[labnetwork] Ebeam deposition of Gold

[Espen Rogstad]

Hi Chito,

Try putting a small metal disc under the tungsten crucible to lift it up a bit from the Cu pocket. This way the cooling efficiency goes way down and you can evaporate with low current. Be careful to not use too high current because the gold can spill over. Use long soak step because it takes a couple minutes after melting before it starts to evaporate (with a steady current).

Regards,
Espen Rogstad

Den 12. nov. 2016 kl. 17.40 skrev Noah Clay <nclay at upenn.edu<mailto:nclay at upenn.edu>>:

Chito,

With the tungsten crucible, I believe that you have more effective heat sinking to the e-beam hearth. Therefore, the process requires more current to the achieve melting or evaporation.

Noah Clay
Director, Quattrone Nanofabrication Facility
University of Pennsylvania

On Nov 11, 2016, at 16:43, Chito Kendrick <cekendri at mtu.edu<mailto:cekendri at mtu.edu>> wrote:


We have a Denton electron beam deposition system for doing Cr/Au and most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply.

We were using a carbon crucible for gold, but it it looked like we were getting carbon contamination so I switch to a tungsten crucible (7 cc). This seemed to be going well, except we are now having to increase the beam current after each run to melt the gold and to get the same rate. I have changed the filament and there was no improvement. I put in some more gold, but that seems to have made is worse. Could I have over filled the crucible so there is too much mass to melt? All the other materials we have seem to not have changed and it was only the gold we change the crucible to.

I am very tempted to order a new crucible or find away of getting the gold out of the W crucible to reduce the mass.

Chito Kendrick

--
Chito Kendrick Ph.D.<https://sites.google.com/site/chitokendrickphd/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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