From mrisley at andrew.cmu.edu Wed Nov 2 12:17:09 2016 From: mrisley at andrew.cmu.edu (Mason Risley) Date: Wed, 2 Nov 2016 16:17:09 +0000 Subject: [labnetwork] Nanostrip Storage Container Message-ID: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> All, Has anyone experienced problems with storing nanostrip solution (a stabilized form of piranha)? We recently purchased a gallon of it, the first shipment did not arrive due to "damaged packaging during shipment" the second round did in fact arrive but the bottle itself (which is just a plastic HDPE 4L chemical bottle) appears to be degrading, chemical label is completely gone and the plastic lining is - is this something that can be stored in a glass container? It seems interesting that something specifically engineered and used for dissolving organics and removing polymers is stored in a plastic container. Thanks, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 -------------- next part -------------- An HTML attachment was scrubbed... URL: From bshiva at stanford.edu Wed Nov 2 23:28:33 2016 From: bshiva at stanford.edu (Shivakumar Bhaskaran) Date: Thu, 3 Nov 2016 03:28:33 +0000 Subject: [labnetwork] Nanostrip Storage Container In-Reply-To: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> References: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Message-ID: Mason, Nanostrip I used to buy comes with plastic container. I haven't had any issue in storing for long period of time. I buy from Capitol Scientific (Cyantek(r) KMG Nano-Strip 2X(r)). Sometimes you may need to have different cap on the lid which might remove the buildup pressure from the Nanostrip. -Shiva From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mason Risley Sent: Wednesday, November 2, 2016 9:17 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Nanostrip Storage Container All, Has anyone experienced problems with storing nanostrip solution (a stabilized form of piranha)? We recently purchased a gallon of it, the first shipment did not arrive due to "damaged packaging during shipment" the second round did in fact arrive but the bottle itself (which is just a plastic HDPE 4L chemical bottle) appears to be degrading, chemical label is completely gone and the plastic lining is - is this something that can be stored in a glass container? It seems interesting that something specifically engineered and used for dissolving organics and removing polymers is stored in a plastic container. Thanks, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 -------------- next part -------------- An HTML attachment was scrubbed... URL: From hower at umich.edu Thu Nov 3 08:27:34 2016 From: hower at umich.edu (Robert Hower) Date: Thu, 3 Nov 2016 08:27:34 -0400 Subject: [labnetwork] Nanostrip Storage Container In-Reply-To: References: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Message-ID: Because it can build up pressurized gas, it is shipped with a pressure release cap. The cap can leak and nanostrip will attack the paper labels. If enough gets out it could attack the box it is shipped in. Make sure that it does not sit on the loading dock and get warm. Our driver drops our chemicals off first so we usually don't have this issue. If it sits on the hot truck for a long period, you can get leaking. Rob On Wed, Nov 2, 2016 at 11:28 PM, Shivakumar Bhaskaran wrote: > Mason, > > > Nanostrip I used to buy comes with plastic container. I haven?t had any > issue in storing for long period of time. I buy from Capitol Scientific (Cyantek? > KMG Nano-Strip 2X?). Sometimes you may need to have different cap on the > lid which might remove the buildup pressure from the Nanostrip. -Shiva > > > > > > > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@ > mtl.mit.edu] *On Behalf Of *Mason Risley > *Sent:* Wednesday, November 2, 2016 9:17 AM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Nanostrip Storage Container > > > > All, > > > > Has anyone experienced problems with storing nanostrip solution (a > stabilized form of piranha)? We recently purchased a gallon of it, the > first shipment did not arrive due to ?damaged packaging during shipment? > the second round did in fact arrive but the bottle itself (which is just a > plastic HDPE 4L chemical bottle) appears to be degrading, chemical label is > completely gone and the plastic lining is ? is this something that can be > stored in a glass container? It seems interesting that something > specifically engineered and used for dissolving organics and removing > polymers is stored in a plastic container. > > > > Thanks, > > > > *Mason Risley* > > *Process Development Engineer* > > *Carnegie Mellon University Nanofabrication * > > 5000 Forbes Street, Pittsburgh PA 15213 > > nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ > > ph: 412.268.5419 | cell : 505.795.4805 > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Robert W. Hower, Ph.D. The University of Michigan, Lurie Nanofabrication Facility 1301 Beal Ave, 1234A EECS Ann Arbor, MI 48109 734-827-4370 -------------- next part -------------- An HTML attachment was scrubbed... URL: From Robert_Vandusen at cunet.carleton.ca Thu Nov 3 09:02:04 2016 From: Robert_Vandusen at cunet.carleton.ca (Robert Vandusen) Date: Thu, 3 Nov 2016 13:02:04 +0000 Subject: [labnetwork] Nanostrip Storage Container In-Reply-To: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> References: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Message-ID: Hi Mason. A few years ago I got rid of the last of our Nano-Strip for the same reason. The original plastic bottle was degrading and I was worried it was going to leak. We may have been well past the expiry date though. No other users have requested Nano-strip since then, so we mix our piranha as needed. Robert Vandusen Microfabrication Facility Manager Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 rvanduse at doe.carleton.ca From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mason Risley Sent: Wednesday, November 02, 2016 12:17 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Nanostrip Storage Container All, Has anyone experienced problems with storing nanostrip solution (a stabilized form of piranha)? We recently purchased a gallon of it, the first shipment did not arrive due to "damaged packaging during shipment" the second round did in fact arrive but the bottle itself (which is just a plastic HDPE 4L chemical bottle) appears to be degrading, chemical label is completely gone and the plastic lining is - is this something that can be stored in a glass container? It seems interesting that something specifically engineered and used for dissolving organics and removing polymers is stored in a plastic container. Thanks, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Thu Nov 3 10:22:56 2016 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Thu, 3 Nov 2016 14:22:56 +0000 Subject: [labnetwork] Nanostrip Storage Container In-Reply-To: References: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Message-ID: We purchase the same material and do experience degradation of the container. Part of our checklist is to make sure we do not keep the material past the expiration date. We also keep it stored in Nalgene container in case the storage container fails. Hope this helps. :) Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran Sent: Wednesday, November 2, 2016 11:29 PM To: Mason Risley ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Nanostrip Storage Container Mason, Nanostrip I used to buy comes with plastic container. I haven't had any issue in storing for long period of time. I buy from Capitol Scientific (Cyantek(r) KMG Nano-Strip 2X(r)). Sometimes you may need to have different cap on the lid which might remove the buildup pressure from the Nanostrip. -Shiva From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mason Risley Sent: Wednesday, November 2, 2016 9:17 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Nanostrip Storage Container All, Has anyone experienced problems with storing nanostrip solution (a stabilized form of piranha)? We recently purchased a gallon of it, the first shipment did not arrive due to "damaged packaging during shipment" the second round did in fact arrive but the bottle itself (which is just a plastic HDPE 4L chemical bottle) appears to be degrading, chemical label is completely gone and the plastic lining is - is this something that can be stored in a glass container? It seems interesting that something specifically engineered and used for dissolving organics and removing polymers is stored in a plastic container. Thanks, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 -------------- next part -------------- An HTML attachment was scrubbed... URL: From melendes at caltech.edu Thu Nov 3 12:14:12 2016 From: melendes at caltech.edu (Melendes, Melissa A.) Date: Thu, 3 Nov 2016 16:14:12 +0000 Subject: [labnetwork] Nanostrip