[labnetwork] Pegasus - Rapier Esc question
LaFleur, David W
dlafleur at cns.fas.harvard.edu
Mon Jun 13 14:03:03 EDT 2016
To Engineers who maintain Pegasus - Rapier Systems with Esc
Where do you set your 15 Torr leak up rate pass/fail limit for the Esc. Does anyone have success in achieving the factory spec of 50mt/min on a 150mm chuck for 15 torr @15degC ?
What is your max flow you like to see for 15 Torr?
Thanks in advance.
David LaFleur
Equipment Engineer
Harvard University
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