our problems. The > bubbles and nodules went away, and the the sheet resistance of our films > improved. Tungsten is more expensive, but it is worth it in my opinion. > > Best Regards, > > Matt > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From gilheart at rice.edu Tue Jul 26 11:31:03 2016 From: gilheart at rice.edu (gilheart at rice.edu) Date: Tue, 26 Jul 2016 10:31:03 -0500 Subject: [labnetwork] Cleanroom research scientist opportunity at Rice University Message-ID: <20160726103103.Horde.IX-wQUW3aHdCXdzqDr3ddw8@webmail.rice.edu> Greetings, The Shared Equipment Authority (SEA) at Rice University in Houston, TX, is looking for a qualified research scientist to add to our existing cleanroom staff. A summary of the position can be found at the official posting here: https://jobs.rice.edu/postings/7809 In addition to me, the existing includes one technician. We are expanding in advance of our new expanded facility coming online, in late 2017/2018. The cleanroom is part of the larger SEA organization, which manages the majority of Rice's shared core lab infrastructure as part of the office of the Vice Provost for Research. Applications may be submitted directly through the RICEWorks site link above, and I am happy to answer questions from any interested applicants who contact me directly. Regards, -- Tim Gilheart, Ph.D. Research Scientist - Nanofabrication Clean Room Manager, Shared Equipment Authority, Rice University Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu From sunanda.babu at cense.iisc.ernet.in Wed Jul 27 08:28:16 2016 From: sunanda.babu at cense.iisc.ernet.in (sunanda.babu at cense.iisc.ernet.in) Date: Wed, 27 Jul 2016 17:58:16 +0530 Subject: [labnetwork] Bubble defects in Ebeam evaporated gold In-Reply-To: <002e01d1e4f8$9cff62a0$d6fe27e0$@andrew.cmu.edu> References: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> <002e01d1e4f8$9cff62a0$d6fe27e0$@andrew.cmu.edu> Message-ID: Thank you all for the valuable feedback. best regards, sunanda Hi Sunanda, > > We had similar issues in the past with a Fabmate (i.e. graphite) crucible. > We had the same gold nodules on the side of the crucible and we had > similar > "bubbles" in some of our films. We also saw carbon residue on the Au > charge. After discussing with some companies, our Process Engineer > prompted > the switch to a tungsten crucible and it solved all of our problems. The > bubbles and nodules went away, and the the sheet resistance of our films > improved. Tungsten is more expensive, but it is worth it in my opinion. > > Best Regards, > > Matt > > -- > Matthew T. Moneck, Ph.D. > Executive Manager, Carnegie Mellon Nanofabrication Facility > Electrical and Computer Engineering | Carnegie Mellon University > 5000 Forbes Ave., Pittsburgh, PA 15213-3890 > T: 412.268.5430 > F: 412.268.3497 > www.ece.cmu.edu > nanofab.ece.cmu.edu > > -----Original Message----- > From: labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] > On Behalf Of sunanda.babu at cense.iisc.ernet.in > Sent: Saturday, July 23, 2016 8:31 AM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Bubble defects in Ebeam evaporated gold > > Hi all, > > We see bubble like defects in e-beam evaporated gold. One of the suspect > is > the graphite crucible that we are currently using. > > We see small gold nodules sticking to the walls of the graphite crucible. > These crucibles were procured from Testbourne(Glossy coated Graphite > crucible). The one we are using currently for gold evaporation is almost 2 > years old. I was wondering whether there is a lifetime for these > crucibles.Do we use these crucibles until they crack? Does the glossy > coating degrade with time? Does the C start to contaminate the gold? I > plan > to do an EDX analysis on this gold. > > Has someone on Labnetwork faced a similar issue? Can you please advise? > > thanks and best regards, > Sunanda Babu > Technology Manager(Thin Films and Dry Etch), National Nanofabrication > Centre, Centre for Nanoscience and Engineering, Indian Institute of > Science, > Bangalore, India > > > > -- > This message has been scanned for viruses and dangerous content by > MailScanner, and