Storage Container In-Reply-To: References: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Message-ID: <0B3F12AB-A394-4690-B6E5-2A27FE992C1D@caltech.edu> Mason, Good morning. Yes, we have experienced issues with long term storage with Nanostrip. We had inventory that was not used as anticipated and we found that at the end of a year the seams on three separate bottles had started to separate and leak. We no longer keep any extra inventory on hand. I would like to add that we have not had any issues with receiving any incoming material. Melissa Melendes KNI - Caltech From: on behalf of Shivakumar Bhaskaran Date: Wednesday, November 2, 2016 at 8:28 PM To: Mason Risley , "labnetwork at mtl.mit.edu" Subject: Re: [labnetwork] Nanostrip Storage Container Mason, Nanostrip I used to buy comes with plastic container. I haven?t had any issue in storing for long period of time. I buy from Capitol Scientific (Cyantek? KMG Nano-Strip 2X?). Sometimes you may need to have different cap on the lid which might remove the buildup pressure from the Nanostrip. -Shiva From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mason Risley Sent: Wednesday, November 2, 2016 9:17 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Nanostrip Storage Container All, Has anyone experienced problems with storing nanostrip solution (a stabilized form of piranha)? We recently purchased a gallon of it, the first shipment did not arrive due to ?damaged packaging during shipment? the second round did in fact arrive but the bottle itself (which is just a plastic HDPE 4L chemical bottle) appears to be degrading, chemical label is completely gone and the plastic lining is ? is this something that can be stored in a glass container? It seems interesting that something specifically engineered and used for dissolving organics and removing polymers is stored in a plastic container. Thanks, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jfraser96 at byu.edu Thu Nov 3 12:56:52 2016 From: jfraser96 at byu.edu (Jim Fraser) Date: Thu, 3 Nov 2016 16:56:52 +0000 Subject: [labnetwork] Nanostrip Storage Container In-Reply-To: References: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Message-ID: <40cc3f47bd784740bdc4c5b4a975361a@MB10.byu.local> Hi Mason, We have had some serious problems in the past. This was about 6 years ago. The plastic bottles cracked and leaked into the plastic bags and then into the storage cabinet. The bottles were past the expiration a few months. I called the manufacturer and they said the expiration date was set at "6 months because the bottles will rupture." The chemical shelf life is longer, but the bottles will rupture. So if they degrade and leak, "it is user error." I was appalled by their solution to the problem. I asked them if they had ever heard of the "Audi Syndrome," but they didn't seem to get the connection. Now I store all my Nanostrip bottles in buckets. James R Fraser IML Manager 485 CB Brigham Young University 801-422-4344 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Thursday, November 3, 2016 7:02 AM To: Mason Risley ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Nanostrip Storage Container Hi Mason. A few years ago I got rid of the last of our Nano-Strip for the same reason. The original plastic bottle was degrading and I was worried it was going to leak. We may have been well past the expiry date though. No other users have requested Nano-strip since then, so we mix our piranha as needed. Robert Vandusen Microfabrication Facility Manager Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 rvanduse at doe.carleton.ca From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mason Risley Sent: Wednesday, November 02, 2016 12:17 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Nanostrip Storage Container All, Has anyone experienced problems with storing nanostrip solution (a stabilized form of piranha)? We recently purchased a gallon of it, the first shipment did not arrive due to "damaged packaging during shipment" the second round did in fact arrive but the bottle itself (which is just a plastic HDPE 4L chemical bottle) appears to be degrading, chemical label is completely gone and the plastic lining is - is this something that can be stored in a glass container? It seems interesting that something specifically engineered and used for dissolving organics and removing polymers is stored in a plastic container. Thanks, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 -------------- next part -------------- An HTML attachment was scrubbed... URL: From price.798 at osu.edu Thu Nov 3 13:01:12 2016 From: price.798 at osu.edu (Price, Aimee) Date: Thu, 3 Nov 2016 17:01:12 +0000 Subject: [labnetwork] Nanostrip Storage Container In-Reply-To: References: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Message-ID: <83583687862B8444A85296A4944147DF8C07BF04@CIO-TNC-D2MBX03.osuad.osu.edu> Many years ago (~10) I ordered a couple gallons and had one in use, second in storage. The second bottle leaked and ate through the "secondary containment" plastic bag that it came in, ran down the back of the cabinet, all over the floor in the back hallway. This required an EHS Hazmat response team since it was a gallon of pH 0 basically which had etched through the paint on the cabinet shelving, door, etc. They came in with absorbent that was essentially dust. Pretty much a bad day in a cleanroom. That was my last experience with Nanostrip. Since then I've always mixed it. Our new facility has a piranha bath (heated, circulated, etc.). We also allow users to mix their own, with all the safety requirements in place of course. To be fair, my bad experience may have also been with an expired bottle. Best of luck, Aimee From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Thursday, November 03, 2016 9:02 AM To: Mason Risley; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Nanostrip Storage Container Hi Mason. A few years ago I got rid of the last of our Nano-Strip for the same reason. The original plastic bottle was degrading and I was worried it was going to leak. We may have been well past the expiry date though. No other users have requested Nano-strip since then, so we mix our piranha as needed. Robert Vandusen Microfabrication Facility Manager Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 rvanduse at doe.carleton.ca From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mason Risley Sent: Wednesday, November 02, 2016 12:17 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Nanostrip Storage Container All, Has anyone experienced problems with storing nanostrip solution (a stabilized form of piranha)? We recently purchased a gallon of it, the first shipment did not arrive due to "damaged packaging during shipment" the second round did in fact arrive but the bottle itself (which is just a plastic HDPE 4L chemical bottle) appears to be degrading, chemical label is completely gone and the plastic lining is - is this something that can be stored in a glass container? It seems interesting that something specifically engineered and used for dissolving organics and removing polymers is stored in a plastic container. Thanks, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mrisley at andrew.cmu.edu Thu Nov 3 14:19:49 2016 From: mrisley at andrew.cmu.edu (Mason Risley) Date: Thu, 3 Nov 2016 18:19:49 +0000 Subject: [labnetwork] Nanostrip Storage Container In-Reply-To: <0B3F12AB-A394-4690-B6E5-2A27FE992C1D@caltech.edu> References: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> <0B3F12AB-A394-4690-B6E5-2A27FE992C1D@caltech.edu> Message-ID: <0a09d2fede7e4210bf1b4aa12bf9fc47@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Thank you for the replies and sharing your experiences with this chemical. I had heard about the issue with the bottles degrading after about a year, however, wasn?t expecting them to be leaking upon arrival. The only attraction I had towards Nanostrip is easier disposal compared to piranha but it?s not an adequate solution given the container degredation even for the short term which is what I needed this for. Our fab has a process for piranha prep and disposal so we will continue to use that. Best, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 From: Melendes, Melissa A. [mailto:melendes at caltech.edu] Sent: Thursday, November 03, 2016 12:14 PM To: Mason Risley; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Nanostrip Storage Container Mason, Good morning. Yes, we have experienced issues with long term storage with Nanostrip. We had inventory that was not used as anticipated and we found that at the end of a year the seams on three separate bottles had started to separate and leak. We no longer keep any extra inventory on hand. I would like to add that we have not had any issues with receiving any incoming material. Melissa Melendes KNI - Caltech From: > on behalf of Shivakumar