[labnetwork] Quartz plates for mask making

[Aaron Hryciw]

Hi Esta,

We have a Heidelberg DWL-200 in our cleanroom, which we use to process
quite a few photomasks (mostly 5", some 7").  We purchase our mask blanks
from Nanofilm (http://www.nanofilm.com/about_us.php).  As for storage, we
keep the mask blanks in their (opaque) cassette within the litho area of
our cleanroom, but without any other special storage conditions.  We keep
finished masks in individual storage boxes from Pozzett
<http://www.pozzetta.com/products/products-overview.html>a.

Hope this helps.

Cheers,

 – Aaron




Aaron Hryciw, PhD, PEng

Fabrication Group Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4 Ph: 780-940-7938
www.nanofab.ualberta.ca


On Fri, Aug 18, 2017 at 7:17 AM, Abelev, Esta <eabelev at pitt.edu> wrote:

> Dear Colleagues,
>
>
>
> Our facility getting it first Heidelberg laser write tool. I would like to
> get advice where to buy quartz or Soda lime plates with Cr (maybe even with
> resist) to make masks.
>
> In addition, if some can comment how to store them in the cleanroom.
>
>
>
> Thank you, Esta
>
>
>
>
>
> -----------------------
>
> *Esta Abelev, PhD*
>
> Technical Director, Petersen Institute of NanoScience and Engineering
>
> University of Pittsburgh | 3700 O’Hara Street | 636| Pittsburgh, PA 15261
>
> 412-383-4096 <(412)%20383-4096> | eabelev at pitt.edu | nano.pitt.edu
> <https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0>
>
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>
>
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