[labnetwork] Two SEM/EBLs set up in the same room : comments

[Jugessur, Aju S]

Marylene,

We have also made provision to add a second Ebeam tool or an FIBSEM in the same cleanroom as our current Raith Voyager.
I do note that you have already received some useful comments.

I would like to add the following:

(a) If you do plan to add any EM cancellation systems on both tools, please ensure that the two systems do not interact with each other.
(b) Have an independent party survey the site including the interference/interraction of the two EM cancellation systems. I had the experience of the tool vendor passing the site surveys or relaxing the specs only for us to accept the tool and we ended up modifying the site substantially ($$$) to accommodate the existing environmental influences.
(c) Our tools are in a cleanroom environment. We do not have any CR filters right above the tool to reduce any acoustic noise vibrations.

All the best with your new tool.

Regards
Aju



On Dec 19, 2017, at 2:04 PM, Palard, Marylene <marylene at mer.utexas.edu<mailto:marylene at mer.utexas.edu>> wrote:

Dear Lab Managers
E-beam photolithography/ SEM experts,

At UT Austin we are lucky to have the task of installing a new EBL/SEM in our NNCI cleanroom lab.

The operation team is leaning towards having the new EBL/SEM system in the same room as the 10 years old one.

Assuming that
- both items are fitting in the room,
- the manufacturer site survey passed,
- we agreed with jagged edges pictures due to cleanroom flow
Could you please share your thoughts on that plan.

Sincerely
Marylene, an avid reader of the labnetwork messages

_______________________________
Marylene Palard, Ph.D.
Program Manager
http://www.mrc.utexas.edu/
(512) 965 6671

The University of Texas | Microelectronics Research Center
Bldg #160 | 10100 Burnet road | Austin, TX 78758-4445

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Aju Jugessur, Ph.D.
Director, University of Iowa Microfabrication Facility (UIMF)
Optical Science and Technology Center
Professor Adjunct, Physics and Astronomy
University of Iowa
Office: IATL 202, Tel: 319-3532342
Labs: IATL 170, 172, 174
https://ostc.uiowa.edu/uimf






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