[labnetwork] Decommissioning Silane and Phosphene Stainless Gas Delivery Lines

[Hmelo, Anthony B]

All:

VINSE is in the process of relocating a PECVD reactor to a new cleanroom facility and I am seeking advice on the industry standards for decommissiong Silane and Phosphene stainless gas delivery lines that run from the respective gas cabinets to the tool in its current location. Beyond thoroughly purging the lines with nitrogen flow through the tool and exhausting the purge gas  through the tool exhaust, are there other considerations involved in abandoning the gas delivery lines? For example, are the lines considered to be permanently contaminated and will they require special disposal?

Any advice on decommissioning these lines will be deeply appreciated.

With thanks,

Anthony B Hmelo, PhD

Associate Director, VINSE
Research Associate Professor of Physics and Astronomy
Research Associate Professor of Materials Science and Engineering
Vanderbilt University
Nashville TN 37235

615-343-7212


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20160909/e8a82d4d/attachment.html>