[labnetwork] Fw: Implementing Lock-out/Logins on AJA Phase II J sputter system

Ahad Syed ahad.syed at kaust.edu.sa
Sat Aug 19 04:49:12 EDT 2017


Hi Mark,


Most of our tools are inter-locked on the monitor. We use Badger LMS at the KAUST. The PC stays on, but without the monitor they wouldn't know what button to press to even vent the system. For some tools, we have the inter-lock on the gas-pod (RIE by Oxford Instruments).


We have been running this for more than 3 years now without any issues.


All the best,

Ahad


--
Nanofabrication Core Lab
4700 King Abdullah University of Science and Technology
0250-WS02 Building 3, Thuwal 23955-6900, Kingdom of Saudi Arabia
Tel:+966 12 808 2348
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Mark Hofheins <mhofheins at unm.edu>
Sent: Thursday, August 17, 2017 5:02 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Fw: Implementing Lock-out/Logins on AJA Phase II J sputter system




Mark Hofheins

mhofheins at unm.edu<mailto:mhofheins at unm.edu>

505-710-3527



Micro Electronics Technician

Manufacturing Engineering

University of New Mexico MTTC

800 Bradbury S.E.  Suit 235

Albuquerque, New Mexico

87106-4346



________________________________
From: Mark Hofheins
Sent: Thursday, August 17, 2017 7:46 AM
To: labnetwork-bounces at mtl.mit.edu
Subject: Implementing Lock-out/Logins on AJA Phase II J sputter system


Hello all,

We have an AJA Phase II J sputter tool that we need to implement our "Login" system on.

The system allows for  a open /closed circuit at 24v or 115v.

Most all of the sputter system is 230v. I do not want to have to power up the computer each time for someone to login and be able to use the tool.

At this point I believe that my best option is to have an electronic valve in the main plasma gas line as all gasses are routed through a single line.

I am looking for suggestions if anyone has a similar system in place on an AJA.

Thank you,


Mark Hofheins

mhofheins at unm.edu<mailto:mhofheins at unm.edu>

505-710-3527



Micro Electronics Technician

Manufacturing Engineering

University of New Mexico MTTC

800 Bradbury S.E.  Suit 235

Albuquerque, New Mexico

87106-4346


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