is believed to be clean. > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > From sunanda.babu at cense.iisc.ernet.in Wed Jul 27 08:32:31 2016 From: sunanda.babu at cense.iisc.ernet.in (sunanda.babu at cense.iisc.ernet.in) Date: Wed, 27 Jul 2016 18:02:31 +0530 Subject: [labnetwork] Electron beam evaporation of Ge In-Reply-To: <002e01d1e4f8$9cff62a0$d6fe27e0$@andrew.cmu.edu> References: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> <002e01d1e4f8$9cff62a0$d6fe27e0$@andrew.cmu.edu> Message-ID: Hi, For Ge, I see that the mostly recommended crucible is Al2O3. But, we tried and observe charging effects here. However, Kurt Lesker recommends Graphite. Can anyone share your experience with Ge deposition through ebeam evaporation? Should it be graphite or Al2O3 ...? thanks and best regards, sunanda From bshiva at stanford.edu Wed Jul 27 12:10:09 2016 From: bshiva at stanford.edu (Shivakumar Bhaskaran) Date: Wed, 27 Jul 2016 16:10:09 +0000 Subject: [labnetwork] Electron beam evaporation of Ge In-Reply-To: References: <64ab519afd071b3da77fa2ff8cb76527.squirrel@cense.iisc.ernet.in> <002e01d1e4f8$9cff62a0$d6fe27e0$@andrew.cmu.edu> Message-ID: Sunanda, I used graphite and fabmate (lesker) crucible for Germanium, I didn't have any issue. I only fill 50% volume of crucible -Shiva Shivakumar Bhaskaran, Ph.D., Research and Development Scientist and Engineer, National Nanotechnology Coordinated Infrastructure (NNCI), Stanford University,348 Via Pueblo, Spilker Building,Room 004, Stanford, CA 94305. Ph:650-498-5653 http://nanolabs.stanford.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of sunanda.babu at cense.iisc.ernet.in Sent: Wednesday, July 27, 2016 5:33 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Electron beam evaporation of Ge Hi, For Ge, I see that the mostly recommended crucible is Al2O3. But, we tried and observe charging effects here. However, Kurt Lesker recommends Graphite. Can anyone share your experience with Ge deposition through ebeam evaporation? Should it be graphite or Al2O3 ...? thanks and best regards, sunanda _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From vmyu at princeton.edu Wed Jul 27 16:38:10 2016 From: vmyu at princeton.edu (Vivian Yu) Date: Wed, 27 Jul 2016 16:38:10 -0400 Subject: [labnetwork] Foggy residue after oxygen plasma etch of polyimide Message-ID: Good afternoon, I am etching 7 microns of spin-coated polyimide using a chrome mask and a direct oxygen plasma in a PlasmaTherm790 at 100 mTorr of pressure, and I am observing a foggy pale yellow residue after and during the etch that can be rubbed off easily with a clean room swab. Has anyone on Labnetwork observed this same thing, or know what this might be? Thanks, Vivian Yu Princeton University -------------- next part -------------- An HTML attachment was scrubbed... URL: From fouad.karouta at anu.edu.au Wed Jul 27 22:23:44 2016 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Thu, 28 Jul 2016 02:23:44 +0000 Subject: [labnetwork] Foggy residue after oxygen plasma etch of polyimide In-Reply-To: References: Message-ID: Hi Vivian, In the past we did etch polyimide in O2/CF4 plasma though the CF4/O2 ratio was like 10% but I believe a good removal of the polyimide requires some fluorine. Hope this helps, Fouad Karouta ************************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics and Engineering L. Huxley Building (#56), Mills Road, Room 4.02 Australian National University ACT 0200, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vivian Yu Sent: Thursday, 28 July 2016 6:38 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Foggy residue after oxygen plasma etch of polyimide Good afternoon, I am etching 7 microns of spin-coated polyimide using a chrome mask and a direct oxygen plasma in a PlasmaTherm790 at 100 mTorr of pressure, and I am observing a foggy pale yellow residue after and during the etch that can be rubbed off easily with a clean room swab. Has anyone on Labnetwork observed this same thing, or know what this might be? Thanks, Vivian Yu Princeton University -------------- next part -------------- An HTML attachment was scrubbed... URL: