[labnetwork] Sputtering targets storage

[DeVito, Richard]

Don't use generic aluminum foil ,they spray it with vegetable oil so it won't bind!. You must clean it or buy pre cleaned foil.  We generally store our targets in a desiccator . The sensitive ones we purge the cabinets with N2



Rich DeVito
Principle Member Technical Staff
Group Leader Microfabrication Lab
Draper
555 Technology Square,
Cambridge, MA 02139
Phone:  617-258-3819
www.draper.com<http://www.draper.com/>


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Guo, Jing
Sent: Thursday, December 14, 2017 12:50 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Sputtering targets storage

Hi All,

We have a lot sputtering targets for our UHV sputtering system. Right now each target is covered by Aluminum foil stored in a plastic box.
We are wondering whether the Aluminum foil is necessary for all the targets. After several times the foil will become wrinkled and it is kind annoying to cover a target with wrinkled foil.
Do you have any good idea to store those targets? Please advise.
And for those used ones, any good way to dispose them or recycle them?

Thanks.

Best Regards,

Jing

Research Lab Supervisor
Nanofabrication Facility
University of Houston
Postal Address:
UNIVERSITY OF HOUSTON
NANOFABRICATION FACILITY
3517 CULLEN BLVD, RM 1011
HOUSTON TX  77204-5062
Phone:  832-842-8822
Email:  jguo5 at central.uh.edu<mailto:jguo5 at central.uh.edu>
Web:  www.uh.edu/nanofab<http://www.uh.edu/nanofab>
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