Bhaskaran > Date: Wednesday, November 2, 2016 at 8:28 PM To: Mason Risley >, "labnetwork at mtl.mit.edu" > Subject: Re: [labnetwork] Nanostrip Storage Container Mason, Nanostrip I used to buy comes with plastic container. I haven?t had any issue in storing for long period of time. I buy from Capitol Scientific (Cyantek? KMG Nano-Strip 2X?). Sometimes you may need to have different cap on the lid which might remove the buildup pressure from the Nanostrip. -Shiva From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mason Risley Sent: Wednesday, November 2, 2016 9:17 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Nanostrip Storage Container All, Has anyone experienced problems with storing nanostrip solution (a stabilized form of piranha)? We recently purchased a gallon of it, the first shipment did not arrive due to ?damaged packaging during shipment? the second round did in fact arrive but the bottle itself (which is just a plastic HDPE 4L chemical bottle) appears to be degrading, chemical label is completely gone and the plastic lining is ? is this something that can be stored in a glass container? It seems interesting that something specifically engineered and used for dissolving organics and removing polymers is stored in a plastic container. Thanks, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jmaduzi2 at illinois.edu Thu Nov 3 14:50:50 2016 From: jmaduzi2 at illinois.edu (Maduzia, Joseph Walter) Date: Thu, 3 Nov 2016 18:50:50 +0000 Subject: [labnetwork] Varian FS eight Manual Message-ID: <49B8615099A5524FBA9EFF3BA1ABAC8A291BD171@CITESMBX1.ad.uillinois.edu> Hello, My CTI Cryotorr 8 needs to be refurbished, and our only backup is a Varian FS eight. The Varian FS eight has never been used at our lab and has no manual. Does anyone have the pinout and helium requirements for the Varian FS eight, or, better yet, an electronic copy of the user manual? I'm sure there are a few model years, but anything at this point seems like it would be helpful. If its helpful M/N: 3230055, S/N: K3G0364. Also, Varian was sold to Ebara then sold again, so there should be an equivalent Ebara FS eight out there. If you have the manual/pinout&He info for the Ebara FS eight, I'd love to see that too. Thank You, Joe Maduzia MNMS Lab Specialist Mechanical Science and Engineering University of Illinois at Urbana-Champaign 221B MEB, MC-244 1206 W. Green St Urbana, IL 61801 Ph: 217-244-6302 www-s.mechse.uiuc.edu/cleanroom/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob at eecs.berkeley.edu Thu Nov 3 17:18:33 2016 From: bob at eecs.berkeley.edu (Robert M. HAMILTON) Date: Thu, 3 Nov 2016 14:18:33 -0700 Subject: [labnetwork] Nanostrip Storage Container In-Reply-To: <0a09d2fede7e4210bf1b4aa12bf9fc47@DCNS-MSGMLT-03.andrew.ad.cmu.edu> References: <9ffd44945f4e47d198e931e9b795cc1a@DCNS-MSGMLT-03.andrew.ad.cmu.edu> <0B3F12AB-A394-4690-B6E5-2A27FE992C1D@caltech.edu> <0a09d2fede7e4210bf1b4aa12bf9fc47@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Message-ID: Colleagues, My instincts are the guys who package piranha and sell it as a premix are laughing all the way to the bank. Bob Hamilton Robert Hamilton University of CA, Berkeley Marvell NanoLab Equipment Manager Rm 520 Sutardja Dai Hall, MC 1754 Berkeley, CA 94720 Phone 510-809-8618 (desk - preferred) Mobile 510-325-7557 (my personal mobile) E-mail preferred: bob at eecs.berkeley.edu http://nanolab.berkeley.edu/ On Thu, Nov 3, 2016 at 11:19 AM, Mason Risley wrote: > Thank you for the replies and sharing your experiences with this chemical. > > > > I had heard about the issue with the bottles degrading after about a year, > however, wasn?t expecting them to be leaking upon arrival. The only > attraction I had towards Nanostrip is easier disposal compared to piranha > but it?s not an adequate solution given the container degredation even for > the short term which is what I needed this for. > > > > Our fab has a process for piranha prep and disposal so we will continue to > use that. > > > > Best, > > > > *Mason Risley* > > *Process Development Engineer* > > *Carnegie Mellon University Nanofabrication * > > 5000 Forbes Street, Pittsburgh PA 15213 > > nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ > > ph: 412.268.5419 | cell : 505.795.4805 > > > > > > > > > > > > *From:* Melendes, Melissa A. [mailto:melendes at caltech.edu] > *Sent:* Thursday, November 03, 2016 12:14 PM > *To:* Mason Risley; labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Nanostrip Storage Container > > > > Mason, > > > > Good morning. Yes, we have experienced issues with long term storage with > Nanostrip. We had inventory that was not used as anticipated and we found > that at the end of a year the seams on three separate bottles had started > to separate and leak. We no longer keep any extra inventory on hand. > > > > I would like to add that we have not had any issues with receiving any > incoming material. > > > > Melissa Melendes > > KNI - Caltech > > > > *From: * on behalf of Shivakumar > Bhaskaran > *Date: *Wednesday, November 2, 2016 at 8:28 PM > *To: *Mason Risley , "labnetwork at mtl.mit.edu" < > labnetwork at mtl.mit.edu> > *Subject: *Re: [labnetwork] Nanostrip Storage Container > > > > Mason, > > > Nanostrip I used to buy comes with plastic container. I haven?t had any > issue in storing for long period of time. I buy from Capitol Scientific (Cyantek? > KMG Nano-Strip 2X?). Sometimes you may need to have different cap on the > lid which might remove the buildup pressure from the Nanostrip. -Shiva > > > > > > > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@ > mtl.mit.edu ] *On Behalf Of *Mason Risley > *Sent:* Wednesday, November 2, 2016 9:17 AM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Nanostrip Storage Container > > > > All, > > > > Has anyone experienced problems with storing nanostrip solution (a > stabilized form of piranha)? We recently purchased a gallon of it, the > first shipment did not arrive due to ?damaged packaging during shipment? > the second round did in fact arrive but the bottle itself (which is just a > plastic HDPE 4L chemical bottle) appears to be degrading, chemical label is > completely gone and the plastic lining is ? is this something that can be > stored in a glass container? It seems interesting that something > specifically engineered and used for dissolving organics and removing > polymers is stored in a plastic container. > > > > Thanks, > > > > *Mason Risley* > > *Process Development Engineer* > > *Carnegie Mellon University Nanofabrication * > > 5000 Forbes Street, Pittsburgh PA 15213 > > nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ > > ph: 412.268.5419 | cell : 505.795.4805 > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From bradshaw1234 at gmail.com Fri Nov 4 11:02:07 2016 From: bradshaw1234 at gmail.com (Keith Bradshaw) Date: Fri, 4 Nov 2016 10:02:07 -0500 Subject: [labnetwork] Trion Sirus T2 Message-ID: I am looking at replacing my long in the tooth table top Technics RIE (excellent service for 16 years+) and am looking at a Trion Sirus T2. Does anyone have any expierience with the Trion and would endorse it? Or what would they use to replace a workhourse Technics? cordially, Keith Bradshaw Texas Instruments Central Research Labs 1972-1990 University of Texas at Dallas Clean Room founder 1990-2011 currently consulting. -------------- next part -------------- An HTML attachment was scrubbed... URL: From cekendri at mtu.edu Fri Nov 4 11:43:06 2016 From: cekendri at mtu.edu (Chito Kendrick) Date: Fri, 4 Nov 2016 11:43:06 -0400 Subject: [labnetwork] DRIE on a Trion Technology Phantom II Message-ID: I have lots of requests from users to buy a DRIE. I am currently building an ALD from a surplus system someone brought so that explains how tight my time and budget is. I am looking at funding options and also sending users to other facilities. However, we have a Trion Technology Phantom II that has the required gases and we can do a cyclic program for deposition and etch. It does not have great cooling right now. I am wanting to see if I can develop a recipe and was wanting to know if anyone already has one for this system? I have seen one on BYU's website and I will likely try that one first or use that as initial conditions. Regards, Chito Kendrick -- Chito Kendrick Ph.D. Director of the Microfabrication Facility Research Assistant Professor Electrical and Computer Engineering Michigan Technological University Room 436 M&M Building 1400 Townsend Dr. Houghton, Michigan 49931-1295 814-308-4255 -------------- next part -------------- An HTML attachment was scrubbed... URL: From robert.celotta at nist.gov Mon Nov 7 14:30:34 2016 From: robert.celotta at nist.gov (Celotta, Robert (Fed)) Date: Mon, 7 Nov 2016 19:30:34 +0000 Subject: [labnetwork] Nanolithography software tool now available Message-ID: Just a note to let folks know that the CNST Nanolithography Toolbox that was discussed at the last UGIM meeting is now available as a free download. The toolbox is a major software package that allows complex shapes to be designed and streamed to GDSII files. The toolbox allows the generation of smooth curves with complex shapes at small dimensions and is applicable to a broad range of microscale and nanoscale device fabrication. You can learn about and acquire the toolbox through the CNST web page or the download site. Bob Robert Celotta, Director Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, Stop #6200 Gaithersburg, MD 20899-6200 v: (301) 975-8001 f: (301) 975-8026 Executive Assistant: Amy Grafmuller CNST Brochure -------------- next part -------------- An HTML attachment was scrubbed... URL: From dcchrist at wisc.edu Thu Nov 10 14:16:27 2016 From: dcchrist at wisc.edu (Daniel Christensen) Date: Thu, 10 Nov 2016 19:16:27 +0000 Subject: [labnetwork] Opening Nano-Lithography Engineer, Univ of Wisconsin-Madison Message-ID: Hi, We have an opening for a Nano-Lithography Engineer at the University of Wisconsin-Madison. The Wisconsin Center for Applied Microelectronics (WCAM ) at the University of Wisconsin-Madison is seeking a Nano-Lithography Engineer. Position Vacancy Listing (PVL) #88559 with an anticipated start date of February 1, 2017. A minimum of BS in Electrical Engineering, Chemical Engineering, Physics, Materials Science, or Interdisciplinary Program Degree with micro/nano device fabrication experience is required. An advanced degree is desirable or equivalent professional experience and knowledge in varied area of semiconductor fabrication and process design. The candidate must have a strong background in the use of micro- and nanofabrication techniques, equipment, and clean room protocols. The position will be responsible for all maintenance and processes in a Nikon i-line stepper and a future (already funded) electron beam lithography tool. The position will be expected to have a thorough understanding of the operation of the stepper and electron beam instrument, including editing software job files and troubleshooting computer operations. Maintenance will be performed independently by the candidate and in close collaboration with field service engineers. The candidate will be expected to assist students and other researchers in all areas of tool use and process development. The position will be responsible for developing documentation and training materials. The positon will be responsible to training new users on the proper operation of the Nikon i-line stepper and the future electron beam lithography instrument. For a full position description information and specific application instructions, go to: http://jobs.hr.wisc.edu/cw/en-us/job/493633/nanolithography-engineer All applications must be placed online. Unless confidentiality is requested in writing, information regarding applicants must be released upon request. Finalists cannot be guaranteed confidentiality. UW-Madison provides equal employment opportunity for all persons and is in compliance with State and Federal regulations. Thank you, Dan C. Daniel C. Christensen WCAM, University of Wisconsin-Madison 1550 Engineering Dr Madison, WI 53706 -------------- next part -------------- An HTML attachment was scrubbed... URL: From cekendri at mtu.edu Fri Nov 11 16:43:35 2016 From: cekendri at mtu.edu (Chito Kendrick) Date: Fri, 11 Nov 2016 16:43:35 -0500 Subject: [labnetwork] Ebeam deposition of Gold Message-ID: We have a Denton electron beam deposition system for doing Cr/Au and most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply. We were using a carbon crucible for gold, but it it looked like we were getting carbon contamination so I switch to a tungsten crucible (7 cc). This seemed to be going well, except we are now having to increase the beam current after each run to melt the gold and to get the same rate. I have changed the filament and there was no improvement. I put in some more gold, but that seems to have made is worse. Could I have over filled the crucible so there is too much mass to melt? All the other materials we have seem to not have changed and it was only the gold we change the crucible to. I am very tempted to order a new crucible or find away of getting the gold out of the W crucible to reduce the mass. Chito Kendrick -- Chito Kendrick Ph.D. Managing Director of the Microfabrication Facility Research Assistant Professor Electrical and Computer Engineering Michigan Technological University Room 436 M&M Building 1400 Townsend Dr. Houghton, Michigan 49931-1295 814-308-4255 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mike.young at nd.edu Sat Nov 12 09:11:01 2016 From: mike.young at nd.edu (Mike Young) Date: Sat, 12 Nov 2016 09:11:01 -0500 Subject: [labnetwork] Ebeam deposition of Gold In-Reply-To: References: Message-ID: <7f5abc32-83e4-b261-9df4-217c46be6b58@nd.edu> Hi Chito. I might be missing something, but why do you perceive this to be a bad thing? Why not just use the higher beam current and be done with it? --Mike On 11/11/2016 4:43 PM, Chito Kendrick wrote: > > We have a Denton electron beam deposition system for doing Cr/Au and > most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply. > > We were using a carbon crucible for gold, but it it looked like we > were getting carbon contamination so I switch to a tungsten crucible > (7 cc). This seemed to be going well, except we are now having to > increase the beam current after each run to melt the gold and to get > the same rate. I have changed the filament and there was no > improvement. I put in some more gold, but that seems to have made is > worse. Could I have over filled the crucible so there is too much mass > to melt? All the other materials we have seem to not have changed and > it was only the gold we change the crucible to. > > I am very tempted to order a new crucible or find away of getting the > gold out of the W crucible to reduce the mass. > > Chito Kendrick > > -- > Chito Kendrick Ph.D. > > Managing Director of the Microfabrication Facility > Research Assistant Professor > Electrical and Computer Engineering > Michigan Technological University > Room 436 M&M Building > 1400 Townsend Dr. > Houghton, Michigan 49931-1295 > > 814-308-4255 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at upenn.edu Sat Nov 12 09:11:21 2016 From: nclay at upenn.edu (Noah Clay) Date: Sat, 12 Nov 2016 09:11:21 -0500 Subject: [labnetwork] Ebeam deposition of Gold In-Reply-To: References: Message-ID: <9611BA25-65D6-4C99-8799-90804A47894E@upenn.edu> Chito, With the tungsten crucible, I believe that you have more effective heat sinking to the e-beam hearth. Therefore, the process requires more current to the achieve melting or evaporation. Noah Clay Director, Quattrone Nanofabrication Facility University of Pennsylvania > On Nov 11, 2016, at 16:43, Chito Kendrick wrote: > > We have a Denton electron beam deposition system for doing Cr/Au and most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply. > We were using a carbon crucible for gold, but it it looked like we were getting carbon contamination so I switch to a tungsten crucible (7 cc). This seemed to be going well, except we are now having to increase the beam current after each run to melt the gold and to get the same rate. I have changed the filament and there was no improvement. I put in some more gold, but that seems to have made is worse. Could I have over filled the crucible so there is too much mass to melt? All the other materials we have seem to not have changed and it was only the gold we change the crucible to. > > I am very tempted to order a new crucible or find away of getting the gold out of the W crucible to reduce the mass. > Chito Kendrick > -- > Chito Kendrick Ph.D. > > Managing Director of the Microfabrication Facility > Research Assistant Professor > Electrical and Computer Engineering > Michigan Technological University > Room 436 M&M Building > 1400 Townsend Dr. > Houghton, Michigan 49931-1295 > > 814-308-4255 > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From espen.rogstad at ntnu.no Sat Nov 12 12:24:53 2016 From: espen.rogstad at ntnu.no (Espen Rogstad) Date: Sat, 12 Nov 2016 17:24:53 +0000 Subject: [labnetwork] Ebeam deposition of Gold In-Reply-To: <9611BA25-65D6-4C99-8799-90804A47894E@upenn.edu> References: , <9611BA25-65D6-4C99-8799-90804A47894E@upenn.edu> Message-ID: Hi Chito, Try putting a small metal disc under the tungsten crucible to lift it up a bit from the Cu pocket. This way the cooling efficiency goes way down and you can evaporate with low current. Be careful to not use too high current because the gold can spill over. Use long soak step because it takes a couple minutes after melting before it starts to evaporate (with a steady current). Regards, Espen Rogstad Den 12. nov. 2016 kl. 17.40 skrev Noah Clay >: Chito, With the tungsten crucible, I believe that you have more effective heat sinking to the e-beam hearth. Therefore, the process requires more current to the achieve melting or evaporation. Noah Clay Director, Quattrone Nanofabrication Facility University of Pennsylvania On Nov 11, 2016, at 16:43, Chito Kendrick > wrote: We have a Denton electron beam deposition system for doing Cr/Au and most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply. We were using a carbon crucible for gold, but it it looked like we were getting carbon contamination so I switch to a tungsten crucible (7 cc). This seemed to be going well, except we are now having to increase the beam current after each run to melt the gold and to get the same rate. I have changed the filament and there was no improvement. I put in some more gold, but that seems to have made is worse. Could I have over filled the crucible so there is too much mass to melt? All the other materials we have seem to not have changed and it was only the gold we change the crucible to. I am very tempted to order a new crucible or find away of getting the gold out of the W crucible to reduce the mass. Chito Kendrick -- Chito Kendrick Ph.D. Managing Director of the Microfabrication Facility Research Assistant Professor Electrical and Computer Engineering Michigan Technological University Room 436 M&M Building 1400 Townsend Dr. Houghton, Michigan 49931-1295 814-308-4255 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From cekendri at mtu.edu Sat Nov 12 13:16:28 2016 From: cekendri at mtu.edu (Chito Kendrick) Date: Sat, 12 Nov 2016 13:16:28 -0500 Subject: [labnetwork] Ebeam deposition of Gold - reply Message-ID: Not sure it this will get added to the original post The main reason we can not use the high current is because out power supply keeps turning off as it overheats. >From all the replies I got adding a shim under the cubicle to break the heat transfer to the hearth should solve the problem. Chito Kendrick -- Chito Kendrick Ph.D. Managing Director of the Microfabrication Facility Research Assistant Professor Electrical and Computer Engineering Michigan Technological University Room 436 M&M Building 1400 Townsend Dr. Houghton, Michigan 49931-1295 814-308-4255 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mccammon at physics.wisc.edu Sat Nov 12 14:40:59 2016 From: mccammon at physics.wisc.edu (Dan McCammon) Date: Sat, 12 Nov 2016 13:40:59 -0600 Subject: [labnetwork] Ebeam deposition of Gold In-Reply-To: <9611BA25-65D6-4C99-8799-90804A47894E@upenn.edu> References: <9611BA25-65D6-4C99-8799-90804A47894E@upenn.edu> Message-ID: As Noah says, this is caused by improved heat sinking to the hearth. If it makes the power requirement too high to get the dep rate you want, try putting a small alumina spacer under the crucible. This will greatly decrease the power requirement. Best wishes, Dan On Nov 12, 2016, at 8:11 AM, Noah Clay wrote: > Chito, > > With the tungsten crucible, I believe that you have more effective heat sinking to the e-beam hearth. Therefore, the process requires more current to the achieve melting or evaporation. > > Noah Clay > Director, Quattrone Nanofabrication Facility > University of Pennsylvania > > On Nov 11, 2016, at 16:43, Chito Kendrick wrote: > >> We have a Denton electron beam deposition system for doing Cr/Au and most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply. >> We were using a carbon crucible for gold, but it it looked like we were getting carbon contamination so I switch to a tungsten crucible (7 cc). This seemed to be going well, except we are now having to increase the beam current after each run to melt the gold and to get the same rate. I have changed the filament and there was no improvement. I put in some more gold, but that seems to have made is worse. Could I have over filled the crucible so there is too much mass to melt? All the other materials we have seem to not have changed and it was only the gold we change the crucible to. >> >> I am very tempted to order a new crucible or find away of getting the gold out of the W crucible to reduce the mass. >> Chito Kendrick >> -- >> Chito Kendrick Ph.D. >> >> Managing Director of the Microfabrication Facility >> Research Assistant Professor >> Electrical and Computer Engineering >> Michigan Technological University >> Room 436 M&M Building >> 1400 Townsend Dr. >> Houghton, Michigan 49931-1295 >> >> 814-308-4255 >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From bfuchs at unm.edu Mon Nov 14 12:02:01 2016 From: bfuchs at unm.edu (Beth Fuchs) Date: Mon, 14 Nov 2016 10:02:01 -0700 Subject: [labnetwork] Ebeam deposition of Gold In-Reply-To: References: Message-ID: <5829EE09.10400@unm.edu> We used tungsten crucibles for our gold evaporation in the past but wnt back to glossy carbon crucibles instead. We found that we were having issues with the gold alloying with the tungsten crucible. Beth -- Beth Fuchs Sr. Engineering Lab Coordinator Center for High Tech Materials 1313 Goddard SE Albuquerque, NM 87106-4343 bfuchs at unm.edu On 11/11/2016 2:43 PM, Chito Kendrick wrote: > We have a Denton electron beam deposition system for doing Cr/Au and > most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply. > > We were using a carbon crucible for gold, but it it looked like we were > getting carbon contamination so I switch to a tungsten crucible (7 cc). > This seemed to be going well, except we are now having to increase the > beam current after each run to melt the gold and to get the same rate. I > have changed the filament and there was no improvement. I put in some > more gold, but that seems to have made is worse. Could I have over > filled the crucible so there is too much mass to melt? All the other > materials we have seem to not have changed and it was only the gold we > change the crucible to. > > I am very tempted to order a new crucible or find away of getting the > gold out of the W crucible to reduce the mass. > > Chito Kendrick > > -- > Chito Kendrick Ph.D. > > Managing Director of the Microfabrication Facility > Research Assistant Professor > Electrical and Computer Engineering > Michigan Technological University > Room 436 M&M Building > 1400 Townsend Dr. > Houghton, Michigan 49931-1295 > > 814-308-4255 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > From michael.rooks at yale.edu Mon Nov 14 21:30:17 2016 From: michael.rooks at yale.edu (Michael Rooks) Date: Mon, 14 Nov 2016 21:30:17 -0500 Subject: [labnetwork] Ebeam deposition of Gold In-Reply-To: <5829EE09.10400@unm.edu> References: <5829EE09.10400@unm.edu> Message-ID: It's true that gold will alloy with tungsten. However, carbon crucibles are not ideal for gold evaporation, since gold will agglomerate around carbon particles. The gold film will be lumpy if carbon is accidentally evaporated from the crucible. Molybdenum crucibles are much better. ---------------------------------- Michael Rooks Yale Institute of Nanoscience and Quantum Engineering nano.yale.edu On 11/14/16 12:02 PM, Beth Fuchs wrote: > We used tungsten crucibles for our gold evaporation in the past but > wnt back to glossy carbon crucibles instead. We found that we were > having issues with the gold alloying with the tungsten crucible. > Beth > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tem at umd.edu Sun Nov 20 13:00:06 2016 From: tem at umd.edu (Thomas E. Murphy) Date: Sun, 20 Nov 2016 13:00:06 -0500 Subject: [labnetwork] UMD seeks Electron-Beam Lithography Specialist Message-ID: I'm a faculty member at the University of Maryland (and a former MTL user from Hank Smith's group). I am writing this list to advise you of a new job opportunity for a Nanolithography Specialist. The University of Maryland is now the proud owner of a new Elionix ELS-G100 lithography system. We have just launched a search for a new "Nanolithography Specialist", who would be a full-time staff member responsible for managing this facility, overseeing maintenance, and training users. As you well know, finding the right person for this kind of position is quite a challenge. I would be very grateful if you could please share this posting with your users. Please also feel free to circulate to others who may know of likely candidates, and let me know if you know of any listservs, websites, or other appropriate forums. Many thanks in advance for your help, -Tom Murphy (Course 6, PhD. 2000) *Title*: *Nanolithography Specialist* *Posting: **https://ejobs.umd.edu/postings/46827 * *Description*: This individual is responsible for overseeing the operation of the electron-beam lithography facility in the University of Maryland Nanocenter. Key responsibilities shall include: training and advising users in the safe and effective use of the instruments; assisting with and documenting lithographic process and recipe development; establishing and fostering a thriving, collaborative community of users; coordinating all scheduled and unscheduled service of the instruments; developing and managing a facility budget; general lab maintenance; maintenance of safety documentation, procedures, and training; interfacing with electron-beam lithography system vendors and service providers; collaborating with other Nanocenter staff to integrate electron-beam lithography processes and practices with other lithographic, deposition, metrological and microscopy tools; interfacing with regional partners and peers at neighboring facilities; and advising the Nanocenter leadership and steering committee about facility usage, policies, and best practices in the field of electron-beam nanolithography. The individual should have at least 4 year of prior experience in operating electron-beam lithography systems. A Ph.D. in engineering or science is expected, although prior experience with nanolithography beyond the 4 years stated above may substitute for educational degrees. Because of the significant required interaction with students and other users, strong communication and interpersonal skills are as important as technical acumen. -- *Thomas E. Murphy* (tem at umd.edu) Professor, Department of Electrical & Computer Engineering Director, Institute for Research in Electronics & Applied Physics University of Maryland 301-405-0030 (ERF 1201J) http://www.photonics.umd.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From jmarsh at eoir.com Mon Nov 21 11:14:58 2016 From: jmarsh at eoir.com (James Marsh) Date: Mon, 21 Nov 2016 16:14:58 +0000 Subject: [labnetwork] Exhaust of corrosive chemical storage cabinets Message-ID: <66F4932D0073B74DB8073E767E734E8C95394C7D@voyager.eoir.com> Hello, I would like some feedback regarding the pros/cons of venting corrosive chemical storage cabinets to outdoors. I may be looking at the wrong resources, but after checking NFPA, SEMI, FM Global, both state and international fire and mechanical codes, I have found only sketchy guidance. I would welcome either ideas or suggestions of where to look for definitive guidance. Thanks, and have a great day. Jim James "Jim" Marsh, Contractor Facility Manager/Test Coordinator EOIR Technologies, Inc. - A Polaris Company Supporting US Army Night Vision and Electronic Sensors Directorate Semiconductor Material and Fabrication Research Center 10221 Burbeck Rd. Ft. Belvoir, VA 22060 Ph: (703) 704-1778 Mobile: (703) 498-1279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From elena.cianci at mdm.imm.cnr.it Mon Nov 21 11:23:17 2016 From: elena.cianci at mdm.imm.cnr.it (Elena Cianci) Date: Mon, 21 Nov 2016 17:23:17 +0100 Subject: [labnetwork] ALD TEMAHf precursor and pump oil loss Message-ID: <51a4d5c0-89ee-dec9-c15e-ee3b740fa986@mdm.imm.cnr.it> Good day all, We have a Cambridge Nanotech Savannah200, and few days ago we mounted TEMAHf cylinder. The system is pumped by a rotary vane pump Pascal2021 with Fomblin oil. After few processes using TEMAHf and ozone, a large oil loss has been observed, with oil present in the vessel under the pump. Furthermore, HfO2 films resulted with lower refractive index than expected. Are there incompatibility issues of precursors like TEMAHf with the pump in use? or are there other issues that we should take into account to prevent such problem? We really approeciate any suggestions you might have Elena Cianci -------------------------------------- Elena Cianci, PhD Research associate CNR-IMM, Unit? di Agrate Brianza via C. Olivetti 2 20864 Agrate Brianza (MB), Italy -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Mon Nov 21 12:14:03 2016 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Mon, 21 Nov 2016 12:14:03 -0500 Subject: [labnetwork] ALD TEMAHf precursor and pump oil loss In-Reply-To: <51a4d5c0-89ee-dec9-c15e-ee3b740fa986@mdm.imm.cnr.it> References: <51a4d5c0-89ee-dec9-c15e-ee3b740fa986@mdm.imm.cnr.it> Message-ID: <58332B5B.4080006@cns.fas.harvard.edu> Hi Elena, We have the same tools and process here (Harvard CNS), and your pump/oil should be fine. What is your base pressure (with 20 sccm of N2 flowing)? It should be between 200mT and, say, 500mT. If it is 600mT or higher, it could well be your pump is dying, and in need of a rebuild. If base pressure is suddenly higher than previously, that is particularly suspicious. The pump oil is probably leaking from a seal, which can be fixed with a rebuild. If the pump runs low on oil, that will effect it's pumping ability. Assuming your exhaust is vented (and well sealed), it is less likely that the oil is coming out of the exhaust, (but possible). See if you can tell if the exhaust side of the pump has a lot of oil in it. At CNS, we used to go through pumps at a rather alarming clip (less than 6 months between rebuilds), due to the creation of oxide powders in the pump oil (excellent grinding slurry). After we started putting oil mist traps on our pumps (as an in-line reaction surface), our pumps starting lasting 2 years or more between rebuilds. What temp are you depositing your HfO2 at? Below 240C should give more consistent results, as above that you start getting close to the decomposition temperature of the TDMAHf. Also, if your pump rate is dropping (as evidenced by higher base pressure), you might find your wait times between pulses is no longer long enough to keep out of CVD mode (just a bit), which can also effect your refractive index. Mac Hathaway Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA02138 617-495-9012 On 11/21/2016 11:23 AM, Elena Cianci wrote: > > Good day all, > > > We have a Cambridge Nanotech Savannah200, and few days ago we mounted > TEMAHf cylinder. > > The system is pumped by a rotary vane pump Pascal2021 with Fomblin > oil. After few processes using TEMAHf and ozone, a large oil loss has > been observed, with oil present in the vessel under the pump. > > Furthermore, HfO2 films resulted with lower refractive index than > expected. > > > Are there incompatibility issues of precursors like TEMAHf with the > pump in use? > > or are there other issues that we should take into account to prevent > such problem? > > > We really approeciate any suggestions you might have > > Elena Cianci > > > > -------------------------------------- > > Elena Cianci, PhD > Research associate > CNR-IMM, Unit? di Agrate Brianza > via C. Olivetti 2 > 20864 Agrate Brianza (MB), Italy > > > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From duda at uchicago.edu Mon Nov 21 13:53:24 2016 From: duda at uchicago.edu (Peter J Duda III) Date: Mon, 21 Nov 2016 18:53:24 +0000 Subject: [labnetwork] Exhaust of corrosive chemical storage cabinets In-Reply-To: <66F4932D0073B74DB8073E767E734E8C95394C7D@voyager.eoir.com> References: <66F4932D0073B74DB8073E767E734E8C95394C7D@voyager.eoir.com> Message-ID: <369CF1861066C244B747413441CCF52908D985F6@xm-mbx-08-prod> Jim Santa Clara developed what is now known as the Toxic Gas Ordinance way back in 1988 as a response to the growing number of semiconductor facilities in that area. It has since been modified and is mostly used as the model for the Universal Fire Code. While no source is definitive and local codes vary - I have found this document: http://www.sbaypipe.org/assets/pdf/TGO_Toxic_Brochure_single%20pages_0519.pdf to be extremely helpful in providing general guidance regarding most standard semiconductor gases. Not only does it cover generally where TGO varies from the model fire code - There are a lot of good definitions, the general requirements are very easy to follow and the table of gases provides easy access to classifications and IDLH, etc. Again - one needs to cross check against your local requirements, but a 20 minute read can give you an abundance of info regarding what is required throughout much of the US. Specifically to your question - you can see under the general requirements in the "Exhaust Ventilation System" which class of gasses are required to be "treated" to ? IDLH. Under the TGO Synopsis you can see under bullet "S" what is involved in a "treatment system". I leave it to you to interpret those for your specific application and again - to cross check those requirements against local codes. Thanks Peter J Duda Technical Director, Pritzker Nanofabrication Facility Institute for Molecular Engineering University of Chicago 5640 South Ellis Avenue ERC LL178 Chicago, IL 60637 Office: 773-702-8903 Pager/Text: 773-652-0480 duda at uchicago.edu ime.uchicago.