From tbritton at criticalsystemsinc.com  Sun Apr  2 11:06:27 2017
From: tbritton at criticalsystemsinc.com (Tom Britton)
Date: Sun, 2 Apr 2017 15:06:27 +0000
Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane,
	diborane, silane) detectors
In-Reply-To: <BCAF21E9-4C54-43EB-B914-54107AA62AD4@upenn.edu>
References: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu>,
 <BCAF21E9-4C54-43EB-B914-54107AA62AD4@upenn.edu>
Message-ID: <9A7223F1-6C7C-4164-A9B5-7B9CB38A65F5@criticalsystemsinc.com>

Hi Jim,

I'm with Noah on this. Our guys have used the DOD instruments in the past with good results.

Good luck,

Tom Britton
Critical Systems, Inc.

Sent from my iPhone

On Apr 1, 2017, at 6:41 AM, Noah Clay <nclay at upenn.edu<mailto:nclay at upenn.edu>> wrote:

Jim,

This may be a good fit:

http://www.dodtec.com/clpx/

Or

http://www.dodtec.com/xp-703dhydrides/

Best,
Noah

Noah Clay
Director, Quattrone Nanofabrication Facility
University of Pennsylvania

On Mar 31, 2017, at 15:59, James C. Sturm <sturm at Princeton.EDU<mailto:sturm at Princeton.EDU>> wrote:

I am looking for handheld detectors to ?sniff? at VCR or swagelock joints for leaks of hydrogen and also for common hydrides (silane, germane, diborane, phosphine?).  The lab has a central system already, but I am looking for something to sniff at joints with after making connections and repressurizing.       (Yes we will Helium leak-check too, but this is as a followup with less likelihood of someone doing it wrong).

Many years (25?) we had a handheld unit for hydrides (about  7? x 3 ? x 1?, with a 4? long rubber sniffer port).   Probably made by Matheson but can?t seem to find anything similar from them now (although I didn?t look very hard).

Suggestions?

Thanks, Jim Sturm

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From schweig at umich.edu  Mon Apr  3 10:44:19 2017
From: schweig at umich.edu (Dennis Schweiger)
Date: Mon, 3 Apr 2017 10:44:19 -0400
Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane,
 diborane, silane) detectors
Message-ID: <CAKzi2_OP-ALzf0U7jC4T_h75Pmh-V5KZhitbp3M6wG5wcxKKwg@mail.gmail.com>

James,

as everyone has previously mentioned, all of the DOD stuff works really
well, as do the Matheson single point hand-held units.  You don't say what
detection system you're using for the rest of your fab, but I'd check with
that vendor to see what they offer.

I'd also suggest that you look at a MultiRAE unit (good for monitoring up
to six different gas chemistries), and the Honeywell SPMFlex (extractive
tapes required).

Here at UofMichigan we have a variety of handheld detection systems. What
you'll find is that there isn't a "silver bullet" to cover every single
thing when you look at multi-use sensors.  There will have to be some trade
offs.

Dennis Schweiger
University of Michigan/LNF
Facilities

734.647.2055 Ofc


On Fri, Mar 31, 2017 at 3:59 PM, James C. Sturm <sturm at princeton.edu> wrote:

> I am looking for handheld detectors to ?sniff? at VCR or swagelock joints
> for leaks of hydrogen and also for common hydrides (silane, germane,
> diborane, phosphine?).  The lab has a central system already, but I am
> looking for something to sniff at joints with after making connections and
> repressurizing.       (Yes we will Helium leak-check too, but this is as a
> followup with less likelihood of someone doing it wrong).
>
>
>
> Many years (25?) we had a handheld unit for hydrides (about  7? x 3 ? x
> 1?, with a 4? long rubber sniffer port).   Probably made by Matheson but
> can?t seem to find anything similar from them now (although I didn?t look
> very hard).
>
>
>
> Suggestions?
>
>
>
> Thanks, Jim Sturm
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
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From beaudoin at physics.ubc.ca  Mon Apr  3 12:52:55 2017
From: beaudoin at physics.ubc.ca (Mario Beaudoin)
Date: Mon, 3 Apr 2017 09:52:55 -0700
Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane,
 diborane, silane) detectors
In-Reply-To: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu>
References: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu>
Message-ID: <e9f78f95-1834-889e-61c4-12a83f38d4bc@physics.ubc.ca>

I used to have something like this made by Draeger.

M.


Le 31/03/2017 ? 12:59 PM, James C. Sturm a ?crit :
>
> I am looking for handheld detectors to ?sniff? at VCR or swagelock 
> joints for leaks of hydrogen and also for common hydrides (silane, 
> germane, diborane, phosphine?).  The lab has a central system already, 
> but I am looking for something to sniff at joints with after making 
> connections and repressurizing.       (Yes we will Helium leak-check 
> too, but this is as a followup with less likelihood of someone doing 
> it wrong).
>
> Many years (25?) we had a handheld unit for hydrides (about  7? x 3 ? 
> x 1?, with a 4? long rubber sniffer port).   Probably made by Matheson 
> but can?t seem to find anything similar from them now (although I 
> didn?t look very hard).
>
> Suggestions?
>
> Thanks, Jim Sturm
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

-- 

*Mario Beaudoin, Ph.D.*

Research Associate, Manager

Advanced Nanofabrication Facility (ANF)

Advanced Materials and Process Engineering Lab (AMPEL)

University of British Columbia

2355 East Mall, Vancouver, BC V6T 1Z4

Tel: 604-822-1853

web: www.nanofab.ubc.ca <http://www.nanofab.ubc.ca>

Reply To: _beaudoin at physics.ubc.ca <mailto:beaudoin at physics.ubc.ca>_

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From frank.gambino at dodtec.com  Mon Apr  3 13:24:49 2017
From: frank.gambino at dodtec.com (Frank Gambino)
Date: Mon, 3 Apr 2017 17:24:49 +0000
Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane,
 diborane, silane) detectors
In-Reply-To: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu>
References: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu>
Message-ID: <2D3ADBBA44F2E44889FEF73BBBF7AC140127687E79@SBS2011.DOD.local>

Hi Jim,

The unit you were using was the Matheson 5057.  This was actually made by New Cosmos for Matheson. The New Cosmos model was XP-703D.  DOD Technologies is partnered with New Cosmos.

[cid:image003.png at 01D2AC75.23990E30]



The XP-703D was replaced by a newer version called the XP-703D-III.  The XP-703D-III like the XP-703D is a general leak detector and basically detects the flammable part for these gases.  It is strictly a qualitative and not quantitative unit.  It can read arsine down to 50ppb and H2 as low as 1ppm.
http://www.dodtec.com/xp-703dhydrides/


Another portable option is the XPS-7 which uses interchangeable EC sensors can read arsine down to 12ppb.  The XPS-7 provides quantitative data where the XP-703D-III does not.
http://www.dodtec.com/xps7/

A 3rd portable option is the CLPX which uses colorimetric technology (tape) and can detect arsine down to 1.6ppb.
http://www.dodtec.com/clpx/

Regards,


Frank Gambino
DOD Technologies, Inc.
815-788-5200 office
815-788-5300 fax
847-722-8274 mobile
frank.gambino at dodtec.com<mailto:frank.gambino at dodtec.com>
www.dodtec.com<http://www.dodtec.com>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of James C. Sturm
Sent: Friday, March 31, 2017 3:00 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane, diborane, silane) detectors

I am looking for handheld detectors to "sniff" at VCR or swagelock joints for leaks of hydrogen and also for common hydrides (silane, germane, diborane, phosphine...).  The lab has a central system already, but I am looking for something to sniff at joints with after making connections and repressurizing.       (Yes we will Helium leak-check too, but this is as a followup with less likelihood of someone doing it wrong).

Many years (25?) we had a handheld unit for hydrides (about  7" x 3 " x 1", with a 4" long rubber sniffer port).   Probably made by Matheson but can't seem to find anything similar from them now (although I didn't look very hard).

Suggestions?

Thanks, Jim Sturm

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From nannini.matthieu at gmail.com  Wed Apr  5 14:11:18 2017
From: nannini.matthieu at gmail.com (Matthieu Nannini)
Date: Wed, 5 Apr 2017 14:11:18 -0400
Subject: [labnetwork] XRR mapping services
Message-ID: <CAOpdsSQ-9yOgL4m=wknk=7yZQeh4QEbUaFsqkzDf0dAgn8r_oA@mail.gmail.com>

Dear all,

I'm looking for a XRR service lab with mapping capabilities.

Any names ?

Thanks,

Matthieu
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From Vincent.Luciani at nist.gov  Wed Apr  5 21:03:24 2017
From: Vincent.Luciani at nist.gov (Luciani, Vincent (Fed))
Date: Thu, 6 Apr 2017 01:03:24 +0000
Subject: [labnetwork] XRR mapping services
In-Reply-To: <CAOpdsSQ-9yOgL4m=wknk=7yZQeh4QEbUaFsqkzDf0dAgn8r_oA@mail.gmail.com>
References: <CAOpdsSQ-9yOgL4m=wknk=7yZQeh4QEbUaFsqkzDf0dAgn8r_oA@mail.gmail.com>
Message-ID: <CY1PR09MB09053FA86F5ED6FE7EAADEA29C0D0@CY1PR09MB0905.namprd09.prod.outlook.com>

Hello Mathieu,


We have the Rigaku SmartLab system.  You can find details here: https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-rigaku-smartlab-x-ray-diffraction

[https://www.nist.gov/sites/default/files/styles/480_x_480_limit/public/images/cnst/nanofab/rigaku_smartlab_1.jpg?itok=MYGx7Ls0]<https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-rigaku-smartlab-x-ray-diffraction>

NanoFab Tool: Rigaku SmartLab X-Ray Diffraction | NIST<https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-rigaku-smartlab-x-ray-diffraction>
www.nist.gov
The Rigaku SmartLab X-ray diffraction system (XRD) is a fully automated, modular system for advanced x-ray diffraction measurements on a wide range of materials ...



I am also copying Dr. Kerry Siebein who is our XRD/XRR expert.  Feel free to contact her directly with any questions.


Best,


Vince



________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Matthieu Nannini <nannini.matthieu at gmail.com>
Sent: Wednesday, April 5, 2017 2:11:18 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] XRR mapping services

Dear all,

I'm looking for a XRR service lab with mapping capabilities.

Any names ?

Thanks,

Matthieu
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From bshiva at stanford.edu  Wed Apr  5 22:02:59 2017
From: bshiva at stanford.edu (Shivakumar Bhaskaran)
Date: Thu, 6 Apr 2017 02:02:59 +0000
Subject: [labnetwork] Blisters on PMMA resists
Message-ID: <BY2PR0201MB07425CBB506FE5369EC12B66B00D0@BY2PR0201MB0742.namprd02.prod.outlook.com>

Hi All,

We are getting blisters or metal film peeling off when depositing metals (Ti/Au/Al) on PMMA resists using EBeam Evaporation.

Did anyone had this issue in your EBeam Evaporation tool. If so how did you fix this?

-thanks
-Shiva

SNSF
http://snsf.stanford.edu/

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From jsmith at tystar.com  Wed Apr  5 17:43:19 2017
From: jsmith at tystar.com (Jim Smith)
Date: Wed, 5 Apr 2017 14:43:19 -0700
Subject: [labnetwork] Field Service Opening
Message-ID: <023701d2ae55$a44404e0$eccc0ea0$@tystar.com>

Dear All,

 

Tystar Corporation announces a job opening for a Field Service Engineer in
our Diffusion Furnace Division.  Please contact  <mailto:careers at tystar.com>
careers at tystar.com for further details on the position.

 

 

Best Regards,

 

Jim Smith

Business Development Mgr.

Tystar Corporation

7050 Lampson Ave.

Garden Grove, Calif. 92841

* Office: 310-781-9219 ext 216  

* Cell: 310-618-4018

* Fax: 310-781-9438

* jsmith at tystar.com <mailto:jsmith at tystar.com> 

 <http://www.tystar.com/> http://www.tystar.com

 

 

 

This Document is confidential and it is intended only for the addressee(s).
Any review, dissemination, distribution, or copying of this message by
persons or entities other than the intended recipient is strictly
prohibited. 

 

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From khbeis at uw.edu  Thu Apr  6 08:16:57 2017
From: khbeis at uw.edu (Michael Khbeis)
Date: Thu, 6 Apr 2017 07:16:57 -0500
Subject: [labnetwork] Plea for Peer Review - Point of Use Abatement
	(pyrophoric) systems
Message-ID: <15C3AC99-A75D-4E3F-85FC-8EDD5873CE4E@uw.edu>

Colleagues,

I continue to rely on and value your assistance in making the case or finding alternative resolution to issues imposed by unilateral decisions my campus construction folks are making and forcing upon us. Most recently, an 11th hour submittal of this EDOC local abatement unit (3-4 in total - see operating manual attachment) in lieu of running 5 - 1.5" forelines from the pumps to the existing CDO burn box. These units mix air into the effluent stream to facilitate pyrolysis and collect the dust until they clog at which time, my personnel are supposed to wear full PPE and respiratory protection and open up and scrape, vacuum, and even chisel the inside of the boxes clean. As per the attached manual, all the constituents would be considered hazardous. 

My issues are that the construction folks and this vendor haven't done a thorough hazard review. We are running diborane, phosphine, and MOCVD precursors in addition to silane. 

I am concerned about scraping phosphine residue as when I was a HAZMAT tech, I personally experienced spontaneous combustion when scraping phosphorus residue from an implanter (and simultaneously experienced the ill effects of when people don't review potential hazards before sending people into harms way). 

Furthermore, the MOCVD precursors are particularly nasty - for example I watched a used VCR gasket that was exposed to CUPRASELECT spontaneously start to fizz, corrode, and jump around on the base of the tool as soon as it was exposed to air. Now this proposal suggests that we purposely expose this material to air. The vendor doesn't even have a list of the liquid precursors we are using - because they didn't even request it to do a hazard review. 

Finally, even if I get my folks HAZWOPR certified to do abatement, have them fully geared, the units are open to my service chase and would potentially have these hazardous dusts in the recirculating air flow path. When I agreed to localized abatement - I meant something like an Edwards GRC that has a cartridge that captures the byproducts not something that hangs onto it and dumps it out on the floor once it clogs and we open it. 

Finally, the vendor claims it would require service about once every 6 months but that of course we would need to establish a statistical idea of how often they need service based on our use. Given that in the recent past, we clogged a foreline in <2 years by sharing with multiple tools (so silane and oxygen were doing this in the unions), I'm assuming that we will be generating a decent amount of sand and likely need to clean out more often. Even then, if I use the 6 month PM figure - that's 8 HAZMAT remediations a year. If we hire out a company like Clean Harbors in lieu of putting my staff in harms way - that's a serious additional expense we would have to adsorb. 

I certainly don't want to be close minded so if you have experience with these or similar units and can enlighten me on the realistic operating and mitigation conditions, I'd be happy to hear the feedback. 

Most gratefully, 




Dr. Michael Khbeis
Washington Nanofab Facility
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(C) 443.254.5192
khbeis at uw.edu
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From myoung6 at nd.edu  Thu Apr  6 09:03:55 2017
From: myoung6 at nd.edu (Mike Young)
Date: Thu, 6 Apr 2017 09:03:55 -0400
Subject: [labnetwork] Blisters on PMMA resists
In-Reply-To: <BY2PR0201MB07425CBB506FE5369EC12B66B00D0@BY2PR0201MB0742.namprd02.prod.outlook.com>
References: <BY2PR0201MB07425CBB506FE5369EC12B66B00D0@BY2PR0201MB0742.namprd02.prod.outlook.com>
Message-ID: <82558C06-DE83-4FFB-86AD-B572CDA6F3C8@nd.edu>

Hi Shiva. We had this problem a while back. Turned out to be poor thermal contact between the substrate and its mount in the evaporator - we had to tighten the mount springs. The PMMA is getting too hot!

Good luck!

--Mike

> On Apr 5, 2017, at 10:02 PM, Shivakumar Bhaskaran <bshiva at stanford.edu> wrote:
> 
> Hi All,
>  
> We are getting blisters or metal film peeling off when depositing metals (Ti/Au/Al) on PMMA resists using EBeam Evaporation.
>  
> Did anyone had this issue in your EBeam Evaporation tool. If so how did you fix this?
>  
> -thanks
> -Shiva
>  
> SNSF
> http://snsf.stanford.edu/ <http://snsf.stanford.edu/>
>  
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork <https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork>
-- 
Michael P. Young                                (574) 631-3268 (office)
Nanofabrication Specialist                      (574) 631-4393 (fax)
Department of Electrical Engineering            (765) 637-3784 (cell)
University of Notre Dame                         mike.young at nd.edu
B-38 Stinson-Remick Hall
Notre Dame, IN 46556-5637

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From jguo5 at Central.UH.EDU  Thu Apr  6 10:33:07 2017
From: jguo5 at Central.UH.EDU (Guo, Jing)
Date: Thu, 6 Apr 2017 09:33:07 -0500
Subject: [labnetwork] CoFeO and BaTiO sputtering
Message-ID: <B721B120-00E9-4775-AF1E-391FE271DE5D@central.uh.edu>

Good morning,

Does anyone have experience with sputtering CoFeO and BaTiO? Is it possible to reactive sputter those materials? And any issues to worry about?
Thanks.

Best Regards,

Jing


Research Lab Supervisor
Nanofabrication Facility
University of Houston
NANOFABRICATION FACILITY
3517 CULLEN BLVD, RM 1011
HOUSTON TX  77204-5062
Phone:  832-842-8822
Email:  jguo5 at central.uh.edu<mailto:jguo5 at central.uh.edu>
Web:  www.uh.edu/nanofab<http://www.uh.edu/nanofab>
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From price.798 at osu.edu  Thu Apr  6 09:31:44 2017
From: price.798 at osu.edu (Price, Aimee)
Date: Thu, 6 Apr 2017 13:31:44 +0000
Subject: [labnetwork] Blisters on PMMA resists
In-Reply-To: <BY2PR0201MB07425CBB506FE5369EC12B66B00D0@BY2PR0201MB0742.namprd02.prod.outlook.com>
References: <BY2PR0201MB07425CBB506FE5369EC12B66B00D0@BY2PR0201MB0742.namprd02.prod.outlook.com>
Message-ID: <83583687862B8444A85296A4944147DF95553943@CIO-TNC-D2MBX03.osuad.osu.edu>

Hi Shiva,
I believe we've had a thread on this subject in the last year or so.  Can someone remind me how to find the old/archived threads (or do we just look in our email history)?

Past that, we have had this several different times on a couple different evaporators, almost always with Ti/Au or Ni/Au ...  Assuming we've baked the PMMA sufficiently it appears to be heating, though we've tried thermal dots alongside and not found very high temps.  Our solution has been to slow the deposition rate and put a "wait" step in during thick Au, Ni, sometimes Pt steps.  The rate we use is 1-2A/s in most cases and the wait times vary but are usually halfway through the Au step.

Lastly, we have a lot of people working with piezoelectric materials and this happens sometimes with those.  That's a separate topic.  I'm assuming you are working with more "standard" semiconductor substrates and the issue is caused by the metal/PMMA not the substrate itself?

Feel free to reach out to me off-line at price.798 at osu.edu<mailto:price.798 at osu.edu> if you want more details.  We did a lot of work with this at two different times, about 3 years ago and 10 years ago.  We even had students travel back to UlUC to use their evaporator when we were diagnosing this issue the first time.

Best of luck.

Aimee

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran
Sent: Wednesday, April 05, 2017 10:03 PM
To: LabNet (labnetwork at mtl.mit.edu)
Subject: [labnetwork] Blisters on PMMA resists

Hi All,

We are getting blisters or metal film peeling off when depositing metals (Ti/Au/Al) on PMMA resists using EBeam Evaporation.

Did anyone had this issue in your EBeam Evaporation tool. If so how did you fix this?

-thanks
-Shiva

SNSF
http://snsf.stanford.edu/

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From tbritton at criticalsystemsinc.com  Thu Apr  6 12:11:51 2017
From: tbritton at criticalsystemsinc.com (Tom Britton)
Date: Thu, 6 Apr 2017 16:11:51 +0000
Subject: [labnetwork] Plea for Peer Review - Point of Use
	Abatement	(pyrophoric) systems
In-Reply-To: <15C3AC99-A75D-4E3F-85FC-8EDD5873CE4E@uw.edu>
References: <15C3AC99-A75D-4E3F-85FC-8EDD5873CE4E@uw.edu>
Message-ID: <MWHPR14MB121680231002A6180356C049A00D0@MWHPR14MB1216.namprd14.prod.outlook.com>

Hi Michael,

You should really look at a dry bed system for this. The Jupiter Callisto is used by many of your fellow Universities and doesn?t need to be cleaned out. You run to it until the canister tells you it is time for a change, and then you wheel it out and wheel in a new one. Veolia or Clean Harbors can take pick these up and incinerate them for you. No operator exposure, minimal utilities, no water or fuel. The canisters now have a DOT rating on them so you can ship them on a pallet without putting them in a hazardous waste container first.

I can call you to discuss if you would like.

Thanks sir,

Tom

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208-890-1417
Office: 877-572-5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

[logo for email signature png]

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis
Sent: Thursday, April 06, 2017 6:17 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Plea for Peer Review - Point of Use Abatement (pyrophoric) systems

Colleagues,

I continue to rely on and value your assistance in making the case or finding alternative resolution to issues imposed by unilateral decisions my campus construction folks are making and forcing upon us. Most recently, an 11th hour submittal of this EDOC local abatement unit (3-4 in total - see operating manual attachment) in lieu of running 5 - 1.5" forelines from the pumps to the existing CDO burn box. These units mix air into the effluent stream to facilitate pyrolysis and collect the dust until they clog at which time, my personnel are supposed to wear full PPE and respiratory protection and open up and scrape, vacuum, and even chisel the inside of the boxes clean. As per the attached manual, all the constituents would be considered hazardous.

My issues are that the construction folks and this vendor haven't done a thorough hazard review. We are running diborane, phosphine, and MOCVD precursors in addition to silane.

I am concerned about scraping phosphine residue as when I was a HAZMAT tech, I personally experienced spontaneous combustion when scraping phosphorus residue from an implanter (and simultaneously experienced the ill effects of when people don't review potential hazards before sending people into harms way).

Furthermore, the MOCVD precursors are particularly nasty - for example I watched a used VCR gasket that was exposed to CUPRASELECT spontaneously start to fizz, corrode, and jump around on the base of the tool as soon as it was exposed to air. Now this proposal suggests that we purposely expose this material to air. The vendor doesn't even have a list of the liquid precursors we are using - because they didn't even request it to do a hazard review.

Finally, even if I get my folks HAZWOPR certified to do abatement, have them fully geared, the units are open to my service chase and would potentially have these hazardous dusts in the recirculating air flow path. When I agreed to localized abatement - I meant something like an Edwards GRC that has a cartridge that captures the byproducts not something that hangs onto it and dumps it out on the floor once it clogs and we open it.

Finally, the vendor claims it would require service about once every 6 months but that of course we would need to establish a statistical idea of how often they need service based on our use. Given that in the recent past, we clogged a foreline in <2 years by sharing with multiple tools (so silane and oxygen were doing this in the unions), I'm assuming that we will be generating a decent amount of sand and likely need to clean out more often. Even then, if I use the 6 month PM figure - that's 8 HAZMAT remediations a year. If we hire out a company like Clean Harbors in lieu of putting my staff in harms way - that's a serious additional expense we would have to adsorb.

I certainly don't want to be close minded so if you have experience with these or similar units and can enlighten me on the realistic operating and mitigation conditions, I'd be happy to hear the feedback.

Most gratefully,

Dr. Michael Khbeis
Washington Nanofab Facility
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101<tel:206.543.5101>
(C) 443.254.5192<tel:443.254.5192>
khbeis at uw.edu<mailto:khbeis at uw.edu>
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From boning at mtl.mit.edu  Thu Apr  6 13:29:18 2017
From: boning at mtl.mit.edu (Duane Boning)
Date: Thu, 6 Apr 2017 13:29:18 -0400
Subject: [labnetwork] Archive and search on old labnetwork posts
In-Reply-To: <83583687862B8444A85296A4944147DF95553943@CIO-TNC-D2MBX03.osuad.osu.edu>
References: <BY2PR0201MB07425CBB506FE5369EC12B66B00D0@BY2PR0201MB0742.namprd02.prod.outlook.com>
 <83583687862B8444A85296A4944147DF95553943@CIO-TNC-D2MBX03.osuad.osu.edu>
Message-ID: <0ae3b3a3-8573-a467-0b2a-3021075fa0ba@mtl.mit.edu>

Hi All,

In response to Aimee's question below, the labnetwork archives can be 
found at:

https://www-mtl.mit.edu/pipermail/labnetwork/

They are not easily searchable in the standard Mailman format at that 
link, but we've also enabled them to be indexed by existing search 
engines. I've found Google searches of the form "[labnetwork] whatever 
my topic is" usually works to find previous labnetwork posts.

Your moderator,
/Duane
-------
Duane S. Boning
Clarence J. LeBel Professor, Electrical Engineering and Computer Science
Associate Director, MTL Microsystems Technology Laboratories
MIT, Room 39-415, Cambridge, MA 02139
Phone: 617-253-0931, boning at mtl.mit.edu

On 4/6/2017 9:31 AM, Price, Aimee wrote:
>
> Hi Shiva,
>
> I believe we?ve had a thread on this subject in the last year or so.  
> Can someone remind me how to find the old/archived threads (or do we 
> just look in our email history)?
>
[...]

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From mark.chiappa at ntnu.no  Thu Apr  6 13:37:19 2017
From: mark.chiappa at ntnu.no (Mark Giulio Chiappa)
Date: Thu, 6 Apr 2017 17:37:19 +0000
Subject: [labnetwork] Blisters on PMMA resists
In-Reply-To: <83583687862B8444A85296A4944147DF95553943@CIO-TNC-D2MBX03.osuad.osu.edu>
References: <BY2PR0201MB07425CBB506FE5369EC12B66B00D0@BY2PR0201MB0742.namprd02.prod.outlook.com>,
 <83583687862B8444A85296A4944147DF95553943@CIO-TNC-D2MBX03.osuad.osu.edu>
Message-ID: <BBD67B50-1992-4C1C-ABE9-2E2A376C5DF2@ntnu.no>

Hi Shiva,

I agree it's probably a thermal issue. When we had the same issue we experimented with PMMA from different batches, baking times and temps as well as thermally conductive mounts (mung etc) to no avail. Interestingly we solved the issue by increasing the deposition rate.

So it seems there is no definite answer I suppose it is dependant in the distance between source an substrate. I don't remember how much we experimented with wait times but that sounds like a good idea.

Kind regards
Mark.

Sent from my iPhone

On 6 Apr 2017, at 18:23, Price, Aimee <price.798 at osu.edu<mailto:price.798 at osu.edu>> wrote:

Hi Shiva,
I believe we've had a thread on this subject in the last year or so.  Can someone remind me how to find the old/archived threads (or do we just look in our email history)?

Past that, we have had this several different times on a couple different evaporators, almost always with Ti/Au or Ni/Au ...  Assuming we've baked the PMMA sufficiently it appears to be heating, though we've tried thermal dots alongside and not found very high temps.  Our solution has been to slow the deposition rate and put a "wait" step in during thick Au, Ni, sometimes Pt steps.  The rate we use is 1-2A/s in most cases and the wait times vary but are usually halfway through the Au step.

Lastly, we have a lot of people working with piezoelectric materials and this happens sometimes with those.  That's a separate topic.  I'm assuming you are working with more "standard" semiconductor substrates and the issue is caused by the metal/PMMA not the substrate itself?

Feel free to reach out to me off-line at price.798 at osu.edu<mailto:price.798 at osu.edu> if you want more details.  We did a lot of work with this at two different times, about 3 years ago and 10 years ago.  We even had students travel back to UlUC to use their evaporator when we were diagnosing this issue the first time.

Best of luck.

Aimee

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran
Sent: Wednesday, April 05, 2017 10:03 PM
To: LabNet (labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>)
Subject: [labnetwork] Blisters on PMMA resists

Hi All,

We are getting blisters or metal film peeling off when depositing metals (Ti/Au/Al) on PMMA resists using EBeam Evaporation.

Did anyone had this issue in your EBeam Evaporation tool. If so how did you fix this?

-thanks
-Shiva

SNSF
http://snsf.stanford.edu/

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From bshiva at stanford.edu  Thu Apr  6 13:51:48 2017
From: bshiva at stanford.edu (Shivakumar Bhaskaran)
Date: Thu, 6 Apr 2017 17:51:48 +0000
Subject: [labnetwork] Blisters on PMMA resists
In-Reply-To: <BBD67B50-1992-4C1C-ABE9-2E2A376C5DF2@ntnu.no>
References: <BY2PR0201MB07425CBB506FE5369EC12B66B00D0@BY2PR0201MB0742.namprd02.prod.outlook.com>,
 <83583687862B8444A85296A4944147DF95553943@CIO-TNC-D2MBX03.osuad.osu.edu>
 <BBD67B50-1992-4C1C-ABE9-2E2A376C5DF2@ntnu.no>
Message-ID: <BY2PR0201MB0742B240416A69D3F2DAECAAB00D0@BY2PR0201MB0742.namprd02.prod.outlook.com>

Yes, higher deposition rate helped in reducing the blisters or completely gone. However, some users want to do at a low deposition rate. Sometimes we start at low rate and change to a higher rate.

-thanks
-Shiva

From: Mark Giulio Chiappa [mailto:mark.chiappa at ntnu.no]
Sent: Thursday, April 6, 2017 10:37 AM
To: Price, Aimee <price.798 at osu.edu>
Cc: Shivakumar Bhaskaran <bshiva at stanford.edu>; LabNet (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Blisters on PMMA resists

Hi Shiva,

I agree it's probably a thermal issue. When we had the same issue we experimented with PMMA from different batches, baking times and temps as well as thermally conductive mounts (mung etc) to no avail. Interestingly we solved the issue by increasing the deposition rate.

So it seems there is no definite answer I suppose it is dependant in the distance between source an substrate. I don't remember how much we experimented with wait times but that sounds like a good idea.

Kind regards
Mark.

Sent from my iPhone

On 6 Apr 2017, at 18:23, Price, Aimee <price.798 at osu.edu<mailto:price.798 at osu.edu>> wrote:
Hi Shiva,
I believe we've had a thread on this subject in the last year or so.  Can someone remind me how to find the old/archived threads (or do we just look in our email history)?

Past that, we have had this several different times on a couple different evaporators, almost always with Ti/Au or Ni/Au ...  Assuming we've baked the PMMA sufficiently it appears to be heating, though we've tried thermal dots alongside and not found very high temps.  Our solution has been to slow the deposition rate and put a "wait" step in during thick Au, Ni, sometimes Pt steps.  The rate we use is 1-2A/s in most cases and the wait times vary but are usually halfway through the Au step.

Lastly, we have a lot of people working with piezoelectric materials and this happens sometimes with those.  That's a separate topic.  I'm assuming you are working with more "standard" semiconductor substrates and the issue is caused by the metal/PMMA not the substrate itself?

Feel free to reach out to me off-line at price.798 at osu.edu<mailto:price.798 at osu.edu> if you want more details.  We did a lot of work with this at two different times, about 3 years ago and 10 years ago.  We even had students travel back to UlUC to use their evaporator when we were diagnosing this issue the first time.

Best of luck.

Aimee

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran
Sent: Wednesday, April 05, 2017 10:03 PM
To: LabNet (labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>)
Subject: [labnetwork] Blisters on PMMA resists

Hi All,

We are getting blisters or metal film peeling off when depositing metals (Ti/Au/Al) on PMMA resists using EBeam Evaporation.

Did anyone had this issue in your EBeam Evaporation tool. If so how did you fix this?

-thanks
-Shiva

SNSF
http://snsf.stanford.edu/

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From eabelev at pitt.edu  Thu Apr  6 21:28:53 2017
From: eabelev at pitt.edu (Abelev, Esta)
Date: Fri, 7 Apr 2017 01:28:53 +0000
Subject: [labnetwork] sound absorbing wall panels
Message-ID: <SN2PR04MB2205ADCD644D1AD90B2E338DC50C0@SN2PR04MB2205.namprd04.prod.outlook.com>

Dear All,

We are looking for sound absorbing open cell foam wall panels for our JEOL 2100F STEM room.
Any recommendations for vendor and type.

Thanks, Esta

-----------------------
Esta Abelev, PhD
Technical Director, Petersen Institute of NanoScience and Engineering
University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261
412-383-4096 | eabelev at pitt.edu<mailto:eabelev at pitt.edu> | nano.pitt.edu<https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0>


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From Vincent.Luciani at nist.gov  Fri Apr  7 09:33:26 2017
From: Vincent.Luciani at nist.gov (Luciani, Vincent (Fed))
Date: Fri, 7 Apr 2017 13:33:26 +0000
Subject: [labnetwork] sound absorbing wall panels
In-Reply-To: <SN2PR04MB2205ADCD644D1AD90B2E338DC50C0@SN2PR04MB2205.namprd04.prod.outlook.com>
References: <SN2PR04MB2205ADCD644D1AD90B2E338DC50C0@SN2PR04MB2205.namprd04.prod.outlook.com>
Message-ID: <BLUPR09MB0899BA53FA9F3D0D4859F8D49C0C0@BLUPR09MB0899.namprd09.prod.outlook.com>

Hello Esta,

I am by no means an expert on this topic but I have one lesson learned I will share with you.  We have used  a type of open cell foam on our walls in our imaging labs and, by in large, it does what it is supposed to do with regard to sound absorption.  My only complaint is that it dries out and sheds particles.  Places like around doors, door handles, light switches or anywhere there may be friction or any place that one may come in contact with it will crack and shed.   The picture attached is an example of the foam where it is constantly touched.  If I were to do it again, I am sure this problem can be engineered away somehow.


Best,
Vince


Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886







From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta
Sent: Thursday, April 06, 2017 9:29 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] sound absorbing wall panels

Dear All,

We are looking for sound absorbing open cell foam wall panels for our JEOL 2100F STEM room.
Any recommendations for vendor and type.

Thanks, Esta

-----------------------
Esta Abelev, PhD
Technical Director, Petersen Institute of NanoScience and Engineering
University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261
412-383-4096 | eabelev at pitt.edu<mailto:eabelev at pitt.edu> | nano.pitt.edu<https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0>


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From spaolini at cns.fas.harvard.edu  Fri Apr  7 17:15:17 2017
From: spaolini at cns.fas.harvard.edu (Paolini, Steven)
Date: Fri, 7 Apr 2017 21:15:17 +0000
Subject: [labnetwork] sound absorbing wall panels
In-Reply-To: <SN2PR04MB2205ADCD644D1AD90B2E338DC50C0@SN2PR04MB2205.namprd04.prod.outlook.com>
References: <SN2PR04MB2205ADCD644D1AD90B2E338DC50C0@SN2PR04MB2205.namprd04.prod.outlook.com>
Message-ID: <BN6PR07MB320228A4E7699486D0F33569DF0C0@BN6PR07MB3202.namprd07.prod.outlook.com>

I'm sorry to not be able to offer any particular product but I would be very concerned with the product's ability to resist flame spread as defined by the NFPA. At the risk of bringing up a gruesome event, The Station night club tragedy in Connecticut some years ago was exacerbated by the fact that the acoustical foam attached to the walls in the stage area was quite flammable. I would venture to say that Federal, State, and local ordinances have more than likely been modified to include a restriction on any acoustic foam that is flammable or does not resist flame spread.
  Thanks for listening.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta
Sent: Thursday, April 06, 2017 9:29 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] sound absorbing wall panels

Dear All,

We are looking for sound absorbing open cell foam wall panels for our JEOL 2100F STEM room.
Any recommendations for vendor and type.

Thanks, Esta

-----------------------
Esta Abelev, PhD
Technical Director, Petersen Institute of NanoScience and Engineering
University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261
412-383-4096 | eabelev at pitt.edu<mailto:eabelev at pitt.edu> | nano.pitt.edu<https://urldefense.proofpoint.com/v2/url?u=https-3A__na01.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.nano.pitt.edu-252F-26data-3D01-257C01-257Ceabelev-2540pitt.edu-257C9f5bd58ba84940765cf308d4024fbe18-257C9ef9f489e0a04eeb87cc3a526112fd0d-257C1-26sdata-3D3KfbG5VbshqdoIAPxvX-252F2s1UeU7ultmBoZmm-252FaZ2Itc-253D-26reserved-3D0&d=CwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=GnG6WqEayk1cmAigJ2RuFVEsZnD7SA_k3Tkdvmm0KPc&s=EhKRFD4SXNsg9AxD7HbzjfkGrRre26v_cAyTFCOwYAE&e=>


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From steffen.8 at osu.edu  Mon Apr 10 10:53:58 2017
From: steffen.8 at osu.edu (Steffen, Paul)
Date: Mon, 10 Apr 2017 14:53:58 +0000
Subject: [labnetwork] sound absorbing wall panels
In-Reply-To: <BN6PR07MB320228A4E7699486D0F33569DF0C0@BN6PR07MB3202.namprd07.prod.outlook.com>
References: <SN2PR04MB2205ADCD644D1AD90B2E338DC50C0@SN2PR04MB2205.namprd04.prod.outlook.com>
 <BN6PR07MB320228A4E7699486D0F33569DF0C0@BN6PR07MB3202.namprd07.prod.outlook.com>
Message-ID: <EB1017E1ADE1B54A89F442083040105580831D5E@CIO-TNC-D2MBX04.osuad.osu.edu>

Esta,

When I was working for a company that made automated systems to load and unload packaged chips from burn-in boards, we had a noise issue from vibration resonances in the burn-in board elevator and used sound-absorbing foam from a company called EAR. It looks like they are a part of 3M now, https://earglobal.com/en/. I recall that they offered pretty decent technical support.

-Paul

[The Ohio State University]
Paul Steffen
Lab Manager
Institute for Materials Research Nanotech West Lab
100 Science Village, 1381 Kinnear Road, Columbus, OH 43212
614-688-3546 Office / 614-688-3379 Fax
steffen.8 at osu.edu<mailto:steffen.8 at osu.edu> nanotech.osu.edu<http://nanotech.osu.edu>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven
Sent: Friday, April 07, 2017 5:15 PM
To: Abelev, Esta <eabelev at pitt.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] sound absorbing wall panels

I'm sorry to not be able to offer any particular product but I would be very concerned with the product's ability to resist flame spread as defined by the NFPA. At the risk of bringing up a gruesome event, The Station night club tragedy in Connecticut some years ago was exacerbated by the fact that the acoustical foam attached to the walls in the stage area was quite flammable. I would venture to say that Federal, State, and local ordinances have more than likely been modified to include a restriction on any acoustic foam that is flammable or does not resist flame spread.
  Thanks for listening.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
www.cns.fas.harvard.edu<http://www.cns.fas.harvard.edu>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta
Sent: Thursday, April 06, 2017 9:29 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] sound absorbing wall panels

Dear All,

We are looking for sound absorbing open cell foam wall panels for our JEOL 2100F STEM room.
Any recommendations for vendor and type.

Thanks, Esta

-----------------------
Esta Abelev, PhD
Technical Director, Petersen Institute of NanoScience and Engineering
University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261
412-383-4096 | eabelev at pitt.edu<mailto:eabelev at pitt.edu> | nano.pitt.edu<https://urldefense.proofpoint.com/v2/url?u=https-3A__na01.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.nano.pitt.edu-252F-26data-3D01-257C01-257Ceabelev-2540pitt.edu-257C9f5bd58ba84940765cf308d4024fbe18-257C9ef9f489e0a04eeb87cc3a526112fd0d-257C1-26sdata-3D3KfbG5VbshqdoIAPxvX-252F2s1UeU7ultmBoZmm-252FaZ2Itc-253D-26reserved-3D0&d=CwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=GnG6WqEayk1cmAigJ2RuFVEsZnD7SA_k3Tkdvmm0KPc&s=EhKRFD4SXNsg9AxD7HbzjfkGrRre26v_cAyTFCOwYAE&e=>


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From ACarlin at sheaumann.com  Tue Apr 11 09:18:45 2017
From: ACarlin at sheaumann.com (Andrew Carlin)
Date: Tue, 11 Apr 2017 09:18:45 -0400
Subject: [labnetwork] Benchmark SM8000 lid sealer
Message-ID: <F635A8EC4006C342A455CCF52A033B3001517BC7@dc2.Sheaumann.local>

Hello,

 

  We have an old benchmark SM8000 lid sealer, which was still in use
until the computer hard drive failed a few weeks ago.  The hard drive
has been replaced, however we do NOT have a backup of the software.  We
have reached out to the company, but they don't have anyone with
knowledge of these units.  Does anyone have access to one of these units
and would be willing to make a copy of the software?

 

Regards,

Andrew

 

Andrew Carlin

Senior Semiconductor Laser Designer

 

  

Sheaumann Laser, Inc.

45 Bartlett Street

Marlborough, MA 01752 USA

Tel: 508-970-0600  ext. 267

Web: www.sheaumann.com <http://www.sheaumann.com/> 

e-mail: acarlin at sheaumann.com <mailto:gsousa at sheaumann.com> 

 

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From stieg at cnsi.ucla.edu  Tue Apr 11 11:48:04 2017
From: stieg at cnsi.ucla.edu (Stieg, Adam)
Date: Tue, 11 Apr 2017 15:48:04 +0000
Subject: [labnetwork] Perspectives on equipment management software
Message-ID: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>

Hi All,

We are in the process of reviewing our approach to managing reservations, access, billing, etc. for equipment throughout the CNSI at UCLA. To date, we have relied on a system developed in-house that is no longer viable. There is a significant push amongst the shared resources on campus toward iLabs. We have also begun looking into FOM (fomnetworks.com) as an alternative option. I know this may not be the best venue for a dialogue on the strengths/weaknesses of these specific solutions (or any other for that matter), but if any of you are willing to share your perspectives or experiences working with either of these vendors it would be greatly appreciated.

All the best,
Adam


Adam Z. Stieg Ph.D.
Associate Director, California NanoSystems Institute at UCLA
Director, Nano and Pico Characterization Laboratory
Technical Director, Integrated Systems Nanofabrication Cleanroom
(p) 310.206.2902
(e) stieg at cnsi.ucla.edu



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From Vincent.Luciani at nist.gov  Tue Apr 11 13:26:38 2017
From: Vincent.Luciani at nist.gov (Luciani, Vincent (Fed))
Date: Tue, 11 Apr 2017 17:26:38 +0000
Subject: [labnetwork] Cost of cleanroom air balancing
Message-ID: <BLUPR09MB08992622ABD3E2941DD158EF9C000@BLUPR09MB0899.namprd09.prod.outlook.com>

Hello All,

It is 85?F here in Gaithersburg, MD today and it has thinking about all the spring-time chores.

One of them I hope to get done is a complete air-rebalancing  of our cleanroom.  It is about 750 M2  (8000 Ft.2) of class 100 plus all chase space.
I know this comes in many flavors such as with or without 100% individual HEPA filter checks, certifications( if required) etc.
I am performing some market research in preparation for a solicitation.  Has anyone done this recently or have a relevant data point to add to my search?

Thanks,
Vince


Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886




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From michael.rooks at yale.edu  Tue Apr 11 16:54:58 2017
From: michael.rooks at yale.edu (Michael Rooks)
Date: Tue, 11 Apr 2017 16:54:58 -0400
Subject: [labnetwork] Perspectives on equipment management software
In-Reply-To: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
References: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
Message-ID: <58ED42A2.8080209@yale.edu>

You could also consider Badger, which is the commercial version of 
Coral. See badgerlms.com

--------------------------------
Michael Rooks
Yale Institute of Nanoscience and Quantum Engineering
nano.yale.edu <http://nano.yale.edu>



On 04/11/2017 11:48 AM, Stieg, Adam wrote:
>
> Hi All,
>
> We are in the process of reviewing our approach to managing 
> reservations, access, billing, etc. for equipment throughout the CNSI 
> at UCLA. To date, we have relied on a system developed in-house that 
> is no longer viable. There is a significant push amongst the shared 
> resources on campus toward iLabs. We have also begun looking into FOM 
> (fomnetworks.com) as an alternative option. I know this may not be the 
> best venue for a dialogue on the strengths/weaknesses of these 
> specific solutions (or any other for that matter), but if any of you 
> are willing to share your perspectives or experiences working with 
> either of these vendors it would be greatly appreciated.
>
> All the best,
>
> Adam
>
> __
>
> Adam Z. Stieg Ph.D.
>
> Associate Director, California NanoSystems Institute at UCLA
>
> Director, Nano and Pico Characterization Laboratory
>
> Technical Director, Integrated Systems Nanofabrication Cleanroom
>
> (p) 310.206.2902
>
> (e) stieg at cnsi.ucla.edu
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From julia.aebersold at louisville.edu  Tue Apr 11 17:15:34 2017
From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu)
Date: Tue, 11 Apr 2017 21:15:34 +0000
Subject: [labnetwork] Perspectives on equipment management software
In-Reply-To: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
References: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
Message-ID: <D84411B2FA8CBA42BC4868D5382CA1BB0155907211@exmbx17>

We use FOM at our facility and it is an economical package that serves our cleanroom well.

Cheers!

Julia Aebersold
Manager, Micro/Nano Technology Center
University of Louisville
2210 South Brook Street
Louisville, KY  40292
(502)852-1572

http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Stieg, Adam
Sent: Tuesday, April 11, 2017 11:48 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Perspectives on equipment management software

Hi All,

We are in the process of reviewing our approach to managing reservations, access, billing, etc. for equipment throughout the CNSI at UCLA. To date, we have relied on a system developed in-house that is no longer viable. There is a significant push amongst the shared resources on campus toward iLabs. We have also begun looking into FOM (fomnetworks.com) as an alternative option. I know this may not be the best venue for a dialogue on the strengths/weaknesses of these specific solutions (or any other for that matter), but if any of you are willing to share your perspectives or experiences working with either of these vendors it would be greatly appreciated.

All the best,
Adam


Adam Z. Stieg Ph.D.
Associate Director, California NanoSystems Institute at UCLA
Director, Nano and Pico Characterization Laboratory
Technical Director, Integrated Systems Nanofabrication Cleanroom
(p) 310.206.2902
(e) stieg at cnsi.ucla.edu<mailto:stieg at cnsi.ucla.edu>



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From ahad.syed at kaust.edu.sa  Wed Apr 12 03:02:24 2017
From: ahad.syed at kaust.edu.sa (Ahad Syed)
Date: Wed, 12 Apr 2017 07:02:24 +0000
Subject: [labnetwork] Perspectives on equipment management software
In-Reply-To: <58ED42A2.8080209@yale.edu>
References: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>,
 <58ED42A2.8080209@yale.edu>
Message-ID: <1491980543604.19601@kaust.edu.sa>

We use Badger at KAUST for the past 4 years and I must say it was one of our better investments. Brought down abuse considerably and enables us to pull reports almost instantly. We started using it at the Core Labs and the success has been such that the University is planning to implement it to all the labs.


All the best.

Ahad


--
Nanofabrication Core Lab
4700 King Abdullah University of Science and Technology
0250-WS02 Building 3, Thuwal 23955-6900, Kingdom of Saudi Arabia
Tel:+966 12 808 2348
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Michael Rooks <michael.rooks at yale.edu>
Sent: Tuesday, April 11, 2017 11:54 PM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Perspectives on equipment management software

You could also consider Badger, which is the commercial version of Coral. See badgerlms.com

--------------------------------
Michael Rooks
Yale Institute of Nanoscience and Quantum Engineering
nano.yale.edu<http://nano.yale.edu>



On 04/11/2017 11:48 AM, Stieg, Adam wrote:
Hi All,

We are in the process of reviewing our approach to managing reservations, access, billing, etc. for equipment throughout the CNSI at UCLA. To date, we have relied on a system developed in-house that is no longer viable. There is a significant push amongst the shared resources on campus toward iLabs. We have also begun looking into FOM (fomnetworks.com) as an alternative option. I know this may not be the best venue for a dialogue on the strengths/weaknesses of these specific solutions (or any other for that matter), but if any of you are willing to share your perspectives or experiences working with either of these vendors it would be greatly appreciated.

All the best,
Adam


Adam Z. Stieg Ph.D.
Associate Director, California NanoSystems Institute at UCLA
Director, Nano and Pico Characterization Laboratory
Technical Director, Integrated Systems Nanofabrication Cleanroom
(p) 310.206.2902
(e) stieg at cnsi.ucla.edu<mailto:stieg at cnsi.ucla.edu>






_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork



________________________________
This message and its contents including attachments are intended solely for the original recipient. If you are not the intended recipient or have received this message in error, please notify me immediately and delete this message from your computer system. Any unauthorized use or distribution is prohibited. Please consider the environment before printing this email.
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From aju-jugessur at uiowa.edu  Wed Apr 12 07:36:24 2017
From: aju-jugessur at uiowa.edu (Jugessur, Aju S)
Date: Wed, 12 Apr 2017 11:36:24 +0000
Subject: [labnetwork] Perspectives on equipment management software
In-Reply-To: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
References: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
Message-ID: <FEFF8A37-ECC7-4DB9-9770-2268A639ADA0@uiowa.edu>

Adam

We have just started using Bookitlab. We have
it customized for our needs. There are some
glitches but I do think it will be resolved.
I went with bookitlab mainly because they are
relatively inexpensive.

Let me know if you need more detailed
feedback.

Thanks

Aju Jugessur Ph.D.

Director, UI Microfabrication Facility


Sent from my iPhone

On Apr 11, 2017, at 3:55 PM, Stieg, Adam <stieg at cnsi.ucla.edu<mailto:stieg at cnsi.ucla.edu>> wrote:

Hi All,

We are in the process of reviewing our approach to managing reservations, access, billing, etc. for equipment throughout the CNSI at UCLA. To date, we have relied on a system developed in-house that is no longer viable. There is a significant push amongst the shared resources on campus toward iLabs. We have also begun looking into FOM (fomnetworks.com<http://fomnetworks.com>) as an alternative option. I know this may not be the best venue for a dialogue on the strengths/weaknesses of these specific solutions (or any other for that matter), but if any of you are willing to share your perspectives or experiences working with either of these vendors it would be greatly appreciated.

All the best,
Adam


Adam Z. Stieg Ph.D.
Associate Director, California NanoSystems Institute at UCLA
Director, Nano and Pico Characterization Laboratory
Technical Director, Integrated Systems Nanofabrication Cleanroom
(p) 310.206.2902
(e) stieg at cnsi.ucla.edu<mailto:stieg at cnsi.ucla.edu>



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From sandrine at umich.edu  Wed Apr 12 08:04:03 2017
From: sandrine at umich.edu (Sandrine Martin)
Date: Wed, 12 Apr 2017 12:04:03 +0000
Subject: [labnetwork] Perspectives on equipment management software
In-Reply-To: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
References: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
Message-ID: <CAMJO2NCSzUt912QrhJ8g=dBki1WX=5cBUhaoum-67yyFH0GdUw@mail.gmail.com>

Hello Adam,

We are in a very similar situation at the University of Michigan. Following
some discussions at last year's UGIM, we have also looked at some of these
(iLab is already used here at the medical school, FOM is implemented in the
electron microscopy/characterization facility). We have also looked at
Stratocore PPMS.

Several universities are also pushing for compliance issues to be
considered.  We have not yet made our decision but here are some of the key
points that we are considering:

1- Scheduler and equipment interlocks

2- Administration/configuration
- role management (including tool-specific)
- web/mobile compatibility
- cost model configuration (room + tool charges, consumables charged with
certain tools)
- support of processing services

3- Documentation (tool manuals, safety/lab training)

4- Communication
- to users/staff/PIs/admins (opt in, opt out, preferences)
- tool status and ticket system for request tracking
- direct communication between users (notification of tool down after hours
for instance)

5- Budget and financial tracking
- placing external orders by staff (with electronic management approval)
- expenses assigned to specific tools / lab budget categories
- labor hours assigned to specific tools / lab budget categories
- revenue tracking per tool

6- Reporting
- tool utilization
- revenue, expenses by category/user groups/tools
- for staff, admin, users, PIs

 7- Support
- ongoing operation support
- long term reliability (code development/ database structure for instance)

9- External add-ons / interfaces with facility-specific applications


Good luck!!
Sandrine


On Tue, Apr 11, 2017 at 16:48 Stieg, Adam <stieg at cnsi.ucla.edu> wrote:

Hi All,



We are in the process of reviewing our approach to managing reservations,
access, billing, etc. for equipment throughout the CNSI at UCLA. To date,
we have relied on a system developed in-house that is no longer viable.
There is a significant push amongst the shared resources on campus toward
iLabs. We have also begun looking into FOM (fomnetworks.com) as an
alternative option. I know this may not be the best venue for a dialogue on
the strengths/weaknesses of these specific solutions (or any other for that
matter), but if any of you are willing to share your perspectives or
experiences working with either of these vendors it would be greatly
appreciated.



All the best,

Adam






Adam Z. Stieg Ph.D.

Associate Director, California NanoSystems Institute at UCLA

Director, Nano and Pico Characterization Laboratory

Technical Director, Integrated Systems Nanofabrication Cleanroom

(p) 310.206.2902

(e) stieg at cnsi.ucla.edu






_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

-- 

Sandrine Martin, Ph.D.

University of Michigan

LNF Managing Director

1246D EECS, 1301 Beal Ave

Ann Arbor, MI 48109

Cell 734-277-2365

Fax 734-647-1781

www.LNF.umich.edu <http://www.lnf.umich.edu/>

@LurieNanofab
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From na2661 at columbia.edu  Wed Apr 12 09:07:06 2017
From: na2661 at columbia.edu (Nava Ariel-Sternberg)
Date: Wed, 12 Apr 2017 09:07:06 -0400
Subject: [labnetwork] Perspectives on equipment management software
In-Reply-To: <58ED42A2.8080209@yale.edu>
References: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
 <58ED42A2.8080209@yale.edu>
Message-ID: <028a01d2b38d$b01a9b20$104fd160$@columbia.edu>

We also use Badger and are happy with it. 

 

-Nava

 

 

Nava Ariel-Sternberg, Ph.D.

Director of CNI Shared Facilities

Columbia University

530 w120th st., NY 10027

Room 1015/MC 8903

Office: 212-854-9927

Cell: 201-562-7600

 

?

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Rooks
Sent: Tuesday, April 11, 2017 4:55 PM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Perspectives on equipment management software

 

You could also consider Badger, which is the commercial version of Coral. See badgerlms.com


--------------------------------
Michael Rooks 
Yale Institute of Nanoscience and Quantum Engineering 
nano.yale.edu <http://nano.yale.edu>  




On 04/11/2017 11:48 AM, Stieg, Adam wrote:

Hi All,

 

We are in the process of reviewing our approach to managing reservations, access, billing, etc. for equipment throughout the CNSI at UCLA. To date, we have relied on a system developed in-house that is no longer viable. There is a significant push amongst the shared resources on campus toward iLabs. We have also begun looking into FOM (fomnetworks.com) as an alternative option. I know this may not be the best venue for a dialogue on the strengths/weaknesses of these specific solutions (or any other for that matter), but if any of you are willing to share your perspectives or experiences working with either of these vendors it would be greatly appreciated.

 

All the best,

Adam

                                                                                                           

 

Adam Z. Stieg Ph.D.                                                

Associate Director, California NanoSystems Institute at UCLA

Director, Nano and Pico Characterization Laboratory

Technical Director, Integrated Systems Nanofabrication Cleanroom

(p) 310.206.2902

(e) stieg at cnsi.ucla.edu <mailto:stieg at cnsi.ucla.edu> 

 

 

 






_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu> 
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

 

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From stieg at cnsi.ucla.edu  Wed Apr 12 13:07:26 2017
From: stieg at cnsi.ucla.edu (Stieg, Adam)
Date: Wed, 12 Apr 2017 17:07:26 +0000
Subject: [labnetwork] Perspectives on equipment management software
In-Reply-To: <028a01d2b38d$b01a9b20$104fd160$@columbia.edu>
References: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
 <58ED42A2.8080209@yale.edu> <028a01d2b38d$b01a9b20$104fd160$@columbia.edu>
Message-ID: <DA7F4783-C110-4FF6-8DC8-CAC1C101939E@cnsi.ucla.edu>

Thanks to everyone for the robust response to my inquiry. As expected, the scope of variables that need be addressed is only matched by the breadth of pespective on the best approach to do so. Part of the challenge we face, which I failed to mention in my initial message, stems from the fact that we house 6 different shared faciltiis at CNSI that range from optical/electron/scanning probe microscopy to cleanroom operations and high-throughput screening. We currently use a single LMS solution for all these labs as there is extensive overlap in the user base of each, with a total of over 5000 active accounts and 1000 unique users per year. Nevertheless, I greatly aprpeciate all the information provided by this channel and will be reaching out to those of you who have provided specific feedback of interest.

Kind regards,
Adam

On 04/11/2017 11:48 AM, Stieg, Adam wrote:
Hi All,

We are in the process of reviewing our approach to managing reservations, access, billing, etc. for equipment throughout the CNSI at UCLA. To date, we have relied on a system developed in-house that is no longer viable. There is a significant push amongst the shared resources on campus toward iLabs. We have also begun looking into FOM (fomnetworks.com) as an alternative option. I know this may not be the best venue for a dialogue on the strengths/weaknesses of these specific solutions (or any other for that matter), but if any of you are willing to share your perspectives or experiences working with either of these vendors it would be greatly appreciated.

All the best,
Adam


Adam Z. Stieg Ph.D.
Associate Director, California NanoSystems Institute at UCLA
Director, Nano and Pico Characterization Laboratory
Technical Director, Integrated Systems Nanofabrication Cleanroom
(p) 310.206.2902
(e) stieg at cnsi.ucla.edu<mailto:stieg at cnsi.ucla.edu>








_______________________________________________

labnetwork mailing list

labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From rmorrison at draper.com  Thu Apr 13 10:44:52 2017
From: rmorrison at draper.com (Morrison, Richard H., Jr.)
Date: Thu, 13 Apr 2017 14:44:52 +0000
Subject: [labnetwork] Cost of cleanroom air balancing
In-Reply-To: <BLUPR09MB08992622ABD3E2941DD158EF9C000@BLUPR09MB0899.namprd09.prod.outlook.com>
References: <BLUPR09MB08992622ABD3E2941DD158EF9C000@BLUPR09MB0899.namprd09.prod.outlook.com>
Message-ID: <321224d4cf7d4b2f92c7d1912f6c6f80@draper.com>

HI,


I had it done last year a complete rebalance of the Draper Cleanroom complex, about 15000 sqft spread over 3 floors involing fans on 2 roof tops it was around $29K. It took an entire week to get done. Balance AHU, 8 exhaust fans, makeup dapers and equipment dampers. Equipment was about 75 tools.


Rick


________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Luciani, Vincent (Fed) <Vincent.Luciani at nist.gov>
Sent: Tuesday, April 11, 2017 1:26:38 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cost of cleanroom air balancing

Hello All,

It is 85?F here in Gaithersburg, MD today and it has thinking about all the spring-time chores.

One of them I hope to get done is a complete air-rebalancing  of our cleanroom.  It is about 750 M2  (8000 Ft.2) of class 100 plus all chase space.
I know this comes in many flavors such as with or without 100% individual HEPA filter checks, certifications( if required) etc.
I am performing some market research in preparation for a solicitation.  Has anyone done this recently or have a relevant data point to add to my search?

Thanks,
Vince


Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886




________________________________
Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
________________________________
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From Thomas_Ferraguto at uml.edu  Thu Apr 13 13:47:54 2017
From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas)
Date: Thu, 13 Apr 2017 17:47:54 +0000
Subject: [labnetwork] Card Readers for equipment interlocks
Message-ID: <9636e814204a4da4be4e627551a91881@uml.edu>

Colleagues,

Has anyone integrated RFID card readers to their equipment interlocks. I'd like to set up a system where the "Tap in" & "Tap Out" ID the user on opens the interlock on the tool.

Thanks in advance....

Best Regards...

Tom Ferraguto


Thomas S. Ferraguto
Saab ETIC Nanofabrication Laboratory Director
Saab ETIC Building Director
1 University Avenue
Lowell MA 01854
Mobile 617-755-0910
Land 978-934-1809
Fax 978-934-1014




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From mike.young at nd.edu  Fri Apr 14 10:10:26 2017
From: mike.young at nd.edu (Mike Young)
Date: Fri, 14 Apr 2017 10:10:26 -0400
Subject: [labnetwork] Card Readers for equipment interlocks
In-Reply-To: <9636e814204a4da4be4e627551a91881@uml.edu>
References: <9636e814204a4da4be4e627551a91881@uml.edu>
Message-ID: <953e1093-b5a0-2e9e-e1c8-8be6d56042f9@nd.edu>

Hi Tom. We use Coral, along with a mix of internet-based interlocks. We 
also use RFID cleanroom badges. I have made a first-cut implementation 
of this for one of our resist spinners, using a Raspberry Pi and an RFID 
reader. It's a bit of a kludge, I think I can do better, but it is 
functional. I'd extend the implementation to other tools also, if the 
darn readers weren't so expensive (~$100 each)!

What I have not addressed, is how to do this for equipment which 
collects run data at disable. I suppose if coral could download the run 
data from the tool at disable, via SECS or some other interface... 
That's how the Big Boys do it...

Good luck, and contact me offline if you'd like more of the gory details.

--Mike


On 4/13/2017 1:47 PM, Ferraguto, Thomas wrote:
>
> Colleagues,
>
> Has anyone integrated RFID card readers to their equipment interlocks. 
> I?d like to set up a system where the ?Tap in? & ?Tap Out? ID the user 
> on opens the interlock on the tool.
>
> Thanks in advance?.
>
> Best Regards?
>
> Tom Ferraguto
>
> Thomas S. Ferraguto
>
> Saab ETIC Nanofabrication Laboratory Director
>
> Saab ETIC Building Director
>
> 1 University Avenue
>
> Lowell MA 01854
>
> Mobile 617-755-0910
>
> Land 978-934-1809
>
> Fax 978-934-1014
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

-- 
Michael P. Young                                (574) 631-3268 (office)
Nanofabrication Specialist                      (574) 631-4393 (fax)
Department of Electrical Engineering            (765) 637-3784 (cell)
University of Notre Dame                         mike.young at nd.edu
B-38 Stinson-Remick Hall
Notre Dame, IN 46556-5637

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From Vincent.Luciani at nist.gov  Fri Apr 14 13:32:46 2017
From: Vincent.Luciani at nist.gov (Luciani, Vincent (Fed))
Date: Fri, 14 Apr 2017 17:32:46 +0000
Subject: [labnetwork] Perspectives on equipment management software
In-Reply-To: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
References: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
Message-ID: <CY1PR09MB09057040CA17E344AC54B2BA9C050@CY1PR09MB0905.namprd09.prod.outlook.com>

Hello Adam and LabNetwork,

Here at CNST we have written our own program called NEMO (NanoFab Equipment Management Operation).   Staff and users are very pleased with it.  It was written with Python and uses Django (a high-level Python Web framework).  We are currently working on packaging it to make it available to others but release is still months away.   I?ll post updates on this network as we get closer to release.  If you would like more details let me know and I will add you to our mailing list.

Thanks,
Vince


Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886










From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Stieg, Adam
Sent: Tuesday, April 11, 2017 11:48 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Perspectives on equipment management software

Hi All,

We are in the process of reviewing our approach to managing reservations, access, billing, etc. for equipment throughout the CNSI at UCLA. To date, we have relied on a system developed in-house that is no longer viable. There is a significant push amongst the shared resources on campus toward iLabs. We have also begun looking into FOM (fomnetworks.com) as an alternative option. I know this may not be the best venue for a dialogue on the strengths/weaknesses of these specific solutions (or any other for that matter), but if any of you are willing to share your perspectives or experiences working with either of these vendors it would be greatly appreciated.

All the best,
Adam


Adam Z. Stieg Ph.D.
Associate Director, California NanoSystems Institute at UCLA
Director, Nano and Pico Characterization Laboratory
Technical Director, Integrated Systems Nanofabrication Cleanroom
(p) 310.206.2902
(e) stieg at cnsi.ucla.edu<mailto:stieg at cnsi.ucla.edu>



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From info at fabsurplus.com  Sat Apr 15 02:47:27 2017
From: info at fabsurplus.com (Stephen Howe)
Date: Sat, 15 Apr 2017 08:47:27 +0200
Subject: [labnetwork] Perspectives on equipment management software
In-Reply-To: <CY1PR09MB09057040CA17E344AC54B2BA9C050@CY1PR09MB0905.namprd09.prod.outlook.com>
References: <86E466A1-90C6-408A-92EE-B84E097C432F@cnsi.ucla.edu>
 <CY1PR09MB09057040CA17E344AC54B2BA9C050@CY1PR09MB0905.namprd09.prod.outlook.com>
Message-ID: <1492238847.2354.11.camel@fabsurplus.com>

Dear Vincent,
My company is engaged in developing software which will allow us to
obtain and store technical data about equipment ?in an efficient way .
Therefore, I'd like to take this opportunity to reach out to make
contact with persons who are working in this area as we'd be interested
to explore ways of working together to achieve our goals.

	
	
	


?Yours sincerely,



Stephen Howe 

Company Owner

SDI
Fabsurplus Group



+1 830 388 1071 (Mobile)

+39
335 710 7756 (Mobile, Italy)



Skype: Stephencshowe

email:
info at fabsurplus.com



WWW.FABSURPLUS.COM



Facebook:
www.facebook.com/fabsurplus

Twitter:
http://twitter.com/fabsurplus

Google+:
https://plus.google.com/+Fabsurplus
On Fri, 2017-04-14 at 17:32 +0000, Luciani, Vincent (Fed) wrote:
> Hello Adam and LabNetwork,
> ?
> Here at CNST we have written our own program called NEMO (NanoFab
> Equipment Management Operation).? ?Staff and users are very pleased
> with it.? It was written with Python and uses Django (a high-level
> Python Web framework). ?We are currently working on packaging it to
> make it available to others but release is still months away.? ?I?ll
> post updates on this network as we get closer to release.? If you
> would like more details let me know and I will add you to our mailing
> list.
> ?
> Thanks,
> Vince
> ?
> ?
> Vincent K. Luciani
> NanoFab Manager
> Center for Nanoscale Science and Technology
> National Institute of Standards and Technology
> 100 Bureau Drive, MS 6201
> Gaithersburg, MD 20899-6200 USA
> +1-301-975-2886
> ?
> ?
> ?
> ?
> ?
> ?
> ?
> ?
> ?
> ?
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.m
> it.edu] On Behalf Of Stieg, Adam
> Sent: Tuesday, April 11, 2017 11:48 AM
> To: labnetwork at mtl.mit.edu
> Subject: [labnetwork] Perspectives on equipment management software
> ?
> Hi All,
> ?
> We are in the process of reviewing our approach to managing
> reservations, access, billing, etc. for equipment throughout the CNSI
> at UCLA. To date, we have relied on a system developed in-house that
> is no longer viable. There is a significant push amongst the shared
> resources on campus toward iLabs. We have also begun looking into FOM
> (fomnetworks.com) as an alternative option. I know this may not be
> the best venue for a dialogue on the strengths/weaknesses of these
> specific solutions (or any other for that matter), but if any of you
> are willing to share your perspectives or experiences working with
> either of these vendors it would be greatly appreciated.
> ?
> All the best,
> Adam
> ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ?????????? ? ? ? ? ? ?
> ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ??
> ?
> Adam Z. Stieg Ph.D. ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ?
> Associate Director,?California NanoSystems Institute at UCLA
> Director, Nano and Pico Characterization Laboratory
> Technical Director, Integrated Systems Nanofabrication Cleanroom
> (p) 310.206.2902
> (e) stieg at cnsi.ucla.edu
> ?
> ?
> ?
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From vamsinittala at gmail.com  Mon Apr 17 05:17:14 2017
From: vamsinittala at gmail.com (N P VAMSI KRISHNA)
Date: Mon, 17 Apr 2017 14:47:14 +0530
Subject: [labnetwork] Diamatix DMP-2831 timing belt
Message-ID: <CA+SWD1UAMmZHLQwzP7PRA1peXMbKD5qNw2a1m7zGei4TeND+gw@mail.gmail.com>

Dear All,

We have a Diamatix Ink jet printer  DMP-2831. The timing belt of it gone
bad and the vendors are demanding too high for the belt replacement.
Does any one have the manual to replace the timing belt? Also kindly let me
know if any one had replaced it.


-- 
--
Thanks & Best Regards,
-----------------
*N.P.Vamsi Krishna*

*?Micro Nano Fluidics lab?*Center for Nano Science and Engineering (CeNSE),
Indian Institute of Science(IISc), Bangalore.
INDIA-560012

?Educating the mind without educating the heart is no education at all.?
-Aristotle
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From dylan.klomparens at nist.gov  Tue Apr 18 10:33:28 2017
From: dylan.klomparens at nist.gov (Klomparens, Dylan L. (Fed))
Date: Tue, 18 Apr 2017 14:33:28 +0000
Subject: [labnetwork] Card Readers for equipment interlocks
In-Reply-To: <953e1093-b5a0-2e9e-e1c8-8be6d56042f9@nd.edu>
References: <9636e814204a4da4be4e627551a91881@uml.edu>
 <953e1093-b5a0-2e9e-e1c8-8be6d56042f9@nd.edu>
Message-ID: <BY1PR09MB0823CDB14355FE56A78338ECE4190@BY1PR09MB0823.namprd09.prod.outlook.com>

Hi Tom,

CNST has "tap in/out" system to control physical access to the cleanroom and tool interlocks. We use wall mounted Windows tablets that communicate with our lab management software, NEMO. I've attached a picture and parts list of one of the entryway tablets. I have received many positive comments about this system, the users really enjoy the convenience and speed of logging in. It's been working well for over a year now.

I enjoyed reading Mike Young's response, since we're also working on improved interlocks using the Raspberry Pi. We have a working prototype (read: kludge) for a single tool. The eventual goal will be to polish it to product level quality. What's nice about the Raspberry Pi is that it has the potential to enable us to collect data from sensors, or create a small embedded systems controller for tools. While prototyping, I've successfully programmed a Raspberry Pi to read an ID number from my government badge. I'd be interested in continuing a conversation about this off-list if anyone is interested in collaborating on Raspberry Pi interlocks.

-- Dylan Klomparens

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mike Young
Sent: Friday, April 14, 2017 10:10 AM
To: Ferraguto, Thomas <Thomas_Ferraguto at uml.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Card Readers for equipment interlocks


Hi Tom. We use Coral, along with a mix of internet-based interlocks. We also use RFID cleanroom badges. I have made a first-cut implementation of this for one of our resist spinners, using a Raspberry Pi and an RFID reader. It's a bit of a kludge, I think I can do better, but it is functional. I'd extend the implementation to other tools also, if the darn readers weren't so expensive (~$100 each)!

What I have not addressed, is how to do this for equipment which collects run data at disable. I suppose if coral could download the run data from the tool at disable, via SECS or some other interface... That's how the Big Boys do it...

Good luck, and contact me offline if you'd like more of the gory details.

--Mike

On 4/13/2017 1:47 PM, Ferraguto, Thomas wrote:

Colleagues,

Has anyone integrated RFID card readers to their equipment interlocks. I'd like to set up a system where the "Tap in" & "Tap Out" ID the user on opens the interlock on the tool.
Thanks in advance....
Best Regards...
Tom Ferraguto
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From aju-jugessur at uiowa.edu  Tue Apr 18 10:54:34 2017
From: aju-jugessur at uiowa.edu (Jugessur, Aju S)
Date: Tue, 18 Apr 2017 14:54:34 +0000
Subject: [labnetwork] Etching Alumina (ALD) using BCl3
Message-ID: <D51B8E60.D872%aju-jugessur@uiowa.edu>


Hi,

Can anyone offer some advice on Alumina etch?

We do have BCl3/Cl2/O2 etch on our Oxford PlasmaPro.
We plan to use S1818 as the mask as we intend etching less than 30 nm of the Alumina: will this work? I am not sure what is the etch selectivity.
We may also use an intermediate metal mask. I am aware that ChF3 and C4F8 also etches Alumina.

Can anyone advise us on this process and a benchmark recipe will help?

Also, the tool is currently used for III-V etching. Can we safely use the tool to etch Alumina without the risk of process contamination, assuming we do a clean up step each time?

Thanks
Regards
Aju



Aju Jugessur Ph.D.
Director, University of Iowa Microfabrication Facility
Professor (Adj.), Physics and Astronomy
OSTC, Iowa Advanced Technology Labs
University of Iowa

205 N. Madison St
Iowa City, IA 52242
319 -353-2342
aju-jugessur at uiowa.edu
http://ostc.uiowa.edu/uimf

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From whipp003 at umn.edu  Tue Apr 18 12:48:29 2017
From: whipp003 at umn.edu (Tony Whipple)
Date: Tue, 18 Apr 2017 11:48:29 -0500
Subject: [labnetwork] Etching Alumina (ALD) using BCl3
In-Reply-To: <D51B8E60.D872%aju-jugessur@uiowa.edu>
References: <D51B8E60.D872%aju-jugessur@uiowa.edu>
Message-ID: <e3ce3be1-62f4-d3f3-cb35-64479b88841c@umn.edu>

Hello Aji;

We etch ALD Alumina film with our Oxford system which is patterned by 
resist.
Since most our films are thin we do not have much problem with 
selectivity to resist
which is about 1:1 for those films.

The recipe we use is:
BCl3 30 sccm
ICP 625 W
RF  50 W
2 mtorr

We get ~ 650 Ang/ min rate for both the Alumina film and resist. The 
recipe has not
been optimized but should be. One of the items that we should work on is 
to have
the recipe etch slower. Our users have said it etches too fast.  We have 
since looked at
reducing the RF platten /chuck power while keeping the ICP power the 
same and this
helps in lowering the etch rate.

Regards, Tony W.


On 4/18/2017 9:54 AM, Jugessur, Aju S wrote:
>
> Hi,
>
> Can anyone offer some advice on Alumina etch?
>
> We do have BCl3/Cl2/O2 etch on our Oxford PlasmaPro.
> We plan to use S1818 as the mask as we intend etching less than 30 nm 
> of the Alumina: will this work? I am not sure what is the etch 
> selectivity.
> We may also use an intermediate metal mask. I am aware that ChF3 and 
> C4F8 also etches Alumina.
>
> Can anyone advise us on this process and a benchmark recipe will help?
>
> Also, the tool is currently used for III-V etching. Can we safely use 
> the tool to etch Alumina without the risk of process contamination, 
> assuming we do a clean up step each time?
>
> Thanks
> Regards
> Aju
>
>
>
> Aju Jugessur /Ph.D./
> Director, University of Iowa Microfabrication Facility
> Professor (Adj.), Physics and Astronomy
> OSTC, Iowa Advanced Technology Labs
> University of Iowa
>
> 205 N. Madison St
> Iowa City, IA 52242
> 319 -353-2342
> aju-jugessur at uiowa.edu
> http://ostc.uiowa.edu/uimf
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From vamsinittala at gmail.com  Tue Apr 18 13:25:33 2017
From: vamsinittala at gmail.com (N P VAMSI KRISHNA)
Date: Tue, 18 Apr 2017 22:55:33 +0530
Subject: [labnetwork] Etching Alumina (ALD) using BCl3
In-Reply-To: <D51B8E60.D872%aju-jugessur@uiowa.edu>
References: <D51B8E60.D872%aju-jugessur@uiowa.edu>
Message-ID: <CA+SWD1Uv6E3E9kkuZzdzfYASzqVsQ5EvcXsHRA2RTe2MZpdcPw@mail.gmail.com>

Dear Aju,

I had used the ALD Al2O3 long back. Here is the recipe I used in Plasmalab
100 OPT tool:

                            BCl3                       50 sccm


                            Pressure                 2mT

                            ICP Power               1250 W

                            Electrode                 300 W

                            Temperature            10?C

                            Backside He            15 Torr



Etch Rate:               36-38 nm/min

Selectivity to PR:     ~ 0.4:1


PR I used was AZ5214E for which selectivity was average, so I had used the
thick AZ4562 which has very good selectivity.


In your case as the Alumina is only 30 nm, S1813 may survive. You may want
try spinning at slightly lower rpm (~3K).


Hope it helps.


Thanks & best regards,

vamsi



On Tue, Apr 18, 2017 at 8:24 PM, Jugessur, Aju S <aju-jugessur at uiowa.edu>
wrote:

>
> Hi,
>
> Can anyone offer some advice on Alumina etch?
>
> We do have BCl3/Cl2/O2 etch on our Oxford PlasmaPro.
> We plan to use S1818 as the mask as we intend etching less than 30 nm of
> the Alumina: will this work? I am not sure what is the etch selectivity.
> We may also use an intermediate metal mask. I am aware that ChF3 and C4F8
> also etches Alumina.
>
> Can anyone advise us on this process and a benchmark recipe will help?
>
> Also, the tool is currently used for III-V etching. Can we safely use the
> tool to etch Alumina without the risk of process contamination, assuming we
> do a clean up step each time?
>
> Thanks
> Regards
> Aju
>
>
>
> Aju Jugessur *Ph.D.*
> Director, University of Iowa Microfabrication Facility
> Professor (Adj.), Physics and Astronomy
> OSTC, Iowa Advanced Technology Labs
> University of Iowa
>
> 205 N. Madison St
> Iowa City, IA 52242
> 319 -353-2342 <03193%20532%20342>
> aju-jugessur at uiowa.edu
> http://ostc.uiowa.edu/uimf
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>


-- 
--
Thanks & Best Regards,
-----------------
*N.P.Vamsi Krishna*
Center for Nano Science and Engineering (CeNSE),
Indian Institute of Science(IISc), Bangalore.
INDIA-560012

?Educating the mind without educating the heart is no education at all.?
-Aristotle
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From price.798 at osu.edu  Tue Apr 18 13:30:14 2017
From: price.798 at osu.edu (Price, Aimee)
Date: Tue, 18 Apr 2017 17:30:14 +0000
Subject: [labnetwork] Card Readers for equipment interlocks
In-Reply-To: <BY1PR09MB0823CDB14355FE56A78338ECE4190@BY1PR09MB0823.namprd09.prod.outlook.com>
References: <9636e814204a4da4be4e627551a91881@uml.edu>
 <953e1093-b5a0-2e9e-e1c8-8be6d56042f9@nd.edu>
 <BY1PR09MB0823CDB14355FE56A78338ECE4190@BY1PR09MB0823.namprd09.prod.outlook.com>
Message-ID: <83583687862B8444A85296A4944147DF95558152@CIO-TNC-D2MBX03.osuad.osu.edu>

We have a home built system that utilizes Raspberry Pi.  Users fob in and out of the equipment and it talks to our database to ensure they are certified to use that equipment.  We use it for billing as well.

Our engineer who designed it is out this week and much of next, but if you contact me I can put you in touch with him.  I'm not sure if he's on this list or not.  He and our IT engineer worked through a lot of the issues and bugs.  We are happy with it for the most part.

Aimee

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Klomparens, Dylan L. (Fed)
Sent: Tuesday, April 18, 2017 10:33 AM
To: Mike Young; Ferraguto, Thomas; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Card Readers for equipment interlocks

Hi Tom,

CNST has "tap in/out" system to control physical access to the cleanroom and tool interlocks. We use wall mounted Windows tablets that communicate with our lab management software, NEMO. I've attached a picture and parts list of one of the entryway tablets. I have received many positive comments about this system, the users really enjoy the convenience and speed of logging in. It's been working well for over a year now.

I enjoyed reading Mike Young's response, since we're also working on improved interlocks using the Raspberry Pi. We have a working prototype (read: kludge) for a single tool. The eventual goal will be to polish it to product level quality. What's nice about the Raspberry Pi is that it has the potential to enable us to collect data from sensors, or create a small embedded systems controller for tools. While prototyping, I've successfully programmed a Raspberry Pi to read an ID number from my government badge. I'd be interested in continuing a conversation about this off-list if anyone is interested in collaborating on Raspberry Pi interlocks.

-- Dylan Klomparens

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mike Young
Sent: Friday, April 14, 2017 10:10 AM
To: Ferraguto, Thomas <Thomas_Ferraguto at uml.edu<mailto:Thomas_Ferraguto at uml.edu>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Card Readers for equipment interlocks


Hi Tom. We use Coral, along with a mix of internet-based interlocks. We also use RFID cleanroom badges. I have made a first-cut implementation of this for one of our resist spinners, using a Raspberry Pi and an RFID reader. It's a bit of a kludge, I think I can do better, but it is functional. I'd extend the implementation to other tools also, if the darn readers weren't so expensive (~$100 each)!

What I have not addressed, is how to do this for equipment which collects run data at disable. I suppose if coral could download the run data from the tool at disable, via SECS or some other interface... That's how the Big Boys do it...

Good luck, and contact me offline if you'd like more of the gory details.

--Mike

On 4/13/2017 1:47 PM, Ferraguto, Thomas wrote:

Colleagues,

Has anyone integrated RFID card readers to their equipment interlocks. I'd like to set up a system where the "Tap in" & "Tap Out" ID the user on opens the interlock on the tool.

Thanks in advance....

Best Regards...

Tom Ferraguto
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From daniel.woodie at cornell.edu  Tue Apr 18 14:14:11 2017
From: daniel.woodie at cornell.edu (Dan P. Woodie)
Date: Tue, 18 Apr 2017 18:14:11 +0000
Subject: [labnetwork] How do you clean your cleanroom?
Message-ID: <BN6PR04MB037013B15BB1DC38169BBDDDEF190@BN6PR04MB0370.namprd04.prod.outlook.com>

Lab Network,

We are in the middle of discussions with our janitorial staff on the proper procedures for cleaning our Class 1,000 cleanroom and are looking to see what others are doing for their academic cleanrooms. If any of you have written cleaning steps and frequencies they are willing to share we would appreciate it. Thank you.

Dan

Daniel Woodie
Safety Manager, College of Engineering
Cornell University
344 Duffield Hall
Ithaca, NY 14853-2700
(607)254-4891
Off Hour Emergency # - (607)227-2993

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From barbjn at sfsu.edu  Tue Apr 18 18:35:54 2017
From: barbjn at sfsu.edu (Barbara J Neuhauser)
Date: Tue, 18 Apr 2017 22:35:54 +0000
Subject: [labnetwork] Diamatix DMP-2831 timing belt
In-Reply-To: <CA+SWD1UAMmZHLQwzP7PRA1peXMbKD5qNw2a1m7zGei4TeND+gw@mail.gmail.com>
References: <CA+SWD1UAMmZHLQwzP7PRA1peXMbKD5qNw2a1m7zGei4TeND+gw@mail.gmail.com>
Message-ID: <1492554954774.71358@sfsu.edu>

Dr. Krishna ---


We are considering purchasing a DMP-2831 for the purpose of printing solar cell front contacts. How long did your printer function before the timing belt failed?


Barbara Neuhauser

The Phoenix Project

San Francisco State University

barbjn at sfsu.edu



________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of N P VAMSI KRISHNA <vamsinittala at gmail.com>
Sent: Monday, April 17, 2017 2:17 AM
To: Labnetwork
Cc: Prosenjit Sen
Subject: [labnetwork] Diamatix DMP-2831 timing belt

Dear All,

We have a Diamatix Ink jet printer  DMP-2831. The timing belt of it gone bad and the vendors are demanding too high for the belt replacement.
Does any one have the manual to replace the timing belt? Also kindly let me know if any one had replaced it.


--
--
Thanks & Best Regards,
-----------------
N.P.Vamsi Krishna
?Micro Nano Fluidics lab?

Center for Nano Science and Engineering (CeNSE),
Indian Institute of Science(IISc), Bangalore.
INDIA-560012

"Educating the mind without educating the heart is no education at all." -Aristotle
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From vamsinittala at gmail.com  Wed Apr 19 00:47:43 2017
From: vamsinittala at gmail.com (N P VAMSI KRISHNA)
Date: Wed, 19 Apr 2017 10:17:43 +0530
Subject: [labnetwork] Diamatix DMP-2831 timing belt
In-Reply-To: <1492554954774.71358@sfsu.edu>
References: <CA+SWD1UAMmZHLQwzP7PRA1peXMbKD5qNw2a1m7zGei4TeND+gw@mail.gmail.com>
 <1492554954774.71358@sfsu.edu>
Message-ID: <CA+SWD1W4-GjMG8xaXzKP=Ts8qBciSRcQhZO+n3fuH988nJF8HA@mail.gmail.com>

Dear Prof. Neuhauser,
Thanks for the mail.

Its ~4 years old tool.
The tool was idle for quite long time, recently (6 months) we started using
it extensively for printing Silver ink interconnects in our 3D devices.

Thanks & best regards,
vamsi krishna

On Wed, Apr 19, 2017 at 4:05 AM, Barbara J Neuhauser <barbjn at sfsu.edu>
wrote:

> Dr. Krishna ---
>
>
> We are considering purchasing a DMP-2831 for the purpose of printing solar
> cell front contacts. How long did your printer function before the timing
> belt failed?
>
>
> Barbara Neuhauser
>
> The Phoenix Project
>
> San Francisco State University
>
> barbjn at sfsu.edu
>
>
>
> ------------------------------
> *From:* labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu>
> on behalf of N P VAMSI KRISHNA <vamsinittala at gmail.com>
> *Sent:* Monday, April 17, 2017 2:17 AM
> *To:* Labnetwork
> *Cc:* Prosenjit Sen
> *Subject:* [labnetwork] Diamatix DMP-2831 timing belt
>
> Dear All,
>
> We have a Diamatix Ink jet printer  DMP-2831. The timing belt of it gone
> bad and the vendors are demanding too high for the belt replacement.
> Does any one have the manual to replace the timing belt? Also kindly let
> me know if any one had replaced it.
>
>
> --
> --
> Thanks & Best Regards,
> -----------------
> *N.P.Vamsi Krishna*
>
> * ?Micro Nano Fluidics lab? *Center for Nano Science and Engineering
> (CeNSE),
> Indian Institute of Science(IISc), Bangalore.
> INDIA-560012
>
> ?Educating the mind without educating the heart is no education at all.?
> -Aristotle
>



-- 
--
Thanks & Best Regards,
-----------------
*N.P.Vamsi Krishna*
Center for Nano Science and Engineering (CeNSE),
Indian Institute of Science(IISc), Bangalore.
INDIA-560012

?Educating the mind without educating the heart is no education at all.?
-Aristotle
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From rmorrison at draper.com  Wed Apr 19 14:28:47 2017
From: rmorrison at draper.com (Morrison, Richard H., Jr.)
Date: Wed, 19 Apr 2017 18:28:47 +0000
Subject: [labnetwork] How do you clean your cleanroom?
In-Reply-To: <BN6PR04MB037013B15BB1DC38169BBDDDEF190@BN6PR04MB0370.namprd04.prod.outlook.com>
References: <BN6PR04MB037013B15BB1DC38169BBDDDEF190@BN6PR04MB0370.namprd04.prod.outlook.com>
Message-ID: <fb3ddf019cbb4c7eb215c1b70fea6589@draper.com>

HI,


At Draper we do the following:

Empty the trash every day,

Using 70% DI AND 30% IPA we wipe the following items daily

Entrance door

Trash can

Chair legs


Weekly we wipe the table tops, equipment, anything on the walls that stick out

Qtr walls and ceiling


Rick



________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Dan P. Woodie <daniel.woodie at cornell.edu>
Sent: Tuesday, April 18, 2017 2:14 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] How do you clean your cleanroom?


Lab Network,



We are in the middle of discussions with our janitorial staff on the proper procedures for cleaning our Class 1,000 cleanroom and are looking to see what others are doing for their academic cleanrooms. If any of you have written cleaning steps and frequencies they are willing to share we would appreciate it. Thank you.



Dan



Daniel Woodie

Safety Manager, College of Engineering

Cornell University

344 Duffield Hall

Ithaca, NY 14853-2700

(607)254-4891

Off Hour Emergency # - (607)227-2993



________________________________
Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
________________________________
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From r.khanna at ucl.ac.uk  Mon Apr 24 06:33:00 2017
From: r.khanna at ucl.ac.uk (Khanna, Rohit)
Date: Mon, 24 Apr 2017 10:33:00 +0000
Subject: [labnetwork] Card Readers for equipment interlocks
In-Reply-To: <AM2PR01MB0916C20DAA1DDEAD6A21B289B91F0@AM2PR01MB0916.eurprd01.prod.exchangelabs.com>
References: <9636e814204a4da4be4e627551a91881@uml.edu>
 <953e1093-b5a0-2e9e-e1c8-8be6d56042f9@nd.edu>
 <BY1PR09MB0823CDB14355FE56A78338ECE4190@BY1PR09MB0823.namprd09.prod.outlook.com>
 <83583687862B8444A85296A4944147DF95558152@CIO-TNC-D2MBX03.osuad.osu.edu>,
 <AM2PR01MB0916C20DAA1DDEAD6A21B289B91F0@AM2PR01MB0916.eurprd01.prod.exchangelabs.com>
Message-ID: <HE1PR01MB11642AE970C55091086ADB0AC31F0@HE1PR01MB1164.eurprd01.prod.exchangelabs.com>

Greeting Mike,

                           Hope you are doing good. A brief introduction, I am an Electronics engineer

working with UCL (University college London). We have a Clean room facility at London Center for NANO Tech.

Incidentally I was directed to this mailing list by my manager Steve Etienne as we were also exploring option for

card access for clean room equipment.


We had also developed a custom solution for cleanroom equipment control. The hardware prototypes have been developed by me

and has been under trial for a few months with few simple equipment we have. So far the hardware seems to be working

reasonably well. The system is based on wired ethernet  or WiFi (there have been two separate version of the hardware).

The current firmware supports usage logging only as I didn't have the requisite support/expertise for developing the PC side

application/middle ware which would accept UDP/TCP requests from multiple control units and run verification requests

with the data base and send back confirmation UDP/TCP packets to the hardware units to unlock equipment.


Here is a youtube link for the system demo: https://www.youtube.com/watch?v=S9hz3KTrfno&t=30s

[https://i.ytimg.com/vi/S9hz3KTrfno/hqdefault.jpg]<https://www.youtube.com/watch?v=S9hz3KTrfno&t=30s>

WiFi Access Control System<https://www.youtube.com/watch?v=S9hz3KTrfno&t=30s>
www.youtube.com
This is a demonstration of Access control system developed for equipment control. The system connects to PC/Database using WiFi network and validates/logs th...

If this seems interesting we could discuss possibility of developing the system further and share designs for mutual benefit.


Also, I am attaching the system overview block diagram for the same.


Warm Regards
Rohit Khanna
Electronic Test & Measurement Engineer
London Center for NANO Technology, UCL
Ph:+44-020-7679984
Int Ext: 39984
Mob: +44 7456265557


________________________________
From: Etienne, Steve
Sent: 24 April 2017 10:55
To: Khanna, Rohit
Subject: FW: [labnetwork] Card Readers for equipment interlocks


Rohit,



Are you subscribed to this mailing list?  It has some information about access systems from time to time.  You could also contribute if you wish.



Steve



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Price, Aimee
Sent: 18 April 2017 18:30
To: Klomparens, Dylan L. (Fed) <dylan.klomparens at nist.gov>; Mike Young <mike.young at nd.edu>; Ferraguto, Thomas <Thomas_Ferraguto at uml.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Card Readers for equipment interlocks



We have a home built system that utilizes Raspberry Pi.  Users fob in and out of the equipment and it talks to our database to ensure they are certified to use that equipment.  We use it for billing as well.



Our engineer who designed it is out this week and much of next, but if you contact me I can put you in touch with him.  I?m not sure if he?s on this list or not.  He and our IT engineer worked through a lot of the issues and bugs.  We are happy with it for the most part.



Aimee



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Klomparens, Dylan L. (Fed)
Sent: Tuesday, April 18, 2017 10:33 AM
To: Mike Young; Ferraguto, Thomas; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Card Readers for equipment interlocks



Hi Tom,



CNST has ?tap in/out? system to control physical access to the cleanroom and tool interlocks. We use wall mounted Windows tablets that communicate with our lab management software, NEMO. I?ve attached a picture and parts list of one of the entryway tablets. I have received many positive comments about this system, the users really enjoy the convenience and speed of logging in. It?s been working well for over a year now.



I enjoyed reading Mike Young?s response, since we?re also working on improved interlocks using the Raspberry Pi. We have a working prototype (read: kludge) for a single tool. The eventual goal will be to polish it to product level quality. What?s nice about the Raspberry Pi is that it has the potential to enable us to collect data from sensors, or create a small embedded systems controller for tools. While prototyping, I?ve successfully programmed a Raspberry Pi to read an ID number from my government badge. I?d be interested in continuing a conversation about this off-list if anyone is interested in collaborating on Raspberry Pi interlocks.



-- Dylan Klomparens



From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mike Young
Sent: Friday, April 14, 2017 10:10 AM
To: Ferraguto, Thomas <Thomas_Ferraguto at uml.edu<mailto:Thomas_Ferraguto at uml.edu>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Card Readers for equipment interlocks



Hi Tom. We use Coral, along with a mix of internet-based interlocks. We also use RFID cleanroom badges. I have made a first-cut implementation of this for one of our resist spinners, using a Raspberry Pi and an RFID reader. It's a bit of a kludge, I think I can do better, but it is functional. I'd extend the implementation to other tools also, if the darn readers weren't so expensive (~$100 each)!

What I have not addressed, is how to do this for equipment which collects run data at disable. I suppose if coral could download the run data from the tool at disable, via SECS or some other interface... That's how the Big Boys do it...

Good luck, and contact me offline if you'd like more of the gory details.

--Mike



On 4/13/2017 1:47 PM, Ferraguto, Thomas wrote:



Colleagues,



Has anyone integrated RFID card readers to their equipment interlocks. I?d like to set up a system where the ?Tap in? & ?Tap Out? ID the user on opens the interlock on the tool.



Thanks in advance?.



Best Regards?



Tom Ferraguto
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From cekendri at mtu.edu  Thu Apr 27 10:34:58 2017
From: cekendri at mtu.edu (Chito Kendrick)
Date: Thu, 27 Apr 2017 10:34:58 -0400
Subject: [labnetwork] Hot embossing of PMMA
Message-ID: <09e573a0-f87c-aedd-9087-fea5e871054e@mtu.edu>

I have a user that wants to replace there PDMS chamber with a PMMA 
chamber for a microfluidic cell. They went and brought a low cost resin 
press to try and hot emboss it with using either a 50-70 um SU-8/Si 
master or a FR4 master (pattern etched into the Copper). They tried a 
DRIE silicon master and broke it first press. So far their PMMA print is 
distorted across the either 4" wafer due to shrinkage. They are looking 
into alternative polymers, but yet to find one. Does anyone have 
experience with this type to work?

I am considering trying to etch into the PMMA using an RIE, but 50 um 
would be a long etch for our systems.

Regards,

Chito Kendrick

-- 
Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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