[labnetwork] HF Vapour Setup

[Fouad Karouta]

Hi all,

We are in the process of installing a commercial HF vapour setup for MEMs-like technology.
The setup will be housed in a fume hood of which the exhaust has been connected to a wet scrubber.
With respect to Work, Health and Safety aspects we need to set a protocol for the usage of this. Our starting point will be the protocol for use of HF solutions, however I am seeking inputs helping us in this process from people who already make use of such a facility.
Also please let us know any points with relation to the wet scrubber and its maintenance, etc.

Thank you,
Fouad Karouta

*************************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
Australian National University
ACT 0200, Canberra, Australia
Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
http://anff-act.anu.edu.au/

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