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of James Marsh Sent: Monday, November 21, 2016 10:15 AM To: labnetwork at mtl.mit.edu Cc: James Marsh (mail.mil) Subject: [labnetwork] Exhaust of corrosive chemical storage cabinets Hello, I would like some feedback regarding the pros/cons of venting corrosive chemical storage cabinets to outdoors. I may be looking at the wrong resources, but after checking NFPA, SEMI, FM Global, both state and international fire and mechanical codes, I have found only sketchy guidance. I would welcome either ideas or suggestions of where to look for definitive guidance. Thanks, and have a great day. Jim James "Jim" Marsh, Contractor Facility Manager/Test Coordinator EOIR Technologies, Inc. - A Polaris Company Supporting US Army Night Vision and Electronic Sensors Directorate Semiconductor Material and Fabrication Research Center 10221 Burbeck Rd. Ft. Belvoir, VA 22060 Ph: (703) 704-1778 Mobile: (703) 498-1279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From elena.cianci at mdm.imm.cnr.it Mon Nov 21 16:37:16 2016 From: elena.cianci at mdm.imm.cnr.it (Elena Cianci) Date: Mon, 21 Nov 2016 22:37:16 +0100 Subject: [labnetwork] ALD TEMAHf precursor and pump oil loss In-Reply-To: <58332B5B.4080006@cns.fas.harvard.edu> References: <51a4d5c0-89ee-dec9-c15e-ee3b740fa986@mdm.imm.cnr.it> <58332B5B.4080006@cns.fas.harvard.edu> Message-ID: <62dfe188741f6c03a6160b81cd55d620@mdm.imm.cnr.it> Dear Mac, thank you for your suggestions. The pump has been installed on last July and the chamber pressure with 20 sccm N2 flow is 0.25Torr. We do not have any trap on the pump, I will look for the oil mist trap you mention and i will check the exhaust. Do oxide powders in the oil change the oil appearance? HfO2 deposition temperature is 175?C, and I tried longer purge time to improve material properties, but it didn't work. I will check the film chemical composition by ToFSIMS in the next days. Elena Il 2016-11-21 18:14 Mac Hathaway ha scritto: > Hi Elena, > > We have the same tools and process here (Harvard CNS), and your > pump/oil should be fine. > > What is your base pressure (with 20 sccm of N2 flowing)? It should be > between 200mT and, say, 500mT. If it is 600mT or higher, it could well > be your pump is dying, and in need of a rebuild. If base pressure is > suddenly higher than previously, that is particularly suspicious. > > The pump oil is probably leaking from a seal, which can be fixed with > a rebuild. If the pump runs low on oil, that will effect it's pumping > ability. Assuming your exhaust is vented (and well sealed), it is less > likely that the oil is coming out of the exhaust, (but possible). See > if you can tell if the exhaust side of the pump has a lot of oil in > it. > > At CNS, we used to go through pumps at a rather alarming clip (less > than 6 months between rebuilds), due to the creation of oxide powders > in the pump oil (excellent grinding slurry). After we started putting > oil mist traps on our pumps (as an in-line reaction surface), our > pumps starting lasting 2 years or more between rebuilds. > > What temp are you depositing your HfO2 at? Below 240C should give > more consistent results, as above that you start getting close to the > decomposition temperature of the TDMAHf. Also, if your pump rate is > dropping (as evidenced by higher base pressure), you might find your > wait times between pulses is no longer long enough to keep out of CVD > mode (just a bit), which can also effect your refractive index. > > Mac Hathaway > > * > * > * > > Mac Hathaway > > Senior Process and Systems Engineer > > Harvard Center for Nanoscale Systems > > 11 Oxford St. > > Cambridge, MA 02138 > > 617-495-9012 > > On 11/21/2016 11:23 AM, Elena Cianci wrote: > >> Good day all, >> >> We have a Cambridge Nanotech Savannah200, and few days ago we >> mounted TEMAHf cylinder. >> >> The system is pumped by a rotary vane pump Pascal2021 with Fomblin >> oil. After few processes using TEMAHf and ozone, a large oil loss >> has been observed, with oil present in the vessel under the pump. >> >> Furthermore, HfO2 films resulted with lower refractive index than >> expected. >> >> Are there incompatibility issues of precursors like TEMAHf with the >> pump in use? >> >> or are there other issues that we should take into account to >> prevent such problem? >> >> We really approeciate any suggestions you might have >> >> Elena Cianci >> >> -------------------------------------- Elena Cianci, PhD >> Research associate >> CNR-IMM, Unit? di Agrate Brianza >> via C. Olivetti 2 >> 20864 Agrate Brianza (MB), Italy >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork [1] > > > Links: > ------ > [1] https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From gcure at email.arizona.edu Mon Nov 21 16:39:13 2016 From: gcure at email.arizona.edu (Gregg Cure) Date: Mon, 21 Nov 2016 14:39:13 -0700 Subject: [labnetwork] Solitec spin coater schematic Message-ID: Hello all, I have an elderly Solitec Model 1111-CD spincoater. It's been stalwart and reliable for over 20 years. Recently, one or more of the timers stopped working. The controller is all relay logic. I know this is a long shot, but would anyone have a schematic for this spincoater's controller? Thanks, Gregg -- Gregg D. Cure` The University of Arizona Office for Research and Discovery Nano Fabrication and Processing Center 1230 E. Speedway Blvd. ECE104 Rm 209 Tucson, AZ 85721-0104 Office: 520.626.1987 Cell: 520.307.0925 Fax: 520.626.7877 Website: http://mfc.engr.arizona.edu Website: http://research.arizona.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From bill at eecs.berkeley.edu Mon Nov 21 17:03:01 2016 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Mon, 21 Nov 2016 14:03:01 -0800 Subject: [labnetwork] Exhaust of corrosive chemical storage cabinets In-Reply-To: <369CF1861066C244B747413441CCF52908D985F6@xm-mbx-08-prod> References: <66F4932D0073B74DB8073E767E734E8C95394C7D@voyager.eoir.com> <369CF1861066C244B747413441CCF52908D985F6@xm-mbx-08-prod> Message-ID: <58336F15.4060006@eecs.berkeley.edu> Jim, Peter, The TGO Synopsis from South Bay Pipe is a useful guide for many in this community. Thank you for providing the on line link for all. However, I do not consider using the TGO and its description of requirements for toxic gases and gas cabinets (chemicals in use) the best reference for evaluating ventilation requirements for chemical storage cabinets. I suspect you are evaluating ventilation from chemical storage cabinets used to store your closed containers of liquid chemicals and whether this effluent must go through a building scrubber or can be exhausted directly - or in other cases is not required to be exhausted. My dated recall is the mechanical and fire code had specific requirements for the overall room ventilation but not requirements for cabinet ventilation. Your local Authority Having Jurisdiction (AHJ, most commonly your local or campus fire marshal) will make the call but I expect you can obtain guidance on this situation by comparing your storage cabinets to the situation at your shipping and receiving or EH&S waste handling facility. I expect the requirements for storage cabinets of closed (not in use) containers to be far more modest than the requirement for a chemical fume hood or other process equipment that is used to handle open chemical containers. Re pros and cons instead of discussing code requirements - we have both. Our chemical inventory room which meets specific overall room ventilation requirements, has sealed bottles from the manufacturer, and chemical cabinets that don't stink when you open them - has chem cabinets that are not separately ventilated. This saved money and reserved exhaust capacity for higher priority needs. When we have a stinky cabinet in the main lab with half filled photoresist and waste solvent bottles - even though this is storage - and the room meets overall ventilation requirements - and the cabinet is not required to be exhausted - we added ventilation to the cabinet and insure we met all 1/2 IDLH exhaust requirements. Bill Flounders UC Berkeley Peter J Duda III wrote: > > Jim > > Santa Clara developed what is now known as the Toxic Gas Ordinance way > back in 1988 as a response to the growing number of semiconductor > facilities in that area. It has since been modified and is mostly > used as the model for the Universal Fire Code. _While no source is > definitive_ and local codes vary ? I have found this document: > > http://www.sbaypipe.org/assets/pdf/TGO_Toxic_Brochure_single%20pages_0519.pdf > > to be extremely helpful in providing general guidance regarding most > standard semiconductor gases. Not only does it cover generally where > TGO varies from the model fire code - There are a lot of good > definitions, the general requirements are very easy to follow and the > table of gases provides easy access to classifications and IDLH, etc. > Again ? one needs to cross check against your local requirements, but > a 20 minute read can give you an abundance of info regarding what is > required throughout much of the US. > > Specifically to your question ? you can see under the general > requirements in the ?Exhaust Ventilation System? which class of gasses > are required to be ?treated? to ? IDLH. Under the TGO Synopsis you > can see under bullet > > ?S? what is involved in a ?treatment system?. I leave it to you to > interpret those for your specific application and again ? to cross > check those requirements against local codes. > > Thanks > > Peter J Duda > > Technical Director, Pritzker Nanofabrication Facility > > Institute for Molecular Engineering > > University of Chicago > > 5640 South Ellis Avenue > > ERC LL178 > > Chicago, IL 60637 > > Office: 773-702-8903 > Pager/Text: 773-652-0480 > > duda at uchicago.edu > > ime.uchicago.edu > > *From:*labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *James Marsh > *Sent:* Monday, November 21, 2016 10:15 AM > *To:* labnetwork at mtl.mit.edu > *Cc:* James Marsh (mail.mil) > *Subject:* [labnetwork] Exhaust of corrosive chemical storage cabinets > > Hello, > > I would like some feedback regarding the pros/cons of venting > corrosive chemical storage cabinets to outdoors. I may be looking at > the wrong resources, but after checking NFPA, SEMI, FM Global, both > state and international fire and mechanical codes, I have found only > sketchy guidance. > > I would welcome either ideas or suggestions of where to look for > definitive guidance. > > Thanks, and have a great day. > > Jim > > James ?Jim? Marsh, Contractor > > Facility Manager/Test Coordinator > > EOIR Technologies, Inc. ? A Polaris Company > > Supporting > > US Army Night Vision and Electronic Sensors Directorate > > Semiconductor Material and Fabrication Research Center > > 10221 Burbeck Rd. > > Ft. Belvoir, VA 22060 > > Ph: (703) 704-1778 > > Mobile: (703) 498-1279 > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmichael at iesengineering.net Tue Nov 22 11:20:29 2016 From: rmichael at iesengineering.net (Rizik Michael) Date: Tue, 22 Nov 2016 08:20:29 -0800 Subject: [labnetwork] Exhaust of corrosive chemical storage cabinets In-Reply-To: <58336F15.4060006@eecs.berkeley.edu> References: <66F4932D0073B74DB8073E767E734E8C95394C7D@voyager.eoir.com> <369CF1861066C244B747413441CCF52908D985F6@xm-mbx-08-prod> <58336F15.4060006@eecs.berkeley.edu> Message-ID: <006301d244dc$586343c0$0929cb40$@iesengineering.net> I agree with Bill. In California exhausting chemical storage cabinets is not required by the California Fire code. We are only required to meet minimum ventilation requirements for the Hazardous Occupancy storage bunker where such cabinets are stored. This is usually a minimum 1-cfm per square foot. Regards Rizik Michael, PE Principal Integrated Engineering Services Office: 408-261-3500 Cell: 408-718-0927 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bill Flounders Sent: Monday, November 21, 2016 2:03 PM To: Peter J Duda III; James Marsh; labnetwork at mtl.mit.edu Cc: James Marsh (mail.mil) Subject: Re: [labnetwork] Exhaust of corrosive chemical storage cabinets Jim, Peter, The TGO Synopsis from South Bay Pipe is a useful guide for many in this community. Thank you for providing the on line link for all. However, I do not consider using the TGO and its description of requirements for toxic gases and gas cabinets (chemicals in use) the best reference for evaluating ventilation requirements for chemical storage cabinets. I suspect you are evaluating ventilation from chemical storage cabinets used to store your closed containers of liquid chemicals and whether this effluent must go through a building scrubber or can be exhausted directly - or in other cases is not required to be exhausted. My dated recall is the mechanical and fire code had specific requirements for the overall room ventilation but not requirements for cabinet ventilation. Your local Authority Having Jurisdiction (AHJ, most commonly your local or campus fire marshal) will make the call but I expect you can obtain guidance on this situation by comparing your storage cabinets to the situation at your shipping and receiving or EH&S waste handling facility. I expect the requirements for storage cabinets of closed (not in use) containers to be far more modest than the requirement for a chemical fume hood or other process equipment that is used to handle open chemical containers. Re pros and cons instead of discussing code requirements - we have both. Our chemical inventory room which meets specific overall room ventilation requirements, has sealed bottles from the manufacturer, and chemical cabinets that don't stink when you open them - has chem cabinets that are not separately ventilated. This saved money and reserved exhaust capacity for higher priority needs. When we have a stinky cabinet in the main lab with half filled photoresist and waste solvent bottles - even though this is storage - and the room meets overall ventilation requirements - and the cabinet is not required to be exhausted - we added ventilation to the cabinet and insure we met all 1/2 IDLH exhaust requirements. Bill Flounders UC Berkeley Peter J Duda III wrote: Jim Santa Clara developed what is now known as the Toxic Gas Ordinance way back in 1988 as a response to the growing number of semiconductor facilities in that area. It has since been modified and is mostly used as the model for the Universal Fire Code. While no source is definitive and local codes vary ? I have found this document: http://www.sbaypipe.org/assets/pdf/TGO_Toxic_Brochure_single%20pages_0519.pd f to be extremely helpful in providing general guidance regarding most standard semiconductor gases. Not only does it cover generally where TGO varies from the model fire code - There are a lot of good definitions, the general requirements are very easy to follow and the table of gases provides easy access to classifications and IDLH, etc. Again ? one needs to cross check against your local requirements, but a 20 minute read can give you an abundance of info regarding what is required throughout much of the US. Specifically to your question ? you can see under the general requirements in the ?Exhaust Ventilation System? which class of gasses are required to be ?treated? to ? IDLH. Under the TGO Synopsis you can see under bullet ?S? what is involved in a ?treatment system?. I leave it to you to interpret those for your specific application and again ? to cross check those requirements against local codes. Thanks Peter J Duda Technical Director, Pritzker Nanofabrication Facility Institute for Molecular Engineering University of Chicago 5640 South Ellis Avenue ERC LL178 Chicago, IL 60637 Office: 773-702-8903 Pager/Text: 773-652-0480 duda at uchicago.edu ime.uchicago.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of James Marsh Sent: Monday, November 21, 2016 10:15 AM To: labnetwork at mtl.mit.edu Cc: James Marsh (mail.mil) Subject: [labnetwork] Exhaust of corrosive chemical storage cabinets Hello, I would like some feedback regarding the pros/cons of venting corrosive chemical storage cabinets to outdoors. I may be looking at the wrong resources, but after checking NFPA, SEMI, FM Global, both state and international fire and mechanical codes, I have found only sketchy guidance. I would welcome either ideas or suggestions of where to look for definitive guidance. Thanks, and have a great day. Jim James ?Jim? Marsh, Contractor Facility Manager/Test Coordinator EOIR Technologies, Inc. ? A Polaris Company Supporting US Army Night Vision and Electronic Sensors Directorate Semiconductor Material and Fabrication Research Center 10221 Burbeck Rd. Ft. Belvoir, VA 22060 Ph: (703) 704-1778 Mobile: (703) 498-1279 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.hume at ualberta.ca Tue Nov 22 19:09:20 2016 From: michael.hume at ualberta.ca (Michael Hume) Date: Tue, 22 Nov 2016 17:09:20 -0700 Subject: [labnetwork] Gas Abatement & Detectors - Cl2, BCl3, HBr Message-ID: Dear Colleagues, We have recently installed a new ICP system that uses Cl2, BCl3 & HBr process gasses. We use a Deltech 859 CDO for exhaust abatement. For gas detection, we use Honeywell Midas detectors with Midas-E-HCL (HBr/BCl3) and Midas-E-HAL (Cl2) detector cartridges. We are seeing readings of 8ppm and 2ppm from the BCl3/HBr and Cl2 detectors (respectively) in the scrubbed exhaust output of our abatement system when running a 42 sccm Cl2 plasma. Is anyone able to provide any guidance or input on what we should expect in terms of performance from this type of setup? Is it normal to read gas levels in the scrubbed exhaust? It seems to me that this should not be the case if the abatement is working properly (but at what efficiency?) The CDO uses both a high temp burn chamber and water re-circulator. This is our first tool to use these gasses and we are still experiencing some learning curves when it comes to understanding the expectations for the system performance - so any feedback is much appreciated. Thanks, -Mike. -- Michael Hume Operations Manager University of Alberta - nanoFAB W1-060 ECERF Building 9107 - 116 Street Edmonton, Alberta Canada T6G 2V4 www.nanofab.ualberta.ca Ph: 587-879-1519 -------------- next part -------------- An HTML attachment was scrubbed... URL: